Inficon PGE500 Manuel utilisateur
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Product Identification
In all communications with INFICON, please specify the infor-
mation given on the product nameplate. For convenient refer-
ence copy that information into the space provided below.
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Validity
This document applies to products with part numbers:
The part number (PN) can be taken from the product nameplate.
This User Manual is applicable to the INFICON® model PGE500
product with Device Net interface manufactured with firmware
number FW 2998-101 and higher (last three digits of 101 or
higher). See STATUS menu described in section 4.6.4of this
manual to determine the firmware version of your PGE500
We reserve the right to make technical changes without prior
notice.
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Important User Information
There are operational characteristic differences between solid
state equipment and electromechanical equipment. Because of
these differences, and because there are a variety of uses for
solid state equipment, all persons that apply this equipment must
take every precaution and satisfy themselves that the intended
application of this equipment is safe and used in an acceptable
manner.
In no event will INFICON be responsible or liable for indirect or
consequential damages that result from the use or application of
this equipment.
Any examples or diagrams included in this manual are provided
solely for illustrative purposes. Because of the many variables
and requirements imposed on any particular installation,
INFICON cannot assume responsibility or liability for any actual
use based on the examples and diagrams.
No patent liability is assumed by INFICON with respect to use of
information circuits, equipment, or software described in this
manual.
Throughout this manual we use notes, notices and apply inter-
nationally recognized symbols and safety messages to make
you aware of safety considerations.
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Identifies information about practices or circumstances that can
cause electrical or physical hazards which, if precautions are not
taken, could result in death or serious injury, property damage,
or economic loss.
Identifies information about practices or circumstances that can
cause electrical or physical hazards which, if precautions are not
taken, could result in minor or moderate injury, property damage,
or economic loss.
Identifies information that is critical for successful application and
understanding of the product.
Labels may be located on or inside the device to alert people
that dangerous voltages may be present.
CAUTION
NOTICE
SHOCK HAZARD
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General Safety Instructions
•Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions with the product materials.
Consider possible reactions (e.g. explosion) of the process
media due to the heat generated by the product.
•Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.
•Before beginning to work, find out whether any vacuum com-
ponents are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contamin-
ated parts.
Communicate the safety instructions to all other users.
Liability and Warranty
INFICON assumes no liability and the warranty becomes null
and void if the end-user or third parties
•disregard the information in this document
•use the product in a non-conforming manner
•make any kind of interventions (modifications, alterations etc.)
on the product
•use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with the
process media used.
Gauge failures due to contamination or wear and tear, as well as
expendable parts (e.g. Pirani filament), are not covered by the
warranty.
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Contents
Product Identification 2
Validity 3
Important User Information 4
General Safety Instructions 6
Liability and Warranty 6
1Introduction / General Information 9
1.1 Description 9
1.2 Specifications 10
1.3 Dimensions 12
2Important Safety Information 13
2.1 Safety Precautions - General 13
2.2 Safety Precautions - Service and Operation 14
2.3 Electrical Conditions 15
2.3.1 Proper Equipment Grounding 16
2.3.2 Electrical Interface and Control 16
