Edwards STP Series Manuel utilisateur

MT-86E-001-F

STP Series Turbomolecular Pumps

STP-iX457/iXU457 Series

Instruction Manual

Read through the Safety Precautions and

each section of this Manual carefully before

using the STP pump.

Keep this Manual in a place where you can

quickly access it at any time.

Original Instructions

STP-iX457/iXU457 Series Turbomolecular Pump

MT-86E-001-F

Page i

PAGE

CONTENTS

Section Title Page

1 INTRODUCTION 1

1.1 Scope and definitions 1

1.2 Applied standards 2

1.3 Limited warranty 3

1.3.1 Warranty period 3

1.3.2 Item warranted 3

1.3.3 Disclaimer 4

1.3.4 Spare parts 4

1.4 Precautions for safe operation of the STP pump 5

1.4.1 Usable gases 5

1.5 Maintenance and inspection precautions 6

1.6 Labels 6

1.7 Operation principle of the STP pump 8

1.8 STP pump specification 10

2 TECHNICAL DATA 11

2.1 STP pump specifications 11

2.2 Control unit 12

2.3 External appearance of the STP pump 13

2.4 Label affixing positions 17

3 INSTALLATION OF THE STP PUMP 19

3.1 Precautions before installation 19

3.1.1 Operating environment 19

3.1.2 Installation area 21

3.1.3 Bench 22

3.1.4 Insulation test 22

3.2 Unpacking and installation 23

3.3 Name and function of each part 27

3.3.1 Name and function of the pump 27

3.3.2 Name and function of the control unit 28

3.4 How to install the STP pump 30

3.4.1 Cleaning the seal 31

3.4.2 STP pump installation positions 32

3.4.3 Secure the STP pump 33

3.4.4 Legs for securing the base 37

3.4.5 Rotation stopper 38

3.5 External power supply unit 39

3.6 DC power cable 39

3.7 Vent valve 42

3.7.1 Connecting the vent valve 42

3.7.2 Vent valve output 44

3.8 Precautions of vacuum piping 45

3.8.1 Vacuum piping method 46

3.9 Introducing N2gas

(for the STP pump equipped with purge port) 46

STP-iX457/iXU457 Series Turbomolecular Pump

MT-86E-001-F

Page ii

PAGE

ii CONTENTS (CONTINUED)

Section Title Page

3.10 Attaching a baking heater 47

3.11 Cooling the STP pump 48

3.12 Air-cooling unit U1-86 49

3.12.1 Parts list 49

3.12.2 Installation procedure 49

3.12.3 Maintenance 50

3.13 Connecting to semiconductor equipment 51

3.13.1 Connecting to power 51

3.13.2 Emergency off circuit (EMO circuit) 51

4 OPERATION 53

4.1 Gas pumping, cooling and baking the STP pump 53

4.1.1 Gas pumping 53

4.1.2 How to introduce a purge gas 54

4.2 Baking the STP pump 54

4.3 Before starting the STP pump 55

4.3.1 Confirmation before starting 55

4.3.2 Confirmation of vacuum system 55

4.4 Powering ON 56

4.5 Pump operation 56

4.5.1 Input operation port setting 56

4.5.2 Starting/stopping the STP pump 56

4.6 How to start/stop the STP pump 57

4.6.1 Starting the STP pump after stopping 57

4.6.2 Starting the STP pump after a safety function operates 57

4.6.3 Powering OFF 57

4.7 LED 58

4.8 Parallel port input/output signal 59

4.8.1 Input signal pins 59

4.8.2 Input operation port setting 62

4.8.3 Second speed option 63

4.8.4 Output signal pins 64

5 SERIAL COMMUNICATION PROTOCOL 69

5.1 Introduction 69

5.2 Connection and setting up 70

5.2.1 Signal connection 70

5.2.2 Connecting the RS485 72

5.2.3 Communication parameter setting 73

5.2.4 Input operation port setting 73

5.2.5 Serial communication timeout setting 74

5.2.6 Recommended items about communication cable installation 75

5.3 Protocol specifications 78

5.3.1 General description 78

5.3.2 Standard transmission frame

(in the RS232/RS485 single point connection) 79

STP-iX457/iXU457 Series Turbomolecular Pump

MT-86E-001-F

Page iii

PAGE

iii

CONTENTS (CONTINUED)

