Pfeiffer Vacuum HIPACE 1200 Manuel utilisateur

OPERATING INSTRUCTIONS

Translation of the Original

HIPACE 1200

Turbopump

Dear Customer,

Thank you for choosing a Pfeiffer Vacuum product. Your new turbopump is designed to

support you by its performance, its perfect operation and without interfering your individual

application. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a

comprehensive and complete range of top-quality products and first-class service. With this

expertise, we have acquired a multitude of skills contributing to an efficient and secure

implementation of our product.

Knowing that our product must not interfere with your actual work, we are convinced that our

product offers you the solution that supports you in the effective and trouble-free execution of

your individual application.

Please read these operating instructions before putting your product into operation for the

first time. If you have any questions or suggestions, please feel free to contact info@pfeiffer-

vacuum.de.

Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on

our website.

Disclaimer of liability

These operating instructions describe all models and variants of your product. Note that your

product may not be equipped with all features described in this document. Pfeiffer Vacuum

constantly adapts its products to the latest state of the art without prior notice. Please take

into account that online operating instructions can deviate from the printed operating

instructions supplied with your product.

Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from

the use of the product that contradicts its proper use or is explicitly defined as foreseeable

misuse.

This document is the intellectual property of Pfeiffer Vacuum and all contents of this

document are protected by copyright. They may not be copied, altered, reproduced or

published without the prior written permission of Pfeiffer Vacuum.

We reserve the right to make changes to the technical data and information in this document.

