Entegris NT 4150 Manuel utilisateur

NT®PRESSURE TRANSDUCER

FOR VACUUM APPLICATIONS

User Guide

ENTEGRIS, INC.

Corporate Headquarters

3500 Lyman Boulevard

Chaska, Minnesota 55318 USA

Customer Service Tel. 763-502-0200

Toll Free 877-503-0200

Customer Service Fax 763-502-0300

www.entegris.com

www.entegrisfluidhandling.com

Entegris®and Flaretek®are registered trademarks of Entegris, Inc.

NT®is a registered trademark of NT International, an Entegris Company .

Kalrez®and Viton®are registered trademarks of DuPont Dow Elastomers.

Printed in USA

P/N 1088 (Rev B 07/04)

3960-1587MAX-0704

The materials integrity management company

ENTEGRIS, INC. Customer Service Tel. 763-502-0200 Customer Service Fax 763-502-0300 1

NT® PRESSURE TRANSDUCER USER GUIDE

Table of Contents

Introduction .................................. 2

Ordering Information .................. 3

Identifying Nonstandard

Product Configurations .......... 5

Installation .................................... 6

Mechanical Installation ............. 6

Electrical Installation ................ 7

Power Supply Requirements ..... 8

Load Resistance:

Current Output ....................... 9

Unit Operation ............................ 10

Operating Environment ........... 10

Process Connections ................ 10

Pressure Transducer

Cover Assembly ..................... 10

Temperature Requirements .... 10

Pressure Limits ......................... 10

Pressure Reference

Accuracy ................................ 10

Linear Output Signal ............... 11

Troubleshooting .......................... 12

Reference ..................................... 13

Physical Specifications ............ 13

Electrical Specifications ......... 13

Performance Specifications .... 13

Certifications .............................. 14

CE Compliance ......................... 14

Dimensions .................................. 15

Repair and Warranty Service .... 21

ENTEGRIS, INC. Customer Service Tel. 763-502-0200 Customer Service Fax 763-502-0300 3

NT® PRESSURE TRANSDUCER USER GUIDENT® PRESSURE TRANSDUCER USER GUIDE

2Customer Service Tel. 763-502-0200 Customer Service Fax 763-502-0300 ENTEGRIS, INC.

Introduction

This manual is for use with NT®

Pressure Transducers for vacuum

applications, single-port and flow-

through models 4150 and 4250.

These instruments have been

designed for use in high purity

applications in the semiconductor

industry and are compatible with

highly corrosive processes.

These products feature no moving

parts and no filled cavities, which

reduces the possibility of a contami-

nated process. The wetted parts of

these nonmetallic transducers are

constructed with PTFE, sapphire

or other similar high purity inert

materials.

Ordering Information

CODE BASE MODEL

4150 Single-Port Vacuum Pressure Transducer

CODE PRESSURE RANGE

030V -12 to 30 PSIG (-83 to 207 kPa)

060V -12 to 60 PSIG (-83 to 414 kPa)

100V -12 to 100 PSIG (-83 to 690 kPa)

CODE INLET/OUTLET PORT CONNECTION TYPE

F02 1/4″Flaretek®

F03 3/8″Flaretek®

F04 1/2″Flaretek®

N02 1/4″FNPT

N04 1/2″FNPT

M02 1/4″MNPT

CODE ELECTRICAL CONNECTOR TYPE

B06 FEP-jacketed 6′pigtail electrical cable

B12 FEP-jacketed 12′pigtail electrical cable

B30 FEP-jacketed 30′pigtail electrical cable

D00 3-pin polypropylene connector

D06 3-pin polypropylene connector and 6′PVC-jacketed mating cable

D12 3-pin polypropylene connector and 12′PVC-jacketed mating cable

D30 3-pin polypropylene connector and 30′PVC-jacketed mating cable

CODE ELECTRICAL OUTPUTS

A 4-20 mA (12-28 VDC input)

CODE PRIMARY/SECONDARY SEAL

U1 Kalrez® 4079/Viton® (default)

