entegris NT Manuel utilisateur
P/N 1088 | REV. C 07/23
NT®Pressure Transducer
for Vacuum Applications
User Guide
NT PRESSURE TRANSDUCER FOR VACUUM APPLICATIONS
1Entegris, Inc. | User Guide
Table of Contents
Introduction .................................. 2
Ordering Information .................. 3
Identifying Nonstandard
Product Configurations ............ 5
Installation ..................................... 6
Mechanical Installation ............ 6
Electrical Installation ................. 7
Power Supply
Requirements ............................. 8
Load Resistance:
Current Output .......................... 9
Unit Operation ............................ 10
Operating Environment ......... 10
Process Connections ............. 10
Pressure Transducer
Cover Assembly ....................... 10
Temperature
Requirements ........................... 10
Pressure Limits ......................... 10
Pressure Reference
Accuracy .................................... 10
Linear Output Signal ............... 11
Troubleshooting ......................... 12
Reference ..................................... 13
Physical Specifications ........... 13
Electrical Specifications ......... 13
Performance
Specifications ........................... 13
Certifications ............................... 14
CE Compliance ........................ 14
Installation Drawings .................. 15
For More Information ................. 21
Terms and Conditions of Sale .... 21
Limited Warranty .......................... 21
NT PRESSURE TRANSDUCER FOR VACUUM APPLICATIONS
2Entegris, Inc. | User Guide
Introduction
This manual is for use with NT®
Pressure Transducers for vacuum
applications, single-port and
flow-through models 4150 and 4250.
These instruments have been
designed for use in high purity
applications in the semiconductor
industry and are compatible with
highly corrosive processes.
These products feature no moving
parts and no filled cavities, which
reduces the possibility of a contami-
nated process. The wetted parts of
these nonmetallic transducers are
constructed with PTFE, sapphire or
other similar high purity inert
materials.
NT PRESSURE TRANSDUCER FOR VACUUM APPLICATIONS
3User Guide | Entegris, Inc.
Ordering Information
CODE BASE MODEL
4150 Single-Port Vacuum Pressure Transducer
CODE PRESSURE RANGE
030V -12 to 30 psig (-83 to 207 kPa)
060V -12 to 60 psig (-83 to 414 kPa)
100V -12 to 100 psig (-83 to 690 kPa)
CODE INLET/OUTLET PORT CONNECTION TYPE
F02 ⁄” Flaretek®
F03 ⁄” Flaretek
F04 ⁄” Flaretek
N02 ⁄” FNPT
N04 ⁄” FNPT
M02 ⁄” MNPT
CODE ELECTRICAL CONNECTOR TYPE
B06 FEP-jacketed 6’ pigtail electrical cable
B12 FEP-jacketed 12’ pigtail electrical cable
B30 FEP-jacketed 30’ pigtail electrical cable
D00 3-pin polypropylene connector
D06 3-pin polypropylene connector and 6’ PVC-jacketed mating cable
D12 3-pin polypropylene connector and 12’ PVC-jacketed mating cable
D30 3-pin polypropylene connector and 30’ PVC-jacketed mating cable
CODE ELECTRICAL OUTPUTS
A4-20 mA (12-28 VDC input)
CODE PRIMARY/SECONDARY SEAL
U3 Perfrez PXC Ultra/Viton
S3 Perfrez PXC Ultra/Perfrez PXC Ultra
NT PRESSURE TRANSDUCER FOR VACUUM APPLICATIONS
4Entegris, Inc. | User Guide
CODE BASE MODEL
4250 Flow-Through Vacuum Pressure Transducer
CODE PRESSURE RANGE
030V -12 to 30 psig (-83 to 207 kPa)
060V -12 to 60 psig (-83 to 414 kPa)
100V -12 to 100 psig (-83 to 650 kPa)
CODE INLET/OUTLET PORT CONNECTION TYPE
F02 ⁄” Flaretek
F03 ⁄” Flaretek
F04 ⁄” Flaretek
F06 ⁄” Flaretek
F08 1” Flaretek (030G, 060G types only)
CODE ELECTRICAL CONNECTOR TYPE
B06 FEP-jacketed 6’ pigtail electrical cable
B12 FEP-jacketed 12’ pigtail electrical cable
B30 FEP-jacketed 30’ pigtail electrical cable
D00 3-pin polypropylene connector
D06 3-pin polypropylene connector and 6’ PVC-jacketed mating cable
D12 3-pin polypropylene connector and 12’ PVC-jacketed mating cable
D30 3-pin polypropylene connector and 30’ PVC-jacketed mating cable
CODE ELECTRICAL OUTPUTS
A4-20 mA (12-28 VDC input)
CODE PRIMARY/SECONDARY SEAL
U3 Perfrez PXC Ultra/Viton
S3 Perfrez PXC Ultra/Perfrez PXC Ultra
NT PRESSURE TRANSDUCER FOR VACUUM APPLICATIONS
5User Guide | Entegris, Inc.