2/72

Table of contents

1 About this manual 7

1.1 Validity 7

1.1.1 Applicable documents 7

1.1.2 Variants 7

1.2 Target group 7

1.3 Conventions 8

1.3.1 Instructions in the text 8

1.3.2 Pictographs 8

1.3.3 Stickers on the product 8

1.3.4 Abbreviations 9

2 Safety 11

2.1 General safety information 11

2.2 Safety instructions 11

2.3 Safety precautions 16

2.4 Limits of use of the product 17

2.5 Proper use 17

2.6 Foreseeable improper use 17

2.7 Personnel qualification 18

2.7.1 Ensuring personnel qualification 18

2.7.2 Personnel qualification for maintenance and repair 18

2.7.3 Advanced training with Pfeiffer Vacuum 19

3 Product description 20

3.1 Identifying the product 20

3.1.1 Product types 20

3.1.2 Product features 20

3.2 Functional properties 20

3.2.1 Cooling 21

3.2.2 Rotor bearing 21

3.2.3 Drive 21

3.3 Shipment 21

4 Transportation and Storage 22

4.1 Transport 22

4.2 Storage 23

5 Installation 24

5.1 Preparatory work 24

5.2 Connecting the high vacuum side 24

5.2.1 Requirements for the dimensioning of a counter flange 24

5.2.2 Considering the earthquake protection 25

5.2.3 Using a splinter shield or protective screen 26

5.2.4 Using the vibration compensator 26

5.2.5 Mounting orientations 27

5.2.6 Attaching ISO-K flange onto ISO-K 28

5.2.7 Attaching ISO-K flange to ISO-F 28

5.2.8 Attaching ISO-F flange to ISO-F 29

5.2.9 Attaching CF flange to CF-F 31

5.3 Filling the operating fluid 32

5.4 Connecting the fore-vacuum side 34

5.5 Connecting the cooling water supply 35

5.6 Connecting accessories 37

5.7 Connecting the electrical supply 37

5.7.1 Grounding the vacuum pump 38

5.7.2 Establishing the electric connection 38

Table of contents

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6 Operation 40

6.1 Commissioning 40

6.2 Operating modes 41

6.2.1 Operation without operating unit 41

6.2.2 Operation via connection "E74" 41

6.2.3 Operation via multi-function connection "remote" 41

6.2.4 Operation via Pfeiffer Vacuum display and control unit 41

6.2.5 Operation via field bus 41

6.3 Switching on the turbopump 42

6.4 Operation monitoring 42

6.4.1 Operating mode display via LED 42

6.4.2 Temperature monitoring 43

6.5 Switching off and venting 43

6.5.1 Switching off 43

6.5.2 Venting 43

7 Maintenance 45

7.1 General maintenance information 45

7.2 Maintenance intervals and responsibilities 45

7.3 Changing the operating fluid 46

7.3.1 Draining the operating fluid 46

7.3.2 Filling the operating fluid 47

7.4 Replacing the electronic drive unit 48

7.5 Confirming the speed specification 50

8 Decommissioning 52

8.1 Stillsetzen für längere Zeit 52

8.2 Recommissioning 52

9 Recycling and disposal 54

9.1 General disposal information 54

9.2 Dispose of turbopumps 54

10 Malfunctions 55

11 Service solutions by Pfeiffer Vacuum 57

12 Spare parts 59

13 Accessories 60

13.1 Accessory information 60

13.2 Ordering accessories 60

14 Technical data and dimensions 63

14.1 General 63

14.2 Technical data 63

14.3 Dimensions 68

Declaration of conformity 71

Table of contents

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List of tables

Tbl. 1: Abbreviations used in this document 10

Tbl. 2: Permissible ambient conditions 17

Tbl. 3: Product designation of Pfeiffer Vacuum HiPace turbopumps 20

Tbl. 4: Turbopump features 20

Tbl. 5: Delivered drive power depending on the supplied mains voltage 20

Tbl. 6: Requirements for the dimensioning of customer-specific high vacuum con-

nection

Tbl. 7: Behavior of pumping speed when using a splinter shield or protective screen 26

Tbl. 8: Requirements on the cooling water composition 36

Tbl. 9: Requirements on the cooling water connection 36

Tbl. 10: Factory pre-set accessory connections on the electronic drive unit 37

Tbl. 11: Terminal lay-out of the power supply connector 38

Tbl. 12: Preconfigured settings for turbopumps when delivered 40

Tbl. 13: Behavior and meaning of the LEDs on the electronic drive unit 43

Tbl. 14: Factory settings for delayed venting in turbopumps 44

Tbl. 15: Characteristic nominal rotation speeds of the turbopumps 51

Tbl. 16: Troubleshooting turbopumps 56

Tbl. 17: Available spare parts 59

Tbl. 18: Accessories 62

Tbl. 19: Conversion table: Pressure units 63

Tbl. 20: Conversion table: Units for gas throughput 63

Tbl. 21: Technical data for HiPace 1200 Standard 64

Tbl. 22: Technical data for HiPace 1200 U 66

Tbl. 23: Technical data for HiPace 1200 C 67

Tbl. 24: Technical data for HiPace 1200 UC 68

List of tables

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List of figures

Fig. 1: HiPace 1200 design (example: standard version, DN 200 ISO-F | U-version

DN 200 ISO-K)

Fig. 2: Slinging points for transport of the turbopump in the standard and U versions 23

Fig. 3: Example: Secure against displacement and tipping caused by external vi-

brations

Fig. 4: Mounting orientations of the standard version, upright 27

Fig. 5: Mounting orientations of the U version, overhead 27

Fig. 6: Alignment of the fore-vacuum connection with horizontal mounting orienta-

tion

Fig. 7: Flange connection ISO-K to ISO-F, bracket screws 28

Fig. 8: Flange connection ISO-K to ISO-F, hexagon head screw and tapped hole 28

Fig. 9: Flange connection ISO-K to ISO-F, stud screw and tapped hole 29

Fig. 10: Flange connection ISO-K to ISO-F, stud screw and through hole 29

Fig. 11: Flange connection ISO-F, hexagon head screw and tapped hole 30

Fig. 12: Flange connection ISO-F, hexagon head screw and through hole 30

Fig. 13: Flange connection ISO-F, stud screw and tapped hole 30

Fig. 14: Flange connection ISO-F, stud screw and through hole 31

Fig. 15: Flange connection CF-F, hexagon head screw and through hole 31

Fig. 16: Flange connection CF-F, stud screw and tapped hole 32

Fig. 17: Flange connection CF-F, stud screw and through hole 32

Fig. 18: Removing the protective cap on U- or standard versions 33

Fig. 19: Position of the operating fluid filler screws depending on orientation of the