Section Title Page

5.3.3 Control command

(in the RS232/RS485 single point connection) 80

5.3.4 Query command

(in the RS232/RS485 single point connection) 81

5.3.5 Transmission data format 82

5.3.6 Frame control (checksum) 83

5.3.7 Error control 83

5.3.8 Transmission frame in the RS485 multi-point connection 83

5.3.9 Control command in the RS485 multi-point connection 85

5.3.10 Query command in the RS485 multi-point connection 86

5.3.11 Broadcasting command in the RS485 multi-point connection 87

5.3.12 Application note 88

5.4 Command specifications 92

5.4.1 Command list 92

5.4.2 ReadMeas 93

5.4.3 Command 93

5.4.4 ReadFailMess 94

5.4.5 ReadModFonct 98

5.4.6 ReadVersion 100

5.4.7 ReadCounters 101

5.4.8 ReadSetPoint 102

5.4.9 ReadMotorTemp 102

5.4.10 ReadStatus 103

5.4.11 ReadEvents 104

5.4.12 SetSpeedSetPoint 105

5.4.13 ReadSpeedSetPoint 106

5.4.14 ReadModFonctWithWarning 107

5.4.15 ReadMeasValue 110

5.4.16 ReadOptionFunc 112

5.4.17 SetOptionFunc 116

5.4.18 ReadCondition 119

5.4.19 ReadEventsWithTime 121

5.4.20 SetOptions 125

5.4.20.1 Second speed option setting 125

5.4.20.2 Second speed selection 126

5.4.21 ReadOptions 127

5.4.21.1 Second speed function setting 127

5.4.21.2 Second speed select 128

6 STP-LINK AND POWER SUPPLY UNIT 129

6.1 STP-Link 129

6.2 Power supply unit 130

7 SAFETY FUNCTIONS 131

7.1 Safety functions 131

7.1.1 Power Failure 131

7.1.2 Operation after a power recovery 132

STP-iX457/iXU457 Series Turbomolecular Pump

MT-86E-001-F

Page iv

PAGE

CONTENTS (CONTINUED)

