entegris InVue NT6510 Manuel utilisateur
P/N 01-1032525 | REV. B 02/19
InVue®Integrated Flow
Controllers, Models
NT6510, NT6520
User guide
INVUE INTEGRATED FLOW CONTROLLERS, MODELS NT6510, NT6520
1Entegris, Inc. | P/N 01-1032525 | Rev. B 02/19
Table of Contents
Introduction .................................. 2
Identifying Nonstandard
Product Configurations ............ 2
Principle of Operation .............. 2
Factory Configured ................... 3
Continuous versus
Batch Control ............................. 3
Calibration Reference
Conditions ................................... 3
General Considerations .............. 4
Power Supply Requirements ... 4
Storage Temperature Range ... 4
Operating Ambient
Temperature Range .................. 4
Operating Process
Temperature Range .................. 4
Line Pressure .............................. 4
Pressure Drop.............................. 4
Dimensions ................................. 5
Installation .................................... 8
Provided Equipment ................. 8
Mounting Requirements .......... 9
Mechanical Installation .......... 10
Power Supply Requirements ... 11
Electrical Connections ........... 13
Wiring Diagrams ...................... 16
Optional Connections ............ 17
Setpoint Signal Setup .............. 18
Calibration Graphs .................. 19
Unit Operation ............................ 20
Operating Environment ........ 20
Performance ............................. 21
Operational Reliability ............ 22
Status and Alarming ................ 22
LED Status Codes .................... 23
Diagnostic Guide ........................ 24
Maintenance ............................... 27
Normal Operation ................... 27
Re-zero Function .................... 27
Reference .................................... 29
Physical Specifications .......... 29
Electrical Specifications ........ 29
Performance Specifications .... 29
Ordering Information ............... 30
Certifications ............................... 33
CE Compliance ........................ 33
Repair and Warranty Service ..... 33
Technical Support ...................... 33
For More Information ................ 34
Terms and Conditions of Sale .. 34
Limited Warranty ........................ 34
INVUE INTEGRATED FLOW CONTROLLERS, MODELS NT6510, NT6520
2P/N 01-1032525 | Rev. B 02/19 | Entegris, Inc.
Introduction
This manual is for use with a standard
InVue®Integrated Flow Controller,
Models NT6510 and NT6520. These
instruments have been designed for
use in high-purity fluid applications
within industries that need tightly
controlled chemical processes such
as the semiconductor, biomedical,
and solar cell industries. The wetted
parts are constructed with Modified
PTFE, PTFE, PFA, or other similar
high-purity inert materials.
WARNING! Attempting to install or
operate standard InVue Integrated
Flow Controllers without reviewing
the instructions contained in this
manual could result in personal
injury or equipment damage.
IDENTIFYING NONSTANDARD
PRODUCT CONFIGURATIONS
—
This User Guide applies to product
manufactured as the standard InVue
Integrated Flow Controller. Entegris
also manufactures nonstandard
product to meet the needs of specific
applications. Nonstandard product
may have dierent materials of
construction, accuracy specifications,
performance, and other specifications
that dierentiate the nonstandard
product from the standard oering.
NOTE: Nonstandard InVue Integrated
Flow Controllers may be identified
by the model number found on the
product label. Specifications for
nonstandard InVue Integrated Flow
Controllers are available by contacting
Entegris.
Nonstandard InVue Integrated Flow
Controllers, Model NT6510, are
identified with an “N" followed by
a number code.
For example, in part number
6510-T2-F03-B06-A-P7-U3-N02,
the “N02" designates the product
as a nonstandard product manu-
factured to certain specifications
designated under the “N02" code.
Nonstandard InVue Integrated Flow
Controllers, Model NT6520, are
identified with an “R" followed by
a number code.
For example, in part number
6520-T6-F03-B06-A-P7-U3-R02,
the “R02" designates the product
as a nonstandard product manufac-
tured to certain specifications
designated under the “R02" code.
Contact Entegris for assistance with
nonstandard product applications.
PRINCIPLE OF OPERATION
—
The user provides a setpoint signal
that corresponds to the desired
amount of flow. The standard InVue
Integrated Flow Controller compares
the setpoint to the actual flow signal
from the flow module. If the actual
flow is greater than the setpoint, the
unit closes the valve. If the actual
flow is less than the setpoint, the unit
opens the valve. The flow controller
does this in a precise manner until
the actual flow signal is equal to
the setpoint.
