
Vistec Lithography manual Page i
EBPG5200 Linux Workstation Notes Notes
Table of Contents
1. Introduction......................................................................................1
1.1. Scope of this document ....................................................................................... 1
2. System specific information...........................................................2
3. How to use projects.........................................................................3
4. How to maintain BEAMS.................................................................4
4.1. Beams-script........................................................................................................ 4
4.2. Upgrading beams................................................................................................. 4
5. Documentation................................................................................. 5
6. Network ............................................................................................ 6
7. Raid 1 storage.................................................................................. 7
7.1. sas2ircu................................................................................................................ 7
7.2. Failing disk........................................................................................................... 7
8. Mail Setup.........................................................................................8
9. Linux Tools.......................................................................................9
10. Backup............................................................................................ 10
11. Linux (Re)Installation .................................................................... 11
11.1. Standard from a kickstart file ............................................................................. 11
11.2. Manual Linux installation ...................................................................................12
12. Vacuum Controller (RE)install...................................................... 14
12.1. Principle ............................................................................................................. 14
12.2. Create bootable USB stick.................................................................................14
12.3. Make the Automation PC USB stick bootable. .................................................. 15
12.4. Installation.......................................................................................................... 16
12.5. Trouble shooting................................................................................................ 17
13. Vistec access to the machine....................................................... 18
14. RGS................................................................................................. 19
14.1. RGS through a ssh tunnel ................................................................................. 19
15. Appendix A..................................................................................... 20