Inficon LDS3000 AQ Manuel utilisateur

Typenbez.

Produktbeschreibung

Translation of the original operating instructions

Catalog no.

from software version

Document no.

560-300

MS-Module 2.41

jiqa54de1-04 (1512)

LDS3000

Mass spectrometer module

This document applies to the software version stated on the title page. Documents

for other software versions are available from our sales department.

Reprinting, translation, and duplication require written confirmation from INFICON

GmbH.

Content 3

Content

1 About these instructions . . . . . . . . . . . . . . . . . . . . . . . . . 6

1.1 Target groups . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

1.2 Other associated documents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

1.3 Displaying information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

1.3.1 Warnings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

1.3.2 Text markings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6

2 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8

2.1 Intended use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8

2.2 Owner requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8

2.3 Operator requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

2.4 General safety information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9

3 Shipment, Transport, Storage . . . . . . . . . . . . . . . . . . . . 11

4 Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12

4.1 Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12

4.2 Device setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

4.2.1 Overall device . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13

4.2.2 Connection block . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

4.2.3 MSB box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14

4.3 Technical data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16

4.3.1 Mechanical data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16

4.3.2 Electrical data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16

4.3.3 Physical data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16

4.3.4 Ambient conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17

4.3.5 Factory settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17

5 Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19

5.1 Adjust the position of the connections to the installation dimensions . 19

5.2 Installing the mass spectrometer module on the test system . . . . . . . 20

5.3 Connecting the mass spectrometer module to the test system . . . . . 21

5.4 Establish component connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22

5.5 Establish electrical connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23

6 Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24

6.1 Switching the unit on . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24

6.2 Default settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25

4Content

6.3 Selecting compatibility mode and operating mode . . . . . . . . . . . . . . . 25

6.4 Select gas type (mass) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27

6.5 Calibrating the device . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27

6.5.1 Internal calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29

6.5.2 External calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30

6.5.3 External dynamic calibration . . . . . . . . . . . . . . . . . . . . . . . . . 32

6.5.4 External calibration with sniffer line SL3000XL (accessories) 34

6.5.5 Check the calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34

6.5.6 Entering the calibration factor . . . . . . . . . . . . . . . . . . . . . . . . 36

6.5.7 Setting machine and sniff factor . . . . . . . . . . . . . . . . . . . . . . 36

6.6 Starting and stopping the measurement . . . . . . . . . . . . . . . . . . . . . . . 38

6.7 Loading and saving parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38

6.8 Copying measurement data, deleting measurement data . . . . . . . . . 39

6.9 Suppressing gas backgrounds with "ZERO" functions . . . . . . . . . . . . 39

6.10 Measurement result display with signal filters . . . . . . . . . . . . . . . . . . . 40

6.11 Decontaminating the backing pump . . . . . . . . . . . . . . . . . . . . . . . . . . 41

6.12 Selecting a unit for the leak rate . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41

6.13 Select unit for pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42

6.14 Selecting display limits . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42

6.15 Setting trigger values . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43

6.16 Setting capillary surveillance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43

6.17 Turbo molecular pump set-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43

6.18 Ion source set-up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 44

6.19 Setting the preamplifier . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 45

6.20 Settings for the XL sniffer adapter . . . . . . . . . . . . . . . . . . . . . . . . . . . 46

6.21 Selecting the type of expansion module . . . . . . . . . . . . . . . . . . . . . . . 48

6.22 Settings for I/O module IO1000 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48

6.22.1 General interface settings . . . . . . . . . . . . . . . . . . . . . . . . . . . 48

6.22.2 Assigning inputs and outputs . . . . . . . . . . . . . . . . . . . . . . . . . 49

6.23 Settings for bus module BM1000 . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59

6.24 Warning and error messages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59

6.24.1 Illustration of error codes with the help of the status LEDs . . 66

6.25 Resetting the settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 66

7 Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67

7.1 Maintenance at INFICON . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67

7.2 General maintenance information . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67

7.3 Maintenance plan . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68

7.4 Maintenance work . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 69

7.4.1 Change operating fluid reservoir of turbo molecular pump . . 69

8 Decommissioning the device . . . . . . . . . . . . . . . . . . . . 73

8.1 Shutting down the leak detector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73

8.2 Disposing of the mass spectrometer module . . . . . . . . . . . . . . . . . . . 73

8.3 Returning the mass spectrometer module . . . . . . . . . . . . . . . . . . . . . 73

Content 5

9 Appendix . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 74

9.1 EC Declaration of Incorporation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 74

9.2 Declaration of Contamination . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 75

6About these instructions

1 About these instructions

1.1 Target groups

These operating instructions are intended for the owner and for technically qualified

personnel with experience in leak detection technology and integration of leak detec-

tion devices in leak detection systems. In addition, the installation and use of the unit

require knowledge of electronic interfaces.

