Inficon IRG080 Manuel utilisateur

Operating Manual

Incl. EU Declaration of Conformity

tinb74e1 (2023-01) 1

Ion Reference Gauge

IRG080

2tinb74e1 (2023-01) IRG080.om

In all communications with INFICON, please specify the information on the product

nameplate.

This document applies to products with part number

399-874 Ion Reference Gauge IRG080 with BNC and multipin connector

(DN 63 CF-R)

The part number (PN:) can be taken from the product nameplate.

We reserve the right to make technical changes without prior notice.

All dimensions in mm.

The references to diagrams, e.g. (2/3), consist of the fig. no. and the item no. in

that order.

The IRG080 is a vacuum gauge developed for precise total pressure measurement in

vacuum systems. This passive sensor is based on an innovative concept of ioniza-

tion vacuum gauge, whereby a hot cathode emits electrons travelling on a straight

path into a Faraday cup. The IRG080 is operated by the Ion Reference gauge

Controller IRC081.

The IRG080 gauge may only be used for the measurement of total pressures in

vacuum systems and this only in connection with the Ion Reference gauge

Controller IRC081.

The IRG080 is designed and built exclusively for the purpose mentioned in the

section "Intended Use" and may only be used in this manner. Any use for purposes

that deviate from the above mentioned, in particular in connection with controller

units other than IRC081, is considered unintended use.

Any unintended use is forbidden. If any damage results from this, any liability and

warranty claims will expire. The operator or user solely bear the risk for this.

1 × IRG080 gauge

1 × Operating Manual

Product Identification

Validity

Description

Intended Use

Unintended use

Scope of Delivery

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Contents

Product Identification 2

Validity 2

Description 2

Intended Use 2

Unintended use 2

Scope of Delivery 2

1Safety 4

1.1 Symbols Used 4

1.2 Personnel Qualifications 4

1.3 General Safety Instructions 4

1.4 Liability and Warranty 4

2Technical Data 5

3Installation 7

3.1 Installation 7

3.2 Dismounting the gauge head connection unit 8

4Operation 11

5Maintenance 13

5.1 Cathode replacement 14

6Spare Parts, Accessories 17

7Storage 17

8Returning the Product 18

9Disposal 18

Appendix 19

A: Conversion Table 19

B: Further Information 19

EU Declaration of Conformity 20

For cross-references within this document, the symbol (→XY) is used; for cross-

references to further documents listed under ‘Literature’, use is made of the symbol

(→[Z]).

4tinb74e1 (2023-01) IRG080.om

1 Safety

DANGER

Information on preventing any kind of physical injury.

WARNING

Information on preventing extensive equipment and environmental damage.

Caution

Information on correct handling or use. Disregard can lead to malfunctions or

minor equipment damage.

Notice

Skilled personnel

All work described in this document may only be carried out by persons who

have suitable technical training and the necessary experience or who have been

instructed by the end-user of the product.

•Adhere to the applicable regulations and take the necessary precautions for the

process media used.

Consider possible reactions with the product materials (→5).

•Adhere to the applicable regulations and take the necessary precautions for all

work you are going to do and consider the safety instructions in this document.

•Before beginning to work, find out whether any vacuum components are conta-

minated. Adhere to the relevant regulations and take the necessary precautions

when handling contaminated parts.

Communicate the safety instructions to all other users.

INFICON assumes no liability and the warranty is rendered null and void if the end-

user or third parties

•disregard the information in this document

•use the product in a non-conforming manner

•make any kind of interventions (modifications, alterations etc.) on the product

•use the product with accessories not listed in the corresponding product docu-

mentation.

1.1 Symbols Used

Symbols for residual risks

1.2 Personnel Qualifications

1.3 General Safety

Instructions

1.4 Liability and Warranty

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2 Technical Data

Principle

hot cathode ionization

Electrode system configuration

according ISO/WD TS 6737

Measurement range (N2)

with IRC081 controller <1×10-8 … 1×10-4 mbar

<1×10

-6

… 1×10

-2

Sensitivity (N2) (typical)

29 mbar

-1

Accuracy (N2), typical)

±1% of reading

Repeatability (typical)

1% of reading

Mounting orientation recommended aligned with magnetic

field

with mu-metal int. piece (399-891)

any

Admissible temperatures

Ambient, in operation

+20 … +80 °C

Bake-out

Max. flange temp. with temp.

resistant gauge head cable set

+165 °C

Max. bake-out temperature

without plug and connector

plate unit

+400 °C

with mu-metal intermediate

piece (399-891)

+200 °C

Storage

+20 … +50 °C

Relative humidity

≤85% (non-condensing)

Admissible external magnetic field

in the plane normal to gauge axis,

without shielding

≤50 µT

Use

indoors only

1) Orientation should be such that magnetic field is not perpendicular to the electron trajectory

DANGER

During operation, it must be ensured that the sensor voltages (anode

voltage and Faraday voltages) do not become dangerous to touch

according to EN 61010-1:2010 + A1:2019 + A1:2019/AC:2019.

For this purpose, the currents <1.1 mA and the charge <45 µC must

be complied with in normal operation. In the event of a single fault, the

limit values are 15 mA for a time of less than 30 ms and 45 µC.

By use of the Ion Reference gauge Controller IRC081 the conditions

for operation compliant to EN 61010-1:2010 + A1:2019 +

A1:2019/AC:2019 are fulfilled. If different controller units are used, the

user is responsible for a safe operation.

