
C-1*
12704A Resistivity Chamber Operation Manual
Table of Contents
1. Introduction..................................................................................................1-1
1.1. Product Overview ......................................................................................................................... 1-2
1.2. Before Using the Product ............................................................................................................. 1-3
2. Part Descriptions ..........................................................................................2-1
2.1 Rear Panel..................................................................................................................................... 2-2
2.2 Electrode Section.......................................................................................................................... 2-3
3. Measurement Method ..................................................................................3-1
3.1 Connecting to the Measuring Instruments.................................................................................... 3-2
3.1.1 Connecting with the 8340A .................................................................................................. 3-3
3.1.2 Connecting with the 8240 ..................................................................................................... 3-4
3.1.3 Connecting with the 8252 ..................................................................................................... 3-4
3.1.4 Connecting with the 5450/5451 ............................................................................................ 3-5
3.2 Setting the Electrodes and a Sample............................................................................................. 3-6
3.3 Measurement ................................................................................................................................ 3-7
3.3.1 Calculating Volume and Surface Resistivities. ..................................................................... 3-7
3.3.2 General Instructions .............................................................................................................. 3-8
4. Specifications ...............................................................................................4-1
Appendix ...........................................................................................................A-1
A.1 How to Calculate Volume and Surface Resistivities ................................................................... A-2
A.2 Internal Connections for Volume/Surface Resistivity Measurements ......................................... A-3
A.3 Internal Connections.................................................................................................................... A-4