INVUE INTEGRATED FLOW CONTROLLERS, MODELS NT6510, NT6520
3Entegris, Inc. | P/N 01-1032525 | Rev. B 02/19
FACTORY CONFIGURED
—
The standard InVue Integrated Flow
Controller is pre-configured from the
factory for the flow range specified
by the user. The specified flow range
is found on the label of the unit. The
unit control algorithm uses pressure
and flow measurements to ensure
proper operation within specification.
CONTINUOUS VERSUS
BATCH CONTROL
—
The standard InVue Integrated Flow
Controller may be ordered as a con-
tinuous type controller or a batch
type controller.
The continuous controller type is
for applications requiring continuous
flow rate control, where the integral
valve module is never required to fully
close. Typically, another valve is used
in conjunction with the flow control-
ler to stop the liquid flow.
The batch controller type is for appli-
cations requiring flow rate control
where the integral valve module will
fully close between batch dispense
cycles. If total volume needs to be
controlled, an additional separate
totalizer device must be employed.
CALIBRATION REFERENCE
CONDITIONS
—
Unless otherwise noted, the specifi-
cations listed for the InVue Integra-
ted Flow Controller are referenced
under the following operating
conditions:
PARAMETER REFERENCE CONDITION
Process fluid Deionized water
Process
temperature
23°C ±3°C (73°F ±5°F)
Ambient
temperature
23°C ±3°C (73°F ±5°F)
Process
pressure
207 kPa (30 psig)
Supply voltage 24 VDC ±10%
Operation Re-zeroed
Power
Setpoint
Re-zero
Pressure signal
Flow signal
Alarm
InVue Integrated Flow Controller System Diagram
Sensor
measurement
Valve
control
Fluid
flow
Fluid
flow
InVue Integrated Flow Controller
control interface
Flow/valve module
INVUE INTEGRATED FLOW CONTROLLERS, MODELS NT6510, NT6520
4P/N 01-1032525 | Rev. B 02/19 | Entegris, Inc.
General Considerations
The following requirements and
specifications are briefly provided
here. Before installing and operating
the InVue Integrated Flow Controller,
see the Installation and Unit Opera-
tion sections of this user guide for
more detailed information.
NOTE: The flow controller has been
factory sealed. Do not attempt to
remove the cover of the unit. Any
attempt at removal of the unit cover
will void the warranty.
POWER SUPPLY REQUIREMENTS
—
The power supply range for the
flow controller is 24 VDC ±10%.
The power supply to the unit must
provide clean power and must be
used only to power similar measure-
ment-type devices.
STORAGE TEMPERATURE RANGE
—
The flow controller can withstand
storage temperatures between
-15°C–40°C (5°F–104°F) with no
permanent eect on the perfor-
mance of the device.
OPERATING AMBIENT
TEMPERATURE RANGE
—
The flow controller is designed to
operate in ambient temperature,
cleanroom environments. It is speci-
fied to operate at temperatures of
10°C–65°C (50°F–149°F).
OPERATING PROCESS
TEMPERATURE RANGE
—
The flow controller is designed to
operate in process temperatures of
10°C–65°C (50°F–149°F).
LINE PRESSURE
—
The system line pressure (measured
at the inlet of the unit) must be
69 kPa – 414 kPa (10 psig – 60 psig).
PRESSURE DROP
—
The flow rate is calculated using
Entegris' dierential pressure flow
technology. The minimum pressure
drop (inlet to outlet port dierential
pressure) required for the unit is
69 kPa (10 psig).
INVUE INTEGRATED FLOW CONTROLLERS, MODELS NT6510, NT6520
5Entegris, Inc. | P/N 01-1032525 | Rev. B 02/19
DIMENSIONS
—
NT6510
The following fitting size and flow range combinations are available
(Flaretek®, PrimeLock®, and Pillar®unless otherwise noted):
FITTING
SIZE
FLOW RANGE (ML/MIN)
TL
0–15
TT
0–25
T0
0–50
T1
0–125
T2
0–250
T3
0–500
T4
0–1250
1⁄4"Yes Yes Yes Yes Yes Yes Yes
3⁄8"Yes Yes Yes Yes Yes Yes Yes
1⁄2"—————Yes* Yes*
*Flaretek and PrimeLock only.
Please consult Entegris for custom flow range requirements.
