32-175 Controller
32-175 Front Panel Controls and Meter
•Main power ON / OFF: Turns the 32-175 ON and OFF
•Switch:
remotely. In the remote mode TTL low (or shorted relay contacts) = Beam ON
•: Sets the Beam Voltage to 500, 1000, 1500, or 2000 volts DC. The Beam
voltage accelerates the ions to the target.
•Focus: Adjusts the size of the ion beam.
•:
the emission meter.
•: Displays the emission current, 25mA nominal.
-gassing of the 04-165 Ion Source
NOTE: Before outgassing the 04-165 ion source the vacuum chamber needs to be baked out to
remove water vapor from the ion source.
1. With the 32-
ament current. 0 to 10 turns corresponds
2. Set the Beam Voltage Knob to 500 V and the Beam Voltage Switch to OFF.
3. Turn the 32-175 main power switch ON.
4. ve 1 to 2 mA of emission
current.
5.
emission current.
6.
emission current.
7. Repeat
8. mA and the Beam voltage set to 500 V, turn the beam
voltage ON.
9. Wait 5 minutes and then turn the beam voltage to 1000V.
10. Wait 5 minutes and turn the beam voltage to 1500V.
11. Wait 5 minutes and turn the beam voltage to 2000V.
