Agilent Technologies 5530 Manuel utilisateur

Agilent 5530 Dynamic Calibrator

Measurements

Reference Guide

Agilent 5530 Dynamic Calibrator

Measurements

Reference Guide

Agilent Technologies, Inc. 7.CD.L.03.11.97.R1.J.CW1FL

Santa Clara Site

5301 Stevens Creek Boulevard

Santa Clara, California 95052-8059

©Copyright Agilent

Technologies, Inc. 1992, 1996,

2000, 2001, 2008

Reproduction, adaptation, or

translations without prior

written permission is

prohibited, except as allowed

under the copyright laws.

Printed: October 2008

Printed in USA

Manual part number

10747-90077

Certification

and Warranty

Certification

Agilent Technologies, Inc.

certifies that this product met

its published specification at the

time of shipment from the

factory. Agilent further certifies

that its calibration

measurements are traceable to

national standards

administered by the U. S. NIST,

NRC Canada, Euromet

members (NPL, PTB, BNM,

etc.) or other recognized

standards laboratories.

Warranty

Agilent warrants Agilent

hardware, accessories and

supplies against defects in

materials and workmanship for

a period specified by each

product from date of shipment.

If Agilent receives notice of such

defects during the warranty

period, Agilent will, at its

option, either repair or replace

products which prove to be

defective. Replacement products

may be either new or like-new.

Agilent warrants that

Agilent software will not fail to

execute its programming

instructions, for the period

specified above, due to defects in

material and workmanship

when properly installed and

used.

If Agilent receives notice of such

defects during the warranty

period, Agilent will replace

software media which does not

execute its programming

instructions due to such defects.

For detailed warranty

information, see back matter.

Safety Considerations

General

This product and related

documentation must be

reviewed for familiarization

with this safety markings and

instructions before operation.

This product is a safety Class I

instrument (provided with a

protective earth terminal).

Before Applying Power

Verify that the product is set to

match the available line voltage

and the correct fuse is installed.

Refer to instructions in Chapter

1 of the Manual.

Before Cleaning

Disconnect the product from

operating power before

cleaning.

Safety Earth Ground

An uninterruptible safety earth

ground must be provided from

the mains power source to the

product input wiring terminals

or supplied power cable.

Safety Considerations

(contd)

Warning Symbols That May

Be Used In This Book

Instruction manual symbol; the

product will be marked with

this symbol when it is necessary

for the user to refer to the

instruction manual.

Indicates hazardous voltages.

Indicates earth (ground)

terminal.

Indicates terminal is connected

to chassis when such connection

is not apparent.

Indicates Alternating

current.

Indicates Direct current.

Safety Considerations

(contd)

WARNING

BODILY INJURY OR DEATH

MAY RESULT FROM

FAILURE TO HEED A

WARNING. DO NOT

PROCEED BEYOND A

WARNING UNTIL THE

INDICATED CONDITIONS

ARE FULLY UNDERSTOOD

AND MET.

CAUTION

Damage to equipment, or

incorrect measurement data,

may result from failure to

heed a caution. Do not

proceed beyond a CAUTION

until the indicated conditions

are fully understood and met.

These CAUTION labels are

required by the United States

Center for Devices and

Radiological Health. Failure to

follow their instructions may

result in personal injury.

This symbol indicates laser

radiation

For additional safety and

acoustic noise information, see

back matter.

