BRONKHORST W-300B Manuel utilisateur

Instruction manual

C.E.M.

Controlled Evaporator

and Mixer

W-300B

Doc. no.: 9.17.082B Date: 14-03-2017

ATTENTION

Please read this instruction manual carefully before installing and operating the instrument.

Not following the guidelines could result in personal injury and/or damage to the equipment.

page 29.17.082

BRONKHORST®

Even though care has been taken in the preparation and

publication of the contents of this manual, we do not

assume legal or other liability for any inaccuracy, mistake,

mis-statement or any other error of whatsoever nature

contained herein. The material in this manual is for

information purposes only, and is subject to change without

notice.

Warranty

Bronkhorst®products are warranted against defects in

material and workmanship for a period of three years from

the date of shipment, provided they are used in accordance

with the ordering specifications and the instructions in this

manual and that they are not subjected to abuse, physical

damage or contamination. Products that do not operate

properly during this period may be repaired or replaced at

no charge. Repairs are normally warranted for one year or

the balance of the original warrant, whichever is longer.

See also paragraph 9 of the Conditions of sales.

The warranty includes all initial and latent defects, random

failures, and undeterminable internal causes.

It excludes failures and damage caused by the customer,

such as contamination, improper electrical hook-up,

dropping etc.

Re-conditioning of products primarily returned for warranty

service that is partly or wholly judged non-warranty may be

charged for.

Bronkhorst HIGH-TECH B.V. prepays outgoing freight

charges when any party of the service is performed under

warranty, unless otherwise agreed upon beforehand.

However, if the product has been returned collect to

Bronkhorst HIGH-TECH B.V., these costs are added to the

repair invoice. Import and/or export charges, foreign

shipping methods/carriers are paid for by the customer.

9.17.042 page 3

BRONKHORST®

Safety Precautions

The following safety precautions should be observed before

using this product and any associated instrumentation.

Although some instruments and accessories would normally

be used with non-hazardous voltages, there are situations

where hazardous conditions may be present.

This product is intended for use by qualified personnel who

recognize shock hazards and are familiar with the safety

precautions required to avoid possible injury. Read the

operating information carefully before using the product.

Before operating an instrument, make sure the line cord is

connected to a properly grounded power receptacle. Inspect

the connecting cables, test leads, and jumpers for possible

wear, cracks, or breaks before each use.

The instrument and accessories must be used in

accordance with its specifications and operating instructions

or the safety of the equipment may be impaired.

When fuses are used in a product, replace with same type

and rating for continued protection against fire hazard.

Opening of the equipment is not allowed. There are no

repairable parts inside. In case of a defect please return the

equipment to Bronkhorst High-Tech.

The symbol on an instrument indicates that the user

should refer to the operating instructions located in the

manual.

Surfaces near the symbol may be hot.

To maintain protection from electric shock and fire,

replacement components in mains circuits, must be

purchased from Bronkhorst®. Standard fuses, with

applicable national safety approvals, may be used if the

rating and type are the same. Other components that are

not safety related may be purchased from other suppliers as

long as they are equivalent to the original component. (Note

that selected parts should be purchased only through

Bronkhorst®to maintain accuracy and functionality of the

product.) If you are unsure about the applicability of a

replacement component, call a Bronkhorst®office for

information.

page 49.17.082

BRONKHORST®

Short-Form Operation Instruction

- Before installing your CEM system it is

important to check:

* flow rate

* fluids to be controlled/evaporated

* up- and downstream pressures

* output signals

* heater temperature

- Watch the red-coloured stickers and make sure the

test pressures are in agreement with normal safety

factors for your application.

- Check if the piping system is clean. Always install filters

to assure particle free fluids.

- Install the CEM system and tighten the fittings

according to the instructions of the supplier of the

fittings.

- Check the system for leaks before applying fluid

pressure.

- In systems with corrosive or reactive fluids, purging with

an inert gas is absolute necessary before use. Complete

purging after use with corrosive or reactive fluids is also

required before exposing the system to air.

- Apply the controlled power to the heat exchanger

and wait till the temperature is stabilised.

- Your CEM system is now ready for operation.

- Be sure that your liquid system is free of gas bubbles. If

needed remove the de-aerate plug on top of the CEM

control valve for de-aeration.

