Agilent Technologies 5530 Manuel utilisateur

Agilent 5530 Dynamic Calibrator

Getting Started Guide

Agilent 5530 Dynamic Calibrator

Getting Started Guide

Agilent Technologies, Inc. 7.CD.L.03.11.97.R1.J.CW1FL

Santa Clara Site

5301 Stevens Creek Boulevard

Santa Clara, California 95052-8059

©Copyright Agilent

Technologies, Inc. 1992, 2000,

2001, 2008

Reproduction, adaptation, or

translations without prior

written permission is

prohibited, except as allowed

under the copyright laws.

Printed: October 13, 2008

Printed in USA

Manual part number

10747-90061

Certification

and Warranty

Certification

Agilent Technologies, Inc.

certifies that this product met

its published specification at the

time of shipment from the

factory. Agilent further certifies

that its calibration

measurements are traceable to

national standards

administeredby the U. S. NIST,

NRC Canada, Euromet

members (NPL, PTB, BNM,

etc.) or other recognized

standards laboratories.

Warranty

Agilent warrants Agilent

hardware, accessories and

supplies against defects in

materials and workmanship for

a period specified by each

product from date of shipment.

If Agilent receives notice of such

defects during the warranty

period, Agilent will, at its

option, either repair or replace

products which prove to be

defective. Replacement products

may be either new or like-new.

Agilent warrants that

Agilent software will not fail to

execute its programming

instructions, for the period

specified above, due to defects in

material and workmanship

when properly installed and

used.

If Agilent receives notice of such

defects during the warranty

period, Agilent will replace

software media which does not

execute its programming

instructions due to such defects.

For detailed warranty

information, see back matter.

Safety Considerations

General

This product and related

documentation must be

reviewed for familiarization

with this safety markings and

instructions before operation.

This product is a safety Class I

instrument (provided with a

protective earth terminal).

Before Applying Power

Verify that the product is set to

match the available line voltage

and the correct fuse is installed.

Refer to instructions in Chapter

1 of the Manual.

Before Cleaning

Disconnect the product from

operating power before

cleaning.

Safety Earth Ground

An uninterruptible safety earth

ground must be provided from

the mains power source to the

product input wiring terminals

or supplied power cable.

Safety Considerations

(contd)

Warning Symbols That May

Be Used In This Book

Instruction manual symbol; the

product will be marked with

this symbol when it is necessary

for the user to refer to the

instruction manual.

Indicates hazardous voltages.

Indicates earth (ground)

terminal.

Indicates terminal is connected

to chassis when such connection

is not apparent.

Indicates Alternating

current.

Indicates Direct current.

Safety Considerations

(contd)

WARNING

BODILY INJURY OR DEATH

MAY RESULT FROM

FAILURE TO HEED A

WARNING. DO NOT

PROCEED BEYOND A

WARNING UNTIL THE

INDICATED CONDITIONS

ARE FULLY UNDERSTOOD

AND MET.

CAUTION

Damage to equipment, or

incorrect measurement data,

may result from failure to

heed a caution. Do not

proceed beyond a CAUTION

until the indicated conditions

are fully understood and met.

These CAUTION labels are

required by the United States

Center for Devices and

Radiological Health. Failure to

follow their instructions may

result in personal injury.

This symbol indicates laser

radiation

For additional safety and

acoustic noise information, see

back matter.

CONTINOUS WAVE 1mW 670nm

CLASS II LASER PRODUCT

LASER RADIATION-DO NOT

STARE INTO BEAM

CAUTION

Getting Started Guide iii

About This Guide

1 Introducing the Agilent 5530

Introduction 1-2

Overview of the Agilent 5530 1-3

System Overview 1-4

Overview of Laser Calibration 1-5

Types of Measurements 1-7

2 Making Laser Measurements Safely

Introduction 2-2

Safety Labeling 2-2

General Safety Precautions 2-3

Using the Laser Head Safely 2-4

Using Components Safely 2-4

Protecting the Optics 2-5

3 Installing the Software and Connecting

Components

Introduction 3-2

Installing the Metrology Software 3-2

Computer Requirements 2

Installing the software 4

To start the Metrology Software (general) 5

To exit the Metrology Software (general) 5

Connecting the Axis Module and Sensor Hub 3-6

Communication LEDs 11

ContentsContents

Contents

iv Getting Started Guide

Connecting the Sensors 3-11

Connecting the Laser 3-14

Agilent 10888A Remote Control Unit 3-16

Agilent 10887-60202 A-quad-B Cable Assembly 3-17

Connecting and Turning on Power 3-18

4 Using the Agilent 5530

for the First Time

Introduction 4-2

Task 1: Assembling and Connecting Components 4-3

Task 2: Setting Up the Software 4-6

Task 3: Aligning the Optics 4-10

Task 4: Making the Measurements 4-13

Task 5: Displaying and Saving Data 4-17

Displaying analysis data 17

Saving data 19

Task 6: Exiting the Metrology Software 4-20

5 Setting Up the Software for a Measurement

Introduction 5-2

Terms to Know 5-4

Conventions Used in the Software 5-6

Entering data 6

Using buttons 7

Using Online Help 5-7

Accessing the Software 5-8

Selecting a Measurement Type 5-10

Recalling Saved Setup Files and Data Files 5-12

Saving Setup Data and Measurement Data Files 5-14

Exiting the Metrology Software 5-16

Contents

Getting Started Guide v

Setting Up the Laser Software for Your

Measurement 5-17

Verifying the hardware setup 18

Testing the remote control unit 19

Setting up environmental compensation 19

Defining laser parameters 20

Resetting the laser position 22

Setting Up Your Measurement 5-22

6 Making the Measurement

Introduction 6-2

Mounting the Laser Head on the Tripod 6-2

Collecting Measurement Data 6-7

Recording Measurement Data 6-8

Erasing Measurement Data 6-9

7 Analyzing, Transferring, and Printing

Measurement Data

Introduction 7-2

Displaying the Analyze Data Screen 7-3

Changing the Data Display 7-4

Autoscaling 4

Adding text to your graph 4

Displaying and editing measurement data 5

Printing the data analysis graph 7

Transferring Data to Another Program 7-8

Setting Up the Data Analysis Graph 7-8

Selecting an industry standard 9

Entering machine information 10

Creating a compensation table 11

Contents

vi Getting Started Guide

8 Ensuring Repeatability, Accuracy, and

Resolution

Introduction 8-2

Ensuring Accuracy 8-3

Compensating for environmental factors 4

Correcting errors that affect linear measurements 4

Abbé error 5

Deadpath error 6

Cosine error 7

Correcting errors that affect angular measurements 9

Correcting errors that affect straightness, squareness, and

parallelism measurements 9

Ensuring the accuracy of straightness reflector

mirrors 9

Correcting for slope 10

Compensating for environmental factors 11

Optimizing Repeatability From One Calibration to the

Next 8-13

Improving Resolution 8-14

9 Troubleshooting and Maintenance

Introduction 9-2

Troubleshooting the Agilent 5530 9-2

Maintaining the Agilent 5530 9-4

Maintaining the optics 4

Cleaning with pressurized air 4

Cleaning with lens tissue and methanol or alcohol 4

Maintaining the air sensor 5

Cleaning 5

Checking accuracy quickly 5

Contents

Getting Started Guide vii

Maintaining material temperature sensor 6

Cleaning 6

Checking accuracy quickly 6

Returning sensors to Agilent for calibration 6

Agilent Service Agreement 6

AGlossary

G-2

Index

Contents

viii Getting Started Guide

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