Lauda Semistat S 1200 Manuel utilisateur
Rev D - 2/19/19
Temperature Control System
MODELS Semistat S 1200, S 2400, S 4400
POU 3300, POU 3500
OPERATION MANUAL
LAUDA
-
Noah, LP.
2501 SE Columbia Way Ste 140
Vancouver, WA 98661
USA
Models S 1200, S 2400, S 4400, POU 3300, POU 3500
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COPYRIGHT
This manual and the information contained herein is the proprietary property of LAUDA-Noah,
LP.
No part of this manual may be reproduced or copied without the express written permission of
LAUDA-Noah, LP. Any unauthorized use of this manual or its contents is strictly prohibited.
Copyright © 2004-2008, 2018 LAUDA-Noah, LP. All Rights Reserved.
DISCLAIMER AND LIMITATION OF LIABILITY
The information contained in this manual is subject to change by LAUDA-Noah, LP, without prior
notice. LAUDA-Noah, LP, makes no warranty of any kind whatsoever, either expressed or
implied, with respect to the information contained herein. LAUDA-Noah, LP, shall not be held
liable for damages, of whatever kind, as a result of the reliance on or use of the information
contained herein.
INTENDED USE
The intended use for this product is for semiconductor temperature control applications. Desired
temperature is achieved by heating/cooling a recirculating perfluorinated fluid, and rejecting
heat to the facility’s water loop. Each module is intended for installation with a LAUDA-Noah
Power Supply Controller (PSC)
PRODUCT USAGE STATEMENT
DANGER:
Read this entire manual and all other publications pertaining to the work to be
performed before installing, operating, or maintaining this equipment. Practice all
plant and product safety instructions and precautions. Failure to follow
instructions can cause personal injury and/or property damage. If the equipment
is used in a manner not specified by the manufacturer, the protection provided by
the equipment may be impaired. All personnel who work with or who are exposed
to this equipment must take precautions to protect themselves against serious or
possibly fatal bodily injury. LAUDA-Noah, LP, provides information on its products
and associated hazards, but it assumes no responsibility for the after-sale
operation of the equipment or the safety practices of the owner or user. This
equipment produces or uses potentially lethal high-voltage, high-current,
electrical power.
NEVER DEFEAT INTERLOCKS OR GROUNDS.
Models S 1200, S 2400, S 4400, POU 3300, POU 3500
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Table of Contents
________________________________________________________________________________ 1
1. INTRODUCTION __________________________________________________________ 3
1.1. General Information _________________________________________________________ 3
1.2. Safety and Certification ______________________________________________________ 4
1.3. Risk of Burns _______________________________________________________________ 4
2. Installation ______________________________________________________________ 6
2.1. Conditions of Use ___________________________________________________________ 6
2.2. Unpacking and Handling ______________________________________________________ 7
2.3. Site and Climate ____________________________________________________________ 7
2.4. Identification of Ports and Connections _________________________________________ 9
2.5. Fluid Connections __________________________________________________________ 10
2.6. Electrical Connections _______________________________________________________ 15
3. Startup ________________________________________________________________ 17
3.1. Fill Procedure _____________________________________________________________ 17
3.2. System Startup ____________________________________________________________ 18
4. Operation ______________________________________________________________ 19
4.1. PSC Panel _________________________________________________________________ 19
4.2. Basic Module Operation _____________________________________________________ 20
5. Maintenance____________________________________________________________ 21
5.1. Basic Maintenance _________________________________________________________ 21
5.2. Unit Removal _____________________________________ Fehler! Textmarke nicht definiert.
5.3. Service ___________________________________________________________________ 21
6. Troubleshooting _________________________________________________________ 22
6.1. List of Alarms and Warnings __________________________________________________ 22
6.2. Troubleshooting ___________________________________________________________ 24
7. Technical Features ________________________________________________________ 0
Models S 1200, S 2400, S 4400, POU 3300, POU 3500
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1. INTRODUCTION
1.1. General Information
To ensure safe operation, read and understand this manual before attempting to install or
operate this unit. Read the safety instructions and follow the safety practices under “Safety”.
Interpreting the Manual
The following sections explain the type conventions, icons, and symbols that appear in
this manual.
Type Conventions
To identify certain words and phrases in type that differ from the rest of the text quickly, please
note the following type conventions:
Pin and signal names appear in capitalized italics (DUTY CYCLE.A).
Technical terms appear in italicized text when first introduced.
Unit labels (switches, indicators, etc.) generally appear in boldface letters as they are
labeled on the unit (MODIFY).
Commands (162) and command names (setpoint) appear in boldface lowercase letters.
Icons (Symbols)
This symbol represents important notes concerning potential harm to this unit, or
associated equipment.