2.4 Overpressure and use with hazardous gases 17
2.5 Gases other than Nitrogen / air 18
3Installation 18
3.1 Mechanical Installation 18
3.2 Electrical Installation 21
3.2.1 Grounding 21
3.2.2 Electrical Connections 22
4Setup and Operation 23
4.1 User Interface Basics 23
4.2 DeviceNet and Module Status LEDs 24
4.3 DeviceNet Setup Switches 25
4.3.1 Data Rate Switch Setting 26
4.3.2 Node Address Switch Setting 26
4.4 Initial Setup 27
4.5 Factory-Set Default Parameters 28
4.6 Programming 30
4.6.1 DISPLAY 30
4.6.2 STATUS 32
4.6.3 DEFAULTS 32
4.6.4 CALIBRATION 33
4.6.5 RELAYS 34
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5Using the gauge with different gases 37
6Display 40
6.1 Display - Torr 40
6.2 Display - mBAR 44
7DeviceNet Operation 48
7.1 Supported DeviceNet Objects for ODVA compliance 48
7.2 Supported DeviceNet Objects compliant with Semi
Guidelines 49
7.3 Other supported DeviceNet Objects 49
7.4 Configuring the DeviceNet switches 49
7.5 Allocating DeviceNet connections to the PGE500 50
7.6 Configuring Expected Packet Rate 50
7.7 Configuring Polled I/O data format 51
7.8 UINT 2 byte integer pressure 52
7.9 DeviceNet Protocol for PGE500 52
7.9.1 Standard Objects 54
7.9.1.1 Identity Object 54
7.9.1.2 DeviceNet Object 55
7.9.1.3 Connection Object - Explicit Message Connection 56
7.9.1.4 Connection Object - Polled I/O Data 57
7.9.1.5 Discrete Output Point Object 58
7.9.1.6 S-Device Supervisor Object 59
7.9.1.7 S-Analog Sensor Object 60
7.9.1.8 S-Gas Calibration Object 61
7.9.1.9 Trip Point Object 62
8Service 63
8.1 Calibration 63
8.2 Maintenance 63
8.3 Troubleshooting 64
8.4 Contamination 66
8.5 Module and sensor replacement 68
9Factory Service and Support 74
10 Returning the Product 75
11 Disposal 75
12 Spare Parts 77
EU Declaration of Conformity 78
For cross-references within this document, the symbol (→XY)
is used.
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1 Introduction / General Information
1.1 Description
Thermal conductivity gauges measure pressure indirectly by
sensing the loss of heat from a sensor to the surrounding gases.
The higher the pressure of the surrounding gas, the more heat is
conducted away from the sensor. Pirani thermal conductivity
gauges maintain a sensor (usually a wire) at some constant tem-
perature, and measure the current or power required to maintain
that temperature. A standard Pirani gauge has a useful measur-
ing range of about 10-4 Torr to 10 Torr. By taking advantage of
convection currents that are generated above 1 Torr, convection-
enhanced Pirani gauges increase the measuring range to just
above atmosphere.
The INFICON®PGE500 module provides the basic signal condi-
tioning required to turn a convection vacuum gauge into a com-
plete measuring instrument. This version of the PGE500 pro-
vides a DeviceNet interface as well as two process control set-
point relays. Additionally a built-in OLED digital display provides
the measured pressure values and provides for a convenient
user interface for setup and operation of the vacuum gauge. The
INFICON PGE500 module will also directly replace the
DeviceNet version of the Granville-Phillips® / MKS Mini-Convec-
tron® vacuum gauge as the electrical connector pin-out and
DeviceNet commands are identical to the corresponding Mini-
Convectron®.
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1.2 Specifications
Measurement range 1.3×10-4 … 1333 mbar
1×10-4 … 1000 Torr
1.3×10
-2
Pa … 133 kPa
Accuracy - N2(typical)
1×10-4 … 1×10-3 Torr
1×10-3 … 400 Torr
400 … 1000 Torr
0.1 mTorr resolution
±10% of reading
±2.5% of reading
Repeatability - N2(typical)
±2% of reading
Display
bright OLED
Scientific notation: 3 digits plus 2 digit exponent for user se-
lectable units in Torr, mbar or Pa.
Engineering notation is also user selectable for Torr/mTorr
only.
Materials exposed to vacuum gold-plated tungsten, 304 & 316
stainless steel, glass, nickel,
Teflon
®
Housing (electronics)
aluminum extrusion
Internal volume
26 cm
3
(1.589 in
3
)
Internal surface area
59.7 cm
2
(9.25 in
2
)
Weight
340 g (12 oz.)
Permissible temperature
Operating
0 … +40 °C
Storage
–40 … +70 °C
Bakeout temperature ≤150 °C (gauge only - electro-
nics removed)
Ce manuel convient aux modèles suivants
1
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