U2 Kalrez® 1050/Viton®

U3 Kalrez® 6375 UP/Viton®

S1 Kalrez® 4079/Kalrez® 4079

S2 Kalrez® 1050/Kalrez® 1050

S3 Kalrez® 6375 UP/Kalrez® 6375 UP

ENTEGRIS, INC. Customer Service Tel. 763-502-0200 Customer Service Fax 763-502-0300 3

NT® PRESSURE TRANSDUCER USER GUIDENT® PRESSURE TRANSDUCER USER GUIDE

2Customer Service Tel. 763-502-0200 Customer Service Fax 763-502-0300 ENTEGRIS, INC.

Introduction

This manual is for use with NT®

Pressure Transducers for vacuum

applications, single-port and flow-

through models 4150 and 4250.

These instruments have been

designed for use in high purity

applications in the semiconductor

industry and are compatible with

highly corrosive processes.

These products feature no moving

parts and no filled cavities, which

reduces the possibility of a contami-

nated process. The wetted parts of

these nonmetallic transducers are

constructed with PTFE, sapphire

or other similar high purity inert

materials.

Ordering Information

CODE BASE MODEL

4150 Single-Port Vacuum Pressure Transducer

CODE PRESSURE RANGE

030V -12 to 30 PSIG (-83 to 207 kPa)

060V -12 to 60 PSIG (-83 to 414 kPa)

100V -12 to 100 PSIG (-83 to 690 kPa)

CODE INLET/OUTLET PORT CONNECTION TYPE

F02 1/4″Flaretek®

F03 3/8″Flaretek®

F04 1/2″Flaretek®

N02 1/4″FNPT

N04 1/2″FNPT

M02 1/4″MNPT

CODE ELECTRICAL CONNECTOR TYPE

B06 FEP-jacketed 6′pigtail electrical cable

B12 FEP-jacketed 12′pigtail electrical cable

B30 FEP-jacketed 30′pigtail electrical cable

D00 3-pin polypropylene connector

D06 3-pin polypropylene connector and 6′PVC-jacketed mating cable

D12 3-pin polypropylene connector and 12′PVC-jacketed mating cable

D30 3-pin polypropylene connector and 30′PVC-jacketed mating cable

CODE ELECTRICAL OUTPUTS

A 4-20 mA (12-28 VDC input)

CODE PRIMARY/SECONDARY SEAL

U1 Kalrez® 4079/Viton® (default)

U2 Kalrez® 1050/Viton®

U3 Kalrez® 6375 UP/Viton®

S1 Kalrez® 4079/Kalrez® 4079

S2 Kalrez® 1050/Kalrez® 1050

S3 Kalrez® 6375 UP/Kalrez® 6375 UP

ENTEGRIS, INC. Customer Service Tel. 763-502-0200 Customer Service Fax 763-502-0300 5

NT® PRESSURE TRANSDUCER USER GUIDENT® PRESSURE TRANSDUCER USER GUIDE

4Customer Service Tel. 763-502-0200 Customer Service Fax 763-502-0300 ENTEGRIS, INC.

Identifying Nonstandard

Product Configurations

CODE BASE MODEL

4250 Flow-Through Vacuum Pressure Transducer

CODE PRESSURE RANGE

030V -12 to 30 PSIG (-83 to 207 kPa)

060V -12 to 60 PSIG (-83 to 414 kPa)

100V -12 to 100 PSIG (-83 to 650 kPa)

CODE INLET/OUTLET PORT CONNECTION TYPE

F02 1/4″Flaretek®

F03 3/8″Flaretek®

F04 1/2″Flaretek®

F06 3/4″Flaretek®

F08 1″Flaretek® (030G, 060G types only)

CODE ELECTRICAL CONNECTOR TYPE

B06 FEP-jacketed 6′pigtail electrical cable

B12 FEP-jacketed 12′pigtail electrical cable

B30 FEP-jacketed 30′pigtail electrical cable

D00 3-pin polypropylene connector

D06 3-pin polypropylene connector and 6 ′PVC-jacketed mating cable

D12 3-pin polypropylene connector and 12′PVC-jacketed mating cable

D30 3-pin polypropylene connector and 30′PVC-jacketed mating cable

CODE ELECTRICAL OUTPUTS

A 4-20 mA (12-28 VDC input)

