Temescal FC-3800 Manuel utilisateur
FACILITY AND INSTALLATION GUIDE FOR
FC-3800 EVAPORATION SYSTEMS
Temescal, a division of Ferrotec (USA) Corporation
4569-C Las Positas Road, Livermore, CA 94551
Tel: 1-800-522-1215; Fax: 925-449-4096
0101-8604-0
Revision F, March 2011
Revision History
0101-8604-0
Revision Change Description Reason/
Application Date Approved
A First version of F & I Guide Applies to all FC-3800
systems built between
2/2000 and 6/2006
Feb.
2000
GW
B Added illustrations to Section 3 Applies to all FC-3800
systems built after 6/2006
July
2006
SS
C Revised instructions for installing
external transformer in nominal 400
V installations (see section 3.2.4)
Applies to all FC-3800
systems build after 6/2006
July
2006
SS
DRevised sections 1.4, 2.2.1, and
3.2.7. Modified Figures 3-4 through
3-14.
Clarified specifications and
instructions regarding water
supplies #2 and #3.
Nov.
2006
SS
E In sections 1.4 and 2.5, corrected
values for power drops to be
provided for vacuum system and e-
beam power supplies. Added Figure
2-3 and updated Figure 3-2. Deleted
former Figures
3-7, 3-9, and 3-11.
Corrections provided by
Temescal Field Service
and Temescal Engineering.
Eliminated former Simba 2
control console option.
Oct.
2010
LW
F In sections 1.4 and 2.4, corrected
input power specifications for
vacuum system.
Updated information
provided by Temescal Field
Service.
March
2011
LW
© 2011 Ferrotec (USA) Corporation. All rights reserved.
0101-8604-0, Rev. F i FC-3800 F & I Guide
TABLE OF CONTENTS
Section Page
Table of Contents......................................................................................... i
Safety Instructions for Operating and Service Personnel ............................ iii
Special Amendment for U.K. Users: Electrical Safety Precautions ............. iv
User Responsibility.......................................................................................v
Guidelines and Good Practices ....................................................................v
Health Hazard ............................................................................................. vi
1 INTRODUCTION AND SITE PREPARATION CHECKLIST
1.1 Scope and Purpose of this Guide............................................................... 1-1
1.2 T emescal Contact information.................................................................... 1-1
1.3 General Safety Information......................................................................... 1-2
1.4 Site Preparation Checklist .......................................................................... 1-2
2 FACILITY REQUIREMENTS
2.1 Enviro nment ............................................................................................... 2-1
2.2 Wate r ......................................................................................................... 2-1
2.3 Compressed Gases.................................................................................... 2-2
2.4 Electrical Power Requirements .................................................................. 2-2
2.5 Electrical Grounding Requirements............................................................ 2-3
3 UNPACKING and INSTALLATION
3.1 Unpacking by Customer ..............................................................................3-1
3.2 Customer’s Site Preparation Responsibilities..............................................3-2
3.3 Temescal Installation Responsibilities.........................................................3-5
3.4 Installation Drawings ................................................................................... 3-7
LIST OF ILLUSTRATIONS
Fig. Number Page
2-1 Facility and System Grounding Requirements 2-4
2-2 Vacuum Cubicle Grounding for Simba 2 Power Supply 2-5
2-3 Low-Z Grounding Requirements on Systems with a CV-6SLX or CV-12SLX Power Supply 2-6
3-1 Elevation View of Vacuum Cubicle, Showing Vacuum Cubicle Height 3-7
3-2 System Plan View, Showing Dimensions of Main System Components 3-8
3-3 Utility Connection Points on Rear of Vacuum Cubicle 3-9
3-4 Routing of Customer-Supplied Service Lines in 208-V Installations 3-10
3-5 Routing of Customer-Supplied Service Lines in 400-V Installations 3-11
3-6 Routing of Temescal-Supplied Helium Lines to Cryopump Compressors 3-12
3-7 Routing of Control/Data Cables on Systems with the Simba 2 Power Supply 3-13
3-8 Routing of Electrical Power Cables on Systems with the Simba 2 Power Supply 3-14
3-9 Routing of EMO Cables and Copper Straps on Systems with the Simba 2 Power Supply 3-15
3-10 Routing of Power and Control/Data Cables on Systems With Either the CV-6SLX
or the CV-12SLX Power Supply 3-16
3-11 Routing of EMO Cables and Copper Grounding Straps on Systems With Either
the CV-6SLX or the CV-12SLX Power Supply 3-17
FC-3800 F & I Guide ii 0101-8604-0, Rev. F
This page intentionally left blank for pagination purposes.