IDENTIFYING NONSTANDARD
PRODUCT CONFIGURATIONS
This User Guide applies to product
manufactured as standard NT
Pressure Transducers single-port
and flow-through models 4150 and
4250. Entegris also manufactures
nonstandard product to meet the
needs of specific applications.
Nonstandard product may have
dierent materials of construction,
accuracy specifications, performance
and other specifications that dieren-
tiate the nonstandard product from
the standard oering.
NOTE: Nonstandard pressure transduc-
ers may be identified by the model
number found on the product label.
Nonstandard single-port pressure
transducers, model 4150 product
line, are identified with a “P” followed
by a number code.
For example, part number
4150-030V-F02-B06-A-P04
the “P04” designates the product as
a nonstandard product manufactured
to certain specifications designated
under the “P04” code.
Nonstandard flow-through pressure
transducers, model 4250 product
line, are identified with a “T” followed
by a number code.
For example, part number
4250-030V-F02-B06-A-T02
the “T02” designates the product as
a nonstandard product manufactured
to certain specifications designated
under the “T02” code.
NT PRESSURE TRANSDUCER FOR VACUUM APPLICATIONS
6Entegris, Inc. | User Guide
Installation
CAUTION! The NT Pressure
Transducer has been factory
sealed. Do not attempt to remove
the coverof the pressure trans-
ducer. Any attempt at removal
of the pressure transducer cover
will void the warranty and damage
the unit.
CAUTION! Do not tighten the
nuts that protect the process
connections during shipment.
Do not tighten the nuts unless
the proper tubing has been
installed. Tightening these
nuts may result in damage to
the pressure transducer process
connections.
MECHANICAL INSTALLATION
NT Pressure Transducers utilize
Flaretek®flared tube connections
and must be used with the proper
tubing size and coupling nut.
When installing flared tubing to the
pressure transducer, the flared tube
is pushed over the transducer’s fitting
until the fitting reaches the smaller
tube diameter. The amount of torque
required to tighten the coupling nut
is dependent upon the size of the
fitting.
Fitting size 11⁄44"33⁄88"11⁄22"33⁄44" 1"
Torque (in•lb) 5 8 11 14 30
Care should be taken when installing
flared tubing onto the pressure
transducer. Do not use excessive
torque or subject the transducer to
high heat during installation. The
transducer should be firmly mounted
to a solid surface to ensure stability.
Verify that the pressure transducer
and the signal cable are free from
mechanical stress or excessive
bending from the surrounding
equipment.
NT PRESSURE TRANSDUCER FOR VACUUM APPLICATIONS
7User Guide | Entegris, Inc.
ELECTRICAL INSTALLATION
The pressure transducer provides
an analog (4-20 mA) electrical
output proportional to the pressure
measured.
NOTE: The white wire is not required,
please refer to the wiring diagram
below.
Pressure transducer
4-20 mA output version
+24 VDCGND
RED
WHITE
BLACK4-20 mA pressure signal
no connection
display
or PLC
NT PRESSURE TRANSDUCER FOR VACUUM APPLICATIONS
8Entegris, Inc. | User Guide
POWER SUPPLY REQUIREMENTS
The pressure transducer requires a
12-28 volt DC power supply with less
than 2% ripple at 100 or 120 Hz. The
required power supply voltage varies
with the load resistance (RLoad),
please refer to the diagrams below
and the formulas on page 9.
The power supply must provide clean
power and must be used only to
power similar measurement-type
devices. The power supply must not
be used to power inductive loads,
such as motors, relays or solenoids.
These devices may produce tran-
sients that may aect the pressure
transducer measurements when the
inductive device is powered-up or
powered down.
NOTE: Be sure to ground the shield of
the cable to local ground.
Figure 1. Power Required for a 4-20 mA Loop
800
0
12 24 28
RLoad(Ohms)
Operating
region
Power Supply Voltage
(VPS)
NT PRESSURE TRANSDUCER FOR VACUUM APPLICATIONS
9User Guide | Entegris, Inc.
LOAD RESISTANCE: CURRENT OUTPUT
(4-20 mA Configuration)
If a load resistor, RLoad, is used in series
with the current output, the value
of RLoad is dependent on the supply
voltage and the meter resistance
and is calculated from the following
formula.
where:
RLoad = maximum load resistance
(ohms)
VPS = power supply voltage (volts)
Rmeter = meter resistance (ohms)
(typically not used, therefore
Rmeter = 0)
Rwire = resistance of
interconnecting wire
RLoad = - (Rmeter +Rwire)
VPS - 12 V
0.020A
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