CODE PRIMARY/SECONDARY SEAL

U1 Kalrez® 4079/Viton® (default)

U2 Kalrez® 1050/Viton®

U3 Kalrez® 6375 UP/Viton®

S1 Kalrez® 4079/Kalrez® 4079

S2 Kalrez® 1050/Kalrez® 1050

S3 Kalrez® 6375 UP/Kalrez® 6375 UP

This User Guide applies to product

manufactured as standard NT®

Pressure Transducers single-port

and flow-through models 4150 and

4250. Entegris also manufactures

nonstandard product to meet the

needs of specific applications.

Nonstandard product may have

different materials of construction,

accuracy specifications, performance

and other specifications that differ-

entiate the nonstandard product

from the standard offering.

NOTE: Nonstandard pressure

transducers may be identified by

the model number found on the

product label.

Nonstandard single-port pressure

transducers, model 4150 product

line, are identified with a “P” fol-

lowed by a number code.

For example, part number

4150-030V-F02-B06-A-P04

the “P04” designates the product as a

nonstandard product manufactured

to certain specifications designated

under the “P04”code.

Nonstandard flow-through pressure

transducers, model 4250 product

line, are identified with a “T” fol-

lowed by a number code.

For example, part number

4250-030V-F02-B06-A-T02

the “T02” designates the product as a

nonstandard product manufactured

to certain specifications designated

under the “T02” code.

ENTEGRIS, INC. Customer Service Tel. 763-502-0200 Customer Service Fax 763-502-0300 5

NT® PRESSURE TRANSDUCER USER GUIDENT® PRESSURE TRANSDUCER USER GUIDE

4Customer Service Tel. 763-502-0200 Customer Service Fax 763-502-0300 ENTEGRIS, INC.

Identifying Nonstandard

Product Configurations

CODE BASE MODEL

4250 Flow-Through Vacuum Pressure Transducer

CODE PRESSURE RANGE

030V -12 to 30 PSIG (-83 to 207 kPa)

060V -12 to 60 PSIG (-83 to 414 kPa)

100V -12 to 100 PSIG (-83 to 650 kPa)

CODE INLET/OUTLET PORT CONNECTION TYPE

F02 1/4″Flaretek®

F03 3/8″Flaretek®

F04 1/2″Flaretek®

F06 3/4″Flaretek®

F08 1″Flaretek® (030G, 060G types only)

CODE ELECTRICAL CONNECTOR TYPE

B06 FEP-jacketed 6′pigtail electrical cable

B12 FEP-jacketed 12′pigtail electrical cable

B30 FEP-jacketed 30′pigtail electrical cable

D00 3-pin polypropylene connector

D06 3-pin polypropylene connector and 6 ′PVC-jacketed mating cable

D12 3-pin polypropylene connector and 12′PVC-jacketed mating cable

D30 3-pin polypropylene connector and 30′PVC-jacketed mating cable

CODE ELECTRICAL OUTPUTS

A 4-20 mA (12-28 VDC input)

CODE PRIMARY/SECONDARY SEAL

U1 Kalrez® 4079/Viton® (default)

U2 Kalrez® 1050/Viton®

U3 Kalrez® 6375 UP/Viton®

S1 Kalrez® 4079/Kalrez® 4079

S2 Kalrez® 1050/Kalrez® 1050

S3 Kalrez® 6375 UP/Kalrez® 6375 UP

This User Guide applies to product

manufactured as standard NT®

Pressure Transducers single-port

and flow-through models 4150 and

4250. Entegris also manufactures

nonstandard product to meet the

needs of specific applications.

Nonstandard product may have

different materials of construction,

accuracy specifications, performance

and other specifications that differ-

entiate the nonstandard product

from the standard offering.

