Agilent Technologies B1500A Guide d'installation

Agilent Technologies

Agilent B1500A

Semiconductor Device

Analyzer

Self-paced Training Manual, 1

Notices

No part of this manual may be reproduced

in any form or by any means (including

electronic storage and retrieval or transla-

tion into a foreign language) without prior

agreement and written consent from Agi-

lent Technologies, Inc. as governed by

United States and international copyright

laws.

Manual Part Number

B1500-90040

Edition

Edition 1, September 2005

Edition 2, May 2006

Edition 3, January 2007

Edition 4, June 2007

Edition 5, February 2008

Agilent Technologies

5301 Stevens Creek Blvd

Santa Clara, CA 95051 USA

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In This Manual

This document is the self-paced training manual to help you to understand what is Agilent

B1500A, what functions the B1500A has, how to use the B1500A, and what applications

the B1500A contributes to.

CAUTION The test setup data described in this manual are only examples. If these example data

damage your devices, Agilent is NOT LIABLE for the damage.

• Module 1. Introduction

This module explains the product concept and the key features of the B1500A/

EasyEXPERT. You will learn about what is the B1500A.

• Module 2. Getting Started

This module explains the basic operations of the B1500A. You will learn about how to

launch B1500A/EasyEXPERT and how to perform application test and quick test.

• Module 3. Data Display and Management

This module explains the data display and analysis capabilities of the EasyEXPERT

software. You will learn how to use analysis tools, how to change display setup, and

how to print/export test result data.

• Module 4. Classic Test Environment

This module explains the classic test mode of the EasyEXPERT. You will learn how to

create the classic test setup in the course exercises.

• Module 5. Basic Measurement

This module explains the basic I-V sweep measurement functionand the cabling and

fixturing issues. You will learn how to measure I-V curves in the course exercises.

• Module 6. Low Current Measurement

This module explains the low current measurement technique. You will learn how to

measure the low current in the course exercises.

• Module 7. Measurement Functions

This module explains the measurement functions available with the B1500A. You will

learn how to use various measurement functions in the course exercises.

• Module 8. Capacitance Measurement

This module explains the capacitance measurement function. You will learn how to

measure the capacitance in a course exercise.

• Module 9. Modifying Application Test Definitions

This module explains a modification example of an application test definition. You will

learn how to modify the definition in a course exercise.

• Module 10. Creating Your Test Definitions

This module explains about the application test definition. You will learn how to create

your application test definition in a course exercise.

• Module 11. Advanced Definitions and Operations

This module explains how to control external GPIB devices, how to call an execution

file, how to perform a repeat measurement, and how to use the prober control script.

• Module 12. Miscellaneous Operations

This module explains what is the status indicator, what is the automatic data export

function and the automatic data record function, how to perform selftest and

calibration, how to perform SMU zero offset cancel, and such.

• Module 13. SPGU Control and Applications

This module explains the SPGU Control classic test. You will learn how to create the

classic test setup and the applications using SPGU in the course exercises.

EasyEXPERT is a trademark of Agilent Technologies. All other trademarks are the

property of their respective owners.

Class Exercises

Class exercises use the test setup listed below. The test setup data are only examples and

included in the Demo.xpg file stored in the Manual CD-ROM.

Module Exercise Device Test setup/definition/data Page

Module 1 no exercise

Module 2 Id-Vd measurement MOSFET CMOS: Id-Vd 2-19, 27

Id-Vg, gm-Vg measurement MOSFET CMOS: Vth gmMax 2-19, 27

B2200/E5250 switch control - - 2-32

Module 3 Id-Vg, gm-Vg measurement MOSFET GMMAX.xtr 3-28

Using Preview window - - 3-31

Module 4 Id-Vd measurement MOSFET Trng Id-Vd 4-25

Multi Channel I/V Sweep

MeasurementBipolar Tr

LED Trng Multi 4-37

I/V List Sweep Measurement MOSFET Trng List 4-51

I/V-t sampling measurement 0.1 μFTrng Sampling 4-64

C-V sweep measurement MOSFET Trng CV 4-76

B2200/E5250 switch control -Trng Switch 4-81

Direct Control (C-f measurement) 0.1 μFTrng C-f 4-88

Module 5 Id-Vd measurement MOSFET IDVD, Id-Vd 5-7

SMU series connection 511 kohm IRVR 5-24

SMU parallel connection 1 ohm Parallel 5-28

Re measurement, kelvin connection Bipolar Tr REKELV 5-38

Module 6 Leak current measurement -Zero-check 6-9

Ultra low current measurement -Zero-check-ASU 6-19

Id-Vg measurement MOSFET IDVG 6-20

Gummel plot Bipolar Tr GUMMEL 6-25

Module 7 SMU pulse mode MOSFET IDVD-Pulse 7-8

RC measurement 0.1 μF and

511 kohm RC-sampling-log 7-16

Negative hold time 511 kohm R-sampl-neg-hold 7-22

Auto analysis MOSFET GMMAX 7-28

Bias hold function LED LED 7-35

SMU series resistor 511 kohm IV-res 7-43

NOTE Demo.xpg file

Demo.xpg file is required to create the Demo preset group which contains the test setup

data used by the class exercises. And it is stored in the \data folder on the Agilent B1500A

Manual CD-ROM, Edition 4 or later.

