Inficon RSH-600 Manuel utilisateur

OPERATING MANUAL

RSH-600

Rotary Sensor Head

PN 153800-L

over

age

Trademarks

The trademarks of the products mentioned in this manual are held by the companies that

produce them.

Scotch-Brite®is a registered trademark of 3M.

Teflon®and Kapton®are registered trademarks of E. I. du Pont de Nemours and Company or its affiliates.

All other brand and product names are trademarks or registered trademarks of their respective companies.

Disclaimer

The information contained in this manual is believed to be accurate and reliable. However, INFICON assumes

no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related

to the use of this product.

Due to our continuing program of product improvements, specifications are subject to change without notice.

Reproduction or adaptation of any part of this document without permission is unlawful.

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RSH-600 Operating Manual

Table Of Contents

Trademarks

Disclaimer

Chapter 1

Introduction

1.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1

1.2 Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2

1.3 How to Contact INFICON . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2

1.4 Returning Your RSH-600 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3

1.5 Unpacking and Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3

1.6 Base Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4

1.7 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5

1.8 Replacement Parts and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6

Chapter 2

Installation

2.1 Configurations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2

2.2 Functional Verification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3

2.3 Crystal Sensor Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4

2.4 Mounting. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5

2.5 Adjustable Flange Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6

2.6 Copper Head Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8

2.7 Cooling System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8

2.8 Air Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8

2.9 Crystal Position Feedback Connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9

2.10 Protection from Evaporant . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9

Chapter 3

Troubleshooting and Maintenance

3.1 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1

3.2 Troubleshooting RSH-600 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1

3.3 Maintain the Temperature of the Crystal . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4

3.4 Use the Optimum Crystal Type . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4

3.5 Crystal Concerns when Opening the Chamber . . . . . . . . . . . . . . . . . . . . . . 3-4

3.6 Crystal Holder Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4

3.7 Crystal Replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5

Chapter 4

Outline Drawings

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RSH-600 Operating Manual

Chapter 1

Introduction

1.1 Introduction

The RSH-600 rotary sensor is designed for the most demanding processes

employing very thick films and several different materials. See Figure 1-1.

Switching the crystal without venting the system makes it possible to run

automatically with continuous deposition. The fixed position of the crystal being

measured also makes it unnecessary to change the tooling factor.

RSH-600 can be used to deposit a different material on each of six crystals

providing greater measurement accuracy. Upon completion of deposition of one

material, the deposition controller may be programmed to switch crystals for the

next material. Switching crystals may also be actuated manually.

The RSH-600 sensor holds six crystals in a thermally shielded, water cooled

housing, insuring excellent crystal performance in temperature environments up to

300ºC. Crystals are housed in an easily removable Teflon®and stainless steel

crystal holder.

Crystal position is switched by applying a one second pulse to a 110/115 V (ac) or

24 V (dc) pneumatic valve. A 7-pin connector provides an indication of the number

of the active crystal. This may be used to interface with a thin film controller for

automatic crystal switching operation. Refer to the controller operating manual for

programming instructions.

Figure 1-1 RSH-600 and sensor head options

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RSH-600 Operating Manual

1.2 Safety

When using this manual, please pay attention to the Notes, Cautions, and Warnings

found throughout. For the purposes of this manual they are defined as follows:

NOTE: Pertinent information that is useful in achieving maximum efficiency

when followed.

CAUTION

Failure to heed these messages could result in damage

to the instrument.

WARNING

Failure to heed these messages could result in

personal injury.

1.3 How to Contact INFICON

Worldwide customer support information is available under Support at

www.inficon.com where you can contact:

a Technical Support Engineer with questions regarding applications.

a Service Engineer with questions regarding troubleshooting, diagnosing or

repairing a defective sensor.

Sales and Customer Service, to find the INFICON Sales office nearest to you.

Repair Service, to find the INFICON Service Center nearest to you.

If you are experiencing a problem with RSH-600, please have the following

information readily available:

the serial number of RSH-600,

a description of your problem,

an explanation of any corrective action that you may have already attempted,

and the exact wording of any error messages that you may have received.

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RSH-600 Operating Manual

1.4 Returning Your RSH-600

Do not return any component of your sensor to INFICON without first speaking with

a Customer Support Representative. You must obtain a Return Material

Authorization (RMA) number from the Customer Support Representative.

If you deliver a package to INFICON without an RMA number, your package will be

held and you will be contacted. This will result in delays in servicing your instrument.

Prior to being given an RMA number, you may be required to complete a

Declaration of Contamination (DOC) form if your sensor has been exposed to

process materials. DOC forms must be approved by INFICON before an RMA

number is issued. INFICON may require that the sensor be sent to a designated

decontamination facility, not to the factory.

1.5 Unpacking and Inspection

1If the RSH-600 sensor has not been removed from its shipping container, do

so now.

2Carefully examine the RSH-600 sensor for damage that may have occurred

during shipping. This is especially important if there is obvious rough handling

on the outside of the container. Immediately report any damage to the carrier

and to INFICON.