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BRONKHORST®

TABLE OF CONTENTS

1 Introduction

1.1 General .........................................................................................................................................page 7

1.2 Principle of operation ....................................................................................................................page 7

1.3 CEM set-up ...................................................................................................................................page 7

2 Installation

2.1 Receipt of equipment ....................................................................................................................page 8

2.2 Return shipment............................................................................................................................page 8

2.3 Service ..........................................................................................................................................page 8

2.4 Mounting position..........................................................................................................................page 8

2.5 Liquid filling ...................................................................................................................................page 8

2.6 In-line filter ....................................................................................................................................page 9

2.7 Fluid connections ..........................................................................................................................page 9

2.8 Electrical connections ...................................................................................................................page 9

2.8.1 General .........................................................................................................................................page 9

2.8.2 Pin configuration ...........................................................................................................................page 9

2.9 Electrical specifications...............................................................................................................page 10

2.9.1 Functional diagram .....................................................................................................................page 10

2.9.2 Electrical specifications...............................................................................................................page 10

2.10 Caution........................................................................................................................................page 10

2.11 Supply pressure ..........................................................................................................................page 11

2.12 System purging ...........................................................................................................................page 11

2.13 Seals ...........................................................................................................................................page 11

3 Operation

3.1 General .......................................................................................................................................page 12

3.2 Power and warm-up....................................................................................................................page 12

3.3 Start-up/close-down ....................................................................................................................page 12

4 Readout and control unit

4.1 Application with Bronkhorst®standard Readout and Control unit ..............................................page 14

4.1.1 General .......................................................................................................................................page 14

4.1.2 Rear panel connector..................................................................................................................page 14

4.1.3 Operation ....................................................................................................................................page 14

4.2 Application with none Bronkhorst®standard Readout and Control unit .....................................page 15

4.2.1 Recommended graphical diagram heater system ......................................................................page 15

5 Cables

5.1 EMC and cables..........................................................................................................................page 16

Appendices

1 Recommendations for handling the Bronkhorst®DLI (CEM) System

A. Vacuum system

B. Non Vacuum system

2 Enclosures

page 69.17.082

BRONKHORST®

Mix

Liquid

Gas

ONTROLLED

VAPORATOR

IXER

Control valve assembly

Purge connector

Liquid-gas mixing

device

Liquid Gas

Heat exchanger

Process

1 Introduction

1.1 General

The Bronkhorst®series CEM system is a unique

system to realise Mass Flow Control of vapour & mixtures,

containing up to 1200 g/h vapour. A complete system is a

combination of a mixing valve, a heating device, a liquid meter with

control function and a mass flow controller for the carrier gas. The

liquid flow through the liquid meter is controlled by the mixing valve.

A complete system also incorporates a readout/control unit,

including power supply for operation of the CEM system

devices.

1.2 Principle of operation

The abbreviation "CEM" stands for:

"C" the control of a flow of gas mixture, gas, liquid or liquid/gas mixture

"E" the evaporation of a flow of liquid/gas mixture by means of a temperature controlled heating device

"M" the mixing of a gas and a liquid (vapour).

At room temperature the liquid, for instance water or TEOS, is drawn from a container with an inert gas

blanket, or membrane, and measured by a liquid mass flow meter type µ-FLOW* or LIQUI-FLOW®*. The

required flow rate is controlled to the setpoint value by a control valve that forms an integral part of the CEM

system.

A carrier gas, controlled by a MFC* is used to stimulate the evaporation process as a mixing component, and

furthermore to transport the vapour.

The process is highly repeatable and efficient.

Subsequent total evaporation of the liquid is achieved in the CEM.

* For operation of these devices consult the appropriate instruction manuals.

1.3 CEM set-up

The CEM system is built up around 3 different parts; a control

valve, a mixing device and a heat exchanger in which heat is added

to the mixture of fluids for evaporation and furthermore to prevent

condensation. The temperature of the heat exchanger is controlled

by a temperature controller which is part of the readout and control

unit.

9.17.082

page 7

BRONKHORST®

2 INSTALLATION

2.1 Receipt of equipment

Check the outside packing box for damage incurred during shipment. Should the packing box be damaged,

then the local carrier must be notified at once regarding his liability, if so required. At the same time a report

should be submitted to:

BRONKHORST HIGH-TECH B.V.

RUURLO HOLLAND

Remove the envelope containing the packing list; carefully remove the equipment from the packing box.

Do not discard spare- or replacement parts with the packing material and inspect the contents for damaged

or missing parts.

2.2 Return shipment

When returning material, always describe the problem and if possible the work to be done, in a covering

letter.

It is absolutely required to notify the factory if toxic or dangerous gases have been metered with the

instrument!

This to enable the factory to take sufficient precautionary measures to safe-guard the staff in their repair

department. Take proper care of packing, if possible use the original packing box; seal instrument in plastic

etc.

All instruments must be dispatched with a completely filled in 'declaration on contamination form'. (In the

back of this manual)

Instruments without this declaration will not be accepted.

Note:

If the instruments have been used with toxic or dangerous gases the customer should pre-clean the

instrument.

