Ulvac GHD-031A Manuel utilisateur

No．1000310-2-01-14

Instruction Manual

For

Oil Sealed Rotary Vacuum Pump

Original Instructions

Model

ＧＨＤ－０３１Ａ

ＧＨＤ－０３１Ｂ

Request to Users

Please read this manual thoroughly to ensure safe and effective use of the equipment.

Keep this manual in a place where it can be referred to at any time and look after it

carefully.

The contents of this instruction manual are subject to change without prior notice due

to improvements in performance and the functions of the product.

ULVAC KIKO, Inc.

Contents－01

Contents

0．Introduction ・・・・・・・・・・01

0.1 Before using the vacuum pump ・・・・・・・・・・01

0.2 Safety symbols ・・・・・・・・・・03

1．For safe operation ・・・・・・・・・・ 1

1.1 Hazards peculiar to the pump and safety measures ・・・・・・・・・・ 1

1.1.1 Leakage of dangerous gas and material ・・・・・・・・・・ 1

1.1.2 Electric shock ・・・・・・・・・・ 1

1.1.3 Explosion ・・・・・・・・・・ 2

1.1.4 High temperature ・・・・・・・・・・ 3

1.2 Safety Data Sheet (SDS) ・・・・・・・・・・ 4

2．Outline of the Pump ・・・・・・・・・・ 5

2.1 Specification ・・・・・・・・・・ 5

2.2 Dimensional drawing ・・・・・・・・・・ 6

3．Measures before it starts ・・・・・・・・・・ 7

3.1 Securing of exhaust vent ・・・・・・・・・・ 7

3.2 Installation ・・・・・・・・・・ 9

3.3 Vacuum piping ・・・・・・・・・・10

3.4 Electric wiring ・・・・・・・・・・12

a) Power cable selection standards ・・・・・・・・・・13

b) Precautions ・・・・・・・・・・13

b-1) Unplug-preventive hardware(Option) ・・・・・・・・・・13

b-2) How to install unplug-preventive hardware ・・・・・・・・・・14

3.5 Fluctuation in the power voltage and frequency ・・・・・・・・・・15

Danger

Warning

Caution

Contents－02

4．Operation ・・・・・・・・・・16

4.1 Cautions for operation ・・・・・・・・・・16

4.2 Start of operation ・・・・・・・・・・16

4.3 Stopping the operation ・・・・・・・・・・17

4.4 Operation in cold climates ・・・・・・・・・・17

4.5 Thermal protector ・・・・・・・・・・17

4.6 Magnet coupling ・・・・・・・・・・18

4.7 Oil mist trap (Option) ・・・・・・・・・・18

4.8 Restriction on operation when the oil mist trap is installed ・・・・・・・・・・18

5．Pump performance ・・・・・・・・・・19

5.1 Ultimate pressure ・・・・・・・・・・19

5.2 Pumping speed ・・・・・・・・・・20

5.3 Power requirement ・・・・・・・・・・21

6．Maintenance, Inspection and Repair ・・・・・・・・・・22

6.1 Maintenance ・・・・・・・・・・22

6.2 Periodic inspection ・・・・・・・・・・22

6.3 Replacement of the pump oil ・・・・・・・・・・25

6.4 Trouble check list ・・・・・・・・・・28

7．Disposal ・・・・・・・・・・31

8．Maintenance parts ・・・・・・・・・・32

8.1 Maintenance parts list ・・・・・・・・・・32

8.2 Disassembly drawing ・・・・・・・・・・33

Warranty

Safety Data Sheet (SDS) for Vacuum Pump Oil R-2

Pump usage check sheet (Use this sheet for requesting an overhaul.)