NOTE: Nonstandard pressure

transducers may be identified by

the model number found on the

product label.

Nonstandard single-port pressure

transducers, model 4150 product

line, are identified with a “P” fol-

lowed by a number code.

For example, part number

4150-030V-F02-B06-A-P04

the “P04” designates the product as a

nonstandard product manufactured

to certain specifications designated

under the “P04”code.

Nonstandard flow-through pressure

transducers, model 4250 product

line, are identified with a “T” fol-

lowed by a number code.

For example, part number

4250-030V-F02-B06-A-T02

the “T02” designates the product as a

nonstandard product manufactured

to certain specifications designated

under the “T02” code.

NT® PRESSURE TRANSDUCER USER GUIDE

6Customer Service Tel. 763-502-0200 Customer Service Fax 763-502-0300 ENTEGRIS, INC. ENTEGRIS, INC. Customer Service Tel. 763-502-0200 Customer Service Fax 763-502-0300 7

NT® PRESSURE TRANSDUCER USER GUIDE

CAUTION!

The NT® Pressure Transducer

has been factory sealed. Do not

attempt to remove the cover

of the pressure transducer. Any

attempt at removal of the

pressure transducer cover will

void the warranty and damage

the unit.

CAUTION!

Do not tighten the nuts that

protect the process connections

during shipment. Do not tighten

the nuts unless the proper

tubing has been installed.

Tightening these nuts may result

in damage to the pressure trans-

ducer process connections.

Installation Electrical Installation

The pressure transducer provides

an analog (4-20 mA) electrical

output proportional to the pressure

measured.

NOTE: The white wire is not

required, please refer to the

wiring diagram below.

Pressure transducer

4-20 mA output version

+24 VDC GND

RED

WHITE

BLACK 4-20 mA pressure signal

no connection

display

or PLC

Mechanical Installation

NT®Pressure Transducers utilize

Flaretek®flared tube connections

and must be used with the proper

tubing size and coupling nut.

When installing flared tubing to the

pressure transducer, the flared tube

is pushed over the transducer’s

fitting until the fitting reaches the

smaller tube diameter. The amount

of torque required to tighten the

coupling nut is dependent upon the

size of the fitting.

Care should be taken when installing

flared tubing onto the pressure

transducer. Do not use excessive

torque or subject the transducer to

high heat during installation. The

transducer should be firmly mounted

to a solid surface to ensure stability.

Verify that the pressure transducer

and the signal cable are free from

mechanical stress or excessive bend-

ing from the surrounding equipment.

FITTING SIZE 1/4˝ 3/8˝ 1/2˝ 3/4˝ 1˝

Torque (in•lbs) 5 8 11 14 30

NT® PRESSURE TRANSDUCER USER GUIDE

6Customer Service Tel. 763-502-0200 Customer Service Fax 763-502-0300 ENTEGRIS, INC. ENTEGRIS, INC. Customer Service Tel. 763-502-0200 Customer Service Fax 763-502-0300 7

NT® PRESSURE TRANSDUCER USER GUIDE

CAUTION!

The NT® Pressure Transducer

has been factory sealed. Do not

attempt to remove the cover

of the pressure transducer. Any

attempt at removal of the

pressure transducer cover will

void the warranty and damage

the unit.

CAUTION!

Do not tighten the nuts that

protect the process connections

during shipment. Do not tighten

the nuts unless the proper

tubing has been installed.

Tightening these nuts may result

in damage to the pressure trans-

ducer process connections.

Installation Electrical Installation

The pressure transducer provides

an analog (4-20 mA) electrical

output proportional to the pressure

measured.

NOTE: The white wire is not

required, please refer to the

wiring diagram below.

Pressure transducer

4-20 mA output version

+24 VDC GND

RED

WHITE

BLACK 4-20 mA pressure signal

no connection

display

or PLC

Mechanical Installation

NT®Pressure Transducers utilize

Flaretek®flared tube connections

and must be used with the proper

tubing size and coupling nut.

