OPTO-EDU A63.7015 Manuel utilisateur

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A63.7015

Tungsten Filament Scanning Electron

Microscope, SE, 20x~150000x

Instruction Manual

To ensure the safety and obtain satisfactory performance, please study this instruction manual thoroughly before start to use the instrument.

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(1) Sample preparation & installation (sample height adjustment)

1. Open the door with the vacuum completely released.

2. Turn the bracket fixed on the control shaft counterclockwise.

3.4. Unscrew the sample stage fixed on the bracket and install the prepared sample.

5. Fix the height of the sample and adjust the height by W/D JIG. (W/D refers to working

distance)

- Rotate the upper and lower parts of the two nuts mounted on the bracket, the height of

the upper edge of the sample and the lower part of the limit arm of the clamp. After

completion, tighten the fixing nuts in opposite directions without changing the height of the

sample.

※ If the sample is relatively high, a nut can be removed to adjust the height.

Fix the stage on the bracket and turn it clockwise to fix it in place.

6. Slowly close the cabin door, press the vacuum button at the same time to vacuum, wait

until the cabin door is sucked and let go.

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(2) Equipment preparation, start, end

1. Press the power switch (POWER).

2. Open the hatch and replace the sample stage. 【Reference Manual (1)】

3. Close the hatch.

4. Press and hold the vacuum button EXCHANGE (three seconds). (vacuum time 2.5

minutes)

- Make sure you are vacuuming and try to open the hatch.

- After the vacuum is completed, the signal tone (2 beeps) and the LED signal light are

solid and do not flash.

※If the signal tone continues to call, you need to push the door again and press it again

Exchange key.

5. Select the SENSE-SEM icon on the computer desktop, double-click to start the

software, and acquire images according to the sequence of operations.

6. Click the "stop" button on the software after the image is taken to close the software.

7. Press and hold EXCHANGE to release the vacuum. (Complete in 40 seconds)

8. Turn off the power switch.

Note: A63.7006 chassis No

diaphragm rod on outer surface,

soft. There is no difference in the

software interface, no [Manual

(6)] Steps

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(3) SEM S/W startup, parameter setting

2 3 4 5

1. Double-click the SENSE-SEM icon on the desktop and wait for the software to run.

2. Select the appropriate acceleration voltage in the upper left of the software.

(5/10/15/20/30KV)

-Accelerating voltage should be selected according to the properties of the sample, image

requirements and observation magnification, etc.

-Usually the higher the acceleration voltage, the higher the resolution of the SEM, and

different objects to be observed may need to change the acceleration

voltage for best results.

3. Select the detector type SE/BSE used for this observation and analysis. (Secondary

Electrons/Backscattered Electrons)

4. Select High Vacuum mode. (High Vacuum/Low Vacuum means high vacuum/low

vacuum)

5. Click the "Start" button, and the electron gun emits an electron beam to form an image.

Note: 1) The software cannot be run when the SEM power is turned off or the SEM-PC

Cable is not connected properly.

2). The first time it starts, it starts in high vacuum mode, and it can be switched to low

vacuum during use.

(Only BSE Mode)

3). Confirm whether the electron beam current value in the upper left corner of the image

display window has risen to (above 100uA).

-The tungsten filament needs to be replaced when the current value is 40~60uA (no

picture)

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(4) Turn on the real-time image and move the observation area

1 2

1. Click on the software (320x240) function, high-speed real-time image scanning

starts.

Use this mode when adjusting focus

- When the image is dark, you need to adjust the value of "Spot Size (Electron Amount)"

(The lower the parameter the brighter / 5~30% - SE image)

- If the graphics are unstable or relatively bright and white, adjust the parameters to the

right as above

(20~70% - BSE image)

※The image cannot be seen at all

1). Confirm the filament value (beam current value in the upper left corner of the image

display window)

2. Use when looking for sample observation points (640x480) full screen mode,

wider field of view.

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(5) Adjust magnification and focus

1. Using the mechanical handle of the SEM,

X axis (transverse), Y Axis (vertical)

adjustment, move the sample to be observed

position to Center of field of view.

*When adjusting the sample position, use

low magnification appropriately

rate, it is easier to observe the shape of

the sample, easy to Determine the

location.

-Z axis (vertical) adjustment

1). When the SE detector is selected, due

to the excitation

The characteristics of SE, adjust the Z-

axis height properly, which is convenient

for collection Board attracts more SE.

2). Z-axis adjustment directly affects WD

(working distance),

And the appropriate WD and sample

surface flatness, magnetic physical

properties such as sex. uneven surface

For magnetic samples, WD is generally

5~10mm; for magnetic samples, WD is

one Generally 25~35mm.

-T axis (tilt angle)

The size of the inclination angle depends

on the magnification and the sample table

The nature of the face varies. The lower

the multiple, the smaller the inclination

angle; the higher the multiple,

The angle of inclination is large. The

sample has obvious convex and concave,

and the inclination angle is small;

The product is relatively flat and the

inclination angle is large.

