Inficon UL1000 Fab Note de version

Catalog-No.

from software version

TECHNICAL HANDBOOK

UL1000 Fab and

UL1000

Helium Leak Detector

UL 1000:

550 - 000A

550 - 001A

550 - 002A

UL 1000 Fab:

550 - 100A

550 - 101A

V5.14

iina70e1-m (1408) Translation of the original handbook

iina70e content.fm Technical Handbook(1408)

Table of Contents 3

iina70e content.fm Technical Handbook(1408)

Table of Contents

1 General Information 7

1.1 Notes on the Use of this Handbook 7

1.1.1 Safety Symbols 7

1.1.2 Indications 8

1.1.3 Symbols of Vacuum Technology 8

1.1.4 Definiton of Terms 8

1.2 Support from INFICON Service 10

1.2.1 Service Centers 11

1.3 Introduction 13

1.3.1 Purpose 13

1.3.2 Technical Data 15

1.3.2.1 Physical Data 15

1.3.2.2 Electrical Data 15

1.3.2.3 Other Data 16

1.3.2.4 Ambient Conditions 16

1.4 Unpacking 16

1.4.1 Supplied Equipment 17

1.4.2 Accessories and Options 18

1.4.2.1 Sniffer line SL200 18

1.4.2.2 Toolbox 18

1.4.2.3 Helium Bottle Holder 18

1.4.2.4 ESD Mat 18

1.4.2.5 RC1000 Remote control 19

1.4.2.6 Test chamber TC1000 20

2 Installation 21

2.1 Transportation 21

2.2 Working Location 23

2.3 Electrical Connections 25

2.3.1 Mains Power 25

2.3.2 Connections for the Data Acquisition Systems 27

2.3.2.1 Accessories 28

2.3.2.2 Digital Out 28

2.3.2.3 Digital In 29

2.3.2.4 Recorder 30

2.3.2.5 RS232 31

2.3.2.6 Remote Control 31

2.4 Vaccum Connections 32

2.4.1 Inlet Port 32

2.4.2 Exhaust 32

2.4.3 Vent 32

2.4.4 Purge-connection (UL1000 Fab) /

Gas ballast (UL1000) 32

2.5 Default parameters 33

4Table of Contents

iina70e content.fm Technical Handbook(1408)

3 First Operation Check 34

3.1 Needed Equipment 34

3.2 Description of the Initial Operation 34

3.2.1 Start up and Measure 34

3.2.2 Internal Calibration 37

3.2.3 Verification 37

4 Description and Working Principle 38

4.1 Introduction 38

4.2 Components of the UL1000 and UL1000 Fab 38

4.2.1 Vacuum System 39

4.2.2 Control Panel 40

4.2.2.1 LC Display 41

4.2.2.2 START Button 41

4.2.2.3 STOP Button 41

4.2.2.4 ZERO Button 41

4.2.2.5 MENU Button 43

4.2.2.6 Soft Keys 43

4.2.2.7 Numerical Entries 43

4.3 Working Modes 45

4.3.1 Vacuum Mode 45

4.3.2 Sniffer Mode 47

4.3.3 Auto Leak Test Mode 47

5 Operation of the UL1000 and UL1000 Fab 48

5.1 Display 48

5.2 The Screen in Run-Up Mode 48

5.3 Display in stand-by mode 49

5.3.1 Purging 49

5.4 The Screen in Measurement Mode 49

5.4.1 Call for Calibration 49

5.4.2 Speaker Volume 50

5.4.3 Status Line in the Display 50

5.4.4 Numerical Display Mode 51

5.4.5 Trend Mode 51

6 Description of the Menu 52

6.1 Main Menu 52

6.2 View 54

6.2.1 Scale linear/logarithmic 55

6.2.2 Display-range auto/manual 55

6.2.3 Time axis 56

6.2.4 Contrast 56

6.2.5 Background in Stand-by 57

6.2.6 Decimal places 57

6.2.7 Lower display limit 58

6.3 Mode 58

6.3.1 Auto Leak Test 59

Table of Contents 5

iina70e content.fm Technical Handbook(1408)