The Demo preset group should be created before starting the class exercise. To create the

preset group, launch EasyEXPERT and import the file by using the Preset Group Import

dialog box opened by clicking My Favorite Setup > Preset Group > Import Preset Group.

The test setup data are only examples for the class exercises.

NOTE .xtd files

The \data folder on the Manual CD-ROM stores some .xtd files. They are the application

test definitions used by some class exercises. To use the definition file, import the file by

using the Test Definition Import dialog box opened by clicking Library > Import Test

Definition. The test definition data are only examples for the class exercises.

NOTE .xtr files

The \data folder on the Manual CD-ROM stores some .xtr files. They are the sample test

results created by executing the test setup which has the same name as the result data. To

display these sample test results, import the files by using the Test Result Import dialog

box opened by clicking Results > Transport Data > Import.

Module 8 C-V sweep measurement MOSFET CV-1MHz 8-6

Module 9 Modifying application test

definition MOSFET Trng IdVd Vth.xtd 9-14

Trng idvd idvg2.xtd 9-32

Trng idvd idvg3.xtd 9-35

Using vector data MOSFET Trng Cgg-Vg 9-41

Module 10 Creating application test definition MOSFET Trng idvd idvg.xtd 10-17

Module 11 no exercise

Module 12 no exercise

Module 13 Charge pumping MOSFET Charge Pumping 4T 0.1V

step13-20

Flash memory MOSFET Demo-S-NorFlash

Endurance 13-29

ALWG output 511 kohm ALWG monitor 13-36

Module Exercise Device Test setup/definition/data Page

Test Setup for Class Exercises

The Demo preset group contains the following test setup. The setup data are only examples

for the class exercises. The following table lists the test setup name in alphabetical order.

Test Setup Name Description

ALWG monitor 511 kohm sampling measurement with SPGU ALWG output

Charge Pumping 4T

0.1V step MOSFET Icp-Vbase measurement

CV-1MHz MOSFET Cgs-Vg measurement

Demo-S-NorFlash

Endurance MOSFET Endurance test

Fowler-Nordheim Fowler-Nordheim (FN) plot

GMMAX MOSFET sqrt_Id-Vg, PEAK-Vg measurement

GUMMEL Bipolar transistor gummel plot

IDVD MOSFET Id-Vd measurement

IDVD-Pulse MOSFET pulsed Id-Vd measurement

Id-Vd MOSFET Id-Vd measurement, Application Test

IDVG MOSFET Id-Vg measurement

IRVR 511 kohm I-V measurement

IV-res 511 kohm I-V measurement with SMU series resistor

LED LED I-V measurement

Parallel 1 ohm I-V measurement, voltage force and current measurement

PG monitor 511 kohm sampling measurement with SPGU VPULSE output

RC-sampling-log RC sampling measurement, log sampling

REKELV Bipolar transistor Re measurement

R-sampl-neg-hold 511 kohm sampling measurement with negative hold time

Subthreshold MOSFET subthreshold measurement

Trng C-f Direct Control (C-f measurement)

Trng Cgg-Vg Modifying application test definition using vector data

Trng CV MOSFET C-V measurement

Trng Id-Vd MOSFET Id-Vd measurement

Trng List MOSFET Vth-gmmax measurement using I/V List Sweep

Trng Multi Multi Channel I/V Sweep (Bipolar transistor and LED)

Trng Sampling 0.1 μF sampling measurement

Trng Switch B2200/E5250 switch setup, Input 1-3-5-7 to Output 1-3-5-7

Zero-check SMU open measurement

Zero-check-ASU SMU open measurement with ASU

Test Setup Name Description

Required Devices for Class Exercises

To perform the class exercises, you need the device set (Agilent part number 04156-87001)

which contains the following devices.

Description Quantity

N-channel MOSFET 2 ea.

NPN Bipolar Transistor 1 ea.

Red Miniature LED 1 ea.

0.1 μF Capacitor 50 V 1 ea.

1.0 Ω Resistor 1/8 W 1 ea.

1.1 kΩResistor 1/8 W 1 ea.

511 kΩResistor 1/8 W 1 ea.

NPN bipolar TransistorN-ch MOSFET LED

1 ohm Resistor

Brown

Black

Silver

1.1 kohm Resistor

Brown

Black

Brown

511 kohm Resistor

Green

Brown

Orange

0.1 uF Capacitor

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