2. Use the mouse cursor to adjust the magnification, zoom

to the left zooms out, and to the right the magnification

increases. (mouse cursor on High-speed real-time image

position, scroll wheel can also zoom in or out

magnification. )

3. Adjust the focus with the mouse cursor in the "Focus"

area, Coarse adjustment on the left, fine adjustment on

the right

※Focus adjustment method

- 1). Decrease the magnification, such as 300 times or

other magnifications.

- 2). Use the mouse to adjust the focus coarse adjustment

slider left and right to make the image the clearest.

- 3). Use the mouse to adjust the focus fine-tuning slider

left and right to make the image the clearest.

- 4). Change the magnification to your desired

magnification, and repeat steps 2) and 3) above.

※If you choose a magnification of 3,000 times or more,

you need to adjust it in conjunction with "Stigmation".

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(6) Aperture rod adjustment (For A63.7015 Only)

2. Image swing lever

1) Left-click the Focus wobble function in the software, the field of view is a high-speed

real-time image, and it can be adjusted repeatedly. The XY position is controlled by

electronic control until the image does not move.

- Adjust the swing function after making the image clear, it is beneficial to watch the image

swing direction, you can call the "cross"

shelf" function, easy to see the shaking direction; if the image is not clear, press

[Manual (5)] to operate.

- Shake and adjust the X-axis knob in the left and right directions of the image.

- Shake and adjust the Y-axis knob in the up and down direction of the image, from the

bottom left to the top right.

2) . Right click on the wobble, when the field of view is a high-speed real-time image, the

image sways so much that it is impossible to distinguish the shaking direction.

Reduce the shaking frequency A, and repeat the above 1) steps.

Note: 1). The swing function needs to be adjusted when changing the voltage or changing

the aperture size.

2). After adjusting the swing, it is necessary to fine-tune the focus to achieve the clearest

state.

1. Aperture adjustment

The diaphragm is divided into four gears (30, 50,

50, 100um),

The size is in order from the inside to the outside

according to the red circle in the picture.

- should be selected according to the nature of

the sample, observation magnification, etc.

Choose the aperture size, generally choose

50um. (100um for EDS)

- Adjustment method: turn left, inward or outward

Pull, rotate right to lock.

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(7) Spot size adjustment

4. Adjust the "beam" with the spot size progress bar

Amount-Size"

※ During SE image operation

1) 5~30% : The brightest image can be obtained

image, high magnification image (more than 5 thousand

times),

Because the great energy is concentrated in the focal

point, the conditioning aspect

Limited. (Expanded edge)

2) 30~60% : form a more suitable figure

Image (5K~20K times image)

※ When adjusting the spot size, according to the sample

The characteristics and equipment conditions are the

same as the above.

Difference, according to the actual observation condition

setter Combined spot pattern.

※ During BSE image operation

1) 50% before/after : you can get the best

combined image effect.

※ When changing the detector, click the

detector selection area on the software

(red box in the picture above), switch detector

(SE ↔ BSE mode)

When SE -> BSE is changed, because of the

spot size,

An unstable image like the one on the right

may appear, While adjusting the spot size

5. Stigmation

Adjust the resolution. (Click the 50% button)

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5. Stigmation

Function: Using the electron beam correction function, by moving X, Y

axis to make the image sharper and clearer.

Principle: Use an external magnetic field to convert the inherent elliptical magnetic field

The field is corrected to a nearly rotationally symmetric magnetic field.

Operation essentials:

1). Can not be used when shooting images below 3,000 times (no big difference)

2) The image is not clearly clear after high magnification adjustment and focus.

When the clearest position

Note: The adjustment range of X and Y is plus or minus 20%, and the astigmatism is

positive

In the range of minus 20%, a clear image cannot be obtained and the edge value is

A clear image is obtained indicating that the diaphragm is contaminated.

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7. Collector-CLT (collector), generally adjusted to the maximum, benefit

The excited SE/BSE is most attracted by high pressure; Amplifier-PMT (amplifier),

generally adjusted to the maximum, good for signal conversion.

8. Contrast (contrast), Brightness (brightness) is Adjust the color effect function of the

image, move the image to the right getting brighter, moving the image to the left gets

darker

9. There are 5 types of image observation modes (scanning).

1).Fast Scan-Used when real-time scanning (320x240:0 sec) to focus and adjust image

position

2). Slow Scan (640x480 : 3 seconds) Confirm and correct the picture before saving

3).Photo Mode1 (1280x960 : 30 seconds) high resolution image storage

4).Photo Mode2 (2560x1920 : 60 seconds) higher resolution image storage

5).Photo Mode3 (5120x3840 : 90 seconds) highest resolution image storage

*5 Mode software main interface can be switched at will.

10. Image Storage

- Click the save icon , after the image acquisition is completed, you will be

prompted to set the storage path. After selecting the path, the software automatically

names and saves the file.

6. The beam shift function is to slightly

move the x,y axis position of the

electron beam. When observing at

high magnification, it is difficult to

move the image through the

mechanical knob. This function can be

used to partially move the image

position for easy observation.

*Max ±150um

※Reset button makes the image

quickly return to the middle position

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