Telemark 376 Manuel utilisateur
MODEL 376/379
ELECTRON BEAM SOURCE
CRUCIBLE INDEXER
INSTRUCTION MANUAL
Part Number 376-0001-2
Copyright © TELEMARK, 1995-03 - All rights reserved
June, 2003
www.telemrk.com
Brand and product names are trademarks or
registered trademarks of thier respective companies.
WARRANTY
The 376/379 Electron Beam Source Crucible Indexer is guaranteed against faulty
materials, function, and workmanship for a period of 12 months after delivery from
Telemark. Components which are purchased by Telemark from other
manufacturers will be guaranteed for any lesser time that such manufacturer
warrants its product to Telemark. This warranty is valid only for normal use
where regular maintenance is performed as instructed. This warranty shall not
apply if repair has been performed or an alteration made by anyone other than an
authorized Telemark representative or if a malfunction occurs through abuse,
misuse, negligence, or accident. No charge will be made for repairs made under
warranty at Telemark’s facilities. Freight costs both ways will be at customer’s
expense. Telemark reserves the right for final warranty adjustment.
USER RESPONSIBILITY
The user is responsible for proper operation and ordinary maintenance of the
equipment, following procedures described in this manual, including reference
documents. Proper operation includes timely replacement of parts that are
missing, broken, or plainly worn. If the user has a reasonable doubt about
understanding the use or installation of a component, Telemark Technical
Service should be called.
It is vitally important that the user properly install the equipment as described in
Chapter 3 (Installation) of this manual. The Warranty will be void if the
equipment is improperly installed.
Alteration of the design or any function of the equipment voids the warranty and is
entirely the responsibility of the user.
SAFETY WARNING
General Precautions: Human contact with the voltages present within the power
supply and vacuum system can be fatal. Make sure that the input power is turned
off before opening the doors or removing panels. Short all HV feedthru
connections with a grounding hook before accessing the indexer main body.
ii
Telemark 376/379 Crucible Indexer
iii
Telemark 376/379 Crucible Indexer
TABLE OF CONTENTS
WARRANTY
USER RESPONSIBILITY
SAFETY WARNING
LIST OF ILLUSTRATIONS
1
UNPACKING
2
DESCRIPTION
3
INSTALLATION
Required Components...................3-1
Setting Up .........................3-1
Changing Number of Pockets ...............3-3
Control PCB ........................3-3
Sweep Select Control ...................3-4
List of Accessories or Supplies ..............3-5
4
OPERATION
General Operation .....................4-1
Model 379 Modes .....................4-1
LIST OF ILLUSTRATIONS
Fig. Title Page
2-A Indexer Reference Dimensions .................2-2
3-A Suggested Installation ........................3-2
3-B Change Number of Pockets ...................3-3
3-C Crucible Indexer Main PCB ....................3-4
3-D Sweep Select Selection .......................3-5
4-A Banana Pocket..............................4-2
5-A Assembly ..................................5-2
iv
Telemark 376/379 Crucible Indexer
5
SERVICING
Motor Drive Assembly ...................5-1
1
UNPACKING
Your Model 376/379 electron beam source crucible indexer is packed into a
specially designed double strength box surrounded with rigid foam padding.
Since packaging the indexer for safe shipment is otherwise difficult, please save
the box in the event that the indexer may ever need to be returned for servicing.
We cannot be held liable, and may not be able to fix without charge, indexers
which are damaged in transit as a result of improper packaging.
Inside the box will be the indexer, controller and this manual. Please check the
items to make sure no damage has occurred in transit. The indexer is ruggedly
built and packaged tightly so no damage should occur. In the event of any
deficiencies please report them to your vendor immediately. Also take care to
read the warranty on page ii as to the limits of our liabilities.
UNPACKING 1-1
Telemark 376/379 Crucible Indexer
1-2 UNPACKING
Telemark 376/379 Crucible Indexer
2
DESCRIPTION
The Indexer positions the crucibles of a turret-type sources, it also has a
position-indicating function. The Indexer features a high torque motor. It is
equipped with a coupling to accommodate a feedthrough drive shaft of a 1/4 inch
(6.35mm). The controller features crucible pocket selection lights to tell the
operator which crucible is in the “evaporate” position.
The model 376/379 electron beam source crucible indexer’s most notable
features are the following:
1Selects, accurately positions, and indicates crucible to be
evaporated.
2Indexes turret electron beam sources witha4to1gear ratio.
3Other features, such as heavy-duty screws in all important
fastening locations, and heavy-duty construction all round, are
designed to make the indexer serviceable for years of
production.
4Remote operation from a PLC (Programmable Logic Control).
5Can be tied to the high voltage interlock on the power supply.
6Ground stud, to ground the indexer from shorts.
7Sweep pattern select output
8Continuous and Banana Pocket operation (Model 379).
9Speed Control (Model 379)
DESCRIPTION 2-1
Telemark 376/379 Crucible Indexer
2-2 DESCRIPTION
Telemark 376/379 Crucible Indexer
Figure 2-A
Crucible
Indexer
Reference
Dimensions
3
INSTALLATION
Required Components
See fig. 3-A
The following is the minimum list of components required for setting up the
indexer for safe operation.
14 or 6 pocket electron beam source. Source rotation must be in
working order.
2Vacuum system with adequate external room for indexer
mounting (see page 2-2 for dimensions).
319 inch rack with 115/230VAC, 50/60 Hz power to house the
controller.
4Cable from ground on chamber to ground stud indexer
controller.
Setting Up
There are many different ways to set up the indexer. The best location and drive
connection for your application can only be made after analyzing all the factors.
The determining factors for the location of the indexer are; source type (side or
bottom drive), free space in the chamber, and free space under the chamber.
The following installation options apply to both side and bottom drive sources.
See Fig. 3-A
The preferred way is a direct drive on each side of the feedthough, this eliminates
the problems associated with gear and chain drive. However the locating holes
and bolts of the feedthough, source, and indexer must be precisely
predetermined so the indexer can function properly. The Feedthrough Bracket
INSTALLATION 3-1
Telemark 376/379 Crucible Indexer
makes it easy to bolt the indexer to the bottom of the chamber with the nut of a 1"
feedthru.
With Telemark thru baseplate Sources (231, 238, 267, 268, 277 or 281) the motor
can be installed on the motor bracket.
With an internal chain drive the source can lined up so the pocket is in the center
of the chamber or new source can be fitted in an existing chamber.
External chain drives can be used when space under the chamber is at a
premium, it is best not to mount the indexer farther away than needed.
3-2 INSTALLATION
Telemark 376/379 Crucible Indexer
Figure 3-A
Sugested
Installation
Ce manuel convient aux modèles suivants
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