JEOL JSM-35C Manuel utilisateur

'll

INSTALLATION INSTRUCTIONS

FOR

JSM-35C

SCANNING

MICROSCOPE

dEOL

U.S.A.

IN(.

TECHNICAL

SERVICE

DIVISION

(OFFICIAL

USE

ONLY)

TABLE

CONTENTS

Page

Installation

Layout

Water

Supply

Wiring

Vacuum

Sequence

Electronics

Adjustments

•••.....•.•...•••

Scan

Generator

Adjustment

Brightness

Adjustment

CSI

Focus

Adjustment

CSI

Pincushion

Adjustment

Line

Scanning

Profile

(LSP)

Image

WFM

Adjustment

Magnification

Adjustment

Auto

Focus

Adjustment

Dynamic

Focus

Adjustment

10.

Numbering

11.

Attachments

Column

Cleaning

••••••••.••....•••....•..

Resolutlon

Pictures

••.•••...•••.•..••.•.

Installation

should

conducted

according

the

above

steps,

making

sure

that

each

step

has

been

properly

com-

pleted.

Check

appropriate

box

upon

completion.

The

standard

installation

time

including

the

instruction

should

about

days.

the

adjustments

outlined

this

booklet

are

performed

the

presence

the

cutomer,

the

instruction

time

will

reduced.

INSTALLATION

Layout

If',

Leave

working

space

between

the

main

console

and

the

surrounding

room

shown

Figure

The

minimum

distance

around

the

instrument

inches.

I)LI

Install

the

variac

the

wall,

least

feet

from

the

column.

(See

Figure

1.)

sure

place

the

rubber

mounts

under

the

four

corners

the

column

console.

•

.-1

("t") g.

'QRIAC

~<\,

•

/.~.

<\,0/"

~o~Y

...

...,

......

(Figure

-1-

""-

...

.........

..,

I I

-...

...

......

(Figure

Wiring

must

done

neatly

and

correctly.

connect

the

cables

for

ease

your

future

service

work.

f;1-

Make

sure

that

all

modules

without

any

trouble.

can

pulled

out

III

Install

anode

chamber,

main

evacuation

pipe,

and

H.V.

cable.

Tighten

the

four

screws

the

H.V.

cable.

-EJ

Make

sure

that

the

gun

chamber

clean.

Mount

the

wehnelt

assembly,

with

filament.

'f<']

Check

IOOV

the

pump

box.

Red

Hot

Black

Neutral

-3-

VACUUM

SEQUENCE

Ell

tIs.

.f#1-.

G.,

ill-

q.Lll.

Turn

the"Unattended

Operation"

switch

(upward).

Turn

the

"Key"

switch

and

the

water

supply.

Check

24V

the

pump

box.

Make

sure

that

the

indication

lamp

located

the

vacuum

panel

comes

for

minute

warm-up.

Attach

the

digital

volt

meter

Fluke

(2mA

range)

data

precision

(lmA

range)

the

jack

the

vacuum

circuit

located

the

left

inside

the

column

console.

Depress

the

VENT

button

and

make

sure

that

the

multimeter

reading

indicates

about

250pA

atmosphere.

not,.

adjust

housed

the

VG-07L

vacuum

control

circuit.

(See

Figure

3.)

Depress

the

"Pump-down"

button.

Make

sure

that

the

meter

reading

reaches

25pA

minutes

with

open.

Depress

the

VENT

button

again

and

make

sure

that

the

meter

reading

indicates

about

250pA.

Depress

the

Pump-Down

button

and

make

sure

that

valve

opens

and

valve

closes

170pA.

not,

adjust

R4.

(To

lower

the

switch

over

point,

turn

counterclockwise.)

Within

minutes

(it

may

take

longer

first)

after

the

vacuUm

system

set

pumping,

the

meter

reading

should

drop

25).lA. .

Pump

down

for

hour.

Then,

check

the

leak

rate

accordance

with

the

following

directions,

with

the

Sanwa

multimeter.

The

permissable

leak

rate

less

than

4pA/minute.

-4-

[2J

13.

-Etf

14.

b/.I.

15.

Procedure

for

checking

vacuum

leak

rate:

(1)

Turn

the

DP,

RP,

and

switches

located

the

vacuum

circuit

panel.

(2)

Set

the

Valve

Lock/Auto

switch

the

vacuum

circuit

panel

Manual.

(At

this

time,

the

pumping

stopped

with

all

remaining

valves

closed.)

(3)

Check

the

leak

rate

every

minute

with

the

digital

volt

meter

for

minutes

and

figure

out

the

average

dividing

the

total

leak

rate

(4)

order

back

the

Auto

operation,

turn

the

valve

lock

switch

Auto.

Wait

for

the

red

warning

lamp

the

vacuum

system

off.

Then,

turn

off

the

DP,

RP,

and

switches.

the

meter

reading

not

25pA

with

the

ready

lamp

on,

adjust

R3.

(See

Figure

3.)

The

ready

lamp

should

now.

not,

adjust

R5.

(See

Figure

3.)

Vent

the

column,

then,

pump down

again.