0101-8604-0, Rev. F iii FC-3800 F & I Guide
SAFETY INSTRUCTIONS FOR OPERATING AND SERVICE PERSONNEL
Operators and service personnel should always wear safety glasses. Operators shall not enter areas
intended for service access only. Only experienced service personnel should enter such areas, and
only after taking the preliminary precautions described in paragraphs 1 through 6 below.
DANGER
Potentially lethal voltages may exist within this unit, even with the line power switched off.
Service should only be attempted by qualified personnel. Failure to observe all safety
precautions may result in personal injury.
This component is designed to operate as part of a system containing high-voltage equipment.
Observe the precautions described below when servicing this system, especially when servicing
components where high voltages may be present.
1. Before servicing or operating this equipment, read all the component manuals supplied with the
system, paying special attention to safety instructions.
2. Post HIGH VOLTAGE WARNING signs in conspicuous locations within the service area.
3. Remove rings, watches, bracelets, and any other metal jewelry before working around high
voltage.
4. DO NOT WORK ALONE!
5. Be sure that all equipment is connected to a power receptacle having the correct polarity and
grounding, as prescribed by the local electrical codes. Refer to the power supply portion of the
documentation to determine the proper electrical ground for high-voltage components.
6. Before servicing any high-voltage component, switch off the electrical power at the component’s
main power switch. This switch should have a lockout feature. Lock the power off and keep the
key with you while you are working on the equipment.
7. Certain electrical parts (e.g., electrolytic capacitors) hold a lethal voltage even after the power is
switched off. Before entering any service area, use a grounding hook to discharge such parts. Be
sure that these parts are discharged before starting any repairs.
8. DO NOT touch high-voltage leads unless power is off and a grounding hook is connected to the
parts to be serviced.
9. The high-voltage components of the system should be equipped with electrical interlocks to
protect personnel from injury. DO NOT ATTEMPT TO DEFEAT, OVERRIDE, OR BYPASS
THESE PROTECTIVE DEVICES!
10. Never leave loose ends on high-voltage connections.
11. Observe the following warning if the system employs Radio Frequency (RF) power.
DANGER
RF radiation—even at modest power levels—can cause serious injury. If any of the RF
components (e.g., the RF power supply, the RF matching network, or the RF electrodes or
shielding inside the product chamber) are moved or changed in any way, the RF energy may
be radiated outside the equipment. Monitor the equipment to assure that external RF
radiation is below the levels prescribed by any and all applicable safety codes.
FC-3800 F & I Guide iv 0101-8604-0, Rev. F
Special Amendment for United Kingdom Users
All Electrical Power Sources: Safety Precautions
This component is designed to be used in an extra-high-voltage system. Only authorized personnel
should be permitted to carry out work on this system.
Prior to any servicing, grounding hooks should be used to short out all high-voltage parts and
conductors in both the vacuum system and the high-voltage power supply. Screens protecting extra-
high-voltage conductors should be removed only if appropriate action has been taken to ensure that
extra-high-voltage conductors are dead and cannot be reenergized inadvertently.
In addition, all personnel should be aware of:
1. The Electricity (Factories Act) Special Regulations (1908 and 1944), in particular, Regulations
18(d) and 28 of the 1980 Regulations, as amended; and
2. The employer’s responsibility to set up suitable systems to safeguard the health and safety of
employees, according to the Health & Safety at Work etc. Act (1974).
0101-8604-0, Rev. F v FC-3800 F & I Guide
USER RESPONSIBILITY
This equipment will perform in accordance with the instructions and information contained in the
user’s manual and its referenced documents when such equipment is installed, operated, and
maintained in compliance with such instructions. The equipment must be checked periodically.
Defective equipment shall not be used. Parts that are broken, missing, plainly worn, distorted, or
contaminated, shall be replaced immediately. Should such repair or replacement become
necessary, a telephone or written request for service should be made to Temescal, Livermore, CA,
a division of Ferrotec (USA) Corp.
The equipment, or any of its parts, shall not be altered without the prior written approval of
Temescal. The user and/or purchaser of this equipment shall have the sole responsibility for any
malfunction which results from improper use, faulty maintenance, damage, improper repair, or
alteration by any party other than Temescal.