1.2 Other associated documents

1.3 Displaying information

1.3.1 Warnings

1.3.2 Text markings

Operating Manual Control Unit CU1000 jina54

Operating instructions bus module jiqb10

Operating instructions I/O module jiqc10

Operating instructions XL sniffer adapter jinxa54

Interface protocols jira54

Imminent threat resulting in death or serious injuries

Hazardous situation resulting in potential death or serious injuries

Hazardous situation resulting in minor injuries

Hazardous situation resulting in damage to property or the environment

Marking Meaning

Requirement for execution of an action

Tool or aid for an action

About these instructions 7

►Instruction

1, 2, 3, ... Several instructions in a fixed order

Result of an action

Marking Meaning

8Safety

2Safety

2.1 Intended use

The unit is a modular leak detector for installation in industrial leak detection sys-

tems. The test gases that can be measured with the unit are helium and hydrogen

(forming gas).

The unit is suitable for pressure and vacuum testing. The unit is used for integral test-

ing in a vacuum and for local testing with a sniffer line.

►You must install, operate and service the device only in compliance with these op-

erating instructions.

►Adhere to the restrictions of use (see chapter 4.3, page 16 ).

Unauthorized use ►Do not suck up liquids with the device.

►Avoid the following, non-intended uses of the turbo molecular pump:

– Pumping corrosive of explosive media,

– Pumping condensing steam or fumes,

– Operation with excessive gas loads,

– Operation with excessive foreline pressure,

– Operation in incorrect gas mode,

– Operation with an excessive irradiated heat output,

– Flushing with excessive flushing rate,

– Usage of the device in radioactive areas,

– Usage of the pumps in plants where sudden loads and vibrations or periodic

forces act upon the pump.

2.2 Owner requirements

Safety conscious operation

►Operate and install the unit only in technically perfect working order and as spec-

ified, in a safety-conscious and hazard-conscious manner and in compliance with

these instructions.

►Fulfill and ensure compliance with the following regulations:

– Intended use

– Universally valid safety and accident prevention regulations

– International, national and local standards and guidelines

– Additional device-related provisions and regulations

►Use only original parts or parts approved by the manufacturer.

►Keep this manual available at the operating site.

Safety 9

Personnel qualifications

►All work must be performed only by technically qualified specialists who have

been trained on the unit.

►Allow personnel in training to work on the unit only under the supervision of tech-

nically qualified specialists.

►Make sure that the authorized personnel have read and understood these instruc-

tions and all other applicable documents (see chapter 1.2, page 6), especially the

information on safety, maintenance and repairs, before starting work.

►Define responsibilities, authorizations and supervision of personnel.

2.3 Operator requirements

►Read, observe and follow the information in these instructions and the working in-

structions created by the owner, especially the safety instructions and warnings.

2.4 General safety information

The device was built according to the state of the art and the recognized safety reg-

ulations. Nevertheless, improper use may result in risk to life and limb on the part of

the user or third parties, or damage to the unit or other property may occur.

Electric power

The device is operated with electrical voltages of up to 24 V. Inside the unit there are

voltages that are considerably higher. Touching parts where electrical voltage is

present can result in death.

►Disconnect the unit from the power supply prior to any installation and mainte-

nance work.

Touching live parts with the sniffer probe can result in death.

►Before starting the leak test, disconnect electrically operated test objects from the

power supply.

The device contains electric components that can be damaged from high electric

voltage.

►Before connecting the unit to the power supply, make sure that the supply voltage

is 24V+/-10%.

Liquids and chemical substances

Liquids and chemical substances can damage the device.

►Comply with the limits of application (see chapter 4.3, page 16).

►Do not suck up liquids with the device.

►Keep the hydrogen concentration below 5 % to prevent ignition.

Permanent magnets

Permanent magnets in the unit pose a hazard to health.

►Keep a sufficient distance from the unit.

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