Double-

check

that

the

ready

lamp

comes

when

the

meter

about

30~A.

vacuum

gauge

available,

adjust

turn

the

r~~dy

lamp

when

the

vacuum

better

than

4 x

torr.

Check

function

according

the

following

procedure:

the

gun

isolation

manual

valve.

Turn

the

valve

fully

clockwise.

Depress

the

VENT

button.

Then,

valve

closes

andLVl

valve

opens.

not,

pump

down

again,

and

adjust

R6.

-5-

Then,

repeat

steps

and

until

the

valve

sequence

proper.

Depress

the

PUMP

button.

•.

valve

closes

and

valve

opens,

with

valve

closed.

About

2 - 3

minutes

later,

valve

closes,

valve

opens,

and

valve

opens.

NOTE: When

this

procedure

conducted,

the

column

must

under

high

vacuum

and

the

ready

lamp

has

ON.

Only

the

gun

chamber

being

leaked

this

time,

and

the

specimen

chamber

remains

under

high

vacuum.

Overnight

leak

rate

test

usually

takes

over-

night

obtain

good

vacuum

leak

rate

indication

becuase

the

outgassing

from

inside

the

column.

You

can

simply

check

the

vacuum

leak

rate,

however,

jUdging

the

pumping

sound

the

rotary

pump

the

following

manner:

(1)

Pump

the

column

for

2 - 3

hours.

(2)

Turn

off

and

leave

the

instrument

overnight.

(3)

Turn

the

instrument

again

the

morning.

Listen

for

the

pumping

sound

when

valve

opens.

(4)

the

column

under

high

vacuum,

you

can

hardly

hear

the

pumping

sound

all.

-6-

( .

Potentiometers

(Figure

--~

(Ready

Pot)

Adjusts

H.V.

ready

point.

(Maximum

torr.

4 x

10-

(Shutter

Pot)·

Controls

V4.

used

when

checked

for

proper

filament

exchange

sequencing.

(High

Vac.Pot)

used

establish

the

proper

VI/V3

switching

point.

(Meter

Pot)

Adjusts

meter

reading

get

250pA

atmosphere.

(Meter

Pot)

Adjusts

25pA

(pi

rani

meter

reading

high

vacuum

saturating

point).

-7-

------

----------._---

ELECTRONICS ADJUSTMENTS

Push

down

the

Unattended

Operation

switch,

and

check

all

the

voltages

the

back

the

power

supply.

The

Unattended

Operation

switch

must

turned

every

time

unit

has

pulled

out

replaced.

Scanning

Generator

Adjustment

Pullout

the

SCAN

GENERATOR

unit.

The

most

important

thing

about

the

scan-generator

.thatthe

Slow

horizontal

speed

synchronized

to.

60HZ.

Checking

procedure:

Evacuate

the

airlock

chamber

and

open

the

door.

Turn

the

PMT

switch

on.

This

PMT

detects

any

light

leak

through

the

airlock

chamber.

Observe

60HZ

(light)

noise

the

screen.

Slow

the

60HZ

noise

should

appear

Figure

with

vertical

bars.

not,

adjust

the

SYNC.

H. FREQ.

potentiometer

the

top

the

scan-generator.

(If

horizontal

sweep

not

synchronized,

black

stripes

should

appear

horizontally.)

Check

Vertical

Scan

Speed

Slow

Decrease

the

vertical

size,

using

Selected

Area

Y-width.

Then,

time

the

line

movement

from

top

bottom

(it

should

seconds).

not,

adjust

FREQ.

the

Scan

Generator

unit.

-8-

--",,"

'-';;.,.

-:~~~

,,{<c>

:,.~

....

...

-:;K

I .,

c·~

~--

-."

1.;~

2l~:

':",

:~:,-r;t_

"~"-:

":-~'

-:',iI

';;:';~~'~o-~.

'~'.

'-J.

-<.~!

.,-.>

~~:~

";:;

;';-,-/1t.

.~.

"',

~~~~

'-;"

":-

;.A

'._-,""

___

~'~~':?;:~~

-.:..'

~.:;~,.

-L-

(Figure

Brightness

Adjustment

(Line,

Spot,

WFM)

Before

starting

this

adjustment,

sure

pull

out

the

display

unit,

remove

the

two

side

panels,

connect

the

power

extension

cable,

and

turn

off

the

Unattended

Operation

switch.

Display

(1)

Set

the

contrast

12:00

and

the

birght-

ctJ

ness

3:00

the

Display

unit.

(2)

Depress

SLOW

and

Wave

Form

Monitor

(WFM).

Adjust

VR3

DU05c

order

make

WFM

comfortable

brightness

(see

Figure

5).

(3)

Adjust

brightness

SEI

locate

the

CfJ

signal

line

between

the

seco?d

and

the

third

lines

from

the

bottom

WFM.

-.-

...

------------.-----.----..

WFM

Signal

(4)

Depress

the

Normal

button.

Adjust

VIEW

PIC

brightness

VR7,

and

make

the

raster

visible

the

monitor.

*The

raster

should

not

too

bright

nor

too

dark.

-9-

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