Siargo MF4000 Manuel utilisateur

Gas Mass Flow Meter VC.1

Model MF / FS4000

Sold in North America by:

Servoﬂo Corporation

75 Allen Street

Lexington, MA 02472

www.servoﬂo.com/info@servoﬂo.com

781-862-9572

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Gas Mass Flow Meter

with MEMS calorimetric sensing technology

MF / FS 4000 Series

User Manual

Document No. 06-2021-FM1 EN

Issue date: 2021.06

Revision: VC.1

Siargo Ltd.

3100 De La Cruz Boulevard, Suite 210

Santa Clara, CA 95054

USA

Tel: +1(408)969.0368

Email: [email protected]om

Siargo Ltd. and its subsidiaries reserve the right to change the specifications and/or descriptions

without prior notice. For further information and updates, please visit: www.Siargo.com

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Attention!

Use with caution!

•Please carefully read this manual prior to operating this product.

•Do not open or modify any hardware which may lead to irrecoverable

damage.

•Do not use this product if you suspect any malfunctions or defection.

•Do not use this product for corrosive media or in a strong vibration

environment.

•Use this product according to the specified parameters.

•Only the trained or qualified personnel shall be allowed to perform

product services.

•Be cautious for the electrical safety, even it operates at a low voltage,

any electrical shock might lead to some unexpected damages.

•The gas to be measured should be clean and free of particles. Do not apply

this meter for liquid medium.

•Do not apply for any unknown or non-specified gases that may

damage the product.

•For remote data, please be sure the meter is properly configured.

 
 
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Table of Contents 
 
Overview.................................................................................................. 5 
Receipt / unpack of the products ................................................................ 6 
Knowing the products ............................................................................... 7 
1. Product description ...................................................................................................7 
2. Power and data cable description...............................................................................7 
3. Mechanical dimensions..............................................................................................8 
Installation............................................................................................... 9 
Operation and MENU description..............................................................11 
1 Check the product specifications .............................................................................. 11 
2 Check the leakage ................................................................................................... 11 
3 Power the product and digital data connection ......................................................... 11 
4 Meter display and MENU descriptions ...................................................................... 12 
4.1. Meter display and function keys ....................................................................................12 
4.2. MENU function input sequence .....................................................................................12 
4.3. Detailed descriptions of the functions ............................................................................ 15 
5 RS485 Modbus / RS232 communication protocol ....................................................... 17 
5.1. Hardware connection ....................................................................................................17 
5.2. Communication parameters...........................................................................................18 
5.3. Frame ..........................................................................................................................18 
5.4. Function codes .............................................................................................................19 
5.5. Registers......................................................................................................................19 
6 Analog output (0.5 ~ 4.5Vdc) .................................................................................... 22 
7 Pressure loss........................................................................................................... 22 
Product selection and order information....................................................24 
1 Product selection ....................................................................................................24 
2 Order contact and customer support ........................................................................24 

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7. Technical specifications............................................................................25

8. Technical notes for the product performance .............................................26

8.1 Measurement principle ............................................................................................26

8.2 Precautions for the best performance of the product .................................................26

8.2.1. Comparison with a third party reference meter ...............................................................26

8.2.3. Particle contamination and fluidic cleanness ...................................................................27

8.2.4. Apply to a different gas medium ....................................................................................27

9. Troubleshooting ..................................................................................... 28

10. Warranty and Liability..............................................................................29

11. Service contact ........................................................................................31

Appendix I: Product evaluation kit..................................................................32

Appendix II: Document history.......................................................................33

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1. Overview

All contact information can be found at the end of this manual.

This manual provides essential information for the operation of the MF/FS4000 series of gas mass

flow meter/sensors for general-purpose gas flow monitor and control applications with the full-scale

mass flow rate from 2 to 50 SLPM with both analog and digital outputs. The product performance,

maintenance, and trouble-shooting as well as the information for product order, technical support,

and repair are also included.

MF/FS4000 mass flow meters/sensors are designed for general purpose precise industrial gas

processing monitor and/or control. It can be applied for medical equipment such as anesthesia

application, endoscope, and cancer treatment; industrial applications including welding machine,

laser equipment, gas mixture; and many more. The series covers a wide dynamic flow range with a

working pressure rating of up to 0.5 MPa (5 bar or 73 PSI), and a compensated temperature ranging

from -10 to 55°C.

The products are designed with an easy change of mechanical connectors. The standard connectors

are BSPT 1/4”, and other customized ones are available upon request.

The products are operated with Siargo’s proprietary MEMS calorimetric mass flow sensors together

with smart control electronics. The sensor surface is passivated with silicon nitride ceramic materials

together with a water/oil proof nano-coating for performance and reliability.