CONTINOUS WAVE 1mW 670nm

CLASS II LASER PRODUCT

LASER RADIATION-DO NOT

STARE INTO BEAM

CAUTION

Contents

Measurements Reference Guide iii

About This Guide

1 Planning Your Measurements

Introduction 1-2

Measurement Planning Guidelines 1-2

Planning and Storing a Calibration Program 1-4

Coordinating Multiple Types of Measurements 1-4

Triggering Options 1-5

Record button 5

Auto 5

Encoder 6

Using Online Help 1-7

2 Linear Measurements

Introduction 2-2

Setting Up for the Measurement 2-3

Placing and Using the Sensors 2-6

Mounting and Aligning the Optics on the Target

Machine 2-9

Mounting the optics 9

Aligning the optics 20

Aligning the Laser Beam to the Machine’s Travel Path

for Long-Range Measurements 2-23

Aligning the Laser Beam to the Machine’s Travel Path

for Short-Range Measurements 2-25

Making the Measurement 2-26

3 Timebase Measurements

Introduction 3-2

Setting Up for the Measurement 3-3

Contents

iv Measurements Reference Guide

Mounting and Aligning the Optics on the Target

Machine 3-7

Aligning the Laser Beam to the Machine’s Travel

Path 3-7

Making the Measurement 3-8

Analyzing Timebase Measurement Data 3-13

Displaying timebase measurement data 14

Understanding timebase measurement data 17

4 Angular Measurements

Introduction 4-2

Setting Up for a Pitch or Yaw Measurement 4-4

Mounting and Aligning the Optics on the Target

Machine 4-6

Mounting the optics 6

Aligning the optics 16

Aligning the Laser Beam to the Machine’s Travel Path

for Long-Range Measurements 4-19

Aligning the Laser Beam to the Machine’s Travel Path

for Short-Range Measurements 4-20

Making the Measurement 4-20

Angular Position Measurements 4-24

Principles of operation 25

Procedure — summary 31

Programming the machine to be calibrated 32

Initial setup of computer and laser head 35

Mounting and aligning the precision index table on the

target machine 37

Mounting and aligning on a rotary table 37

Mounting and aligning on a machining center 39

Choosing the moveable optic 42

Mounting the moveable optic 42

Creating the control link 45

Contents

Measurements Reference Guide v

Taking care of the measurement fixture’s clutch 45

For parallel spindle and table axes 47

For right-angle spindle and table axes 50

Mounting the fixed optic 54

Aligning the laser beam 56

Checking your installation 60

To set the machine’s relative zero point for your

measurement 60

To perform final optics alignment and integrity

check 61

Controlling the machine during the measurement 62

Manually stepping through the machine control

program 62

Running the machine control program 63

Making the measurement 63

Storing the hardware 67

Maintenance 67

Precision index table 67

Clutch 68

Clutch breakaway nut 71

5 Straightness Measurements

Introduction 5-2

Setting Up for the Measurement 5-4

Positioning the Laser Head and Target Machine 5-5

Positioning optics for X-axis and Y-axis measurements 6

Positioning optics for vertical Z-Axis measurements 7

Positioning optics for horizontal Z-axis measurements 8

Mounting and Aligning Optics for X-Axis or Y-Axis

Measurements 5-10

Mounting the optics 10

Aligning the optics 14

Making Vertical Axis Straightness Measurements 5-17

Contents

vi Measurements Reference Guide

Aligning the Laser Beam to the Machine’s Travel

Path 5-22

Checking the Alignment for Beam Strength 5-24

Making the Measurement 5-25

6 Squareness Measurements in a Horizontal

Plane

Introduction 6-2

Setting Up for the Measurement 6-4

Positioning the Laser Head and Target Machine 6-6

Mounting and Aligning the Optical Square and

Interferometer for the First Axis Measurement 6-10

Mounting and aligning optics on a machine with a vertical

spindle 10

Mounting the optics 10

Aligning the optics 12

Mounting and aligning optics on a machine with a

horizontal spindle 14

Mounting the optics 14

Aligning the optics 15

Aligning the Laser Beam to the Machine’s Travel Path

for the First Axis Measurement 6-16

Mounting and Aligning the Reflector for the First Axis

Measurement 6-17

Mounting the reflector 17

Aligning the reflector 17

Checking the Alignment for Beam Strength for the First

Axis Measurement 6-20

Making the First Axis Measurement 6-20

Mounting and Aligning Optics for the Second Axis

Measurement 6-24

Aligning the Laser Beam to the Machine’s Travel Path

for the Second Axis Measurement 6-26

Contents

Measurements Reference Guide vii

Checking the Alignment for Beam Strength for the

Second Axis Measurement 6-27

Making the Second Axis Measurement 6-27

7 Squareness Measurements in a Vertical Plane

Introduction 7-2

Setting Up for the Measurement 7-4

Positioning the Laser Head and Target Machine 7-6

Mounting and Aligning the Optics for the First Axis

Measurement 7-7

Aligning the Laser Beam to the Machine’s Travel Path

for the First Axis Measurement 7-9

Checking the Alignment for Beam Strength for the First

Axis Measurement 7-9

Making the First Axis Measurement 7-9

Mounting and Aligning Optics for the Second Axis

Measurement 7-13

Mounting the optics 13

Aligning the optics 16

Aligning the Laser Beam to the Machine’s Travel Path

for the Second Axis Measurement 7-22

Checking the Alignment for Beam Strength for the

Second Axis Measurement 7-23

Making the Second Axis Measurement 7-24

8 Parallelism Measurements

Introduction 8-2

Setting Up for the Measurement 8-4

Positioning the Laser Head and Target Machine 8-6

Mounting and Aligning Optics for Coplanar Parallelism

Measurements 8-11

Mounting and Aligning Optics for Spindle Parallelism

Measurements 8-11

Contents

viii Measurements Reference Guide

Mounting the optics 11

Aligning the optics 13

Aligning the Laser Beam to the Machine’s Travel

Path 8-14

Checking the Alignment for Beam Strength 8-14

Making Spindle Parallelism Measurements 8-15

Making the first set of measurements 15

Making the second set of measurements 19

Making the third set of measurements 19

Making the fourth set of measurements 20

Calculating the total out-of-parallelism value 20

Making Coplanar Parallelism Measurements 8-20

Making the first axis measurement 21

Making the second axis measurement 22

9 Flatness Measurements

Introduction 9-2

Setting Up for the Measurement 9-4

Creating the measurement grid 5

Planning your measurement grid 6

Determining grid border requirements 6

Choosing a foot spacer 7

Drawing the perimeter lines of the measurement

grid 10

Drawing the internal measurement lines 12

Assembling and Mounting the Optics 9-13

Assembling the optics 13

Mounting the optics 17

Positioning the Laser Head 9-20

Aligning the Optics 9-22

Aligning the optics if you are not using flatness

mirrors 23

Aligning the optics if you are using flatness mirrors 24

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