Important:

Clearly note, on top of the package, the customer clearance number of BRONKHORST HIGH-TECH B.V.,

namely:

NL801989978B01

2.3 Service

If this equipment is not properly serviced, serious personal injury and/or damage to the equipment could be

the result. It is therefore important that trained and qualified service personnel perform servicing. Bronkhorst®

has a trained staff of servicemen available.

2.4 Mounting position

Preferably the CEM system is mounted in a vertical position, with the control valve section pointing upwards

and the vapour output pointing downwards.

Avoid installation in close proximity of mechanic vibration or strong heat sources.

2.5 Liquid filling

The purge connector can be used to remove the air from the liquid system. If available, use vacuum to de-

aerate the valve and liquid flowmeter before filling with liquid.

page 89.17.082

BRONKHORST®

2.6 In-line filter

Although fluids and piping should be absolutely free from dirt, it is recommended to install inline filters

upstream of the flowmeter(s).

2.7 Fluid connections

The liquid meter should be installed according to its manual. The outlet of this meter should be connected to

the liquid input port of the CEM valve. The controller section of the liquid flowmeter controls the CEM valve.

Electrical connections should be made according to the customer system description.

The outlet of the gas flow controller must be connected to the gas input part of the CEM valve.

The vapour outlet of the CEM should be directly coupled to the process, this tube should be heated at a

temperature higher than the heater in order to assure that the vapour will not condense in this line. Avoid

“cold spots” in the outlet.

* Note: Always check your system for leaks, before applying fluid pressure. Especially if toxic, explosive or

other dangerous fluids are used.

2.8 Electrical connections

2.8.1 General

Bronkhorst®recommends using their standard Readout and Control module and standard cables, which

have been tested together with the system. These cables are always supplied with the CEM system.

When not using the standard Readout and Control unit please read chapter 4.

2.8.2 Pin configuration

The heat exchanger is equipped with two connectors:

connector (1) 6-pin male

Pinnumber

Description

Not connected

PT100 (T-sensor)

Safety switch

connector (2) 5-pin male

Pinnumber

Description

110…120Vac supply

Description

220…240Vac supply

Heater (N)

Heater (L)

Heater (N)

Not connected

Heater (N)

Heater (L)

Not connected

9.17.082

page 9

BRONKHORST®

2.9 Electrical specifications

2.9.1 Functional diagram

2.9.2 Electrical specifications

Heater

The heater consists of two heater elements with a resistance of approx. 19,25 ± 0.5 Ohm each.

For 110…120Vac-power supply: two heater elements switched parallel.

For 220…240Vac-power supply: two heater elements switched serial.

Temperature sensor

Heraeus Sensor PT 100 sensor M-K 2515 1PT100

Safety switch:

Pepi Miniature Thermostat Model C, CH version

Switch temperature: 200 ºC

Contact rating: 24Vdc max / 3A max.

Controlled power supply

110…120Vac or 220…240Vac max. (Factory adjusted)

50-60 Hz

Power 1650VA max.

Max. Ambient temperature

50°C max.

2.10 Caution

Each system is pressure tested to at least 1.5 times the working pressure of the process conditions

stipulated by the customer, with a minimum of 8 bar.

This test pressure is stated on the CEM valve with a Red Coloured sticker.

Check test pressure before installing in the line.

If this sticker is not available, or the test pressure is incorrect, the instrument should not be mounted in the

process line and be returned to the factory.

Each instrument is leak tested to at least 2 ⋅10-9 mbar.l/s Helium.

page 10 9.17.082

BRONKHORST®

2.11 Supply pressure

Do not apply pressure until electrical connections are made. When applying pressure to the system, take

care to avoid pressure shocks in the system, and increase pressure gradually. Be sure that all setpoints are

at zero when doing so.

2.12 System purging

If corrosive or reactive fluids are used, purging with an inert gas is absolutely necessary, because if the

tubing has been exposed to air, introducing these fluids will tend to clog up or corrode the system due to a

chemical reaction with air or moist air.

Complete, long term purging is also required to remove such fluids from the system before exposing it to air.

It is preferred not to expose the system to air, when working with these corrosive fluids. Cycled purging and

evacuating is preferred.

2.13 Seals

Bronkhorst® has gathered a material compatibility chart from a number of sources believed to be reliable.

However, it is a general guide only. Operating conditions may substantially change the accuracy of this

guide. Therefore is no liability for damages accruing from the use of this guide. The customer’s application

demands its own specific design or test evaluation for optimum reliability. So check if the seals are correct for

your process. However the CEM system has metal seals for all connections. Only the valve plunger is an

elastomer.

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