SevenStar PC100-D PC Manuel utilisateur

REV.1.0

PC100-D PC

User’s Manual

2 0 2 0. 0 9

Contents

SECTION 1 INTRODUCTION

1.1 Declaration ...................................................

3.4 LED..................................................................

1.2 Attention.......................................................

SECTION 4 MAINTENANCE

1.3 The notice of safety ......................................

4.1 General ............................................................

1.4 General .........................................................

4.2 Caution ............................................................

1.5 Specification .................................................

SECTION 5 TROUBLESHOOTING

1.6 Calibration features.....................................

5.1 Initial check.....................................................

SECTION 2 INSTALLATION

5.2 Troubleshooting ..............................................

2.1 General .........................................................

SECTION 6 WARRANTYAND SERVICES

2.2 Unpacking.....................................................

6.1 Guarantee of Sevenstar ..................................

2.3 Mechanical Installation ...............................

6.2 Product Warranty…………………………...

2.3.1 General........................................................

6.3 Services............................................................

2.3.2 Installation ..................................................

6.4 Disclaimer........................................................

2.3.2.1 1/4VCR Installation .................................

APPENDIX I.........................................................

2.3.2.2 Compression Fitting Installation..............

2.4 Electrical Installation...................................

2.5 Checking Before Operation.......................

SECTION3 FUNCTIONS

3.1 General...........................................................

3.2 Control Mode ...............................................

3.3 Valve Type.....................................................

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Instruction of PC

1.1 Declaration

The copy right of The user’s manual of pressure controller and mass flow meter is

subjected to Beijing Sevenstar Flow Co., Ltd (following abbr. Sevenstar), which is not

allowed to duplicate, store and distribute any part of this manual in mean of electric,

mechanical, photocopy, recording or other way without permission of Sevenstar. This

manual is not assured that there is no mistake and missing in which have been corrected

strictly, and the publisher is under no obligation to the mistake or missing, meanwhile the

publisher is not in charge of any loss that this manual leads to.

Beijing Sevenstar Flow Co. , Ltd

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1.2 Attention

Dear customer, thanks for using PC pressure controller. This manual describes in detail

important issues about correct and safe operations of the product.

User of the product should read and comprehend this manual and pay attention to the

text with labels and notices.

Sevenstar assumes no liability for the customer’s failure to comply with this manual.

This manual is necessary for your installation and maintenance, please keep it carefully.

1.3 The notice of safety

Please pay attention to the below notices when reading this manual. We are not responsible

for any result without abiding by the below notices.

a) Do not replace any components or disassemble instrument.

Do not replace any components, or disassemble the instrument without any authorized

and make sure that the label or/and seal of product is not removed when returning for

reworking, recalibration and maintenance.

b) Please contact professional for technical service.

Do not replace any components. Any technical support is provided by professional who

must be authorized by Sevenstar.

c) Please pay more attention to use dangerous gas.

Instrument should be purged completely and keep safety if dangerous gas is used.

Meanwhile make sure that moist gas must not react with material of seal and

instrument.

d) Please pay attention to purging instrument.

The whole system should be purged by dry gas after and before the instrument is

installed.

e) Please abide by proper steps of purging.

Product should be purged and handled with gloves.

f) Do not use the instrument in explosive environment.

Do not use the instrument in explosive environment, unless the safety certificate is

available.

g) Please use proper fittings and keep the rules.

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All fittings of instrument must be matched according to the listing in manual. Please

read manual carefully before screwing tightly.

h) Please do leakage check.

Please check carefully all of vacuum parts and make sure that there is not leakage in

the system.

i) Please make sure that instrument is working under safe pressure.

Please make sure that the pressure of inlet gas is less than maximum working pressure.

j) Please keep the whole system away from pollution.

When system running, do not use polluting gas, such as particle of dust, dirt, fibre,

glass or scrap iron.

k) Please do warm-up instrument before working.

Please do warm-up instrument, especially in using dangerous gas. Please close valve

completely to make sure that there is not error flow.

1.4 General

Pressure controller (PC) accurately measures and controls mass flow rates, which is

widely applied in the fields as: semiconductor and IC fabrication, special materials science,

chemical industry, petrolic industry, pharmaceutical industry, environmental protecting and

vacuum system researching, etc.. The typical applications include: microelectronic process

equipment such as diffusion, oxidation, epitaxy, CVD, plasma etching, sputtering, ion

implantation, vacuum deposition equipment, optical fiber melting, micro-reaction

equipment, mixing & matching gas system, capillary flow pressure control system, gas

chromatograph and other analytical instruments.