INLET/OUTLET PORT
CONNECTION
DIMENSIONS
ABC
1⁄4" Flaretek tube fitting 118.1 mm (4.65") 17.0 mm (0.67") 187.5 mm (7.38")
3⁄8" Flaretek tube fitting 119.6 mm (4.71") 17.0 mm (0.67") 191.0 mm (7.52")
1⁄2" Flaretek tube fitting 119.6 mm (4.71") 17.0 mm (0.67") 195.1 mm (7.68")
1⁄4" PrimeLock tube fitting 118.1 mm (4.65") 17.0 mm (0.67") 177.8 mm (7.00")
3⁄8" PrimeLock tube fitting 119.6 mm (4.71") 17.0 mm (0.67") 177.8 mm (7.00")
1⁄2" PrimeLock tube fitting 119.6 mm (4.71") 17.0 mm (0.67") 182.4 mm (7.18")
1⁄4" Super 300 Pillar
tube fitting
118.1 mm (4.65") 17.0 mm (0.67") 159.3 mm (6.27")
3⁄8" Super 300 Pillar
tube fitting
119.6 mm (4.71") 17.0 mm (0.67") 167.1 mm (6.58")
INVUE INTEGRATED FLOW CONTROLLERS, MODELS NT6510, NT6520
6P/N 01-1032525 | Rev. B 02/19 | Entegris, Inc.
NT6520
The following fitting size and flow range combinations are available
(Flaretek, PrimeLock, and Pillar unless otherwise noted):
FITTING
SIZE
FLOW RANGE (L/MIN)
T5
0–2.5
T6
0–5
T7
0–10
T8
0–20
T9
0–40
3⁄8"Yes* Yes* ———
1⁄2"Yes** Yes** Yes — —
3⁄4"———Yes Yes
*Flaretek and Pillar only.
**Flaretek and PrimeLock only
Please consult Entegris for custom flow range requirements.
137.2 mm (5.40")
154.9 mm (6.10")
167.6 mm (6.60")
C
53.2 mm
(2.10")
39.4 mm
(1.55")
Top View
5.1 mm
(0.20")
A
Side View
B
End View
INVUE INTEGRATED FLOW CONTROLLERS, MODELS NT6510, NT6520
7Entegris, Inc. | P/N 01-1032525 | Rev. B 02/19
INLET/OUTLET PORT
CONNECTION
DIMENSIONS
ABC
3⁄8" Flaretek tube fitting 117.3 mm (4.62") 15.7 mm (0.62") 224.0 mm (8.82")
1⁄2" Flaretek tube fitting 120.9 mm (4.76") 18.3 mm (0.72") 228.0 mm (8.98")
3⁄4" Flaretek tube fitting 129.0 mm (5.08") 23.6 mm (0.93") 234.2 mm (9.22")
1⁄2" PrimeLock tube fitting 120.9 mm (4.76") 18.3 mm (0.72") 215.4 mm (8.48")
3⁄4" PrimeLock tube fitting 129.0 mm (5.08") 23.6 mm (0.93") 229.1 mm (9.02")
3⁄8" Super 300 Pillar
tube fitting
117.3 mm (4.62") 15.7 mm (0.62") 200.2 mm (7.88")
1⁄2" Super 300 Pillar
tube fitting
120.9 mm (4.76") 18.3 mm (0.72") 205.2 mm (8.08")
3⁄4" Super 300 Pillar
tube fitting
129.0 mm (5.08") 23.6 mm (0.93") 214.1 mm (8.43")
Top View
47 mm
(1.85")
187.5 mm (7.38")
170.2 mm (6.70")
200.2 mm (7.88")
7.1 mm
(0.28")
71.1 mm
(2.80")
C
B
A
Side View
End View
INVUE INTEGRATED FLOW CONTROLLERS, MODELS NT6510, NT6520
8P/N 01-1032525 | Rev. B 02/19 | Entegris, Inc.
Installation
PROVIDED EQUIPMENT
—
Verify:
Remove Unit from the Bag
NOTE: This unit has been assembled
and double-bagged under cleanroom
conditions. To maintain purity, only
open under cleanroom conditions.
CAUTION! Do not tighten the nuts that
protect the tube connections during
shipment. (See the Prepare Fluid Lines
section on page 10). Tightening these nuts
without the proper tubing installed may
damage the unit's tube connections.
Gloves
INVUE INTEGRATED FLOW CONTROLLERS, MODELS NT6510, NT6520
9Entegris, Inc. | P/N 01-1032525 | Rev. B 02/19
MOUNTING REQUIREMENTS
—
The flow controller may be mounted
in any orientation. The unit does not
require straight lengths of tubing at
the inlet or the outlet connection.
Mount the Unit
The flow controller and base bracket
assembly must be mounted to a solid
surface to ensure stability. Verify the
valve and the electrical cable are free
from mechanical stress from the
surrounding equipment.
NOTE: The flow controller requires
mounting in the direction of the
fluid flow.
#10 (M4)
Pan head
#10 (M4)
Flat washer
Recommended hardware
Ce manuel convient aux modèles suivants
1
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