Inficon CDG025D2 Manuel utilisateur

Communication Protocol

tirb45e1 (2019-02) 1

EtherCAT®

for Capacitance Diaphragm Gauges

CDG025D2

CDG045D

CDG045D2

CDG045Dhs

CDG100D

CDG100D2

CDG100Dhs

CDG160D

CDG160Dhs

CDG200D

CDG200Dhs

2tirb45e1 (2019-02) CDGxxxDxx.cp

Data transmission errors

Any attempt to simultaneously operate the gauge via the RS232C

Serial Interface and EtherCAT interface or the diagnostic port may

result in incorrect data and data transmission errors.

Therefore, it is inadmissible to simultaneously operate the gauge via

the RS232C Serial Interface and EtherCAT interface, or the diagnostic

port.

This Communication Protocol contains instructions for operating EtherCAT inter-

faces (slaves) together with a master.

For safety information, specifications and operation instructions of the

vacuum gauges refer to the appropriate documents:

CDG025D2 →[4]

CDG045D →[1]

CDG045D2 →[5]

CDG045Dhs →[6]

CDG100D →[2]

CDG100D2 →[5]

CDG100Dhs →[7]

CDG160D →[3]

CDG160Dhs →[8]

CDG200D →[3]

CDG200Dhs →[8]

The following description of the EtherCAT interface is compliant to the EtherCAT

specification of the EtherCAT Technology Group (ETG) and to the "EtherCAT

Semiconductor Device Profile".

This manual describes the functionality of a EtherCAT slave and supports

•ETG.5003.1 S (R) V1.1.0: Part 1 Common Device Profile (CDP) (→[17])

and

•ETG.5003.2080 S (R) V1.3.0: Part 2080: Specific Device Profile (SDP) Vacuum

Pressure Gauge (→[18]).

For operating the gauge via EtherCAT, prior installation of the device specific ESI

file is required on the bus master side. This file can be downloaded from our web-

site.

In all communications with INFICON, please specify the information on the product

nameplate. For convenient reference copy that information into the space provided

below.

Caution

General Information

Intended Use

EtherCAT–Interface

Product Identification

tirb45e1 (2019-02) CDGxxxDxx.cp 3

This document applies to products of the CDG025D2, CDG045D, CDG045D2,

CDG045Dhs, CDG100D, CDG100D2, CDG100Dhs, CDG160D, CDG160Dhs,

CDG200D and CDG200Dhs series with EtherCAT interface.

This manual is based on firmware version 1.3.0.0.

If your unit does not work as described in this document, please check that it is

equipped with the above firmware version:

•CDG025D2, CDG045D, CDG045D2, CDG100D, CDG100D2, CDG160D and

CDG200D →14, Index 100A

•CDG045Dhs, CDG100Dhs, CDG160Dhs and CDG200Dhs →38, Index 100A

Part numbers of standard products are indicated below. OEM products have other

part numbers and different parameter settings (e.g. factory setting of setpoint) as

defined in the corresponding ordering information.

The part number (PN) can be taken from the product nameplate.

If not indicated otherwise in the legends, the illustrations in this document corres-

pond to CDG045D gauges with the DN 16 ISO-KF vacuum connection. They apply

to other vacuum connections and to the other gauges by analogy.

We reserve the right to make technical changes without prior notice.

