
4Rev. A / November 2005
PRF-914B High Resistance Miniature Concentric Ring Fixture Set
The High Resistance PRF-914B Miniature Concen-
tric Resistance Fixture accurately measures surface
resistance of small areas. The xture set consists
of a PRF-914B Concentric Resistance Fixture, dual
shielded cables equipped with SMA and BNC con-
nectors, and a BNC/banana adapter for instrument
connecon. The oponal PRV-913B Resistance Veri-
caon Fixture is designed to conrm the proper
operaon of the PRF-912B and high resistance PRF-
914B Miniature Concentric Resistance Fixtures.
The PRF-914B is designed to work in conjuncon
with a precision wide range resistance instrument,
such as the PROSTAT PRS-801 Resistance System,
and an insulated test bed (e.g., PTB-920 or equiva-
lent). This instrument and xture combinaon
provides direct surface resistance measurements in
ohms, generally in accordance with the ESD Asso-
ciaon’s S11.11 Surface Resistance test standard. To
obtain an esmate of ASTM D-257 Surface Resis-
vity in ohms/square, simply mulply the PRF-914 xture measurement by 10, i.e., add one order of
magnitude.
A. PRF-914B Concentric Resistance Fixture Descripon
This precision xture is designed in miniature to approximate surface resistance measurements
typically obtained with the ESD Associaon’s ESD S11.11 Surface Resistance Standard xture. The
PRF-914B, however, is approximately 1/10th the size of the S11.11 xture. Based on its size the
PRF-914B is oen referred to as a “micro probe”.
1. The resistance measurement range of the PRF-914B xture is 0.9 ohms at <10 volts to 1.0E+14
(1.0x1014 ) ohms at 100 volts.
2. The miniature concentric xture consists of a spring loaded 0.10 inch (2.54 mm) diameter
center electrode surrounded by 10 each 0.06 inch (1.5 mm) diameter contact electrodes that
electrically form a connuous outer ring. (Figure 2) Contacts are pogo-pin type ATE quality
probes made of beryllium Copper coated with 60 microinch of hard Gold.
a. The PRF-914B’s center electrode is electrically separated from the outer ring contacts by
a high resistance dielectric (Teon). The center electrode acts as a current sensor dur-
ing resistance measurements. It is connected to the negave (-) terminal of a wide range
measurement instrument via its own RG-174 coaxial cable’s inner conductor, SMA/BNC
couplers and dual BNC to Banana instrument adapter. The outer shield of the sensing cable
is connected to ground via the instrument adapter.
b. The outer ring contacts are electrically connected at a common point. They apply the test
voltage to the material under test during a resistance measurement. They are connected to
the posive (+) terminal of the wide range measurement instrument via a second shielded
RG-174 coaxial cable’s inner conductor, SMA/BNC couplers and dual BNC to Banana instru-
ment adapter. The outer shield of the power cable is connected to ground via the instru-
ment adapter.
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