Sales, service agency, and the where to make contact

Contents－03

Figures and Tables

Figure1. Dimensional drawing of GHD-031 oil sealed rotary vacuum pump・・・・・・・・・ 6

Figure2. Basic piping diagram to the vacuum chamber ・・・・・・・・・・10

Figure3. Electric wiring diagram ・・・・・・・・・・12

Figure4. Inlet (EN60320-1) ・・・・・・・・・・12

Figure5. Change region of the voltage and frequency ・・・・・・・・・・15

Figure6. Pumping speed curve ・・・・・・・・・・20

Figure7. Characteristics of motor power ・・・・・・・・・・21

Figure8. Lubrication of the oil sealed rotary vacuum pump ・・・・・・・・・・27

Figure9. Disassembly drawing of GHD-031 oil sealed rotary vacuum pump ・・・・・・33

Table1. Specification ・・・・・・・・・・ 5

Table2. Power cable selection standards ・・・・・・・・・ 13

Table3. Characteristics of the thermal protector ・・・・・・・・・ 17

Table4. Periodic inspection table ・・・・・・・・・ 24

Table5. Trouble check list ・・・・・・・・・ 28

Table6. GHD-031 Maintenance parts list ・・・・・・・・・ 32

Attached table: Safety Data Sheet (SDS) for Vacuum Pump Oil R-2

－01－

０.Introduction

0.1 Before using the vacuum pump

Thank you for purchasing this product. Your custom is very much appreciated.

This pump is only for vacuum pumping, and may malfunction or cause accidents if not

handled appropriately. Please use instruction manuals after attention enough for

check / maintenance / security sides after a reading well.

Personnel handling the equipment

Only persons who have read this manual thoroughly, and have sufficient

understanding of safety, pump specifications, and method of operation, can operate

this pump.

Read the manual thoroughly

Please completely read a manual well to use this product definitely. Please read

the section on “introduction in the security” “use for safe operation” by all

means.

Keep this manual in a safe place

Keep the instruction manual carefully. After reading this manual, be sure to keep

it in a safe place, which is readily accessible to others needing to use it.

Copying this manual is prohibited

This instruction manual can copy no part for sale without our permission.

Statutory requirements for disposal

Follow all statutory and local authority regulations when disposing of this pump.

－02－

Safety during repair

When it is asked us for repair, please inform the use situation of having hazardous

substance or not in particular for the safe management of the repair worker.

The use situation declines repair in the case of lack of foresight.

Confirmation at the time of the unpacking

Although the pump is delivered with great care, check the following after unpacking.

(1) Confirm whether it is the model of the pump of the order.

(2) The specified accessories have been provided.

(3) No parts have been damaged in transportation.

(4) Neither screws nor nuts have become loose nor were lost in transportation.

If there are any problems, contact the company from which you purchased the pump or

the sales department of the manufacturer.

－03－

0.2 Safety symbols

In this instruction manual and on warning labels attached to the pump, the following

symbols are used so that matters which must be strictly adhered to can be readily

understood.

These symbols are divided as shown below.

When mishandled, there is an imminent danger of the operator suffering a fatal

accident or serious injury.

When mishandled, there is a possibility of the operator suffering a fatal accident

or serious injury.

When mishandled, there is a possibility of the operator suffering an injury (light

or medium injury) or of damage occurring to property.

When mishandled, there is a possibility of the pump being damaged or malfunctioning.

Some parts of the pump may reach temperatures of 60°C or more during operation.

Touching such components may result in burns.

Danger

Warning

Caution

Note

High temperature

－04－

Always switch off the main power supply before installing electrical wiring

or performing any electrical work on the pump. Failure to do so may result in

electric shock.

The inlet port of the pump

The outlet port of the pump

Various label putting positional externals

Electric shock

－05－

Table for various labels

No. Label name Label

① Rotation

② Burn caution

③ Electric shock caution

④ Installation caution

⑤ Transportation caution

⑥ Pump

ＧＨＤ－０３１ＡＧＨＤ－０３１Ｂ

－06－

No. Label name Label

⑦ Inlet

⑧ Position

⑨ High temperature caution

⑩ Outlet

⑪ Pump oil（R-2）

⑫ Passed

⑬ Warning explosion

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