Agilent Technologies B1500A Guide d'installation

Agilent Technologies

Agilent B1500A

Semiconductor Device

Analyzer

Self-paced Training Manual, 4

Notices

No part of this manual may be reproduced

in any form or by any means (including

electronic storage and retrieval or transla-

tion into a foreign language) without prior

agreement and written consent from Agi-

lent Technologies, Inc. as governed by

United States and international copyright

laws.

Manual Part Number

B1500-90043

Edition

Edition 1, September 2005

Edition 2, May 2006

Edition 3, January 2007

Edition 4, June 2007

Edition 5, February 2008

Agilent Technologies

5301 Stevens Creek Blvd

Santa Clara, CA 95051 USA

Warranty

The material contained in this docu-

ment is provided “as is,” and is sub-

ject to being changed, without notice,

in future editions. Further, to the max-

imum extent permitted by applicable

law, Agilent disclaims all warranties,

either express or implied, with regard

to this manual and any information

contained herein, including but not

limited to the implied warranties of

merchantability and fitness for a par-

ticular purpose. Agilent shall not be

liable for errors or for incidental or

consequential damages in connection

with the furnishing, use, or perfor-

mance of this document or of any

information contained herein. Should

Agilent and the user have a separate

written agreement with warranty

terms covering the material in this

document that conflict with these

terms, the warranty terms in the sep-

arate agreement shall control.

Technology Licenses

The hardware and/or software described in

this document are furnished under a

license and may be used or copied only in

accordance with the terms of such license.

Restricted Rights Legend

If software is for use in the performance of

a U.S. Government prime contract or sub-

contract, Software is delivered and

licensed as “Commercial computer soft-

ware” as defined in DFAR 252.227-7014

(June 1995), or as a “commercial item” as

defined in FAR 2.101(a) or as “Restricted

computer software” as defined in FAR

52.227-19 (June 1987) or any equivalent

agency regulation or contract clause. Use,

duplication or disclosure of Software is

subject to Agilent Technologies’ standard

commercial license terms, and non-DOD

Departments and Agencies of the U.S. Gov-

ernment will receive no greater than

Restricted Rights as defined in FAR

52.227-19(c)(1-2) (June 1987). U.S. Govern-

ment users will receive no greater than

Limited Rights as defined in FAR 52.227-14

(June 1987) or DFAR 252.227-7015 (b)(2)

(November 1995), as applicable in any

technical data.

In This Manual

This document is the self-paced training manual to help you to understand what is Agilent

B1500A, what functions the B1500A has, how to use the B1500A, and what applications

the B1500A contributes to.

CAUTION The test setup data described in this manual are only examples. If these example data

damage your devices, Agilent is NOT LIABLE for the damage.

• Module 1. Introduction

This module explains the product concept and the key features of the B1500A/

EasyEXPERT. You will learn about what is the B1500A.

• Module 2. Getting Started

This module explains the basic operations of the B1500A. You will learn about how to

launch B1500A/EasyEXPERT and how to perform application test and quick test.

• Module 3. Data Display and Management

This module explains the data display and analysis capabilities of the EasyEXPERT

software. You will learn how to use analysis tools, how to change display setup, and

how to print/export test result data.

• Module 4. Classic Test Environment

This module explains the classic test mode of the EasyEXPERT. You will learn how to

create the classic test setup in the course exercises.

• Module 5. Basic Measurement

This module explains the basic I-V sweep measurement function and the cabling and

fixturing issues. You will learn how to measure I-V curves in the course exercises.

• Module 6. Low Current Measurement

This module explains the low current measurement technique. You will learn how to

measure the low current in the course exercises.

• Module 7. Measurement Functions

This module explains the measurement functions available with the B1500A. You will

learn how to use various measurement functions in the course exercises.

• Module 8. Capacitance Measurement

This module explains the capacitance measurement function. You will learn how to

measure the capacitance in a course exercise.

• Module 9. Modifying Application Test Definitions

This module explains a modification example of an application test definition. You will

learn how to modify the definition in a course exercise.

• Module 10. Creating Your Test Definitions

This module explains about the application test definition. You will learn how to create

your application test definition in a course exercise.

• Module 11. Advanced Definitions and Operations

This module explains how to control external GPIB devices, how to call an execution

file, how to perform a repeat measurement, and how to use the prober control script.

• Module 12. Miscellaneous Operations

This module explains what is the status indicator, what is the automatic data export

function and the automatic data record function, how to perform selftest and

calibration, how to perform SMU zero offset cancel, and such.

• Module 13. SPGU Control and Applications

This module explains the SPGU Control classic test. You will learn how to create the

classic test setup and the applications using SPGU in the course exercises.

EasyEXPERT is a trademark of Agilent Technologies. All other trademarks are the

property of their respective owners.

Class Exercises

Class exercises use the test setup listed below. The test setup data are only examples and

included in the Demo.xpg file stored in the Manual CD-ROM.