DANGER:
This box identifies hazards or unsafe practices that could result in severe
personal injury or death.
WARNING:
This box identifies hazards or unsafe practices that could result in personal
injury.
CAUTION:
This box identifies hazards or unsafe practices that could result in product or
property damage.
Models S 1200, S 2400, S 4400, POU 3300, POU 3500
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The following symbols may appear on labels on the unit:
Electrical Hazard
CE label
Heat Hazard
1.2. Safety and Certification
Do not attempt to install or operate this equipment without proper training.
Ensure that this unit is properly grounded.
Ensure that all cables are properly connected.
Verify that input line voltage and current capacity are within specifications before turning
on the power supplies.
Use proper electrostatic discharge (ESD) precautions.
Do not attempt to operate product outside of its specified electrical range.
1.3. Risk of Burns
Avoid areas of the unit marked with the heat hazard label to reduce the risk of burns.
Additionally, use insulation on process hose/tubing and fittings to reduce the exposure of
potentially high temperature areas.
Product Safety/Compliance
Certain options of this product will be tested for and comply with Electromagnetic Compatibility
(EMC) standards. Certification is pending.
Models S 1200, S 2400, S 4400, POU 3300, POU 3500
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Certification
Certain options of this product are pending certification by:
CE certification
EMC measurements
SEMI S2
For more information, refer to the letter of conformance (US) or declaration of conformity (EU)
accompanying the product.
Models S 1200, S 2400, S 4400, POU 3300, POU 3500
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2. Installation
2.1. Conditions of Use
Install this unit according to the following requirements.
DANGER:
Operating and maintenance personnel must receive proper training before
installing, troubleshooting, or maintaining high-energy electrical equipment.
Potentially lethal voltages could cause death, serious personal injury, or damage to
the equipment. Ensure that all appropriate safety precautions are taken.
DANGER:
RISK OF DEATH OR BODILY INJURY. Disconnect all sources of input power before
working on this unit or anything connected to it.
To be in compliance with the stated directives and standards, the following conditions of use
must be met:
Operate the point-of-use module only within a system configuration that contains
accessory components authorized and provided by LAUDA-Noah, LP, or one of its
authorized agents.
Install and operate this device in an over voltage category II installation only.
Install and operate this device only in a pollution degree 2 or better environment (an
indoor location such as a computer room, office, or factory floor), where only non-
conductive pollution occurs during operation.
To prevent toppling, the point-of-use module must also be securely mounted by a
bracket or in a subfloor tile mount.
When dealing with any fluids such as coolant or facility water, utilize PPE such as gloves
and protective eyewear to avoid direct contact with skin or eyes.
Models S 1200, S 2400, S 4400, POU 3300, POU 3500
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2.2. Unpacking and Handling
WARNING:
Heavy Load. The 3300 /2400 module weighs 25 kg (55 lb). The 3500/4400 module
weighs 38 kg (84 lbs). The power supply/ controller weighs up to 30 kg (66 lbs).
Lifting can cause muscle strain or back injury. Use lifting aids and proper lifting
techniques when installing, removing or replacing.
Unpack the unit carefully. Verify that all items checked on the packing slip are in the crate.
Inspect the unit for obvious physical damage. Contact LAUDA-Noah, LP Customer Support and
the carrier immediately if there are signs of shipping damage. Save the shipping container for
submitting necessary claims to the carrier.
Utilize the handles on the top of the unit for transport, and use a 2 person lift for the POU 3500
and S 4400.
2.3. Site and Climate
The unit must be installed vertically, according to the markings on the side of the unit. We
recommend that the unit be located no more than 3.8m (12.5 ft) away from the temperature
control target.
The electrical protection degree of the unit is IP2X, indicating the unit is for indoor use only, with
no protection against water droplets.
Since the unit is liquid cooled, there are no requirements for spacing and ventilation. However,
accommodations must be made for the unit’s fluid and electrical connections. Do not position
the equipment so that it is difficult to access these connections.
Additionally, avoid installing the unit’s process loop through areas where someone may come
into contact with tubing/hose in order to reduce risk of burns.
Models S 1200, S 2400, S 4400, POU 3300, POU 3500
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The following table denotes the climatic specifications of the unit.
Temperature Relative Humidity Air Pressure
Operating 0°C to +50°C
(+32°F to +122°F)
10% to 90%
1
+2 g/m3 to +25g/m3
1 Atm
Storage and
Transportation
-20°C to +60°C
(-4°F to +140°F)
10% to 90%
1
+2 g/m3 to +25g/m3
1 Atm
1 Noncondensing
Models S 1200, S 2400, S 4400, POU 3300, POU 3500
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2.4. Identification of Ports and Connections
The following illustration depicts the unit’s external fittings and connectors.
Ce manuel convient aux modèles suivants
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