GUIDELINES AND GOOD PRACTICES
1. Follow applicable clean room procedures (smocks, masks, gloves, etc.).
2. Do not expose the vent and purge valves to excessive pressures. The nitrogen line regulator is
factory set at 15 psi and must not be adjusted above 20 psi.
3. Prevent oil, grease, water, sweat, etc. from getting into the vacuum chamber.
4. Replace the source tray shield correctly to ensure that the ceramic parts or the high voltage
feedthroughs are protected from being coated.
5. Clean all mechanical parts and seals with lint-free paper/cloth soaked with isopropyl alcohol
(IPA). Dispose all IPA-exposed cleaning paper/cloth in a fireproof container, while ensuring
proper safety precautions are being followed.
6. Polish scratched surfaces with Scotch-Brite, taking care not to produce any cross scratches.
7. Shaft seals are all ferromagnetic. No lubrication is required.
8. Check the chamber door’s seal and sealing surfaces each time before closing it.
9. Check and clean with IPA the source tray seals and sealing surfaces each time before raising
the source tray into place.
10. Train staff by competent personnel. DO NOT allow staff to operate or do maintenance and
recovery work on the machine until they are trained by competent personnel.
11. Document all alarms, deviations, breakdowns, and servicings done on either a hardcopy or an
electronic equipment-log system.
FC-3800 F & I Guide vi 0101-8604-0, Rev. F
HEALTH HAZARD
The condensates deposited on the tank walls of a vacuum system are generally in the form of
extremely fine particles. The nature, as well as the form, of the materials poses the following
potential health hazards:
a) Inhaling fine particles (powder) may cause damage to the lungs. To help prevent this, wear a
protective respirator mask with fine filter that has been approved by the National Institute for
Occupational Safety and Health (NIOSH) and the federal Mine Safety and Health
Administration (MSHA).
b) Some substances are toxic and inhaling them should be avoided. Take steps to ascertain
whether or not the material being deposited is a known toxic substance. Refer to the Material
Safety Data Sheet(s) covering the evaporant(s) in question.
c) Certain powders (titanium, for instance) can cause flash fires when exposed to oxygen or
other oxidizers. Therefore, when opening the chamber door after a deposition cycle, exercise
extreme caution and allow time for the coating surface to oxidize. Breakage of some of the
more reactive condensates may be hazardous, even when the above precautions are observed.
In this situation, fire-protective clothing should be worn.
d) Certain powders (platinum, for instance) are known to catalyze methyl alcohol vapors upon
contact, generating heat in the process and possibly causing a fire to erupt. Therefore, never
use methyl alcohol to wipe down or clean any internal tank surfaces of a vacuum system.
Use isopropyl alcohol (IPA), instead. Dispose of all IPA-exposed lint-free paper/cloth into a
fireproof container, while ensuring all proper safety procedures and precautions are being
followed.
0101-8604-0, Rev. F vii FC-3800 F & I Guide
Customer
Documentation
Survey
In an effort to provide continuous improvement and ensure technical accuracy regarding product
documentation, we invite you to comment on this Facilities & Installation (F & I) Guide.
Please fill out and return this form to Temescal as soon as possible. Thank You.
Company: __________________________________________ Today’s Date: _____________
System Ordered: _____________________________________ Delivery Date: _____________
1. Please rate the quality of the information provided using the following rating system:
1 = Poor 2 = Fair 3 = Acceptable 4 = Good 5 = Excellent
Site preparation checklist 12345
Descriptions of facility requirements 12345
Installation instructions 12345
Installation drawings 12345
2. Was the information in this manual clearly presented and easy to understand?
YES NO
If NO, please cite specific references: _____________________________________
____________________________________________________________________
3. Did you find errors in this manual? YES NO
If YES, typographical or technical? (please cite the pages)
____________________________________________________________________
4. How important was this F & I Guide in preparing for your system (circle one)?
Essential Important Nice to Have Not Important
5. Do you currently own and operate any other Temescal Systems? YES NO
(please specify) ______________________________________________________
6. What kind of information would you like to see in future F&I Guides?
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7. Do you have any additional comments/suggestions/complaints? If so, please explain:
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Name: __________________________________ Telephone: ______________________
Fax #: __________________________________ E-mail: __________________________
Thank you for taking the time to review our documentation. Please mail or fax this form back to:
Temescal, a division of Ferrotec (USA) Corp.
Attn: Customer Support
4569-C Las Positas Road, Livermore, CA 94551
Telephone: 1-800-522-1215 Fax: 925-449-4096
FC-3800 F & I Guide viii 0101-8604-0, Rev. F
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