Kofloc 8700 Series Manuel utilisateur

MJ400306A1

Thermal Mass Flow Meter / Controller

MODEL 8700 SERIES

INSTRUCTION MANUAL

MJ400306A1

Please read this manual thoroughly prior to installing and using the product. This

way it is possible to ensure the performance and safety of the product and prevent

possible accidents and damage to the product due to incorrect use.

When the product has failed or is considered to require readjustment, please

contact our sales office. Our experienced technical staff will give you appropriate

advice. Please follow the instructions given.

Please note that if you repair modify the product yourself, not only serious

accidents may occur, but our warranty will become void.

The contents of the manual are subject to change without notice for improvement.

Prior to shipment, every care has been taken in preparing this manual not to

mention the product itself, but if you notice any imperfections, errors or omission,

please contact KOFLOC.

<< Prior to use >> and << Precautions for use >>

Various alert symbols and signal words are used in this manual and attached to the

product to ensure correct use of the product and to prevent possible personal injury or

loss of life and property damage. The symbols and meanings of the signal words are as

follows:

Ignoring this symbol and handling the product

incorrectly will immediately result in loss of life or

serious injury.

Ignoring this symbol and handling the product

incorrectly may result in loss of life or serious injury.

Ignoring this symbol and handling the product

incorrectly may result in personal injury or damage to

property.

DANGER

WARNING

CAUTION

MJ400306A1

Table of Contents

Page

1. Foreword 4

2. Precautions for Use 4

3. Overview and Configuration of the Product 6

4. Standard Specifications 7

5. Special Functions 9

6. Installation 10

7. Connector and Pin Assignment 12

8. Preparation Prior to Use 14

9. Nomenclature and Functions of the Indicator 15

10. Nomenclature and Functions of the Main Unit 16

11. Basic Operation of the Indicator 17

12. Changing Over the Operation Modes 20

13. Applied Operating Procedure 21

14. List of Function Setting Modes 25

15. Alarm Codes and Corrective Actions 29

16. Troubleshooting and Precautions for Servicing 30

17. After-Sales Service 32

18. Product Warranty 32

19. External View 33

MJ400306A1

1. Foreword

Thank you for your selection of the mass flow meter controller Model 8700 Series. Prior to using

your new equipment, please read this manual thoroughly to ensure it is used in the correct way.

2. Precautions for Use

(1) Peripheral Equipment to Connect

① The connector pin assignment of Model 8700 Series is different from that of

Model 8500 Series and D8500 Series. For details, refer to 7. Connector and Pin

Assignment.

② Model 8700 Series allows the use of the same AC adapter as that for Model 8500

Series and D8500 Series. (The outside of the jack is +24 V.)

③ Check to see if the voltage (24 VDC), polarity and current capacity (0.3A or over)

of the power supply are correct.

④ Check to see if the analog set input is the signal within the allowable input range.

The allowable maximum input voltage is10 V and the allowable maximum input

current is 30 mA.

⑤ When the analog flow rate output signal is to be used, make sure that the proof

pressure on the input equipment side is sufficient. The output may possibly be in

a range of -1 to 7 V in the case of voltage and 0 to 26 mA in the case of current.

(2) Items to Check about the Product

Do the specifications shown on the label match your order?

(The ordered product has been assembled and adjusted one by one according to the

specifications. The ID plate attached to the back of the case shows the gases to use,

flow rate and other specifications. Check to see if they comply with your order

specifications.)

①

MODEL 8700MC - 0

8700MC：Controller 0：Integrated indicator type

8700MM：Meter S1：Separate indicator type 1 m

8750MC：Controller S3：Separate indicator type 3 m

8750MM：Meter S5：Separate indicator type 5 m

② Fluid name

③ Flow rate calibration temperature

SCCM = ml min at 0℃ : 1 atm

SLM = l min at 0℃ : 1 atm

NCCM = ml min at 20℃ : 1 atm

NLM = l min at 20℃ : 1 atm

※ ”SCCM” stands for Standard Cubic Centimeter per Minute and normally refers to the

state at 0℃, but there are many industries where the normal state is at 20℃.

