Raith 150 Manuel utilisateur
System Operation Manual
RAITH150
Version 4.0
Product: RAITH150
Document number: 04-12-9911-404-1.01
Date generated: Monday, December 13, 2004
Statement All information in this document has been carefully prepared and are
believed to be accurate and complete. If doubts exist about any detail
or additional information is necessary, please inquire Raith GmbH or
their accredited representative.
Copyright © 2004 by Raith GmbH. All rights reserved.
Trademarks
Microsoft, Windows,
and Windows 2000
are the registered trademarks of Microsoft,
Inc.
AutoCAD, DXF are the registered trademarks of Autodesk,
Inc.
Design CAD is the registered trademark of American Small
Business Computers, Inc.
GEMINI is the registered trademark of LEO
Elektronenmikroskopie GmbH.
GDSII is the registered trademark of Calma GE.
Addresses
Raith GmbH Tel.: +49 231 97 50 00 – 0
Hauert 18 Fax.: +49 231 97 50 00 – 5
44227 Dortmund WWW: www.raith.com
Raith USA, Inc. Tel.: +1 631 738 9500
2805 Veterans Hwy Fax.: +1 631 738 2005
Suite 23 WWW: www.raith.com
3
1 Introduction 5
1.1 Using this manual 5
1.2 Notes, cautions, and warnings 5
1.3 Navigating through the manuals 6
2 Safety and handling 7
2.1 Site requirements 7
2.2 General precautions 7
2.3 Operation, maintenance, service procedures 7
2.4 Miscellaneous Precautions 10
3 Notes concerning Personal Computer 13
3.1 Operation system 13
3.2 Hardware 13
3.3 Software 13
3.4 Backup 14
4 Power on and off 15
4.1 Starting the instrument 15
4.2 Troubleshooting 18
4.3 Going into standby 19
4.4 Shutting down the instrument 19
5 Maintenance of system 21
5.1 Column maintenance 21
5.2 Filament lifetime 23
5.3 Utility maintenance 24
5.4 Sample holders 25
5.5 Computer systems 26
5
1 Introduction
1.1 Using this manual 5
1.2 Notes, cautions, and warnings 5
1.3 Navigating through the manuals 6
1.1 Using this manual
Make sure that you use the system correctly by reading the operation
manual before usage carefully.
Keep the operation manual on hand to read it whenever necessary.
Contact directly Raith or your local representative whenever you are
uncertain about operating your system.
1.2 Notes, cautions, and warnings
Stickers on the left column provide you with the following messages:
A note emphasizes information requiring special attention.
A Caution message appears when special handling is necessary to
prevent product damage.
A dedicated message appears when special handling is necessary to
prevent personal injury or death.
1 Introduction
6
1.3 Navigating through the manuals
This manual provides information about
• safety and handling procedure for system and personal safety,
• startup, standby, shutdown, and bakeout procedures.
• Information on the task-oriented operation of the system as well
as the user interface are given in separate documents.
You can read the manual from beginning to end. This is highly
recommended but rarely done. Be sure to read the safety section,
before operation, in ►chapter Safety and handling.
7
2 Safety and handling
2.1 Site requirements 7
2.2 General precautions 7
2.3 Operation, maintenance, service procedures 7
2.4 Miscellaneous Precautions 10
2.1 Site requirements
Verify that the safety and environmental requirements of the
workstation site, which are the responsibility of the customer, are
satisfied. In particular,
• the X-ray radiation requirements,
• the electrical supply and grounding requirements,
• the requirements regarding pneumatic gate valve (RAITH150
only),
• the LASER radiation requirements,
• the hot surface requirements, and
• local codes regarding floor loading and earthquake safety.
2.2 General precautions
We request that you use the instrument in a proper manner and within
the scope of its purpose. Never make any modifications, especially,
removing protective parts, replacing components, and unlocking
safety measures. The cover of the system is also for your protection,
so never unscrew covers.
2.3 Operation, maintenance, service
procedures
Operators and service personnel must be trained on potential safety
hazards and safe techniques, and must observe all warnings and
cautions encountered on the system and in the manuals. If you have
any doubt regarding procedures, contact Raith directly or your local
representative.