Section Title Page

7.1.3 Abnormal state of magnetic bearing (Disturbance) 133

7.1.4 Excessive vibration (Disturbance) 133

7.1.5 Motor driver overload (DRV Overload) 133

7.1.6 Overheating inside the STP pump (MOTOR Overheat) 133

7.1.7 Overheating inside the control unit (CNT Overheat) 133

7.1.8 Overspeed 134

7.2 "WARNING" function 134

7.2.1 "WARNING" function 134

7.3 Contents of WARNING function 135

7.3.1 First Damage limit 135

7.3.2 Second Damage Limit 135

7.3.3 Pump run time over 135

7.3.4 Pump Overload 136

7.3.5 Imbalance 136

7.3.6 Other Warning 136

7.4 WARNING function setting 137

7.5 Troubleshooting immediately after failure occurs 138

7.5.1 After power failure 138

7.5.2 After other abnormality/error 138

7.6 Troubleshooting 139

7.6.1 Indication of "STATUS" LED (red flash) 139

7.6.2 Indication of "STATUS" LED (green and red alternately) 145

7.6.3 No Indication of the "STATUS" LED (red) 145

8 MAINTENANCE AND INSPECTION 143

8.1 Maintenance and inspection 143

8.2 Cleaning 144

8.3 Inspecting the deposit 144

8.4 Maintenance 145

8.4.1 Recommended overhaul intervals 145

8.4.2 Standard replacement parts 145

8.4.3 Recommended maintenance intervals for main parts 146

8.5 Transporting for repair or overhaul 147

9 STORAGE AND DISPOSAL 153

9.1 Storage of the STP pump 153

9.2 Disposal 154

10 SERVICE, SPARES AND ACCESSORIES 151

10.1 Introduction 151

10.2 Service 151

10.3 Spares 151

10.4 Accessories 152

STP-iX457/iXU457 Series Turbomolecular Pump

MT-86E-001-F

Page v

PAGE

ILLUSTRATIONS

Figure Title Page

1 STP pump installation warning label 6

2 Hot surface warning label 6

3 Heavy product caution label 7

4 High voltage device caution label 7

5 Rotation instruction label 7

6 Cross sectional view of the STP pump 8

7 External appearance of STP-iX457 13

8 External appearance of STP-iX457C 14

9 External appearance of STP-iXU457 15

10 External appearance of STP-iXU457C 16

11 Label affixing positions 17

12 Space around the STP pump 21

13 Space around the STP pump

(with air-cooling unit [optional accessory]) 21

14 Example of lifting the STP pump 23

15 Example of lifting the STP pump (horizontal positioning) 24

16 Jack-up the STP pump 25

17 Control unit bottom face 25

18 STP pump with eyebolts 26

19 Configuration of the STP pump 27

20 Control unit 28

21 Installation of the STP pump to the vacuum equipment 30

22 STP pump installation positions 32

23 Positions of the outlet port on the horizontally

or slanted installed STP pump 32

24 Example of securing the STP pump

(when securing the inlet port with bolts) 34

25 Example of securing the STP pump

(when securing the inlet port flange with claw clamps) 35

26 Example of securing the STP pump

(when installing the damper in the inlet port flange) 36

27 Recommended leg for securing base 37

28 Screw holes for securing the base 37

29 Rotation stopper 38

30 DC power cable 41

31 Vent valve connection 42

32 Example of a control method

when introducing the atmosphere (in dashed line) 43

33 Height of purge port 46

34 Baking heater installation position 47

35 Air-cooling unit 48

36 Installation procedure for air-cooling unit U1-86 49

37 Pump operation method 56

38 Flash pattern of STATUS 58

39 X2 REMOTE connector 59

40 X2 REMOTE input signal pins (contact input) 61

41 X2 REMOTE Pin function matrix for input signal

(Type-A PROG-IN) 62

42 X2 REMOTE Pin function matrix for input signal

(Type-B PROG-IN) 62

STP-iX457/iXU457 Series Turbomolecular Pump

MT-86E-001-F

Page vi

PAGE

ILLUSTRATIONS (CONTINUED)

Figure Title Page

43 X2 REMOTE output signal pins 66

44 X2 REMOTE output signal pin which changes

according to abnormality notification / warning notification 67

45 X2 REMOTE output signal pin which changes

according to rotation speed 67

46 Serial port 69

47 X2 connector (High density D-Sub15) 70

48 RS485 connections 72

49 Grounding example (Both ends grounding) 75

50 Grounding example (single point grounding) 75

51 Example of ring ferrite core installation 76

52 Example of cable installation in metallic duct 76

53 Example of differential signal waveform 77

54 PC to SIM communication 78

55 Block diagram of communication process example 88

56 Example of answer resending process 89

57 Example of response when the command is sent continuously 89

58 Example of command sending during answer data reply 89

59 Example of communication cycle process 90

60 Example of command sending process 91

61 Power supply unit iPD-240-24V 130

STP-iX457/iXU457 Series Turbomolecular Pump

MT-86E-001-F

Page vii

PAGE

vii

TABLES

Table Title Page

1 Environmental requirements for installation 20

2 Eyebolt size 23

3 Pump functions 27

4 Control unit front panel functions 29

5 Tightening torque of bolt 33

6 Maximum torque predicted

and recommended securing bolt for inlet port flange 34

7 Number of claw clamps for flange size 35

8 Suitable parts for DC power cable 41

9 Number of claw clamps for flange size 41

10 X3 OPTION connector function setting 44

11 Vent valve operation setting 44

12 Starting/stopping the STP pump (X2 REMOTE) 56

13 Reset operation (X2 REMOTE) 57

14 X2 REMOTE input signal pins 60

15 Second speed function 63

16 X2 REMOTE output signal pins 64

17 X2 REMOTE output signal pins (continued) 65

18 Rated contacts for four photo relays 66

19 X2 pin position 70

20 Communication parameters 73

21 Input operation port 73

22 Serial communication time out setting 74

23 Transmission control characters 79

24 Pump operation commands 87

25 Command list 92

26 Pump operation commands 94

27 Error message values 96

28 Error message values (continued) 97

29 Pump operation mode 99

30 Remote mode 104

31 Warning value bit assign 108

32 Parameter setting value 114

33 Option function number and parameter list 125

34 Option function number and parameter list 127

35 Functions of STP-Link 129

STP-iX457/iXU457 Series Turbomolecular Pump

MT-86E-001-F

Page viii

PAGE

viii

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