Edwards IS16K Manuel utilisateur
D059-14-880
Issue D Original
Instruction Manual
Vacuum Interlock Switch IS16K
Description Item Number
Vacuum Interlock Switch IS16K D059-14-000
This product has been manufactured under a quality system registered to ISO9001
Declaration of Conformity
We, Edwards,
Manor Royal,
Crawley,
West Sussex, RH10 9LW, UK
declare under our sole responsibility, as manufacturer and person within the EU authorised
to assemble the technical file, that the product(s)
Vacuum Interlock Switch
IS16K D059-14-000
to which this declaration relates is in conformity with the following standard(s) or other
normative document(s)
EN61010-1: 2001 Safety Requirements for Electrical Equipment for Measurement,
Control and Laboratory Use. General Requirements
and fulfils all the relevant provisions of
2006/95/EC Low Voltage Directive
2004/108/EC Electromagnetic Compatibility (EMC) Directive
Note: This declaration covers all product serial numbers from the date this Declaration was
signed onwards.
Mr L. Marini, Technical Manage
r
Date and Place
P200-03-640 Issue B
9 December 2009
© Edwards Limited 2009. All rights reserved. Page i
Edwards and the Edwards logo are trademarks of Edwards Limited.
D059-14-880 Issue D
Contents
Section Page
1 INTRODUCTION ....................................................................................1
1.1 Scope and definitions ................................................................................................... 1
1.2 Description ................................................................................................................ 1
2 TECHNICAL DATA .................................................................................2
2.1 Operating conditions .................................................................................................... 2
2.2 Performance .............................................................................................................. 2
2.3 Mechanical data .......................................................................................................... 2
2.4 Electrical data ............................................................................................................ 2
2.5 Product item number ................................................................................................... 3
3 INSTALLATION .....................................................................................4
3.1 Unpacking and inspection .............................................................................................. 4
3.2 General .................................................................................................................... 4
3.3 Connection to the Vacuum System .................................................................................... 4
3.4 Connection to the Electrical Circuit .................................................................................. 4
4 OPERATION ........................................................................................6
4.1 Adjustment ............................................................................................................... 6
5 MAINTENANCE .....................................................................................7
6 STORAGE AND DISPOSAL .........................................................................8
6.1 Storage .................................................................................................................... 8
6.2 Disposal ....................................................................................................................8
Index ................................................................................................9
For return of equipment, complete the HS Forms at the end of this manual.
gea/0049/07/09
D059-14-880 Issue D
Page ii © Edwards Limited 2009. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Contents
Illustrations
Figure Page
1 Vacuum switch plug connections ...................................................................................... 5
2 Dimensions of VS16K vacuum switch .................................................................................. 7
Tables
Table Page
1 Maximum switch ratings ................................................................................................ 2
© Edwards Limited 2009. All rights reserved. Page 1
Edwards and the Edwards logo are trademarks of Edwards Limited.
INTRODUCTION
D059-14-880 Issue D
1 INTRODUCTION
1.1 Scope and definitions
This manual provides installation, operation and maintenance instructions for the Edwards IS16K Vacuum Interlock
Switch. Read this manual before attempting to install and operate the IS16K.
This manual contains essential safety information which supplements the safety features of the IS16K. Safety
procedures are highlighted as WARNING and CAUTION instructions. You must obey these instructions. The use of
WARNINGS and CAUTIONS is defined below.
CAUTION
Cautions are given where failure to observe the instruction could result in damage to the equipment, associated
equipment and process.
1.2 General description
The Edwards IS16K Vacuum Interlock Switch is designed for applications where the electrical circuits within the
vacuum chamber must be de-energised when the vacuum system is let up to atmosphere.
Typical applications would be the interlocking of H.T. and R.F. power supplies on vacuum coating systems. The
interlocking switch consists of a positive break microswitch operated by a snap action diaphram to ensure rapid
separation of the microswitch contacts.
The diaphram is enclosed within the vacuum switch housing which is surrounded by atmospheric pressure and is
coupled to the vacuum system by a NW16 flange. The absolute switch point pressure will therefore vary by the same
amount as the atmospheric pressure.
The set-point is non-adjustable and cannot be tampered with.
WARNING
Warnings are given where failure to observe the instruction could result in injury or death to
people.