KOFLOC indicates the units of flow rate together with the calibration

temperature and atmosphere.

MJ400306A1

If the calibration temperature is different, the actual flow rate will become

different largely. Always check it prior to use.

④ Presence of the serial No.

(3)

Precautions for Transportation

Wherever possible, transport the product in the condition in which it has been received from

KOFLOC to the installation site in order to prevent damage due to accidents during

transportation

(4)

Precautions for Storage of the Product

If the product is not put in use for a long time after it was received, unexpected troubles may

occur.

When it is expected that the product will be kept in storage for a long time, take the following

precautions:

・Store the product in the package in which it was received from KOFLOC, wherever possible.

・Store the product in a place described below:

① A place free of rain and water.

② A place free of vibration and impact.

③ A place of normal temperature and normal humidity (around 25℃, 65%).

④ A place free of dust.

⑤ A place free of corrosive gases.

⑥ A place free of a strong electric magnetic field.

・To store the product that has been used, purge it with clean air or N2 so that measuring gas

will not remain in the flow meter.

Cover the inlet and outlet sides (joints) of measuring gas with caps to prevent intrusion of dust

and dirt.

MJ400306A1

3. Overview and Configuration of the Product

(1) Overview of the product

Model 8700 Series is a gas flow control measuring equipment with an integrated flow

sensor developed based on the principle of the thermal flow sensor, flow control valve

(controller type) and indicator.

8700 Series has the following functions and features:

・Normally closed type. (Controller type)

・A large flow rate realized by a small body by employing a high-lift actuator.

(Controller type)

・An indicator is installed and can be operated with a single 24 VDC power supply only.

・Both of digital control (indicator, communications, contact) and control by analog signals

are possible. (Voltage signal: 0 – 5 V or current signal: 4 – 20 mA)

(2) Configuration

Model 8700 Series is configured with a sensor, bypass, electric circuit and valve (controller

type only) as shown below.

Indicator

Proportional

control circuit

Bridge circuit

Amplific

ation

operation circuit

Sensor

Gas IN

Bypass

Gas OUT

Valve

MJ400306A1

4. Standard Specifications

Item Specifications

Model Name 8700 MC MM 8750MC MM

F.S. flow rate (N

) 10SCCM～20SLM 20SLM～100SLM

Specifiable gas N

, Air , O

, CO

, Ar , H

, He , etc.

Sensor type Thermal winding sensor

Valve actuator※1 Solenoid normally closed type

Control

Control range※2

2～100% F.S. 5～100％F.S.

Response 2 sec Max. （0→98%） 3 sec Max. （0→98%）

Accuracy

Accuracy ±1.0 % F.S.（25℃） ±1.5 % F.S.（25℃）

Repeatability ±0.5 % F.S.

Pressure

Proof pressure

1 MPa (G)

Operating

pressure 500kPa (G) Max.

Operating

differential

pressure※1

50～300kPa（F.S.≦5SLM）

100～300kPa（F.S. > 5SLM）

150～300kPa（F.S.≦50SLM）

200～300kPa（F.S. >50SLM）

Pressure

characteristic 0.3% F.S. 100 kPa

Temperature

Working

temperature

5～45℃

Temperature

characteristic

0.1％F.S. ℃ 0.2%F.S. ℃

Humidity

Allowable

operating

humidity

10 – 90 %

(no condensation)

Flow rate setting

※1※3

Digital

①Indicator ② Communications

③ Event input selection

Analog Standard: 0 – 5 V (Input impedance 100 kΩ min.)

Selection: 4 – 20 mA (Input impedance approx. 250 Ω)

Flow rate output

※3 Analog Standard: 0 – 5 V (External load resistance 250 kΩ min.)

Selection: 4 – 20 mA (External load resistance approx. 300 Ω max.)

