Sierra 830M Manuel utilisateur

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Sierra Series 830/840/860

Side-Trak™and Auto-Trak™

Mass Flow Meters and Controllers

Instruction Manual

Part Number IM-83/84/86

Revision G.6 - 10/08

CORPORATE HEADQUARTERS

5 Harris Court, Building L Monterey, CA 93940

Phone (831) 373-0200 (800) 866-0200 Fax (831) 373-4402

www.sierrainstruments.com

EUROPE HEADQUARTERS

Bijlmansweid 2 1934RE Egmond aan den Hoef

The Netherlands

Phone +31 72 5071400 Fax +31 72 5071401

ASIA HEADQUARTERS

Rm. 618, Tomson Centre, Bldg A, 188 Zhang Yang Road

Pu Dong New District, Shanghai, P.R.China

Phone: + 8621 5879 8521 Fax: +8621 5879 8586

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Table of Contents Series 830/840/860 Instruction Manual

0-2 IM-83/84/86-H

Customer Notice

Sierra Instruments, Inc. is not liable for any damage or personal injury, whatso-

ever, resulting from the use of Sierra Instruments standard mass flow meters or

controllers for oxygen gas. You are responsible for determining if this mass flow

meter or controller is appropriate for your oxygen application. You are responsible

for cleaning the mass flow meter or controller to the degree required for your oxy-

gen flow application.

No part of this publication may be copied or distributed, transmitted, transcribed, stored in

a retrieval system, or translated into any human or computer language, in any form or by

any means, electronic, mechanical, manual, or otherwise, or disclosed to third parties

without the express written permission of Sierra Instruments. The information contained in

this manual is subject to change without notice.

TRADEMARKS

Side-Trak™, Auto-Trak™ and Cal-Bench™ are trademarks of Sierra Instruments, Inc.

Other product and company names listed in this manual are trademarks or trade names of

their respective manufacturers.

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Series 830/840/860 Instruction Manual Table of Contents

IM-83/84/86-H 0-3

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Table of Contents Series 830/840/860 Instruction Manual

0-4 IM-83/84/86-H

Table of Contents

Chapter 1 Introduction

Introduction..............................................................................1-1

Using this Manual...............................................................1-1

Safety Information..............................................................1-2

Receipt of System Components ..........................................1-2

Technical Assistance ..........................................................1-2

The Series 800 Flow Sensing Principle.....................................1-3

Chapter 2 Installation

Quick Installation Guide...........................................................2-1

Installation Overview ...............................................................2-2

Installing the Transducer ..........................................................2-3

Compression Fittings..........................................................2-3

VCO Fittings ......................................................................2-3

VCR Fittings ......................................................................2-4

NPT and 1/2-inch Fittings...................................................2-4

Wiring the Transducer..............................................................2-5

Recommended Wire Gauges...............................................2-5

Wiring Transducers with 20-Pin Card Edge Connectors .....2-6

Wiring Transducers with 15-Pin D Connectors.................2-10

Motor-Operated Valve Circular 10-Pin Connector ............2-14

Chapter 3 Operation

Mass Flow Meter Operation .....................................................3-1

Mass Flow Controller Operation...............................................3-2

Electromagnetic Valve Controllers .....................................3-2

Motor-Operated Rotary Valve Controllers ..........................3-3

Mass Flow Controller Features.................................................3-4

Over-Range and Cold Sensor Lockout Circuit ....................3-4

Controller Auto Shut-Off Feature .......................................3-4

On-Off Control and Soft Start Option .................................3-5

Valve Purge Function .........................................................3-6

Chapter 4 Maintenance

Flow Path Maintenance ............................................................4-1

Changing the Laminar Flow Element..................................4-1

Sensor Maintenance .................................................................4-6

Sensor Cleaning and Inspection..........................................4-6

Sensor Electrical Test .........................................................4-7

Valve Maintenance...................................................................4-8

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Series 830/840/860 Instruction Manual Table of Contents

Electromagnetic Valves -Low and Medium Flow.....................4-8

Electromagnetic Valves - High Flow..............................................4-9

Motor-Operated Rotary Valves..................................................... 4-11

Valve Adjustment..................................................................4-12

Transducer Calibration....................................................................4-15

Chapter 5 Troubleshooting

Troubleshooting Procedures....................................................................5-1

Frequently Asked Questions ...................................................................5-4

Returning Equipment to the Factory.............................................................5-7

