Edwards STP-301 Series Manuel utilisateur

MT-21E-101-C

STP Series Turbomolecular Pumps

STP-301/451 Series

Pump Specific Information

Instruction Manual (B)

STP pump consists of the three-volumed Instruction Manuals.

Instruction Manual (A): STP pump generic Instruction Manual

Instruction Manual

(B)

(This Instruction Manual)

STP

ump specific information

Instruction Manual (C): STP control unit Instruction Manual

This product has been manufactured under a quality management system certified to ISO 9001:2008

Declaration of Conformity

We,

Manufacture: Edwards Japan Limited

1078-1, Yoshihashi, Yachiyo-shi, Chiba, 276-8523, Japan

EU Representative: Edwards Limited

Manor Royal, Crawley, West Sussex, RH10 9LW, UK

declare under our sole responsibility, as manufacturer and person within the EU authorised to

assemble the technical file, that the product(s)

Product Name: Turbomolecular pump

Model Number: STP-301/451 series

to which this declaration relates is in conformity with the following standard(s) or other normative

document(s)

EN1012-2:1996, A1:2009 Compressors and Vacuum Pumps.

Safety Requirements. Vacuum Pumps

EN61010-1:2010 Safety Requirements for Electrical Equipment for Measurement,

Control and Laboratory Use. General Requirements

EN61326-1:2013 Electrical equipment for measurement, control and laboratory Use.

EMC requirements. General requirements

(Immunity: Industrial locations, Emission: Class A)

EN61000-6-2:2005 Electromagnetic compatibility (EMC). Generic standards.

Immunity for industrial environments

EN55011:2009, A1:2010 Industrial, scientific and medical equipment - Radio-frequency

disturbance characteristics (Group1, Class A)

EN50581:2012 Technical Documentation for the Assessment of Electrical and Electronic

Products with respect to the Restriction of Hazardous Substances

and fulfils all the relevant provisions of

2006/42/EC Machinery Directive

2014/35/EU Low Voltage Directive

2014/30/EU Electromagnetic Compatibility (EMC) Directive

2011/65/EU* Restriction of Certain Hazardous Substances (RoHS) Directive

* i.e. The product(s) contain less than - 0.1wt% for hexavalent chromium, lead, mercury, PBB and PBDE; 0.01wt% for

cadmium - in homogeneous materials (subject to the exemptions allowed by the Directive). The RoHS Directive does not

legally apply to industrial vacuum equipment until July 2019 (July 2017 for instruments).

Note: This declaration covers all product serial numbers from the date this Declaration was

signed onwards.

VI-DOC-21-103

anufacture:

uji Kato, TMP Technical Senior Manager

Edwards Japan Limited

Aug

ust

. 201

Yachiyo

Date and Place

EU representative:

Ian Stones

Director of

Technology, Edwards Limited

Aug

ust

. 20

, Burgess Hill

Date and Place

The description of this product consists of the three-volumed Instruction Manuals. Read through each

Instruction Manual before operation.

The separate volume contents of each description are as follows:

Instruction Manual (A)

STP pump generic Instruction Manual:

Introduction

Installation of the STP pump

Installation of the STP control unit

Operation

Safety functions

Maintenance and inspection

Storage and disposal

Service, Spares and accessories

Instruction Manual (B)

STP Pump specific information:

Technical data

How to Secure the STP pump

Instruction Manual (C)

STP control unit Instruction Manual:

Introduction

Technical data

Installation

Operation

Maintenance

Storage, transportation and disposal

Service, spares, and accessories

Keep the manuals in an easily accessible location.

This page intentionally blank.

