Keysight Technologies B1500A Mode d’emploi

Keysight Technologies B1500A

Semiconductor Device Analyzer

Connection Guide

for Wafer Prober

Notices

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Manual Part Number

B1500-90091

Edition

Edition 1, June 2017

Published by:

Keysight Technologies International

Japan G.K.

9-1, Takakura-cho, Hachioji-shi, Tokyo

192-0033 Japan

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in this document are furnished under a

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in accordance with the terms of such

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Warranty

THE MATERIAL CONTAINED IN THIS

DOCUMENT IS PROVIDED “AS IS,” AND

IS SUBJECT TO BEING CHANGED,

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Contents

Connection Guide for Wafer Prober

SMU/GNDU connection with prober . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

GNDU connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

Non-Kelvin connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7

Kelvin connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8

SMU connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

Non-Kelvin connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

Kelvin connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10

Kelvin to non-Kelvin connection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11

MCSMU connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12

Connection for low current measurement. . . . . . . . . . . . . . . . . . . . . . . . . . . 16

To make connection to reduce leakage current . . . . . . . . . . . . . . . . . . . . 16

Guarding . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16

Connection for low resistance measurement . . . . . . . . . . . . . . . . . . . . . . . . 18

To make connection to measure low resistance . . . . . . . . . . . . . . . . . . . . 18

Kelvin connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18

SCUU and ASU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20

SCUU positioner-based probing connection . . . . . . . . . . . . . . . . . . . . . . . 20

ASU connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 21

WGFMU and RSU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23

Connecting RSU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23

Connecting RF Probes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25

Connecting DC Probes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 28

Interlock circuit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30

Installing the interlock circuit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30

To connect interlock circuit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32

1 Connection Guide for Wafer Prober

6 Keysight B1500A Connection Guide for Wafer Prober, Edition 1

Connection Guide for Wafer Prober

SMU/GNDU connection with prober

This section describes how to connect a wafer prober to the Keysight B1500A

semiconductor device analyzer.

Table 1-1 Semi automated prober with B1500A

B1500A with Cascade Prober B1500A with Vector Prober

B1500A with Cascade (Suss) Prober ASUs on the probe station

Keysight B1500A Connection Guide for Wafer Prober, Edition 1 7

Connection Guide for Wafer Prober

SMU/GNDU connection with prober

GNDU connections

An SMU has FORCE (SENSE), GUARD, and COMMON, but a GNDU has SENSE,

FORCE, and COMMON as shown in Figure 1-1. User needs some sort of GNDU to Kelvin

adapter when connecting the GNDU to standard triaxial connections.

CAUTION User should use the Keysight 16493L GNDU cable to connect the GNDU to the connector

plate; do not use a standard triaxial cable. The GNDU cable can handle the maximum

GNDU current of 4.2 A, but standard triaxial cables (16494A) are only rated to 1 A.

Figure 1-1 GNDU terminal

Non-Kelvin connection

Connect the triaxial connector using an adapter for GNDU (N1254A-107) as shown in

Figure 1-2. For parts information for this connection, see Table 1-2.

Figure 1-2 Example of a GNDU non-Kelvin connection

Table 1-2 Item number information for GNDU non-Kelvin connection with B1500A

Description Qty Product Number Part number

Ground unit cable (1.5 m) - max 4.2 A 1 16493L-001 N/A

Ground unit cable (3.0 m) - max 4.2 A 1 16493L-002 N/A

Triaxial (m) to triaxial (f) adapter 1 N1254A-107 1250-2654

8 Keysight B1500A Connection Guide for Wafer Prober, Edition 1

Connection Guide for Wafer Prober

SMU/GNDU connection with prober

Kelvin connection

Connect the dual triaxial connector using a GNDU to Kelvin Adapter (N1254A-100) as

shown in Figure 1-3. For parts information, see Table 1-3. Maximum current is restricted

when the Kelvin triaxial cable is used.

Figure 1-3 Example of a GNDU Kelvin connection

Table 1-3 Item number information for GNDU Kelvin connection with B1500A

Description Qty Product Number Part number

Kelvin triaxial cable (1.5 m) - Max 3.0 A 1 16493K-001 N/A

Kelvin triaxial cable (3.0 m) - Max 2.6 A 1 16493K-002 N/A

GNDU to Kelvin adapter 1 N1254A-100 N/A

Keysight B1500A Connection Guide for Wafer Prober, Edition 1 9

Connection Guide for Wafer Prober

SMU/GNDU connection with prober

SMU connections

An SMU terminal is shown in Figure 1-4.

CAUTION Never connect the Guard terminal to any output, including circuit common, chassis

ground, or any other guard terminal. Doing so will damage the SMU.

Figure 1-4 SMU terminal

Non-Kelvin connection

These instructions apply when all connections are non-Kelvin. Connect the Keysight

16494A triaxial cables between the SMU and the Connector plate. Connect the triaxial

connector on the probe cable as shown in Figure 1-5. For parts information, see Table 1-4.

NOTE Making non-kelvin connection

The Force terminals can be used to force and measure DC voltage or current. If you want to

simplify the cable connections, open the Sense terminals and connect the Force terminals

only to the connector plate by using the triaxial cables. If user makes the Kelvin

connection, use both Force and Sense terminals. Connecting the Force and Sense lines

together at the terminal of the device under test minimizes the measurement error caused

by the residual resistance of the connection cables. The Kelvin connection is effective for

the low resistance measurement and the high current measurement.

Figure 1-5 Example of an SMU non-Kelvin connection

10 Keysight B1500A Connection Guide for Wafer Prober, Edition 1

Connection Guide for Wafer Prober

SMU/GNDU connection with prober

Table 1-4 Item number information for GNDU non-Kelvin connection with B1500A

Kelvin connection

These instructions apply when all connections are Kelvin. Two probes must contact the

wafer in this connection. Connect an Keysight 16493K Kelvin triaxial cable (or two

Keysight 16494A triaxial cables) between the SMU and the connector plate. Connect the

FORCE and SENSE lines to probes separately. Connect the triaxial connector on the probe

cable as shown in Figure 1-6. For parts information, see Table 1-5.

NOTE To prevent oscillations, do not use cables longer than 1.5 m, if you use two 16494A triaxial

cables with Kelvin connections.

Figure 1-6 Example of an SMU Kelvin connection

Table 1-5 Item number information for SMU Kelvin connection with B1500A

Description Qty Product Number Part number

Triaxial cable (1.5 m) 1 16494A-001 N/A

Triaxial cable (3.0 m) 1 16494A-002 N/A

Description Qty Product Number Part number

Kelvin triaxial cable (1.5 m) - max 3.0 A 1 16493K-001 N/A

Kelvin triaxial cable (3.0 m) - max 2.6 A 1 16493K-002 N/A

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