turbopump

Fig. 20: Example of fore-vacuum connection 35

Fig. 21: Cooling water connection 36

Fig. 22: Example: Connecting the grounding cable 38

Fig. 23: Removing the protective cap on U- or standard versions 46

Fig. 24: Position of the operating fluid drain plugs depending on orientation of the

turbopump

Fig. 25: Position of the operating fluid filler screws depending on orientation of the

turbopump

Fig. 26: Replacing the electronic drive unit – Removal 49

Fig. 27: Replacing the electronic drive unit – Installation 50

Fig. 28: Replacing the electronic drive unit – Fastening 50

Fig. 29: Spare parts HiPace 1200 59

Fig. 30: HiPace 1200 | DN 200 ISO-K 69

Fig. 31: HiPace 1200 | DN 200 ISO-F 69

Fig. 32: HiPace 1200 | DN 200 CF-F 69

Fig. 33: HiPace 1200 U | DN 200 ISO-K 70

Fig. 34: HiPace 1200 U | DN 200 ISO-F 70

Fig. 35: HiPace 1200 U | DN 200 CF-F 70

List of figures

6/72

1 About this manual

IMPORTANT

Read carefully before use.

Keep the manual for future consultation.

1.1 Validity

This operating instructions is a customer document of Pfeiffer Vacuum. The operating instructions de-

scribe the functions of the named product and provide the most important information for the safe use of

the device. The description is written in accordance with the valid directives. The information in this op-

erating instructions refers to the product's current development status. The document shall remain valid

provided that the customer does not make any changes to the product.

1.1.1 Applicable documents

Document Number

Operating instructions, Electronic drive unit TC 1200, standard PT 0239 BN

Operating instructions, Electronic drive unit TC 1200 PB, Profibus PT 0269 BN

Operating instructions, Electronic drive unit TC 1200 E74, according to

Semi E74

PT 0303 BN

Operating instructions, Electronic drive unit TC 1200 DN, DeviceNet PT 0353 BN

Operating instructions, Electronic drive unit TC 1200 EC, EtherCat PT 0455 BN

Declaration of conformity A component of these in-

structions

You can find these documents in the Pfeiffer Vacuum Download Center.

1.1.2 Variants

●HiPace 1200, DN 200 ISO-K

●HiPace 1200, DN 200 ISO-F

●HiPace 1200, DN 200 CF-F

●HiPace 1200 C, DN 200 ISO-K

●HiPace 1200 C, DN 200 ISO-F

●HiPace 1200 C, DN 200 CF-F

●HiPace 1200 U, DN 200 ISO-K

●HiPace 1200 U, DN 200 ISO-F

●HiPace 1200 U, DN 200 CF-F

●HiPace 1200 U C, DN 200 ISO-K

●HiPace 1200 U C, DN 200 ISO-F

●HiPace 1200 U C, DN 200 CF-F

1.2 Target group

These operating instructions are aimed at all persons performing the following activities on the product:

●Transportation

●Setup (Installation)

●Usage and operation

●Decommissioning

●Maintenance and cleaning

●Storage or disposal

The work described in this document is only permitted to be performed by persons with the appropriate

technical qualifications (expert personnel) or who have received the relevant training from Pfeiffer Vac-

uum.

About this manual

7/72

1.3 Conventions

1.3.1 Instructions in the text

Usage instructions in the document follow a general structure that is complete in itself. The required ac-

tion is indicated by an individual step or multi-part action steps.

Individual action step

A horizontal, solid triangle indicates the only step in an action.

►This is an individual action step.

Sequence of multi-part action steps

The numerical list indicates an action with multiple necessary steps.

1. Step 1

2. Step 2

3. ...

1.3.2 Pictographs

Pictographs used in the document indicate useful information.

Note

Tip

1.3.3 Stickers on the product

This section describes all the stickers on the product along with their meaning.

C US

T V Rheinland

Oil

S/N

Mod.

HiPace 1200

PM P03 910

- - - - - - - -

P/N

n, f

Mass Made in Germany 2018/05

PM 006 336 -T

37800 1/min, 630 Hz

27 kg

D-35614 Asslar

Rating plate (example)

Rating plates of individual assemblies are located on the

lower part of the turbopump or on the relevant attachments.