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2. Receipt / unpack of the products

Upon receipt of the products, please check the packing box before the dismantlement of the packing

materials. Ensure no damages during shipping. If any abnormality is observed, please contact and

notify the carrier who shipped the product and inform the distributors or sales representatives if the

order is not placed directly with the manufacturer, otherwise, the manufacturer should be informed

as well. For any further actions, please refer to the return and repair section in this manual.

If the packing box is intact, proceed to open the packing box, and you shall find the product (either

the meter with LED display or the sensor without the display per the actual order). The power and

data cable as shown below may also be found according to the same packing materials.

Figure 2.1: MF/FS4o00 flow meter Figure 2.2: data cable

Please check immediately for the integrity of the product as well as the power and data cable, if any

abnormal is identified, please notify the distributor/sales representative or manufacturer as soon as

you can. If any defects are confirmed, an exchange shall be arranged immediately via the original

sales channel. (Note: the LED display shall not be lighted up until the power cable is plugged in). This

user manual shall also either be included in the packing box or via an online request for an electronic

version. In most cases, this manual shall be made available to the customer before the actual order.

The standard cable has an AMPMODU MTE (5 positions) compatible connector with a length of 0.5

meters.

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3. Knowing the products

3.1. Product description

Figure 3.1: MF/FS4000 parts description

3.2. Power and data cable description

Table 3.1: MF/FS4o00 pin/wire assignments.

Figure 3.2: MF/FS4o00 connection and cable

Note: 1. The standard cable has an AMPMODU MTE (5 positions) compatible connector with a length of 0.5

meters.

2. The RS485 Modbus is asynchronous, half-duplex communication. When the data are transmitted

or received from the product, the other pin is serving as the ground.

3. The RS232 communication is bi-directional. TX is the transmit pin that sends data from the product.

RX is the receive pin.

Wire

Color

Definition

Blue

RS485B / RS232 TX

Green

Analog output, 0.5~4.5Vdc

Red

Power supply, 8 ~ 24Vdc

Black

Ground

Yellow

RS485A / RS232 RX

Exchangeable

connector

LED display

MENU keys

Excahngeable

connector

Flow direction

Electrical interface, AMP

MTE, 5 positions

Meter body

Sensor body

Status indicator

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3.3. Mechanical dimensions

Figure 3.3: MF /FS4000 dimensions with BSPT (R1/4”) connectors

Figure 3.4: MF /FS4000 dimensions with one-touch connectors

Note: * Other threads or compressive types can be customized.

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4. Installation

Do not open or alter any part of the product which would lead to malfunction and irrecoverable

damage. It will also forfeit the terms of the warranty and cause liability.

The product at the time of shipment is fully inspected for its quality and meets all safety requirements.

Additional safety measures during the installation should be applied. This includes, but is not limited

to the leakage verification procedures, standard EDS (electrostatic discharge) precautions, DC

voltage precautions. Other tasks such as calibration, part replacement, repair, and maintenance

must only be performed by trained personnel. Upon request, the manufacturer will provide

necessary technical support and/or training of the personnel.

There are no preferred space directions for the installation. Flow direction should be aligned with the

arrow mark on the meter body. If the flowing fluid may have particles or debris, a filter is strongly

recommended to be installed upstream of the meter.

Please follow the following steps to complete the installation:

a) Upon opening the package, the product's physical integrity should be inspected to ensure no

visual damage.

b) Before installation of the product, please ensure that the pipe debris or particles or any other

foreign materials are completed removed.

c) Close the upstream valve, if any, completely.

d) During installation, please make sure no foreign materials (such as water, oil, dirt, particles, etc.)

entering into the installation pipeline.

e) Connect electrical wires per the wire definition in Table 3.1. Please be sure of the power supply

range (i.e., 8 ~ 24 VDC) and power supply polarization. If an adapter is used, make sure the

adapter meets industrial standards and has all safety certifications. Alternatively, this product

can also be powered by a 9Vdc battery.

f) For the data communication wire connection, please follow the description in Table 3.1 and make

sure that the wires are correctly connected to the proper ports on your data device/equipment.

Please make sure the data cable meets industrial standards with proper shielding.

g) Once the external power is successfully connected, for the MF serial of meters, the LED should

be lighted up with the proper information displayed.

h) Slowly open the valve(s) of the gas supply if any, upstream or downstream, or both of the

pipeline. the product should then start to measure the flow in the pipeline. Note: because the

meter has a large dynamical measurement range, it could be normal if you see the small instant

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