SUSS PM5 Manuel utilisateur
terr
Contents
Safety Instructions
Manufacturerlnformation
Introduction
Scope of the Document
Purposeof the System
AcceptanceTest
Training
Safety
General Safety Precautions
General Requirements
Lockoutand Tagout Procedure
RiskValuation
User lnformation
Ergonomiclnformation
Clearances
DisplayUnits
Requirements
FacilityRequirements
EnvironmentalRequirements
NoiseLevel
RF
Frequencies,ElectrostaticDischargeandNon-IonizingRadiation
Mechanical Requirements
Vibration RequirementsandEarthquakeProtection
Media Requirements
Vacuum
CompressedAir
Power(onlyforaccessories)
PowerDisconnection
Main Componentsof the System
Typical SystemLayout
The Basic Prober
BaseFrame
ChuckStage
PlatenAssembly
Microscope
Non-electricalUtilities
Electrical Utilities
OpenConnections
Accessories
MaterialRequirements
Installingthe
Z
StrokeandChuck
Assemblingand Installingthe Microscope
ProbeHeads
Operation
Start Up Procedure
SystemOperation
ProbecardTesting
AnalyticalProbing
MechanicalAdjustments
Chuck PlanarizingProcedure
PlatenLevellingProcedure
Scope LevellingProcedure
MicroscopeStagePneumaticUpIDownAdjustment (optional)
Controls
ChuckStageAdjustment Controls
PlatenControls
PlatenProbeHeadMountingOptions
MicroscopeControls
ProbecardAdapter
Text Tool SocketAdapter
ConnectorTerminals
Maintenance
Preventive Maintenance
AnnualOperationalCheck
Lubrication
General Maintenance
Visual Checks
InstrumentOperation
Bulb Maintenance
Troubleshooting
The Stage IsDifficultTo Move
The Wafer DoesNotHoldOnThe Chuck
The Pneumatic Microscope
Lift
DoesNotFunction
Appendix
EquipmentDataBaseUnits
InstallationChecklist
Health HazardAnalysis
ProcessHealthHazardAnalysis
Useof Instruments
Safety Concept
Radiation
Earthquake Safety
Total RiskEvaluation
Warranty andLimitations
Safety Instructionsand
Symbols
Achtung,
bewgte
TaHel
Vedelzur?gsgefahrf
Im
slngescha~en
Zustand
nkht
hheingmtfen!
Attenth,
movlng
parts!
Danger
d
in)wyi
Do
not
touch
tIm
msEhkrs
when
swkched
on!
Attention,
pikas
en
mouvm!
Risque
de
bfeasures!
Ne
pas
tourher
pendant
le
fondiwrwmsnt
de
la
mwhhal
Attedone,
parti
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P&mb,
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Wre
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Manufacturer Information
System:
ManualProbeSystem PM5
Manufacture Date:
This manual has beenwritten for systems
that were builtfrom
1998.
Manufacturer: SUSS MicroTec Test Systems GmbH
Siiss
-
Strasse
1
0-01561
Sackabei Dresden
Germany
Tel:
[+49](0)35240
-
73
-
0
Fa:
[+49](0)35240
-
73
-
700
Email:
For maintenance and repairs, contact our service departments:
Germany:
Tel:
[+49](0)35240
-
73
-
2201-221
Fax:
[+49](0)35240
-
73
-
722
Email:
Japan:
Tel:
[+81]45
-
931
-
5600
Fax:
[+81]45
-
931
-
5601
Asia:
Tel:
[+66]2
-
938
-
44
-
261-27
Fax:
[+66]2
-
51 2
-
5569
1
Introduction
1.1
Scope
of
the Document
This documentcontains thefacilities design and equipment installation requirements
for the PM5andconformsto SEMI E6and SEMIS13 guidelinesandformats. Design
andinstallationrequirementsvarywitheachownerand project. Thereforethisguideline
is designed to cover all possibletasks that can be carried out usingthe equipment.
The successful installation and operation of semiconductor equipment is the mutual
objective of the owner, the operator, the installer and the supplier. Within the
semiconductor industry, the diversity and complexity of equipment have created
significant problemsfor those who design the facilities and install the systems. It is
difficulttostaycurrentwiththeeverchanging requirementsnecessaryforthe individual
pieces of equipment. As a result, it is also difficultto guaranteethat the facilities will
meetthe needs of each piece of equipment.
It is recommended that this manual is read and understood thoroughly before any
work isstartedwiththePM5andthatallsafety instructionsaretaken intoconsideration.
1.2
Purpose
of
the System
TheSUSS PM5analytical probesystem is intendedforthe preciseanalysis of wafers
andsubstrates upto 150mm (6"). Itcan be usedfor DCand
HF
measurementsand
isalsosuitableas afailureanalysistoolallowingthe useof upto 12SUSSprobeheads
at onetime.
The PM5 conforms to the EEC EMC Guidelines (89/336/EWG including all
corresponding alterations) and to the German EMVG law (for the electromagnetic
tolerance of devices) from 1
81h
September 1998.