When installing flared tubing to the

pressure transducer, the flared tube

is pushed over the transducer’s

fitting until the fitting reaches the

smaller tube diameter. The amount

of torque required to tighten the

coupling nut is dependent upon the

size of the fitting.

Care should be taken when installing

flared tubing onto the pressure

transducer. Do not use excessive

torque or subject the transducer to

high heat during installation. The

transducer should be firmly mounted

to a solid surface to ensure stability.

Verify that the pressure transducer

and the signal cable are free from

mechanical stress or excessive bend-

ing from the surrounding equipment.

FITTING SIZE 1/4˝ 3/8˝ 1/2˝ 3/4˝ 1˝

Torque (in•lbs) 5 8 11 14 30

NT® PRESSURE TRANSDUCER USER GUIDE

8Customer Service Tel. 763-502-0200 Customer Service Fax 763-502-0300 ENTEGRIS, INC. ENTEGRIS, INC. Customer Service Tel. 763-502-0200 Customer Service Fax 763-502-0300 9

NT® PRESSURE TRANSDUCER USER GUIDE

Power Supply Requirements

Figure 1. Power Required for a 4-20 mA Loop

Load Resistance: Current Output

(4-20 mA Configuration)

If a load resistor, RLoad, is used in

series with the current output, the

value of RLoad is dependent on the

supply voltage and the meter resis-

tance and is calculated from the

following formula.

where:

RLoad = maximum load

resistance (ohms)

VPS = power supply voltage (volts)

Rmeter = meter resistance (ohms)

(typically not used, therefore Rmeter = 0)

Rwire = resistance of

interconnecting wire

RLoad = - (Rmeter + Rwire)

VPS - 12 V

0.020A

Operating

region

Power Supply Voltage

(VPS)

12 24 28

800

The pressure transducer requires a

12-28 volt DC power supply with less

than 2% ripple at 100 or 120 Hz. The

required power supply voltage varies

with the load resistance (RLoad),

please refer to the diagrams below

and the formulas on page 9.

The power supply must provide

clean power and must be used only

to power similar measurement-type

devices. The power supply must not

be used to power inductive loads,

such as motors, relays or solenoids.

These devices may produce tran-

sients that may affect the pressure

transducer measurements when the

inductive device is powered-up or

powered down.

NOTE: Be sure to ground the

shield of the cable to local ground.

NT® PRESSURE TRANSDUCER USER GUIDE

8Customer Service Tel. 763-502-0200 Customer Service Fax 763-502-0300 ENTEGRIS, INC. ENTEGRIS, INC. Customer Service Tel. 763-502-0200 Customer Service Fax 763-502-0300 9

NT® PRESSURE TRANSDUCER USER GUIDE

Power Supply Requirements

Figure 1. Power Required for a 4-20 mA Loop

Load Resistance: Current Output

(4-20 mA Configuration)

If a load resistor, RLoad, is used in

series with the current output, the

value of RLoad is dependent on the

supply voltage and the meter resis-

tance and is calculated from the

following formula.

where:

RLoad = maximum load

resistance (ohms)

VPS = power supply voltage (volts)

Rmeter = meter resistance (ohms)

(typically not used, therefore Rmeter = 0)

Rwire = resistance of

interconnecting wire

RLoad = - (Rmeter + Rwire)

VPS - 12 V

0.020A

Operating

region

Power Supply Voltage

(VPS)

12 24 28

800

The pressure transducer requires a

12-28 volt DC power supply with less

than 2% ripple at 100 or 120 Hz. The

required power supply voltage varies

with the load resistance (RLoad),

please refer to the diagrams below

and the formulas on page 9.

The power supply must provide

clean power and must be used only

to power similar measurement-type

devices. The power supply must not

be used to power inductive loads,

such as motors, relays or solenoids.

These devices may produce tran-

sients that may affect the pressure

transducer measurements when the

inductive device is powered-up or

powered down.

NOTE: Be sure to ground the

shield of the cable to local ground.

Ce manuel convient aux modèles suivants

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