STP-301/451 Series Turbomolecular Pump

MT-21E-101-C

Page i

PAGE

CONTENTS

Section Title Page

1 TECHNICAL DATA 1

1.1 Applicable pump specifications 1

1.1.1 STP pump specifications 2

1.1.2 Condition for the water-cooling unit 3

1.2 External appearance of the STP pump 4

1.3 Label affixing positions 7

1.4 Accessories 8

2 HOW TO SECURE THE STP PUMP 9

2.1 When securing the inlet port with bolts 10

2.2 When securing the inlet port flange with claw clamps 12

2.3 When installing the damper in the inlet port flange 13

2.4 Cooling the STP Pump 14

2.4.1 Installation of air cooling unit 14

STP-301/451 Series Turbomolecular Pump

MT-21E-101-C

Page ii

PAGE

ii ILLUSTRATIONS

Figure Title Page

1 External appearance of STP-301/451 series

(Non-corrosion resistant type) 4

2 External appearance of STP-301/451 series

(Corrosion resistant type) 5

3 External appearance of STP-301/451 series

(with water cooling unit) 6

4 Label affixing positions for the STP pump 7

5 Example of securing the STP pump

(when securing the inlet port with bolts) 11

6 Example of securing the STP pump

(when securing the inlet port flange with claw clamps) 12

7 Example of securing the STP pump

(when installing the damper in the inlet port flange) 13

8 Air cooling unit and baking heater 15

TABLES

Table Title Page

1 Tightening torque of bolt 9

2 Maximum torque predicted

and recommended securing bolt for inlet port flange 10

3 Number of claw clamps for flange size 12

STP-301/451 Series Turbomolecular Pump

MT-21E-101-C

Page 1

TECHNICAL DATA

1 TECHNICAL DATA

1.1 Applicable pump specifications

Model Name Specification Applicable Control unit

STP-301/451 series High-vacuum type SCU-350 series

Naming convention:

"C" following a pump model name indicates a corrosion resistant*1 type (e.g. STP-301C).

"C1" following a pump model name indicates a corrosion resistant*1 type with water cooling unit

(e.g. STP-301C1).

"H" following a pump model name indicates the pump used in combination with SCU-350H or

SCU350HA (e.g. STP-301H)

"-U" following a pump model name indicates a UL61010-1 listed model (e.g. STP-301-U).

*1 Corrosion resistant: STP pump with anti-corrosive treatment.

STP-301/451 Series Turbomolecular Pump

MT-21E-101-C

Page 2

TECHNICAL DATA

PAG

1.1.1 STP pump specifications

The values shown below are typical. They are not guaranteed.

Item STP-301 series STP-451 series

Flange size Inlet port flange ICF152/VG100/ISO100

ICF203/VG150/ISO160

Outlet port flange KF25 KF25

Pumping speed N2L/s

300 480

He L/s

280 460

H2L/s

300 460

Compression ratio

>108

5×105

2×104

Ultimate pressure Non-corrosion

resistant type Pa (Torr)

10-8 (10-10) : ICF flange

6.5×10-6 (5×10-8) : VG/ISO flange

Corrosion

resistant type Pa (Torr)

10-7 (10-9) : ICF flange

6.5×10-6 (5×10-8) : VG/ISO flange

Maximum working pressure*1Pa (Torr)

6.7×10-2 (5×10-4): Natural air-cooling

Allowable backing pressure*1Pa (Torr)

13 (0.1): Natural air-cooling

Flow rate of purge gas <N2>

Pa·m3/s (SCCM)

1.7×10-2 (10): Corrosion resistant type only

Rated speed rpm

25,000 to 48,000

Backup rotational speed*2 rpm

Approximately 15,000

Starting time min

Stopping time min

Vibration μm 0-p

< 0.01 (at 48,000 rpm)

Noise dB

<50 (at 48,000 rpm)

Temperature Management System (TMS) N/A

Baking temperature °C

<120

Lubricating oil

Not necessary

Installation position

Free

Cooling method

Natural air cooling (Water cooling, Air cooling:

At baking and gas pumping)

Recommended backing-pump L/min

240

Mass*3kg

11 12

Ambient temperature range °C

0 to 40

STP-301/451 Series Turbomolecular Pump

MT-21E-101-C

Page 3

TECHNICAL DATA

Item STP-301 series STP-451 series

Storage temperature range °C

-25 to 55

Pollution degree

Installation category

Ⅱ

Applicable Control unit

SCU-350 series

*1 The pressure is applicable under conditions that N2or other similar gas is vacuumed and the backing-pump (pumping

speed: 1,300 L/min) is used. When the gas is exhausted intermittently, the gas more than the maximum gas flow-rate can be

exhausted. Consult Edwards about conditions.

*2 A backup rotational speed is the lowest rotational speed to which the magnetic bearing can be backed up at a power failure.

*3 Mass is a value of state that the only standard accessory was installed (except the optional accessory).

1.1.2 Condition for the water-cooling unit

The water-cooling unit is an optional accessory.

Item Specification

Port type

Rc 1/4 (Female) *1

Flow rate L/min

Water temperature °C

5 to 25

Water pressure MPa (kgf/cm2)

0.3 (3)

*1 Standard type

STP-301/451 Series Turbomolecular Pump

MT-21E-101-C

Page 4

TECHNICAL DATA

PAG

1.2 External appearance of the STP pump

No.

Item Description

STP-301 series STP-451 series

ICF152

VG100

ISO100

ICF203

VG150

ISO160

1 Inlet port flange

φA

152 185 130 203 235 180

2 Bending dimension of

the STP connection

cable

B 230 230 230 200 200 200

C 171 171 171 141 141 141

3 Screw hole of legs 8-M8

D 21 12 12 22 12 12

depth 16

4 Outlet port flange KF25

5 Screw hole for earth M4

6 STP connector

7 Viewed from arrow A

Figure 1 - External appearance of STP-301/451 series (Non-corrosion resistant type)

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