Agilent Technologies 4156b Manuel utilisateur

User’s Guide

Volume 2

Measurement and Analysis

Agilent 4155B Semiconductor Parameter Analyzer

Agilent 4156B Precision Semiconductor Parameter Analyzer

Agilent Part No. 04156-90200

Printed in Japan May 2000

Edition 5

Silicon Investigations

Repair Information - Contact Us

920-955-3693

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2 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5

Legal Notice

The information contained in this document is subject to change without notice.

This document contains information which is protected by copyright. All rights are

reserved. Reproduction, adaptation, or translation without prior written permission

is prohibited, except as allowed under the copyright laws.

•Product Warranty

Agilent Technologies warrants Agilent Technologies hardware, accessories and

supplies against defects in materials and workmanship for the period of one year

from the warranty start date specified below. If Agilent Technologies receives

notice of such defects during the warranty period, Agilent Technologies will, at

its option, either repair or replace products which prove to be defective.

Replacement products may be either new or like-new.

Warranty service of this product will be performed at Agilent Technologies.

Buyer shall prepay shipping charges to Agilent Technologies and Agilent

Technologies shall pay shipping charges to return the product to Buyer.

However, Buyer shall pay all shipping charges, duties, and taxes for products

returned to Agilent Technologies from another country.

Agilent Technologies does not warrant that the operation of Agilent

Technologies products will be uninterrupted or error free. If Agilent

Technologies is unable, within a reasonable time, to repair or replace any

product to a condition as warranted, customer will be entitled to a refund of the

purchase price upon prompt return of the product.

The Agilent Technologies products may contain remanufactured parts

equivalent to new in performance or may have been subject to incidental use.

The warranty period begins on the date of delivery or on the date of installation

if installed by Agilent Technologies. If customer schedules or delays Agilent

Technologies installation more than 30 days after delivery, warranty begins on

the 31st day from delivery.

Warranty does not apply to defects resulting from (a) improper or inadequate

maintenance or calibration, (b) software, interfacing, parts or supplies not

supplied by Agilent Technologies, (c) unauthorized modification or misuse, (d)

operation outside of the published environmental specifications for the product,

or (e) improper site preparation or maintenance.

Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 3

To the extent allowed by local law, the above warranties are exclusive and no

other warranty or condition, whether written or oral, is expressed or implied and

Agilent Technologies specifically disclaims any implied warranties or

conditions of merchantability, satisfactory quality, and fitness for a particular

purpose.

Agilent Technologies will be liable for damage to tangible property per incident

up to the greater of $300,000 or the actual amount paid for the product that is the

subject of the claim, and for damages for bodily injury or death, to the extent

that all such damages are determined by a court of competent jurisdiction to

have been directly caused by a defective Agilent Technologies product.

To the extent allowed by local law, the remedies in this warranty statement are

customer’s sole and exclusive remedies. Expect as indicated above, in no event

will Agilent Technologies or its suppliers be liable for loss of date or for direct,

special, incidental, consequential (including lost profit or date), or other damage,

whether based in contract, tort, or otherwise.

For consumer transactions in Australia and New Zealand: the warranty terms

contained in this statement, except to the extent lawfully permitted, do not

exclude, restrict or modify and are in addition to the mandatory statutory rights

applicable to the sale of this product to you.

•Assistance

Product maintenance agreements and other customer assistance agreements are

available for Agilent Technologies products.

For any assistance, contact your nearest Agilent Technologies Sales Office.

•Certification

Agilent Technologies, Inc. certifies that this product met its published

specifications at the time of shipment from the factory. Agilent Technologies

further certifies that its calibration measurements are traceable to the National

Institute of Standards and Technology (NIST), to the extent allowed by the

Institute’s calibration facility, and to the calibration facilities of other

International Standards Organization members.

4 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5

•Safety Summary

The following general safety precautions must be observed during all phases of

operation, service, and repair of this instrument. Failure to comply with these

precautions or with specific warnings elsewhere in this manual may impair the

protections provided by the equipment. In addition, it violates safety standards

of design, manufacture, and intended use of the instrument. Agilent

Technologies, Inc. assumes no liability for customer’s failure to comply with

these requirements.

NOTE Agilent 4155B/4156B/41501B comply with INSTALLATION CATEGORY II for

mains input and INSTALLATION CATEGORY I for measurement input terminals,

and POLLUTION DEGREE 2 defined in IEC 1010-1.

Agilent 4155B/4156B/41501B are INDOOR USE products.

NOTE LEDs in Agilent 4155B/4156B/41501B are Class 1 in accordance with IEC 825-1.

CLASS 1 LED PRODUCT.

•GROUND THE INSTRUMENT

This is Safety Class I instrument. To minimize shock hazard, the instrument

chassis and cabinet must be connected to an electrical ground. The power

terminal and the power cable must meet International Electrotechnical

Commission (IEC) safety standards.

•DO NOT OPERATE IN AN EXPLOSIVE ATMOSPHERE

Do not operate the instrument in the presence of flammable gases or fumes.

Operation of any electrical instrument in such an environment constitutes a

definite safety hazard.

•KEEP AWAY FROM LIVE CIRCUITS

Operation personnel must not remove instrument covers. Component

replacement and internal adjustments must be made by qualified

maintenance personnel. Do not replace components with power cable

connected. Under certain conditions, dangerous voltages may exist even

with the power cable removed. To avoid injuries, always disconnect power

and discharge circuits before touching them.