Do not open!

before having read the

operating instructions

Nicht öffnen!

Erst Betriebsanweisung lesen

Prima d’aprire,

leggerele instruzioni d’uso

Pas ouvrir !

il faut lire d’abord

l’instruction de

service

Operating manual note

This sticker indicates that this operating manual must be

read before performing any tasks.

Vor Inbetriebnahme Pumpe mit Öl

füllen.

Fill the pump with oil before putting

into operation.

Remplir la pompe d’huile avant la

mise en route.

Operating fluids note

This sticker emphasizes the necessity to fill the turbopump

with operating fluid before commissioning.

Mounting orientation upright note

This sticker depends on the variant. The sticker shows the

valid spatial positions for the installation and operation of

the turbopump.

About this manual

8/72

Overhead mounting orientation note

This sticker depends on the variant. The lsticker shows the

valid spatial positions for the installation and operation of

the turbopump.

ACHTUNG!

Wird F3-Öl über 300 °C erwärmt, entstehen giftige Dämpfe,

die den Atemwegen schaden! F3-Öl nicht mit Tabakwaren in

Berührung bringen! Die üblichen Vorsichtsmaßnahmen im

Umgang mit Chemikalien beachten!

ATTENTION!

If oil F3 will be heated to more than 300 °C poisonous vapours

come out whhich are noxious for the respiratory organs! Do not

bring oil F3 in contact with tobaccos! Care for the usual pre-

cautions for treating chemicals!

ATTENTION !

Quand on chauffe l’huile F3 à une température supérieure à

300 °C, il se forment des vapeurs toxiques, misibles pour les

organes de la respiration! Le contact de l’huile F3 avec des

produit en tabac doit être évité! Il faut faire attention aux pré-

cautions usuels pour le traitement des substances chimiques!

F3 operating fluid note

This sticker provides information on the safe handling of

hazardous substances.

Öleinfüll- und Ablassschraube nur dann öffnen

wenn Pumpe auf Atmosphärendruck geflutet

Do not open oil-filling or oil-drain flange

unless interior of the pump is under atmos-

pheric pressure

Ne pas ouvrir les brides d’entrée d’huile et

de vidange si l’interieur de la pompe ne se

trouve pas sous pression atmosphérique

Operating fluid filler screws note

This sticker provides information on the safe handling of the

screws on the operating fluid pump.

Operating fluid filler screw

This sticker describes the position of the respective filler

screw for operating fluid.

Protection class

This sticker describes protection class 1 for the product.

The positioning indicates the position for the ground con-

nection.

COOLING WATER IN

max. 6 bar (90 psi)

Cooling water connection

This sticker indicates the position and conditions for the

cooling water supply of the turbopump.

COOLING WATER OUT

Cooling water connection

This sticker indicates the position for the cooling water dis-

charge of the turbopump.

warranty seal

Closure seal

The product is sealed ex-factory. Damaging or removing a

closure seal results in loss of the warranty.

PURGE

Sealing gas connection note

This sticker indicates the position for the exclusive sealing

gas connection.

1.3.4 Abbreviations

Abbreviation Meaning in this document

AC Alternating current (AC)

CCorrosive gas version

dDiameter value (in mm)

DCU Display Control Unit (Pfeiffer Vacuum display and control unit).

DN Nominal diameter as size description

EMS Emergency Stop

fRotation speed value of a vacuum pump (frequency, in rpm or Hz)

HPU Handheld Programming Unit. Aid for control and monitoring pump parameters

HV High vacuum flange, high vacuum side

ISO Flange: Connector in accordance with ISO 1609 and ISO 2861

About this manual

9/72

Abbreviation Meaning in this document

LED Light emitting diode

PE Earthed conductor (protective earth)

[P:xxx] Electronic drive unit control parameters. Printed in bold as a three-digit number in

square brackets. Frequently displayed in conjunction with a short description.

Example: [P:312] software version

remote 26-pole D-Sub connecting socket on the turbopump electronic drive unit

WAF width across flats

TTemperature (in °C)

TC Turbo Controller

UUpside-down version

VV Fore-vacuum flange, fore-vacuum connection

Tbl. 1: Abbreviations used in this document

About this manual

10/72

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