The electrical assemblies which belong to and are delivered with the system are
listed on the Delivery Note according to configuration. You will receive this with the
delivery of the system. All parts of the system therefore correspond to the EC
Conformity Declarationfor PM5.
Furtherelectricalassemblies (accordingto EMVGuidelines)can bedelivered as long
asthey appear inthe SUSS accessory guide.
The PM5conformsto EN 61010
-
1
:
1993-04which correspondsto
UL
3101-1
:
1993
and IEC1010-1
:
1992.
1-3
Accentancc?
Test
6
2
Safety
IMPORTANT:
This section contains informationthat the operator must know
and understandto minimizethe risk of injuries.This information
is consistent with German local and federal safety regulations.
SUSS
equipment is designed to protect the user against all possible hazards. After
review by qualified safety personnel, the user should generate specific safety
procedureswith regardto the particular application ofthe equipmentand localcodes.
Itshould also be made certain that operators are familiar with the procedures. Ifthe
equipment is being usedto probe high voltage devices, the safety proceduresshould
alsobe postedinanobvious locationwhere all operators of theequipmentcannotfail
to readthem.
A
2.1
General Safety Precautions
1.
Read and understandthe User manual before usingthe system.
2.
This system must be handled carefully to ensure no harm comesto the user.
During usethere isthe danger of crushing, tripping, burningor beingcaught
up inthe equipment. Thesedangers cannot beavoided dueto the function of
the devices but any possible danger areas are labelledwith the signs onthe
following pagesand will also be highlighted throughout this manual. These
should be studied carefully inorder to avoid any unnecessary risk.
Donotreachintothe proberwhen it is plugged intothe mains. Avoid reaching
intothe chuck area as there is a danger of getting caught. The reararea is
open when workingwith a probe adapter which increasesthis risk.
Never usethe equipment with an open or removed safety cover as
this will increasethe danger of injurythrough moving parts.
A
6.
The device is underlow voltage (upto
28
V
DC). Incaseof equipmentfailure
the lowvoltage can bepresent untilthe operator switchesthecurrentoff atthe
main switch. Do not touch the electrical connections.
7.
Do nottouch the probehead needles with your fingers as this will
dirtythem and may result in injury.
A
Pleasetake noteof the nationaland international safety regulationsfor example
-
,
.
7
2.2
General Requirements
Safety relatedchecksshould be performedinaccordancewith supplierspecifications
prior to the system acceptance. These safety checks which are carried out at
installation, should be accepted by boththe supplier and the customer.
The installationsiteacceptancetest shouldbesignedbythesupplierandthe customer.
The following test should be performed prior to acceptance in orderthat the system
meets certain requirements:
Statement of Conformanceto SEMI
S2
Safety interlocksfunction and shut-down correct hazards
Ability to lock out hazardous energy sources prior to
maintenance
Site-specific installationdoes not degrade the tools'ergonomic designfactors
Interfaceto building systems function as intended
Radiofrequencies, electrostaticdischarge and non-ionizingradiation.
ElectricalPrecautions
A
When probing highvoltage devices, lethalhighvoltages may bepresent atthe probe
tips, probe head connectors and on non-shielded or non-isolated probe arms. It is
therefore essential that the operator avoids coming in to contact with these system
components during testing.
MovingParts
A
The operator should becarefulto keep loose clothing or long hairfrom gettingcaught
inthe system.
The operator should be careful when raising and loweringthe microscopeto prevent
trapping histher hands.
llluminator bulbs get very hot. Personnel replacing bulbs should be careful to allow
adequatetimefor the bulbto cool down before replacing it.
Laser Precautions
A
The prober may beequippedwith a lasercutter. Avoid eye and skinexposureto
direct or scattered radiation. The accompanying manual should be readthoroughly
hofnr~tho lacor
rl
~ttoric
I
tend
All
cafnttr inctrl~rtinnc
rn~
~cthntcaltnn intn
8
2.3
Lockout and Tagout Procedure
For safety reasons,this procedure is only necessaryfor devices containingelectrical
or non-electrical parts which store hazardous energy. As
SUSS
probers do not
contain such parts, this procedure is not applicable.
A
2.4
Risk Valuation
A
Thefollowing risks correspondto
KSD
risk valuation categories.
Reaching in during normal operation is not necessary.
A
Reaching in with a bare hand in the case of a default without stopping the system
doesnotproduceany immediatedangerthe movingpartsare restrictedandtherefore
unableto squashanything inside.
2.5
User Information
A
It should
be
noted that the position of the system is important where safety is
concerned. If
SUSS
recommendations are taken into consideration and followed
injury riskscan be kept minimal.
2.6
Ergonomic lnformation
A
Note
:
The user should take into considerationthe ergonomic conditions
according to the demands of SEMI. It is the responsibility of the
customer to ensure that these requirementsare met.
Transient overvoltage
Pollutiondegree
Vacuum supply
Air
pressure supply
Usage position
As per overvoltage category
II
Grade
1
as per IEC
664
Lessthan
200
mbar
(-0.8
bar gauge)
Filtered, dry, oil-free air of at least
4
bar,
max. pressure is
10
bar
Probe station
-
horizontal
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