2 USER GUIDE ENTEGRIS, INC.
INVUE INTEGRATED FLOW CONTROLLERS, MODELS NT6510, NT6520
Introduction
This manual is for use with a standard
InVue
™
Integrated Flow Controller,
Models NT6510 and NT6520. These
instruments have been designed for
use in high-purity fluid applications
within industries that need tightly
controlled chemical processes such
as the semiconductor, biomedical
and solar cell industries. The wetted
parts are constructed with Modified
PTFE, PTFE, PFA or other similar
high-purity inert materials.
WARNING! Attempting to install or
operate standard InVue Integrated
Flow Controllers without reviewing
the instructions contained in this
manual could result in personal
injury or equipment damage.
Identifying Nonstandard
Product Configurations
This User Guide applies to product
manufactured as the standard
InVue Integrated Flow Controller.
Entegris also manufactures non-
standard product to meet the needs
of specific applications. Nonstandard
product may have different materials
of construction, accuracy specifi-
cations, performance and other
specifications that differentiate the
nonstandard product from the stan-
dard offering.
NOTE: Nonstandard InVue Inte-
grated Flow Controllers may be
identified by the model number
found on the product label.
Specifications for nonstandard
InVue Integrated Flow Controllers
are available by contacting Entegris.
Nonstandard InVue Integrated Flow
Controllers, Model NT6510, are
identified with an “N” followed by
a number code.
For example, in part number
6510-T2-F03-B06-A-P7-U3-N02, the
“N02” designates the product as a
nonstandard product manufactured
to certain specifications designated
under the “N02” code.
Nonstandard InVue Integrated
Flow Controllers, Model NT6520,
are identified with an “R” followed
by a number code.
For example, in part number
6520-T6-F03-B06-A-P7-U3-R02, the
“R02” designates the product as a
nonstandard product manufactured
to certain specifications designated
under the “R02” code.
Contact Entegris for assistance with
nonstandard product applications.
Principle of Operation
The user provides a setpoint signal
that corresponds to the desired
amount of flow. The standard InVue
Integrated Flow Controller compares
the setpoint to the actual flow signal
from the flow module. If the actual
flow is greater than the setpoint, the
unit closes the valve. If the actual
flow is less than the setpoint, the
unit opens the valve. The flow con-
troller does this in a precise manner
until the actual flow signal is equal
to the setpoint.
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