MTS Systems MA2000 Series Manuel utilisateur

MA2000-series Instructions December 10, 2003 1

____________________________________________________

McAllister Technical Services

Manufacturers of surface analytical instruments and devices

______________________________________________________________

West 280 Prairie Avenue Coeur d'Alene, Idaho 83815

Telephone: (208) 772-9527 Fax: (208) 772-3384

E-mail: [email protected]

MA2000 Instructions

THANK YOUfor your purchase of MTS' MA2000 series XYZ sample

manipulator. It is the finest of its kind available. We appreciate the confidence you have placed

in our company. We encourage your comments and suggestions on this product and its manual.

Please read this manual carefully prior to assembling/mounting your manipulator. We have

found this will answer many of the commonly asked questions, saving time and aiding

understanding. It will be time well spent.

Leak Check Certificate

Model Date Job # Checked by

MA2___

This is to certify that the above-referenced product has been checked on a Helium Mass

Spectrometer leak detector having a sensitivity of _____ X 10-___ std. cc/sec and has been

found to have no measurable leak.

MA2000-series Instructions December 10, 2003 2

Check for Damage:

Many shipping companies require that claims for damage and/or loss be filed within a very

short period of time, sometimes within one week of delivery! Promptly inspect the shipment for

exterior as well as hidden damage. If any damage or loss is encountered, be sure to do ALL of

the following:

CNotify the shipper promptly. If the damage is significant, insist on an on-site inspection.

CRetain ALL packing materials.

CDo not proceed with installation or unpacking.

CDo not allow the shipping company to remove the goods from your premises without first

notifying MTS.

Verify the shipment received against the enclosed packing list and against your order.

Notify MTS promptly of any discrepancies. Clean any debris, dust or stray packaging material

from the manipulator before removing the flange covers. Check for any loose screws.

Unpackaging Instructions:

Inspect the unit for hidden damage from shipment. Translators are shipped with custom

foam-in-place packing. We have found this to be the best way. The foam is separated

approximately halfway inside the carton with thin white plastic. The unit is also bagged in

polyethylene, and the flanges are covered with aluminum foil and plastic covers. The bellows is

shipped in the compressed position and is wrapped to prevent damage. All of this is designed

to get the unit to you in the same condition it left our shop. We recommend you save the

packing box and materials, if possible, for equipment or possible future shipment.

1. Take the manipulator out of the box on a clean, dry, level surface.

2. Unwrap the bellows.

3. REMOVE THE SHIPPING CLAMP SCREW COMPLETELY! Be sure to save it for later

use.

4. Install the Micrometers. We ship your unit with the micrometers removed to prevent

damage. The screws for each micrometer are enclosed in a ziplock bag and packaged with

the micrometers. Reassembly is a rather simple process. Insert the screws in the appropriate

holes in the micrometer mount. Line up the screws and the micrometer load nut with the

mating holes/part on the manipulator. Start the screws, but do not tighten. Next, thread the

knurled micrometer nut onto the micrometer insertion bracket. Tighten only finger tight.

Finish tightening the two screws. Repeat the process for the other micrometer.

5. Remove the shipping covers and aluminum foil from the flanges. The manipulator is now

ready for installation.

MA2000-series Instructions December 10, 2003 3

General Precautions:

Under normal conditions your manipulator will provide years of trouble-free service,

especially if the following simple maintenance is performed. After several bakeouts, it may be

necessary to relubricate the lead screw and/or micrometers. Use the MoS2grease in the supplied

syringe. The micrometers can be removed for easier access. When replacing the screws in the

micrometer brackets or any other location on the manipulator, be sure to re-coat the threads with

an anti-seize compound.

1. Do not allow contamination to get into the bellows interior.

2. The stainless steel bellows is made from thin material and is fragile. Do not hit it or allow it

to hit other objects.

3. Do not over-travel the unit. Hitting the side of the bellows may cause damage.

4. When compressing a manipulator with a Z stroke greater than ~8"that is not under vacuum,

care must be taken to ensure the bellows does not squirm or sag sideways. Hand support of

the bellows may be required to prevent the bellows hitting nearby structures.

Use the appropriate bolts, nuts, washers and gasket to mount the manipulator to your

chamber. The standard MA2000-series manipulator uses the following bolt sizes:

Location Nominal Flange Size Bolts SAE (Metric) Sizes

Top flange

(Standard tapped) 2.75"

(70 mm) 1/4-28 X 7/8

(M6 X 1 X 20)

Mini flanges

(Standard tapped) 1.33"

(34 mm) 8-32 X 1/2

(M4 X 0.8 X 15)

Bottom Flange

(Standard non-tapped) 6.0"

(150 mm) 5/16-24 X 2

(M8 X 1.25 X 50)

When tightening the flange bolts, make sure the bolt heads and threads are in good condition,

the threads are lubricated with anti-seize material and that the wrench fits properly. Turn the

bolts deliberately and with great care. A stripped, seized or broken bolt can be frustrating. A

slipped wrench can puncture the bellows or injure hands. Install the MA2000-series manipulator

on your chamber/flange as you would any other ConFlat type flange. Use standard, 0.080" thick,

flat copper gaskets. The following tightening sequence for lubricated bolts with washers is

recommended. First finger tighten all bolts evenly, then sequentially torque the bolts in even

steps.