Appendix A Conversion Formulas and Gas Tables

Appendix B Production Specifications

List of Figures

1-1. Flow Paths through the Transducer............................... 1-3

1-2. Flow Measuring Principle............................................... 1-3

1-3. Sensor Temperature Distribution.................................... 1-4

1-4. Linear Range of the Transducer’s Output Signal .......... 1-4

2-1. Piping Requirements for NPT & 1/2-inch Connections...... 2-3

2-2. Input Power Connections (20-Pin Connector) ..................... 2-5

2-3. Output Signal Connections (20-Pin Connector)...................2-5

2-4. Local Command Set Point (20-Pin Connector)......................2-6

2-5. External Command Set Point (20-Pin Connector) ............... 2-6

2-6. 15 Volt Valve Purge and Off (20-Pin Connector)..................2-7

2-7. 30 Volt Valve Purge and Off (20-Pin Connector)..................2-7

2-8. Input Power (15-Pin D Connector).....................................2-8

2-9. Output Signal (15-Pin D Connector) ..................................2-8

2-10. Local Command Set Point (15-PinD Connector).................2-9

2-11. External Command Set Point (15-Pin D Connector)..............2-9

2-12. 15 Volt Valve Purge and Off (15-Pin D Connector)............2-10

2-13. 30 Volt Valve Purge and Off (15-Pin D Connector)............2-10

2-14. Motor-Operated Valve Circular 10-Pin Connector ..............2-11

3-1. Soft Start Response Times............................................... 3-5

4-1. Low Flow Transducer LFE Cleaning............................... 4-2

4-2. Medium Flow Transducer LFE Cleaning......................... 4-3

4-3. High Flow Transducer L F E Cleaning....................................4-4

4-4. NPT Transducer LFE Cleaning...........................................4-5

4-5. Sensor Wire Access ............................................................4-7

4-6. Transducer Potentiometers Used for Calibration................4-12

List of Tables

2-1. Recommended Wire Gauges ................................................. 2-4

H 0-5

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Table of Contents Series 830/840/860 Instruction Manual

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Series 830/840/860 Instruction Manual Table of Contents

IM-83/84/86-H 0-7

Warnings and Cautions

Warning! Follow National Electric Code or your local code safety practices when wiring

or connecting thisunit to apower source. Only qualified personnel should install and wire

the transducer.

Warning! Always remove main powerbefore disassembling the transducer.

Caution! During operation, the mass flow controller valve becomes hot.

Caution! Do not use the manual purge function when RS-485 is active (Model

860 only).

Caution! Always fully neutralize any toxic gas trapped inside the transducer before re-

moving from the gas line.

Caution! Only qualified personnel should perform transducer service,calibration or

troubleshooting procedures.

Caution! Printed circuit boards are sensitive to electrostatic discharge. To avoid damag-

ing the board, follow these precautions to minimize the risk of damage:

•before handling the assembly, discharge your body by touching a grounded, metal

object

•handleall cards by their edges unless otherwise required

•when possible,use grounded electrostatic discharge wrist straps when handling

sensitive components

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Series 830/840/860 Instruction Manual Chapter 1 Introduction

IM-83/84/86-H 1-1

Chapter 1 Introduction

Sierra’s Side-Trak™and Auto-Trak™mass flow meters and con-

trollers are designed to accurately measure and control flows of

process gases. This instruction manual covers the installation, op-

eration and maintenance of the entire Side-Trak and Auto-Trak

product lines, which include the following Sierra models:

•830 Side-Trak Mass Flow Meter

•840 Side-Trak Mass Flow Controller

•860M Auto-Trak Mass Flow Meter with RS-485 interface

•860C Auto-Trak Mass Flow Controller with RS-485 interface

Sierra’s mass flow meters and controllers offer a broad range of sizes,

control electronics, process connections, cables and connectors for

flexibility and versatility. The meter’s patented straight sensor tube

with access ports permits easy cleaning and reduces maintenance

down-time. The platinum sensor eliminates zero-drift and ensures

long-term repeatability. The primary standard calibration ensures

starting point accuracy and NIST traceability. All wetted surfaces are

constructed of 316 stainless steel with Viton®seals standard. Control-

lers incorporate either an electromagnetic valve (up to 500 slpm) or a

motor-operated rotary valve (100 slpm to 200 scfm). The Auto-Trak

860 digital microprocessor features automatic bridge-balancing cir-

cuitry and provides simultaneous analog and digital RS-485 commu-

nication.

Using This Manual

This manual is organized into five chapters:

•Chapter 1 includes the introduction and theory of operation

•Chapter 2 provides installation and wiring instructions

•Chapter 3 describes system operation and controller features

•Chapter 4 covers maintenance and calibration procedures

•Chapter 5 provides troubleshooting advice

Gas tables and conversion formulas are found in Appendix A. The

product specifications and dimensional drawings are found in Ap-

pendix B.

The Model 860 Auto-Trak RS-485 communications program in-

cludes an “Auto-Net” Software Addendum as a supplement to this

manual. Please refer to this addendum for all RS-485 operating in-

structions.

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Chapter 1 Introduction Series 830/840/860 Instruction Manual

1-2 IM-83/84/86-H

Throughout this manual, we use the word transducer as a ge-

neric term to represent all Side-Trak and Auto-Trak mass flow

meters and controllers.

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