Validity

4tirb45e1 (2019-02) CDGxxxDxx.cp

EtherCAT®Beckhoff Automation GmbH, Deutschland

Edge™ INFICON GmbH

Stripe™ INFICON GmbH

EP 1070239 B1, 1040333 B1

US Patents 6528008, 6591687, 7107855, 7140085

Trademarks

Patents

tirb45e1 (2019-02) CDGxxxDxx.cp 5

Contents

General Information 2

Intended Use 2

EtherCAT–Interface 2

Product Identification 2

Validity 3

Trademarks 4

Patents 4

1Technical Data 7

2Interface Connection 8

3Operation 10

3.1 Introduction 10

3.2 Front View 10

3.3 Indicators and Switches 11

3.3.1 <RUN> LED 11

3.3.2 <ERR> LED 11

3.3.3 <LA> LED (<IN> Port) 11

3.3.4 <LA> LED (<OUT> Port) 11

3.3.5 Device Address Switch 12

4Object Structure CDG025D2, CDG045D, CDG045D2, CDG100D,

CDG100D2, CDG160D, CDG200D 13

4.1 Object Dictionary structure 13

4.2 Communication Profile Objects (0x1000…0x1FFF) 14

4.2.1 Process Data Objects (PDO's) 14

4.3 Manufacturer-specific Profile Objects (0x2000...0x5FFF) 15

4.3.1 Manufacturer Status 15

4.3.2 Manufacturer Configuration (Module 1) 16

4.3.3 Manufacturer Configuration (Module 2) 17

4.4 Input Area (0x6000…0x6FFF) 17

4.4.1 Input Common 17

4.4.2 Input Capacitance Diaphragm 17

4.4.3 Input Common 18

4.4.4 Input Piezo 18

4.4.5 Input Trip Point 1 18

4.4.6Input Trip Point 2 19

4.5 Configuration Area (0x8000…0x8FFF) 19

4.5.1 Configuration Capacitance Diaphragm 19

4.5.2 Configuration Trip Point 19

4.5.3 Configuration Trip Point 1 20

4.5.4 Configuration Trip Point 2 21

4.6 Information Area (0x9000…0x9FFF) 22

4.6.1 Information Common Capacitance Diaphragm 22

4.6.2 Information Capacitance Diaphragm 23

4.6.3 Information Common Piezo 23

4.6.4 Information Piezo 24

4.6.5Information Trip Point 1 / 2 24

4.7 Device Area (0xF000...0xAFFF) 24

4.7.1 Semiconductor Device Profile 24

4.7.2 Module Profile List 24

4.7.3 Exceptions 25

4.7.4 Active Exception Status 25

4.7.5 Active Device Warning Details 25

4.7.6 Active Device Error Details 26

4.7.7 Active Global Device Warning Details 26

4.7.8 Active Global Device Error Details 27

4.7.9 Latched Device Warning Details 27

4.7.10 Latched Device Error Details 27

4.7.11 Latched Global Device Warning Details 28

4.7.12 Latched Global Device Error Details 28

4.7.13 Device Warning Mask 28

4.7.14 Device Error Mask 29

4.7.15 Global Device Warning Mask 29

4.7.16 Global Device Error Mask 29

4.7.17 Manufacturer Information Device 29

4.7.18 Trip Point Output All 29

4.7.19 Input Latch Local Timestamp 30

6tirb45e1 (2019-02) CDGxxxDxx.cp

4.7.20 Configure Device 30

4.7.21 Information Device 31

4.7.22 Command Zero Adjust 32

4.7.23 Full Scale Adjust 32

4.7.24 Device Reset Command 33

4.7.25 Exception Reset Command 33

4.7.26 Store Parameters Command 34

4.7.27 Calculate Checksum Command 35

4.7.28 Load Parameters Command 36

5Object Structure CDG045Dhs, CDG100Dhs, CDG160Dhs, CDG200Dhs 37

5.1 Object Dictionary structure 37

5.2 Communication Profile Objects (0x1000…0x1FFF) 38

5.2.1 Process Data Objects (PDO's) 38

5.3 Manufacturer-specific Profile Objects (0x2000...0x5FFF) 39

5.3.1 Manufacturer Status 39

5.3.2 Manufacturer Configuration (Module 1) 40

5.3.3 Manufacturer Configuration (Module 2) 40

5.4 Input Area (0x6000…0x6FFF) 41

5.4.1 Input Common 41

5.4.2 Input Capacitance Diaphragm 41

5.4.3 Input Common 42

5.4.4 Input Piezo 42

5.4.5 Input Trip Point 1 42

5.4.6 Input Trip Point 2 43

5.5 Configuration Area (0x8000…0x8FFF) 43

5.5.1 Configuration Capacitance Diaphragm 43

5.5.2 Configuration Trip Point 43

5.5.3 Configuration Trip Point 1 44