6.4 Trigger & Alarms 61

6.4.1 Trigger Level 1 61

6.4.2 Trigger Level 2 62

6.4.3 Volume 62

6.4.4 Units 63

6.4.5 Alarm delay 63

6.4.6 Audio alarm type 64

6.4.6.1 Pinpoint 64

6.4.6.2 Leak rate prop. 64

6.4.6.3 Setpoint 65

6.4.6.4 Trigger alarm 65

6.5 Calibration 65

6.6 Settings 66

6.6.1 Vacuum settings 67

6.6.1.1 Automatic purge (UL1000 Fab only) 67

6.6.1.2 Vent delay 67

6.6.1.3 Vacuum ranges 68

6.6.1.4 Leak rate internal test leak 69

6.6.1.5 Machine factor 69

6.6.1.6 Auto Leak Test adjustments 69

6.6.2 Zero & Background 73

6.6.2.1 Background Suppression 73

6.6.2.2 Zero 73

6.6.3 Mass 74

6.6.4 Interfaces 75

6.6.4.1 Control Location 75

6.6.4.2 RS232 Protocol 76

6.6.4.3 Recorder output 77

6.6.4.4 Scaling Recorder Output 78

6.6.5 Miscellaneous 79

6.6.5.1 Time&Date 79

6.6.5.2 Language 79

6.6.5.3 Leak rate filter 80

6.6.5.4 Mains Frequency 80

6.6.5.5 Service interval exhaust filter 80

6.6.5.6 Service message exhaust filter 81

6.6.6 Parameter save / load 81

6.6.6.1 Load parameter set 81

6.6.6.2 Save parameter set 82

6.6.7 Monitoring functions 82

6.7 Information 85

6.7.1 Service 85

6.8 Access Control 86

6.8.1 Access to CAL function 86

6.8.2 Access to Trigger&Alarme menu 87

6.8.3 Change Device PIN 87

6.8.4 Change Menu-PIN 87

7 Calibration 88

7.1 Introduction 88

6Table of Contents

iina70e content.fm Technical Handbook(1408)

7.2 The calibration routines 88

7.2.1 Internal Calibration 89

7.2.1.1 Automatic Internal Calibration 89

7.2.1.2 Manual Internal Calibration 89

7.2.2 External Calibration 89

7.3 Factor of Calibration - Range of Values 93

8 Error And Warning Messages 94

8.1 Hints 94

8.2 List of Errors & Warnings 95

9 Maintenance Work 99

9.1 General Information 99

9.2 Maintenance or Service at INFICON 100

9.3 Key to the Maintenance Plan 100

9.4 Maintenance Plan 101

9.5 Maintenance Groups 102

9.5.1 1500 Hours Maintenance 102

9.5.2 4000 Hours Maintenance 102

9.5.3 8000 Hours Maintenance 103

9.5.4 16000 Hours Maintenance 103

9.5.5 Notes refering the maintenance of the SplitFlow 80 104

9.6 Description of the Maintenance Work 104

9.6.1 Opening the Instrument for Maintenance Purposes 105

9.7 Checking and Replacing the Filter Insert 106

9.8 Replacing the Exhaust Silencer 108

9.9 Checking/Emptying the Exhaust Filter 109

9.9.1 Replacing the Filter Insert 109

9.10 Monitoring the Oil Level of the D16 B and Topping up the Oil 111

9.11 Oil Change for the D16B 112

9.12 Scroll Pumps (UL1000 and UL1000 Fab only) 114

Appendix 115

A Diagram 115

B Index 116

C Declaration of Conformity 118

General Information 7

iina70e 01.fm technical handbook(1408)

1 General Information

Notice: We recommend that you carefully read this technical handbook to ensure

optimum operating conditions right from the start.

This technical handbook contains important informations on the functions,

installation, start-up and operation of the UL1000 and UL1000 Fab.

General

We reserve the right to modify the design and the specified data. The illustrations are

not binding.

1.1 Notes on the Use of this Handbook

1.1.1 Safety Symbols

Important remarks concerning operational safety and protection are emphasised as

follows:

Caution

Information on correct handling or use. Disregardcan lead to malfunctions or minor

equipment damage.

Warning

Information on preventing extensive equipment and environmental damage.

STOP Danger

Information on preventing any kind of physical injury.

Skilled personnel

Indicates procedures that must be performed by skilled personnel only.

8General Information

iina70e 01.fm technical handbook(1408)

1.1.2 Indications

Tipp Information on helpful procedures.

Notice: Information on special technical requirements that the user must comply

with.

The references to diagrams consists of the chapter number, figure number and the

item number in this order. For example: Fig. 2-4/7 refers to item 7 in the figure 4 of

chapter 2.

1.1.3 Symbols of Vacuum Technology

Given in the following are some important vacuum symbols which are used in this

manual.

Vacuum pump in general

Turbomolecular pump

Measuring instrument

Valve

1.1.4 Definiton of Terms

Autoranging

The range of the preamplifier and the vacuum ranges are selected automatically.