The PC100-D PC is a latest generation PC for use in semiconductor applications and

demanding industrial uses where its high accuracy and flexibility in interfacing are

required.

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The PC100-D PC incorporate a dual interface, voltage (0~5V) and as well as RS-485

digital interfaces. It is possible to operate the instrument completely digitally or it can be

operated in analog mode with digital monitoring. PC100-D series have wide range of

power supply(available for +15 ～+24VDC).Customer Secondary Development of

control and sample software is available through the open protocol.

PC100-D PC default setting：

MAC address：32；

RS485 baud rate：19200；

Control mold：0-5V analog signal control.

For more information, please refer to www.mfcsevenstar.cn.

Path: Service >> Downloads>>Software download>>Communication Protocol.

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1.5 Specification

Pressure Type

Absolute

Pressure Full Scale Ranges

1000Torr,1200mbar

Proof Pressure

3MPa

Orifice Full Scale Ranges

2、3、5SLM

Control Modes

Upstream

Temperature drift

Zero：±0.02% of FS/℃; Span：±0.04% of Reading/℃

Pressure Resolution

0.1 Torr

Pressure Control Accuracy

±1.0% of Reading(≥10%FS); ±0.2% of FS (<10%FS)

Typical Response Time

< 1.0 second

Operating Temperature Range

10 ℃to 50 ℃

Mechanical interface

1/4" Compression Fitting、1/4VCR M

Valve Type

Normally Closed

Leak Integrity，External

< 1 x 10-10(scc/sec He)

Leak Integrity，Through closed valve

< 1.0% of orifice Full Scale (Nitrogen at 25 psig on inlet to atmosphere)

Power supply

+15 to +24 VDC(< 4 watts)

Electrical interface

DB-9 M

Notes :

PC is calibrated by N2as a standard gas.

Units: Torr ;

mbar

Standard Situation: Tem —273.15K ( 0 ºC );

Air Pressure —101325 Pa (760mm Hg)

For Sevenstar PC, the unit of SCCM is identical to “mL/min, 0 ºC ,1atm”, and the unit of SLM is

identical to “L/min, 0 ºC ,1atm”.

F.S. : Full Scale; S.P. : (Set Point)

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1.6 Calibration Features

Normally, the PC are calibrated close to customer’s requirement ( the requirement

should be accorded with the specification). Without customer’s information, the PC are

calibrated under standard conditions.

1.6.1 Standard conditions

Without special conditions specified by the customer, the PC is calibrated under the

following standard conditions:

Pressure Outlet: Atmospheric.

Normally gas mass flow rate is transferred to gas volume flow rate at standard state.

Mass flow rate unit:

SCCM——standard cubic centimeter per minute.

SLM——standard liter per minute.

Standard state：Temperature —— 0ºC (273.15K)

Pressure —— 101325Pa (760mmHg)

At standard state, the gas density will be constant. The multiplication of density and

volume flow rate is equal to the mass flow rate. Therefore at the standard state, the volume

flow rate can represent mass flow rate.

1.6.2 Manufacturing Environment

The PC are assembled, calibrated, packaged and controlled in class 1000 environment.

The temperature is 22±2 ℃.

1.6.3 PrecisionAdjustment

Each PC is accurately controlled for 24 hours after manufacturing on a different

calibration bench. The accuracy, the dynamic response, the stability to pressure

variations is double checked, only qualified product available for sale.

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SECTION 2 INSTALLATION

2.1 General

WARNING: Toxic, corrosive or explosive gases must be handled with extreme care.

After installing the PC, the system should be thoroughly checked to ensure it is leak-free.

Purge the PC with a dry inert gas for one hour before using corrosive gases.

IMPORTANT: When installing the PC, ensure that the arrow on the back of the unit

in the same direction as the gas flow.

2.2 Unpacking

The PC100-D are assembled，calibrated and clean packaged under clean room

conditions. These series products are packaged with two separately sealed plastic bags. The

outside is common plastic bag, the inside is clean bag. The outside bag should be removed

in the entrance to the clean room. In order to minimize the contamination, the second clean

bag should be removed in the clean room when PC installed in the system.

2.3 Mechanical Installation

2.3.1 General

PC100-D should be mounted in the position accord with the requirement in the

purchase order. The gas should be clean and dry. The mounting should be free from shock

or vibration. The pictures of the product are shown in figure2-1,the dimensions of the

product are shown in figure2-2 and figure2-3. Different fittings(Compression Fitting1/4

and VCR1/4 M) are optional for customer, The length of the product L are shown in Table

2-1. Do not remove the protective end caps of the fittings until installation.

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Figure 2-1 PC100-D

Table des matières

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