2 Safety and handling
8
There may be additional limitations to operation, maintenance, and
service procedures not mentioned in this manual as well as industry-
approved methods and procedures which must be observed. If you
have any doubt regarding approved procedures, contact safety
personnel at your company, or representatives of your state, territory
or province, or federal government.
Therefore,
• No operator should perform any normal operations without prior
training. Operation procedures are described in this Operation
manual.
• Allow only trained personnel to perform maintenance procedures.
Maintenance procedures are described in this Operation manual.
• Only authorized service personnel are allowed to service the
system. Service procedures are described in the system service
manual, which is only available for Raith’s service engineers only.
2.3.1 X-ray radiation
The system produces X-rays, if the high voltage is switched on. Under
no mode of operation the measured X radiation exceeds 1µSv/h at a
distance of 0.1m from any surface of the system. To insure this,
Do not remove the cover, especially near the column.
Never attempt maintenance of any kind on the electron column other
than that described in this Operation manual.
Servicing the column is restricted to service engineers.
According to German Law (X-ray Protection Directive revised June
18, 2002 or Röntgenverordnung geändert am 18. Juni 2002) the
operation of this e-beam lithography-System is not subject to official
permission. Outside Germany, the user of this e-beam lithography-
System must observe the specific regulations of the country where the
system is installed. See provided important document for further
details.
Should you find that any of the stickers is missing on your instrument
please notify us. We will send you a replacement.
2.3.2 High voltages
Your system uses lethal high voltages up to 30 kV. Therefore,
Touching the power supply may result in death or serious injury.
For the same reason do not change the instrument’s connections
especially the grounding to the main power line.
The system is equipped with interlocks to minimize hazards.
2.3 Operation, maintenance, service procedures
9
Overriding interlocks is dangerous and should never be done.
Never attempt maintenance of any kind on the high voltage other than
that described in this Operation manual.
Servicing the high voltage is restricted to service engineers.
The system meets the requirement for protection against electrical
shocks.
Should you find that any of the stickers is missing on your instrument
please notify us. We will send you a replacement.
2.3.3 Line voltage
Line voltage up to 240 V AC may be present in various locations
within the system, even when the system or instrument is turned off.
Therefore,
Completely disconnect the unit from line voltage by disconnecting the
AC plug from the AC power source before performing service or
maintenance.
Never attempt maintenance of any kind on the line voltage other than
that described in this Operation manual.
Servicing the line voltage is restricted to service engineers.
The system meets the requirement for protection against electrical
shocks.
Should you find that any of the stickers is missing on your instrument
please notify us. We will send you a replacement.
2.3.4 Pneumatic gate valve (RAITH150 only)
Your system uses a pneumatic gate valve for separating the load lock
from the chamber. Therefore,
Never put your arm or hands through the gate valve. They may get
bruised.
Never attempt maintenance of any kind on the gate valve other than
that described in this Operation manual.
Servicing the gate valve is restricted to service engineers.
Should you find that any of the stickers is missing on your instrument
please notify us. We will send you a replacement.
2 Safety and handling
10
2.3.5 LASER radiation
Your system uses a LASER. Therefore,
Never look into the LASER beam to avoid damaging your eyes.
Never attempt maintenance of any kind on the LASER other than that
described in this Operation manual.
Servicing the LASER is restricted to service engineers.
Should you find that any of the stickers is missing on your instrument
please notify us. We will send you a replacement.
2.3.6 Hot surface
While performing a bake out of the column, its surface becomes hot.
Therefore,
Never touch the column while performing a bake out.
Be careful not to place any flammable objects on the protection grid
behind the electron-optic column.
Servicing the bake out is restricted to service engineers.
Should you find that any of the stickers is missing on your instrument
please notify us. We will send you a replacement.
2.4 Miscellaneous Precautions
2.4.1 Monitor
The system may include a cathode ray tube (CRT) monitor for
display. If the screen portion of the CRT is broken, a high-velocity
scattering of glass fragments results. Use care when handling the
CRT. Avoid striking it with any object which may cause it to crack.
2.4.2 Electric Fans
Some instruments in the system may be air-cooled. Do not block the
air flow to or from the fans. Do not operate fans with the protective
covers or filters removed. Keep fingers, loose clothing, etc. away from
fans. Periodic filter maintenance may be required to prevent
overheating.
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