The autoranging feature of the UL1000 Fab covers the entire range or leak rates

depending on the selected operating mode. Not only the leak rate signal, but also the

pressure in the test sample (inlet pressure P1) and the forevacuum pressure (P2) are

used for control purposes. Range switching between the main ranges is performed

via valves. Fine range switching within the main ranges is implemented by switching

over the gain factor of the preamplifier.

Autotune

Mass alignment

This function automatically aligns the mass spectrometer so that a maximum leak

rate is displayed. The control processor changes the voltage which erates the ions

in the selected mass range until a maximum ion current is detected by the ion

detector. During each calibration the mass alignment is run automatically.

General Information 9

iina70e 01.fm technical handbook(1408)

Auto zero

Measurement and automatic adaptation to the helium background.

This function determines the internal ZERO level of the unit which is then deducted

from the currently measured leak rate signal. This function is enabled by pressing

the Start key providedthe UL1000 or UL1000 Fab have run at least 20 s in"Standby"

mode or in "Ventilation" mode.

If the before suppressed helium background further decreases and only the display

limit appears, the ZERO-level will be adjusted automatically

The menu allows the user to program the UL1000 and UL1000 Fab according to his

requirements. The menu has a tree architecture.

Default

Status of the UL1000 and UL1000 Fab when supplied by the factory.

GROSS

GROSS is a measurement mode which allows high inlet pressure (1 to 15 mbar).

The smallest detectable leak rate is 1x10-6 mbar l/s.

FINE

FINE is the medium measurement mode with inlet pressure between 2 and 0,4 mbar.

Detection limit is 1x10-10 mbar l/s.

ULTRA

ULTRA is the most sensitive measuring range with inlet pressures below 0,4 mbar.

The minimum detectable leak rate is 5x10-12 mbar l/s.

Foreline pressure

Pressure in the foreline between Turbo pump and scroll pump.

Minimum detectable leak rate

The smallest leak rate the UL1000 and UL1000 Fab is able to detect

(5x10-12 mbar l/s).

Internal helium background

The existing helium partial pressure in the measurement system. The level of the

internal helium background is measured in the Stand-by mode and subtracted from

the measured signal.

Measure Measurement mode

The UL1000 and UL1000 Fab measures the leak rate of the test sample.

10 General Information

iina70e 01.fm technical handbook(1408)

1.2 Support from INFICON Service

If an instrument is returned to INFICON or an authorised representative of INFICON,

please indicate wether the instrument is free of substances damaging to healths or

wether it is contaminated. If it is contaminated also indicate the nature of the hazard.

INFICON must return any appliances without a Declaration of Contamination to the

sender’s address. A form for stating details as to the type of contamination is

reproduced in Fig. 1-1.

A maintenance and service contract is recommended.

Fig. 1-1: Declaration of Contamination form

INFICON GmbH

Bonner Str. 498,50968 Cologne, Germany

Tel: +49 221 3474 2222 Fax: +49 221 3474 2221

www.inficon.com leakdetection.service

inficon.co

zisa01e1-a

Declaration of Contamination

Legally binding declaration:

I/we hereby declare that the information on this form is complete and accurate and that I/we will assume any further costs that may

arise. The contaminated product will be dispatched in accordance with the applicable regulations.

Organization/company

Address Post code, place

Phone Fax

Name

Date and legally binding signature Companystamp

1) or not containing any amount

of hazardous residues that

exceed the permissible ex-

posure limits

Process related contamination of product:

toxic no 1) yes 

caustic no 1) yes 

biological hazard no yes 2)

explosive no yes

2)

radioactive no yes 2)

other harmful substances no 1) yes 

The service, repair, and/or disposal of vacuum equipment and components will only be carried out if a correctly completed declaration has

been submitted. Non-completion will result in delay.

This declaration may only be completed (in block letters) and signed by authorized and qualified staff.

Copies:

Original for addressee - 1 copy for accompanying documents - 1 copy for file of sender

Harmful substances, gases and/or by-products

Please list all substances, gases, and by-products which the product may have come into contact with:

Trade/product name Chemical name

(or symbol)

Precautions associated

with substance

Action if human contact

Description of product

Type

Article Number

Serial Number

Reason for return

Operating fluid(s) used (Must be drained before shipping.)

The product is free of any sub-

stances which are damaging to

health yes 

This form can be downloaded

from our website.

2) Products thus conta mi-

nated will not be ac-

cepted without written

evidence of decontami-

nation!

Ce manuel convient aux modèles suivants

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