3Do not discard the packing materials until inventory is taken and a functional

verification test is performed. See section 2.2.

4Take an inventory of the order by referring to the order invoice and verifying that

the items listed in section 1.6 were received.

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RSH-600 Operating Manual

1.6 Base Configuration

RSH-600 Rotary Sensor Head. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15320X-XX

See Figure 1-2 below for possible configurations.

Figure 1-2 RSH-600 configurations

Crystals (2 boxes, 10 total) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 103200-2

Technical Manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . 153800 on 074-5000-G1 CD

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RSH-600 Operating Manual

1.7 Specifications

Number of Crystals: 6

Crystal Size . . . . . . . . . . . . . . . . . . . 14 mm (0.550 in.) diameter

Installation Aperture: . . . . . . . . . . . . 5.08 cm (2.0 in.) diameter

Overall Length

RSH-600 w/flat head . . . . . . . . . 208 mm (8.19 in.) plus in-vacuum length

RSH-600 w/angled head . . . . . . 219 mm (8.62 in.) plus in-vacuum length

Adjustable in-vacuum Length . . . 200 mm (7.9 in.) (standard)

350 mm (13.8 in.)

450 mm (17.7 in.)

540 mm (21.3 in.)

650 mm (25.6 in.)

Power Requirement . . . . . . . . . . . . . 115 V (ac) @ 50 mA or 24 V (dc) @ 20 mA

Crystal Switching Method. . . . . . . . . Air Actuated @ 55 psi (4 kg/cm2) regulated

Cooling Method . . . . . . . . . . . . . . . . Water-cooled @ 5 L/m at 2 kg/cm2(28 psi)

Air and Water Connections. . . . . . . . (3) 6.35 mm (1/4 in.) quick connects

Operating Temperature. . . . . . . . . . . 300°C max with water cooling and Standard

Head Cover

400°C max with water cooling and Copper

Head Cover

Weight: (standard length) . . . . . . . . 200 mm (7.9 in.) RSH-600 - Flat - 3.8 kg

(8.5 lb.)

RSH-600 - Angled - 4.5 kg (9.9 lb.)

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RSH-600 Operating Manual

1.8 Replacement Parts and Accessories

Flat Copper Head Cover . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 153731

Angled Copper Head Cover . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 153731-2

Flat Stainless Steel Head Cover (See Figure 1-3) . . . . . . . . . . . . . . . . . . . 153708

Angled Stainless Steel Head Cover (See Figure 1-4) . . . . . . . . . . . . . . . . 153713

Flat Crystal Retainer Assembly (See Figure 1-3). . . . . . . . . . . . . . . . . . . . 153204

Angled Crystal Retainer Assembly (See Figure 1-4) . . . . . . . . . . . . . . . . 153204-2

Flat Crystal Holder (See Figure 1-3) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 153710

Angled Crystal Holder (See Figure 1-4) . . . . . . . . . . . . . . . . . . . . . . . . . . . 153716

Flat Spring Retainer Assembly (See Figure 1-3) . . . . . . . . . . . . . . . . . . . . 153706

Angled Spring Retainer Assembly (See Figure 1-4) . . . . . . . . . . . . . . . . . 153714

Flat Spring Retainer Contact Kit (See Figure 1-3) . . . . . . . . . . . . . . . . . . . 153724

Spring Contact (See Figure 1-3 and Figure 1-4) . . . . . . . . . . . . . . . . . . . . 153726

Flat Retainer Screw (See Figure 1-3) . . . . . . . . . . . . . . . . . . . . . . . . . . . . 153709

Angled Retainer Screw (See Figure 1-4) . . . . . . . . . . . . . . . . . . . . . . . . . . 153715

Angled Retainer Spacer (See Figure 1-4) . . . . . . . . . . . . . . . . . . . . . . . . . 153717

M3x6 Screw for Flat Crystal Retainer Assembly (See Figure 1-3). . . . . . . 144-101

M3x12 Screw for Angled Crystal Retainer Assembly (See Figure 1-4) . . . 144-224

Solenoid Valve Assembly, 24 V (See Figure 4-1). . . . . . . . . . . . . . . . . . . . 153707

Crystal Position Male Connector (See Figure 4-1). . . . . . . . . . . . . . . . . . . 889128

Adjustable Flange (See Figure 4-1 and Figure 4-2). . . . . . . . . . . . . . . . . . 153202

O-ring for Adjustable Flange (See Figure 4-1) . . . . . . . . . . . . . . . . . . . . . . 803188

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RSH-600 Operating Manual

Figure 1-3 Rotary sensor head - flat

Stainless Steel Cover

Crystal Holder

P/N 153708

P/N 153710

Spring Contact

Retainer Screw

Spring Retainer

P/N 153726

P/N 153709

Copper Cover (not shown)

P/N 153731

Contact Kit (set of 6)

P/N 153724

Assembly

P/N 153706

Crystal Retainer

Assembly

P/N 153204

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