5.5.4 Configuration Trip Point 2 45

5.6 Information Area (0x9000…0x9FFF) 47

5.6.1 Information Common Capacitance Diaphragm 47

5.6.2 Information Capacitance Diaphragm 48

5.6.3 Information Common Piezo 48

5.6.4 Information Piezo 48

5.6.5Information Trip Point 1 / 2 49

5.7 Device Area (0xF000...0xAFFF) 49

5.7.1 Semiconductor Device Profile 49

5.7.2 Module Profile List 49

5.7.3 Exceptions 49

5.7.4 Active Exception Status 49

5.7.5 Active Device Warning Details 50

5.7.6 Active Device Error Details 50

5.7.7 Active Global Device Warning Details 51

5.7.8 Active Global Device Error Details 51

5.7.9 Latched Device Warning Details 52

5.7.10 Latched Device Error Details 52

5.7.11 Latched Global Device Warning Details 53

5.7.12 Latched Global Device Error Details 53

5.7.13 Device Warning Mask 53

5.7.14 Device Error Mask 53

5.7.15 Global Device Warning Mask 54

5.7.16 Global Device Error Mask 54

5.7.17 Manufacturer Information Device 54

5.7.18 Trip Point Output All 54

5.7.19 Input Latch Local Timestamp 54

5.8 Configure Device 55

5.8.1 Information Device 56

5.8.2 Command Zero Adjust 57

5.8.3 Full Scale Adjust 57

5.8.4 Device Reset Command 58

5.8.5 Exception Reset Command 58

5.8.6 Store Parameters Command 59

5.8.7 Calculate Checksum Command 60

5.8.8 Load Parameters Command 61

Appendix 62

A: Overview Setting Trip Points 62

B: Literature 64

For cross-references within this document, the symbol (→XY) is used, for cross-

references to further documents, listed under literature, the symbol (→[Z]).

tirb45e1 (2019-02) CDGxxxDxx.cp 7

1 Technical Data

For further technical data refer to the appropriate documents:

CDG025D2 →[4]

CDG045D →[1]

CDG045D2 →[5]

CDG045Dhs →[6]

CDG100D →[2]

CDG100D2 →[5]

CDG100Dhs

→



[7]

CDG160D →[3]

CDG160Dhs →[8]

CDG200D →[3]

CDG200Dhs →[8]

Communication protocol

protocol specialized for EtherCAT

Communication standards ETG.5003.1 S (R) V1.1.0: Part 1 Common

Device Profile (CDP) (→[17])

ETG.5003.2080 S (R) V1.3.0: Part 2080:

Specific Device Profile (SDP) Vacuum

Pressure Gauge (

→



[18])

Data rate

100 Mbps

Node address Explicit Device Identification

Physical layer

100BASE-Tx (IEEE 802.3)

EtherCAT connector 2 × RJ45, 8-pin (socket)

<IN>: EtherCAT input

<OUT>: EtherCAT output

Cable shielded, special Ethernet Patch Cable

(CAT5e quality or higher)

Cable length

≤100 m

Process data Fixed PDO mapping and configurable PDO

mapping

Mailbox (CoE)

SDO requests, responses and information

EtherCAT interface

8tirb45e1 (2019-02) CDGxxxDxx.cp

2 Interface Connection

For operating the temperature controlled CDGxxxD gauge via EtherCAT, two

interface cables conforming to the EtherCAT standard are required.

If no such cables are available, make two according to the following indications.

Ethernet Patch Cable Cable (CAT5e quality) with FCC68 connector.

Pin assignment:

FCC68, 8-pin,

male, soldering side

Signal

Description

TD+

Transmission Data +

TD-

Transmission Data -

RD+

Receive Data +

not used

6 RD- Receive Data -

not used

Pin assignment of the D-sub 15-pin sensor connector according to the

respective operating manual (→[1] … [8]).

8 1

Making an EtherCAT interface

cable

Cable type

Procedure

tirb45e1 (2019-02) CDGxxxDxx.cp 9

Plug the EtherCAT (and sensor) cables connector into the gauge: From the

previous device the cable connected to OUT port has to be connected to

the CDGxxxD <IN> port. And the cable from the CDGxxxD <OUT> port has

to be connected to the next device's <IN> port.