•DO NOT SERVICE OR ADJUST ALONE

Do not attempt internal service or adjustment unless another person, capable

of rendering first aid and resuscitation, is present.

Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 5

•DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT

Because of the danger of introducing additional hazards, do not install

substitute parts or perform any unauthorized modification to the instrument.

Return the instrument to a Agilent Technologies Sales and Service Office for

services and repair to ensure that safety features are maintained.

•DANGEROUS PROCEDURE WARNINGS

Warnings, such as example below, precede potentially dangerous procedures

throughout this manual. Instructions contained in the warnings must be

followed.

WARNING Dangerous Voltage, capable of causing death, are present in this instrument.

Use extreme caution when handling, testing, and adjusting.

•Safety Symbols

The general definitions of safety symbols used on equipment or in manuals are

listed below.

Instruction manual symbol: the product will be marked with this symbol when it

is necessary for the user to refer to the instruction manual in order to protect

against damage to the instrument.

Indicates dangerous voltage and potential for electrical shock. Do not touch

terminals that have this symbol when insrument is on.

Protective conductor terminal. For protection against electrical shock in case of

a fault. Used with field wiring terminals to indicate the terminal which must be

connected to ground before operating equipment.

Frame or chassis terminal. A connection to the frame (chassis) of the equipment

which normally includes all exposed metal structures.

Indicates earth (ground) terminal.

Alternating current.

Direct current.

ON (Supply).

6 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5

OFF (Supply).

STANDBY (Supply).

Means INSTALLATION CATEGORY I. Measurement terminals on the rear

panel comply with INSTALLATION CATEGORY I.

WARNING The warning sign denotes a hazard. It calls attention to a procedure, practice,

condition or the like, which, if not correctly performed or adhered to, could result in

injury or death to personal.

CAUTION The caution sign denotes a hazard. It calls attention to an operating procedure,

practice, condition or the like, which, if not correctly performed or adhered to, could

result in damage to or destruction of part or all of the product.

•Herstellerbescheinigung

GEÄUSCHEMISSION

Lpa < 70 dB

am Arbeitsplatz

normaler Betrieb

nach DIN 45635 T. 19

•Manufacturer’s Declaration

ACOUSTIC NOISE EMISSION

Lpa < 70dB

operator position

normal operation

per ISO 7779

CAT 1

Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 7

Printing History

Edition 1: August 1997

Edition 2: September 1997

Edition 3: October 1998

Edition 4: January 2000

Edition 5: May 2000

8 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5

In This Manual

This manual provides information for all parts and functions of Agilent

4155B/4156B, and consists of the following chapters:

•Measurement Units

This chapter provides information about the measurement units.

•Measurement Mode

This chapter provides information about sweep and sampling measurements.

•Measurement Functions

This chapter provides information about the measurement functions.

•Making a Measurement

This chapter describes how to perform measurements.

•Analyzing Measurement Results

This chapter describes how to analyze measurement results manually and

automatically.

•Screen Organization

This chapter provides information about each user interface that is displayed on

the instrument screen.

•Data Variable and Analysis Function

This chapter provides information about data variables and analysis functions.

•If You Have A Problem

This chapter provides problem-solving information that you may encounter.

Text Conventions

The following text conventions are used in this manual:

Screen Text Represents text that appears on screen of the 4155B/4156B.

Italic Refers to a related document, or is used for emphasis.

Contents

Agilent 4155B/4156B User’s Guide Vol.2, Edition 5 Contents - 1

1. Measurement Units

Ground Unit (GNDU) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3

Source/Monitor Unit (SMU) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4

Voltage Source Unit (VSU) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-16

Voltage Monitor Unit (VMU) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-17

Pulse Generator Unit (PGU) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-20

2. Measurement Mode

Sweep Measurement Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3

Basic Sweep Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4

Subordinate Sweep Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7

Synchronous Sweep Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9

Pulse Sweep Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11

Sampling Measurement Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-14

Available Units . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-14

Sampling Interval and Measurement Time . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-15

Sampling Measurement Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18

Sampling Completion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-20

Source Output Sequence and Time Origin . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-22

Linear Sampling Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-24

Thinned-out Sampling Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-27

Logarithmic Sampling Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-30

3. Measurement Functions

Stress Force Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3

Stress Output Channels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4

Stress Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6

Stress Force Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7

Stress Stop Function at Abnormal Status . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10

Contents - 2 Agilent 4155B/4156B User’s Guide Vol.2, Edition 5

Contents

Knob Sweep Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11

Available units and functions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11

Normal Sweep and Knob Sweep Measurements . . . . . . . . . . . . . . . . . . . . . . . 3-12

Features of Knob Sweep Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-13

KNOB SWEEP screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-16

Y-AXIS ASSIGN Softkey . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-17

SETUP COPY Softkey . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-17

DISPLAY SETUP Softkey . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18

VAR1 SETUP Softkey . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-20

VAR2 SETUP Softkey . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-23

CONST SETUP Softkey . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-25

Analysis of the Knob Sweep Measurement Results . . . . . . . . . . . . . . . . . . . . 3-26

Standby Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-27

Standby Channels. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-27

Standby State . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-27

Available Units and Output Values . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-28

Output Values of non-Standby Channels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-28

Output Sequence of Standby Channels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-29

When Getting Setup File . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-30

Operation States . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-31

Idle State. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-31

Measurement State. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-31

Stress Force State . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-32

Standby State . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-32

Changing among Operation States . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-32

Output Sequence . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-34

Sequential Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-35

Simultaneous Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-37

Trigger Function . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-39

Trigger Input . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-41

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