Collector potential

0 V

Cathode potential

+50 V

Wehnelt potential

+34 V

Anode potential

+250 V

Deflector potential

45 V

Faraday cup potential

+280 V

Emission current range

10 … 100 µA

Cathode heater current / voltage (typ.)

1.4 … 1.8 A / 2 V

Measurement system

Measurement capabilities

General gauge head data

Standard operating characteristics

with IRC081 controller

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Flange connection

DN 63 CF-R

Gauge connections

Ion collector

Bayonet (BNC)

Interface to Sensor (IS)

push-pull self-latching, 7-pin

Feedthrough pins

stainless steel (EN 1.4301)

Feedthrough caps

NiFeCo (EN 1.3981)

Feedthrough isolation

ceramic (Al2O3)

Cathode

Ta, W, Kovar, Al2O3

Anode

stainless steel (EN 1.4404, EN 1.4435)

Wehnelt cylinder

stainless steel (EN 1.4404, EN 1.4435)

Flange

stainless steel (EN 1.4435 ESU)

Internal volume

~385cm

Weight

4.3 kg

Fig. 1 Dimensions of the IRG080

Connections

Materials exposed to vacuum

Internal volume, weight

Dimensions [mm]

DN 63 CF-R

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3 Installation

Caution

As a rule, all ionization measurement systems must only be operated

in connection with a properly earthed pump system.

Installation and mounting may only be carried out with the operating

unit switched off.

When connecting the vacuum gauges to the vacuum system it must be strictly ob-

served that during operation the gauges are not subjected to mechanical oscilla-

tions, impact or vibrations.

The mounting position of the gauge heads has no influence on proper operation

per se. However magnetic fields can influence the operation of the gauge. Elec-

trons may be deflected by earth’s magnetic field or nearby sources.

The mounting orientation should be such that magnetic field is not perpendicular to

the electron trajectory. This can be obtained aligning the gauge axis to the mag-

netic field.

Any other mounting orientation can be adopted using the mu-metal

intermediate piece 399-891 (Accessories →17).

Exercise caution when install a venting valve in the immediate vicinity. The then

suddenly occurring air flow may result in mechanical damage to the sensitive

cathode.

When installing several gauge heads at one common component (T-piece or cross

for example) an optical separation is required. The gauge heads may not directly

"see" each other. Interactions may cause incorrect measurements.

Humidity at the insulators, caused for example by condensing water,

can give rise to incorrect measurements due to leakage currents.

Fit the gauge head to the vacuum chamber and bolt the CF flange on.

Before connecting the gauge head, it is recommended to pump down

the system and if possible run a vacuum test or a direct leak search.

Connect the gauge head cable set (Accessories →17) to the gauge head

(Fig. 2).

•BNC plug (with metallic shell) →Collector BNC socket (“Collect.”)

•Multipin connector →Multipin socket (“IS”)

The touch-insulated BNC connector included in the the gauge head

cable set must be connected to the IRC081 controller.

Do not use force to connect the plug. When plugging in make sure first that all pins

are lined up in parallel and are straight. Otherwise the current feedthrough can

suffer damage.

3.1 Installation

Fitting the gauge head

Connecting the gauge head

cable set

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WARNING

Especially note the pin assignment. Provide the connection with great

care. Do not subject the pin contacts to any bending forces.

(Risk: damaging of the current feedthrough/leak)

Fig. 2View of the front connector plate with the BNC socket (Collect.) and multipin

connector (IS)

Put the gauge out of operation first before working at the gauge cable.

After putting out of operation, wait for at least 15 seconds.

For bake-out above 165 °C, the gauge head connection unit shall be disconnected.

3.2 Dismounting the gauge

head connection unit

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1 Gauge head assembly

2 Gauge head connecting unit

3 Cylinder housing

4 Slotted truss head screws M4×6 (3×)

5 Slotted cylindrical head screws M3×6 (4×)

6 Golden connection sockets (8x)

7 Hex socket set screws M3×3 (8×) (also visible in the following Fig. 3)

8 Feedthrough pins (8×)

Unscrew the 3× slotted truss head screws M4×6 (3/4) using a flat head

screwdriver.

Move the cylinder housing (3/3) away.

Unscrew the 4× slotted cylindrical head screws M3×6 (3/5) with flat head

screwdriver.

Unscrew the 8x hex socket set screws

M3×3 (3/7) with an Allen key 1.5 mm on

each golden connection socket (3/6).

Fig. 4Detail view of the hex socket set

screws (3/7) on the connection sockets (3/6)

Separate and remove the complete gauge head connecting unit (3/2) from

the gauge head assembly (3/1).

The gauge head can be baked-out up to 400 °C (200 °C with mu-metal

intermediate piece 399-891).

Disassembly of the gauge head

connecting unit for bake-out

Procedure

Fig. 3Disassembly of the gauge head connection unit

10 tinb74e1 (2023-01) IRG080.om

Move and fit the complete gauge head connecting unit (3/2) to the gauge

head assembly (3/1).

Tighten the 8x hex socket set screws M3×3 (3/7) with Allen key 1.5 mm on

each golden connection socket (3/6). Recommended torque: 1 Nm.

Tighten the 4× slotted cylindrical head screws M3×6 (3/5) with flat head

screwdriver. Recommended torque: 1 Nm.

Move the cylinder housing (3/3) in.

Tighten the 3× slotted truss head screws M4×6 (3/4) using a flat head

screwdriver. Recommended torque: 1 Nm.

Assembly of the gauge head

connecting unit after bake-out

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