Display Method 7-segment LED, 4 digits

Other

input output

functions

Event input 5 contacts

Alarm output 1x NPN open collector output Max 35V : 50mA

Event output 2x NPN open collector output Max 35V : 50mA

MJ400306A1

Power supply

Rating 24 VDC, power consumption 300 mA max.

Allowable volta

range

DC22.5V～25.2V

Installation posture Any posture

Materials of parts in contact with gas

SUS316 , SUS316L , SUS430 , Fluor rubber ,

PTFE , Chloroprene rubber (Optional)

Joint Rc1 4 Rc3 8 (Optional：1 4SWL,1 8SWL,1 4VCR, 3 8SWL)

Weight Integrated type approx. 1200 g

separate type approx. 1400 g

Integrated type approx. 1500 g

separate type approx. 1700 g

※1 Applicable to the controller only.

※2 Measuring range in the case of the meter.

※3 The analog input output is changeable on the indicator.

MJ400306A1

Special Functions

(1)

Indicator function

・Indication: 7-segment LED, 4 digits

・Indication update cycle: Selected from 50 msec , 100 msec , 200 msec, 500 msec and 1000

msec time

・Status indicator lamp: Green 7 pieces Red 1 pieces

・Key switch: 6 pieces

(2)

Integration function

※To make setting about integration, refer to 13. Applied Operating Procedure.

①Maximum integrated flow rate

Maximum 12-digit integration measurement is possible.

For details, refer to 11. Basic Operation of the Indicator.

②Integration timing

An instantaneous flow rate value is added every one second.

③Power failure measure

The integrated flow rate is stored held every one minute and as soon as the power is

recovered, integration will restart. When this happens, the integrated flow rate for one

minute maximum from the storage to the power failure is lost.

(3)

Upper lower limit flow rate alarm allowable range (OK judgment) function

※To use this function, refer to 13. Applied Operating Procedure.

① When the instantaneous flow rate value is above the upper limit alarm value or below

the lower limit alarm value, the ALM LED lights and the alarm output is turned on.

② When the instantaneous flow rate value is between the lower limit alarm value and the

upper limit alarm value, the OK LED lights.

(4)

Zero adjust and auto zero functions

① Zero adjust function

Pressing the yellow [ZERO] adjust switch on the side face of the main unit corrects the

zero point.

② Auto zero function

When the operation mode is the fully closed state or when the set flow rate is 0 and the

instantaneous flow rate value is 2% of the full scale or less, the zero point is

automatically corrected.

※Refer to “D-08” and “D-09” in 14. List of Functions Setting Modes.

MJ400306A1

Installation

(1) Installation place

①This equipment is designed for indoor use.

Never install the equipment in a place where it is likely to be wetted by water or rain. The

equipment may fail. Install the equipment in a place where sufficient ventilation is provided

and changes in humidity are minimal.

②Install the equipment in a place free of vibration and impact.

③Do not use the equipment under direct sunlight or at high temperature humidity.

④Install the equipment in a place free of dust.

⑤Install the equipment in a place free of corrosive gases.

⑥Install the equipment in a place free of a strong electric magnetic field.

⑦Install the equipment in a place where ambient temperature is 15 to 35℃.

The use of the equipment in a condition deviating from the conditions described in the

specifications is a cause of failure.

When installing the mass flow unit, noise generating sources in the

vicinity of installation, environment filled with moisture and dust and very

hot, corrosive gas ambient must be avoided. Such conditions are causes of

serious failure.

(2)

Installation method

Install the equipment using the threaded holes (M4) on the bottom of the body.

For installation hole dimensions, refer to 19. External View on page 33.

(3)

Installation posture

The basic installation posture is horizontal. If the equipment is to be installed vertically,

warm up the equipment fully and conduct the zero point adjustment.

Determine the direction of gas inlet and outlet as indicated by the arrows on the ID plate.

CAUTION

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Ce manuel convient aux modèles suivants

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