MA2000-series Instructions December 10, 2003 4

For 6" ConFlats - Maximum torque 120-150 in/lbs

For 2.75" ConFlats

Maximum torque 80-100 in/lbs

For Mini ConFlats

Maximum torque 20-30 in/lbs

Bakeout:

Bakeout in normal fashion, but NEVER exceed 1000C with the micrometers attached during

bakeout. Higher temperatures can damage the precision components. If the micrometers are

removed, replace the shipping screw and bakeout up to 2000C. Note that the red knob on the

shipping clamp screw is for initial easy identification. This red knob MUST be removed if the

screw is used during bakeout. To remove it, hold the screw by its body and press or tap the cap

off. Monitor the temperature during bakeout. Never translate the manipulator during bakeout or

when it is above ambient temperature. Always remove any motor or limit switches before

bakeout.

X-Y gib adjustment:

Lateral alignment of the X-Y slides is maintained by special crossed roller bearings made of

hardened carbon steel. These bearings will corrode. Do not allow moisture to condense on or in

the bearings. Do not allow LN2to chill the bearings. The X-Y slides have an adjustment for

side play. This is set at the factory and usually does not need readjustment. In the event

readjustment is necessary, this function should only be performed by a technician experienced in

such adjustments. Make sure the slide bearing faces are clean and free from debris. Remove the

micrometer of the axis to be adjusted so the slide moves freely. This is important because the

technician must be able to feel whether or not the slide is tight or binds. Next, slightly loosen the

bolts that retain the slide nearest the gib adjustment screws. Then readjust the side play and

retighten the screws in the slide. Make sure the crossed roller cage is equidistant from both ends

when the slides are in the middle of their travel. Do not over tighten the screws.

MA2000-series Instructions December 10, 2003 5

Gib Adjustment Figure

Non-tapped top flange:

On specially-ordered manipulators, the top flange is non-tapped (non-threaded) to allow

mounting devices with tapped bolt holes. To mount such a device to the traveling flange of a

MA2000-series manipulator, vent the manipulator and remove it from the vacuum system. Next,

remove the 4 screws that hold the flange ring on the top slide. Move the Z axis traveler towards

the bottom (stationary) flange while supporting the top flange to prevent damage to the bellows.

When there is enough room, install a new gasket and the mating equipment, inserting the

lubricated bolts or studs only finger tight. Ensure that the new equipment is aligned

appropriately as the top flange will no longer be rotatable after the bolts are tight. Support the

new equipment securely to withstand the torque of tightening the bolts and to protect the

bellows. Reinsert the traveling flange and retainer ring on the top slide of the MA2000.

Flange ring and top flange

MA2000-series Instructions December 10, 2003 6

Motors and limit switches:

Stepper motors and limit switches can easily be installed in the field. To install steppers on

the X-Y axes, remove the micrometer bracket and the micrometer insertion bracket.

Replace them with the lead screw bracket and motor bracket. The limit switches mount to either

side of the lead screw, in the threaded holes provided, as shown in the above illustration.

To install a stepper motor to the Z axis, remove the Z axis crank,

Woodruff key and index. Install the flexible coupling to the lead

screw in the area formerly occupied by the crank, tighten and

install the motor bracket. Rotate the lead screw by hand to align

the clamp screw in the flex coupling with the access hole in the

motor bracket. Insert the motor shaft in the flex coupling. Make

sure the motor flange is flush with the top of the bracket. Tighten

the flex coupling to the motor shaft and fasten the motor to the

bracket.

Lubrication:

Under normal conditions, your manipulator will provide years of trouble-free service. As

delivered, the lead screw and ball bearings are lubricated with molybdenum disulfide.

Relubricate the ball bearings every third or fourth bake out with the molybdenum disulfide

grease provided. Do not use a hydrocarbon grease such as Felpro C100TM for bearings or lead

screws that will be baked because the hydrocarbon greases will cake and dry out. After several

bakeouts, it may be necessary to relubricate the drive screw. Use the MoS2grease in the

MA2000-series Instructions December 10, 2003 7

supplied syringe. A small amount applied to the drive screw as you run it up and down is

sufficient.

We have operated your unit prior to shipment to assure that it works properly. Prior to

calling the factory, check to make certain you have removed all shipping constraints, have read

these instructions, and have checked for shipping damage. If you do call, it is best to have the

manipulator close to the phone, for ease of description.

Packaging for storage or reshipment:

The bellows on your unit is particularly susceptible to damage/contamination. Normal

precautions for shipment are, therefore, usually inadequate. Please follow these guidelines:

1. Work on a clean surface when packaging.

2. Place aluminum foil over the bellows openings, then re-install the shipping covers. Do not

allow any contamination to get into the bellows interior.

3. Remove the micrometers. Place the screws in a bag. Wrap the micrometers and the bag in

bubble pack.

4. Re-install the shipping clamp screw.

5. Move the Z axis to the fully compressed position. Wrap cardboard around the bellows and

seal with tape. Make certain the cardboard extends up/down into the plate areas. The

bellows is most susceptible to damage if the box is dropped and it bangs into the plates.

6. Place the unit in a polyethylene bag.

7. Place the lower piece of foam-in-place packaging in the box (check the condition of the box

and replace as necessary). Place the unit into the foam as indicated by the outline in the

foam. Now place the micrometers into the box as indicated. Place the upper piece of foam-

in-place packaging over the unit as indicated by the outline in it. Secure the box shut, and

the manipulator is ready to ship or store.

Accessories included:

1. Hex wrench kit

2. Lubrication kit consisting of 1 each:

High temperature silicone/MoS2(black) grease for lead screws

High temperature silicone (clear) grease for bearings

Parts and factory service:

Replacement parts and non-warranty factory service are available on a fast turnaround basis.

Please consult the factory with your specific need.

End

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