D059-14-880 Issue D
Page 2 © Edwards Limited 2009. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
TECHNICAL DATA
2 TECHNICAL DATA
2.1 Operating conditions
2.2 Performance
2.3 Mechanical data
2.4 Electrical data
Maximum switch ratings for different loads and voltages:
2.5 Product item number
Temperature range - operating -5°C to 40°C
Temperature range - storage -20°C to 70°C
Relative humidity (non condensing) 10 to 90%
Maximum operating altitude 3000 m
Installation category (IEC1010) 2 (IEC664/664A)
Pollution category (IEC1010) 2
Enclosure rating IP40
Set-point Within the range 250 to 500 mbar below
atmospheric pressure
Maximum switch point differential 100 mbar
Leak rate < 1 x 10-9 mbar litre/sec-1
Maximum overpressure 1 bar gauge (2 bar absolute)
Weight (unpacked) 0.5 kg
Weight (packed) 0.6 kg
Vacuum connection NW16 Flange
Volume added to vacuum system 7 cm3
Materials exposed to vacuum system Stainless steel and Armco 17/7PH
Electrical connection mPm 283 plug
Accessory supplied mPm 183 mating electrical socket
Table 1 - Maximum switch ratings
Volts
a.c. 50/60Hz Resistive Load
Amps Tungsten Lamp Load
Amps Inductive Load
Amps
125 10 5.0 10
250 10 5.5 10
Description Item Number
Vacuum Interlock Switch D059-14-000
© Edwards Limited 2009. All rights reserved. Page 3
Edwards and the Edwards logo are trademarks of Edwards Limited.
INSTALLATION
D059-14-880 Issue D
3 INSTALLATION
3.1 Unpacking and inspection
Remove all packing materials and protective covers and check the IS16K for damage. If the IS16K is damaged, notify
your supplier and the carrier in writing within three days; state the Item Number of the IS16K together with your
order number and your supplier's invoice number. Retain all packing materials for inspection. Do not use the IS16K.
3.2 General
The vacuum switch should be mounted as close as possible to the point at which the pressure is to be measured. Use
a short branch tube with an internal diameter no less than that of the switch vacuum connection. Long, narrow and
angled connections can cause significant errors.
This equipment is not protected from dripping water from above, unless mounted with the vacuum flange pointing
downwards.
3.3 Connection to the Vacuum System
The vacuum switch may be mounted in any orientation but mounting with the vacuum switch vertical will prevent
the possibility of debris falling into the vacuum port and affecting the performance of the switch.
3.4 Connection to the Electrical Circuit
CAUTION
Ensure that the circuit connected to the vacuum switch is suitably fused to prevent the switch contact rating
being exceeded. The fuse rating must not exceed 10 amps.
WARNING
Do not allow the internal pressure to be higher than 1 bar gauge (2 bar absolute). If the pressure
in your system can be higher than 1 bar gauge, you must fit a suitable pressure relief valve.
Overpressure of the switch could cause injury to persons.
WARNING
Ensure that the electrical installation of the Vacuum Switch conforms with your local and national
safety requirements. It must be connected to a suitably fused and protected electrical supply and
a suitable earth point.
WARNING
If, in your application, failure of this switch could lead to a safety hazard, it is recommended that
the switch should be wired in series with another interlocking device, for example chamber lid
microswitch, to provide a double level of protection.
D059-14-880 Issue D
Page 4 © Edwards Limited 2009. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
INSTALLATION
Connect the vacuum switch to the equipment using the four pole mPm connector supplied. The contacts on this
connector are internally wired as follows:-
Figure 1 - Vacuum switch plug connections
CAUTION
To ensure that the socket cable gland strain relief is effective a cable with a minimum diameter of 6 mm must
be used.
Select a three or four core cable of a rating suitable for the power supply to be switched. One core should be
coloured green/yellow for the earth connection.
Thread the cable through the cable gland on the mPm socket cover and connect to the appropriate terminals as
shown on the diagram.
Tighten the cable gland and connect the socket to the switch using the sealing gasket and locking screw provided.
Earth connection.
Com Common
Lo Contact made when system
pressure is lower than set-
point.
© Edwards Limited 2009. All rights reserved. Page 5
Edwards and the Edwards logo are trademarks of Edwards Limited.
OPERATION
D059-14-880 Issue D
4OPERATION
4.1 Adjustment
The IS16K Vacuum interlock switch is pre-set to operate in the range of 250 to 500 mbar below atmospheric pressure.
No user adjustment is available.
Figure 2 - Dimensions of IS16K vacuum switch
D059-14-880 Issue D
Page 6 © Edwards Limited 2009. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
MAINTENANCE
5 MAINTENANCE
To ensure correct operation this vacuum switch should be tested once per year or every 10 000 cycles whichever is
sooner.
To test for correct operation proceed as follows:
1. Disconnect the electrical supply from the vacuum switch.
2. Connect an electrical continuity meter between the pin marked 'com' and the pin marked 'Lo'. Refer to Figure 1
for pin connections.
3. With the IS16K at atmosphere verify that the meter reads open circuit.
4. Reduce the pressure to below 500 mbar (as measured on a vacuum gauge) and check that the meter reads short
circuit.
5. Raise the pressue to above 500 mbar and check that the meter reads open circuit again.
The outer surfaces of the switch may be cleaned by wiping with a dry cloth. Avoid the use of solvents that may attack
the moulded cover.
This product contains no user serviceable parts.
WARNING
Ensure that maintenance is done by a suitably trained and supervised technician. Obey your local
and national safety requirements.
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1
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