10 tirb45e1 (2019-02) CDGxxxDxx.cp

3 Operation

Via the EtherCAT interface, the following and further data are exchanged in the

standardized EtherCAT protocol:

•Pressure reading

•Pressure unit (Torr, mbar, Pa)

•Zero adjustment

•Status and error messages

•Status of the switching functions

•Set Trip Point for switching functions

Data transmission errors

Any attempt to simultaneously operate the gauge via the RS232C

Serial Interface and EtherCAT interface or the diagnostic port may

result in incorrect data and data transmission errors.

Therefore, it is inadmissible to simultaneously operate the gauge via

the RS232C Serial Interface and EtherCAT interface or the diagnostic

port.

Position

Label

Function

EtherCAT IN connector

ERR

Error LED

Link activity EtherCAT IN

x100

Address Switch × 100, hexadecimal

x10

Address Switch × 10, hexadecimal

Address Switch × 1, hexadecimal

Link activity EtherCAT OUT

RUN

EtherCAT Status LED

OUT

EtherCAT OUT connector

10 PWR Sensor cable connector

(Power, analog I/O, RS232C I/O and Relay contacts)

Caution

3.1 Introduction

3.2 Front View

Ce manuel convient aux modèles suivants

Table des matières

Autres manuels Inficon Instrument de mesure

Inficon

Inficon CMS5000 Manuel utilisateur

Inficon

Inficon Micro GC Fusion Instructions de montage

Inficon

Inficon HAPSITE Smart Manuel utilisateur

Inficon

Inficon IRG080 Manuel utilisateur

Inficon

Inficon Cube CDGsci Manuel utilisateur

Inficon

Inficon SQM-160 Manuel utilisateur

Inficon

Inficon Micro GC Fusion 2-Module Manuel utilisateur

Inficon

Inficon Sensistor ILS500 Manuel utilisateur

Inficon

Inficon Pilot Plus Manuel utilisateur

Inficon

Inficon PCG550 Manuel utilisateur

Inficon

Inficon SKY CDG045 Series Manuel utilisateur

Inficon

Inficon Transpector SPS Manuel utilisateur

Inficon

Inficon FLUE-Mate Manuel utilisateur

Inficon

Inficon Transpector MPH Manuel utilisateur

Inficon

Inficon CDG045D2 Manuel utilisateur

Inficon

Inficon LDM250 Manuel utilisateur

Inficon

Inficon Gemini MAG500 Manuel utilisateur

Inficon

Inficon Micro GC Fusion Manuel utilisateur

Inficon

Inficon Porter CDG020D Manuel utilisateur

Inficon

Inficon HAPSITE ER Manuel utilisateur

Inficon

Inficon Sensistor ILS500 Manuel utilisateur

Inficon

Inficon 3000 Micro GC Manuel utilisateur

Inficon

Inficon CO Check Manuel utilisateur

Inficon

Inficon 3000 Micro GC Manuel utilisateur

Manuels Instrument de mesure populaires d'autres marques

Suaoki

Suaoki D40 Manuel utilisateur

Elster

Elster BK-G1.6 Manuel utilisateur

Endress+Hauser

Endress+Hauser Deltabar FMD71 Manuel

Duratool

Duratool D03128 Manuel utilisateur

Vega

Vega VEGAPULS 65 Manuel utilisateur

Tonghui

Tonghui TH2618B Manuel utilisateur

Tenmars

Tenmars TM-801 Manuel utilisateur

MSR

MSR 145 Manuel utilisateur

TPS

TPS WP-82 Manuel utilisateur

ELMETRON

ELMETRON CP-511 Manuel utilisateur

PCB Piezotronics

PCB Piezotronics 003C30 Manuel utilisateur

Tenma

Tenma 72-10465 Manuel utilisateur

Endress+Hauser

Endress+Hauser Proline Promag 50 Caractéristiques techniques

Siemens

Siemens SITRANS F Coriolis FCT030 Manuel de la liste des pièces

KLINGER

KLINGER CMF V Series Manuel utilisateur

EXFO

EXFO FTB-2 Manuel d'exploitation et d'entretien

Keysight

Keysight M8290A Manuel utilisateur

ADTEK

ADTEK MW-5 Manuel utilisateur