Module Exercise Device Test setup/definition/data Page

Module 1 no exercise

Module 2 Id-Vd measurement MOSFET CMOS: Id-Vd 2-19, 27

Id-Vg, gm-Vg measurement MOSFET CMOS: Vth gmMax 2-19, 27

B2200/E5250 switch control - - 2-32

Module 3 Id-Vg, gm-Vg measurement MOSFET GMMAX.xtr 3-28

Using Preview window - - 3-31

Module 4 Id-Vd measurement MOSFET Trng Id-Vd 4-25

Multi Channel I/V Sweep

Measurement Bipolar Tr

LED Trng Multi 4-37

I/V List Sweep Measurement MOSFET Trng List 4-51

I/V-t sampling measurement 0.1 μFTrng Sampling 4-64

C-V sweep measurement MOSFET Trng CV 4-76

B2200/E5250 switch control -Trng Switch 4-81

Direct Control (C-f measurement) 0.1 μFTrng C-f 4-88

Module 5 Id-Vd measurement MOSFET IDVD, Id-Vd 5-7

SMU series connection 511 kohm IRVR 5-24

SMU parallel connection 1 ohm Parallel 5-28

Re measurement, kelvin connection Bipolar Tr REKELV 5-38

Module 6 Leak current measurement -Zero-check 6-9

Ultra low current measurement -Zero-check-ASU 6-19

Id-Vg measurement MOSFET IDVG 6-20

Gummel plot Bipolar Tr GUMMEL 6-25

Module 7 SMU pulse mode MOSFET IDVD-Pulse 7-8

RC measurement 0.1 μF and

511 kohm RC-sampling-log 7-16

Negative hold time 511 kohm R-sampl-neg-hold 7-22

Auto analysis MOSFET GMMAX 7-28

Bias hold function LED LED 7-35

SMU series resistor 511 kohm IV-res 7-43

NOTE Demo.xpg file

Demo.xpg file is required to create the Demo preset group which contains the test setup

data used by the class exercises. And it is stored in the \data folder on the Agilent B1500A

Manual CD-ROM, Edition 4 or later.

The Demo preset group should be created before starting the class exercise. To create the

preset group, launch EasyEXPERT and import the file by using the Preset Group Import

dialog box opened by clicking My Favorite Setup > Preset Group > Import Preset Group.

The test setup data are only examples for the class exercises.

NOTE .xtd files

The \data folder on the Manual CD-ROM stores some .xtd files. They are the application

test definitions used by some class exercises. To use the definition file, import the file by

using the Test Definition Import dialog box opened by clicking Library > Import Test

Definition. The test definition data are only examples for the class exercises.

NOTE .xtr files

The \data folder on the Manual CD-ROM stores some .xtr files. They are the sample test

results created by executing the test setup which has the same name as the result data. To

display these sample test results, import the files by using the Test Result Import dialog

box opened by clicking Results > Transport Data > Import.

Module 8 C-V sweep measurement MOSFET CV-1MHz 8-6

Module 9 Modifying application test

definition MOSFET Trng IdVd Vth.xtd 9-14

Trng idvd idvg2.xtd 9-32

Trng idvd idvg3.xtd 9-35

Using vector data MOSFET Trng Cgg-Vg 9-41

Module 10 Creating application test definition MOSFET Trng idvd idvg.xtd 10-17

Module 11 no exercise

Module 12 no exercise

Module 13 Charge pumping MOSFET Charge Pumping 4T 0.1V

step13-20

Flash memory MOSFET Demo-S-NorFlash

Endurance 13-29

ALWG output 511 kohm ALWG monitor 13-36

Module Exercise Device Test setup/definition/data Page

Test Setup for Class Exercises

The Demo preset group contains the following test setup. The setup data are only examples

for the class exercises. The following table lists the test setup name in alphabetical order.

Test Setup Name Description

ALWG monitor 511 kohm sampling measurement with SPGU ALWG output

Charge Pumping 4T

0.1V step MOSFET Icp-Vbase measurement

CV-1MHz MOSFET Cgs-Vg measurement

Demo-S-NorFlash

EnduranceMOSFET Endurance test

Fowler-Nordheim Fowler-Nordheim (FN) plot

GMMAX MOSFET sqrt_Id-Vg, PEAK-Vg measurement

GUMMEL Bipolar transistor gummel plot

IDVD MOSFET Id-Vd measurement

IDVD-Pulse MOSFET pulsed Id-Vd measurement

Id-Vd MOSFET Id-Vd measurement, Application Test

IDVG MOSFET Id-Vg measurement

IRVR 511 kohm I-V measurement

IV-res 511 kohm I-V measurement with SMU series resistor

LED LED I-V measurement

Parallel 1 ohm I-V measurement, voltage force and current measurement

PG monitor 511 kohm sampling measurement with SPGU VPULSE output

RC-sampling-log RC sampling measurement, log sampling

REKELV Bipolar transistor Re measurement

R-sampl-neg-hold 511 kohm sampling measurement with negative hold time

Subthreshold MOSFET subthreshold measurement

Trng C-f Direct Control (C-f measurement)

Trng Cgg-Vg Modifying application test definition using vector data

Trng CV MOSFET C-V measurement

Trng Id-Vd MOSFET Id-Vd measurement

Trng List MOSFET Vth-gmmax measurement using I/V List Sweep

Trng Multi Multi Channel I/V Sweep (Bipolar transistor and LED)

Trng Sampling 0.1 μF sampling measurement

Trng Switch B2200/E5250 switch setup, Input 1-3-5-7 to Output 1-3-5-7

Zero-check SMU open measurement

Zero-check-ASU SMU open measurement with ASU

Test Setup Name Description

Required Devices for Class Exercises

To perform the class exercises, you need the device set (Agilent part number 04156-87001)

which contains the following devices.

Description Quantity

N-channel MOSFET 2 ea.

NPN Bipolar Transistor 1 ea.

Red Miniature LED 1 ea.

0.1 μF Capacitor 50 V 1 ea.

1.0 Ω Resistor 1/8 W 1 ea.

1.1 kΩResistor 1/8 W 1 ea.

511 kΩResistor 1/8 W 1 ea.

NPN bipolar TransistorN-ch MOSFET LED

1 ohm Resistor

Brown

Black

Silver

1.1 kohm Resistor

Brown

Black

Brown

511 kohm Resistor

Green

Brown

Orange

0.1 uF Capacitor

Autres manuels pour B1500A

Table des matières

Autres manuels Agilent Technologies Instrument de mesure

Agilent Technologies

Agilent Technologies N9039A Manuel utilisateur

Agilent Technologies

Agilent Technologies U3025AE10 Manuel utilisateur

Agilent Technologies

Agilent Technologies 4338B Manuel utilisateur

Agilent Technologies

Agilent Technologies E4419B Manuel utilisateur

Agilent Technologies

Agilent Technologies ESA-E E4404B Manuel utilisateur

Agilent Technologies

Agilent Technologies ACQIRIS DC122 Manuel utilisateur

Agilent Technologies

Agilent Technologies Flow Tracker 1000 Manuel utilisateur

Agilent Technologies

Agilent Technologies TS-5410 Mode d'emploi

Agilent Technologies

Agilent Technologies U5303A Guide de l'utilisateur

Agilent Technologies

Agilent Technologies E8356A Manuel d'installation et d'exploitation

Agilent Technologies

Agilent Technologies E4915A Manuel utilisateur

Agilent Technologies

Agilent Technologies Cary Eclipse Manuel utilisateur

Agilent Technologies

Agilent Technologies E4980A Manuel utilisateur

Agilent Technologies

Agilent Technologies E3238S Instructions d'utilisation et d'entretien

Agilent Technologies

Agilent Technologies N9340B Manuel

Agilent Technologies

Agilent Technologies X Series Guide de l'utilisateur

Agilent Technologies

Agilent Technologies ESA E4401B Manuel d'installation et d'exploitation

Agilent Technologies

Agilent Technologies N9320B Manuel utilisateur

Agilent Technologies

Agilent Technologies E5100A Manuel utilisateur

Agilent Technologies

Agilent Technologies Agilent 4396B Manuel utilisateur

Agilent Technologies

Agilent Technologies 4418B Manuel utilisateur

Agilent Technologies

Agilent Technologies 85032B/E 50 Manuel

Agilent Technologies

Agilent Technologies E5061B Manuel utilisateur

Agilent Technologies

Agilent Technologies 3200P Manuel utilisateur

Manuels Instrument de mesure populaires d'autres marques

Suaoki

Suaoki D40 Manuel utilisateur

Elster

Elster BK-G1.6 Manuel utilisateur

Endress+Hauser

Endress+Hauser Deltabar FMD71 Manuel

Duratool

Duratool D03128 Manuel utilisateur

Vega

Vega VEGAPULS 65 Manuel utilisateur

Tonghui

Tonghui TH2618B Manuel utilisateur

Tenmars

Tenmars TM-801 Manuel utilisateur

MSR

MSR 145 Manuel utilisateur

TPS

TPS WP-82 Manuel utilisateur

ELMETRON

ELMETRON CP-511 Manuel utilisateur

PCB Piezotronics

PCB Piezotronics 003C30 Manuel utilisateur

Tenma

Tenma 72-10465 Manuel utilisateur

Endress+Hauser

Endress+Hauser Proline Promag 50 Caractéristiques techniques

Siemens

Siemens SITRANS F Coriolis FCT030 Manuel de la liste des pièces

KLINGER

KLINGER CMF V Series Manuel utilisateur

EXFO

EXFO FTB-2 Manuel d'exploitation et d'entretien

Keysight

Keysight M8290A Manuel utilisateur

ADTEK

ADTEK MW-5 Manuel utilisateur