PI P-5 7 Series Manuel utilisateur

Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany

Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, www.pi.ws

PZ82E

-5x7/P-5x8 Positioners

User Manual

Version: 3.2.0

Date: 23.06.2022

This document describes the following products:



P-517, P-527

Precision XY nanopositioner

P-517.2CD/.2CL, 100 µm × 100 µm

P-527.2CD/.2CL, 200 µm × 200 µm



P-517, P-527

Precision XYZ nanopositioner

P-517.3CD/.3CL, 100 µm × 100 µm × 20 µm

P-527.3CD/.3CL, 200 µm × 200 µm × 20 µm



P-517, P-527

Precision XY / rotation nanopositioner

P-517.RCD, 100 µm × 100 µm, 2 mrad

P-527.RCD, 200 µm × 200 µm, 4 mrad



P-558, P-518, P-528

Precision nanopositioning Z stage

P-558.ZCD/.ZCL, 50 µm

P-518.ZCD/.ZCL, 100 µm

P-528.ZCD/.ZCL, 200 µm



P-558, P-518, P-528

Precision nanopositioning Z and tip/tilt stage

P-558.TCD, 50 µm, 0.5 mrad

P-518.TCD, 100 µm, 1 mrad

P-528.TCD, 200 µm, 2 mrad

.2CD/.3CD/.ZCD/.RCD/.TCD with D-sub

connector

.2CL/.3CL/.ZCL with LEMO connectors

The following company names and brands are registered trademarks of Physik Instrumente (PI) GmbH & Co.

KG:

PI®, NanoCube®, PICMA®, PILine®, NEXLINE®, PiezoWalk®, NEXACT®, Picoactuator®, PInano®, PIMag®,

Q-Motion®

The patents held by PI are found in our patent list:

https://www.physikinstrumente.com/en/about-pi/patents

this manual are protected by copyright. With regard thereto, Physik Instrumente (PI) GmbH & Co. KG retains

all the rights. The use of any text, images and drawings is permitted only in part and only when indicating the

source.

Original instructions

First printing: 23.06.2022

Document number: PZ82E, CBo, Version 3.2.0

Subject to change without notice. This manual is superseded by any new release. The latest release is

available for download (p. 3) on our website.

1About this Document 1

1.1 Objective and Target Group of this User Manual ...................................................... 1

1.2 Symbols and Typographic Conventions...................................................................... 1

1.3 Definition of Terms..................................................................................................... 2

1.4 Figures ........................................................................................................................ 2

1.5 Other Applicable Documents ..................................................................................... 3

1.6 Downloading Manuals................................................................................................ 3

2Safety 5

2.1 Intended Use .............................................................................................................. 5

2.2 General Safety Instructions ........................................................................................ 5

2.3 Organizational Measures............................................................................................ 7

3Product Description 9

3.1 Model Overview ......................................................................................................... 9

3.2 Product View ............................................................................................................ 10

3.3 Scope of Delivery...................................................................................................... 11

3.4 Suitable Electronics .................................................................................................. 11

3.5 Accessories ............................................................................................................... 12

3.6 Technical Features.................................................................................................... 13

3.6.1 PICMA® Piezo Actuators .............................................................................. 13

3.6.2 Flexure Guides ............................................................................................. 13

3.6.3 Capacitive Sensors ....................................................................................... 13

3.6.4 ID Chip (Models with D-sub Connector Only).............................................. 13

4Unpacking 15

5Installation 17

5.1 General Notes on Installing ...................................................................................... 17

5.2 Connecting the P-5x7/P-5x8 to the Protective Earth Conductor ............................. 18

5.3 Mounting the P-5x7/P-5x8 ....................................................................................... 20

5.4 Fixing the Load.......................................................................................................... 21

6Starting and Operating 25

6.1 General Notes on Starting and Operating................................................................ 25

6.2 Operating the P-5x7/P-5x8....................................................................................... 27

6.3 Discharging the P-5x7/P-5x8 .................................................................................... 27

Contents

7Maintenance 29

7.1 General Notes on Maintenance ............................................................................... 29

7.2 Packing the P-5x7/P-5x8 for Transport .................................................................... 29

7.3 Cleaning the P-5x7/P-5x8 ......................................................................................... 31

8Troubleshooting 33

9Customer Service 35

10 Technical Data 37

10.1 Specifications............................................................................................................ 37

10.1.1 P-5x7 Data Table.......................................................................................... 37

10.1.2 P-5x8 Data Table.......................................................................................... 39

10.1.3 Maximum Ratings........................................................................................ 40

10.2 Ambient Conditions and Classifications ................................................................... 41

10.3 Dimensions ............................................................................................................... 42

10.4 Torque for Stainless Steel Screws (A2-70)................................................................ 45

10.5 Pin Assignment ......................................................................................................... 45

11 Old Equipment Disposal 49

12 European Declarations of Conformity 51

1 About this Document

P-5x7/P-5x8 Positioners PZ82E Version: 3.2.0 1

In this Chapter

Objective and Target Group of this User Manual.......................................................................... 1

Symbols and Typographic Conventions ......................................................................................... 1

Definition of Terms ........................................................................................................................ 2

Figures............................................................................................................................................ 2

Other Applicable Documents......................................................................................................... 3

Downloading Manuals ................................................................................................................... 3

1.1 Objective and Target Group of this User Manual

This user manual contains the information required for using the P-5x7/P-5x8 as intended ("x"

stands for the different models (p. 9)).

Basic knowledge of control technology, drive technologies, and suitable safety measures is

assumed.

The latest versions of the user manuals are available for download (p. 3) on our website.

1.2 Symbols and Typographic Conventions

The following symbols and typographic conventions are used in this user manual:

CAUTION

Dangerous situation

Failure to comply could lead to minor injury.

Precautionary measures for avoiding the risk.

NOTICE

Dangerous situation

Failure to comply could cause damage to equipment.

Precautionary measures for avoiding the risk.

INFORMATION

Information for easier handling, tricks, tips, etc.

About this Document

1 About this Document

2 Version: 3.2.0 PZ82E P-5x7/P-5x8 Positioners

Symbol/Label Meaning

Action consisting of several steps with strict sequential order



Action consisting of one or more steps without relevant sequential

order.



Bullet

p. 5

Cross-reference to page 5

RS-232

Label on the product indicating an operating element (example:

RS-232 interface socket)

Warning signs on the product that refer to detailed information in this

manual.

1.3 Definition of Terms

Term Explanation

Positioner

Electrically driven mechanics (here: P-5x7/P-5x8) with one or more

motion axes

Electronics

Piezo amplifier or piezo controller that supplies the operating voltage

for positioners or piezo actuators

Piezo amplifier

Electronics without sensor evaluation for open-loop operation of

positioners and piezo actuators

Piezo controller

Electronics with sensor evaluation for closed-loop operation of

positioners and piezo actuators

1.4 Figures

For better understandability, the colors, proportions, and degree of detail in illustrations can

deviate from the actual circumstances. Photographic illustrations may also differ and must not

be seen as guaranteed properties.

1 About this Document

P-5x7/P-5x8 Positioners PZ82E Version: 3.2.0 3

1.5 Other Applicable Documents

The devices and software tools from PI mentioned in this documentation are described in

separate manuals.

The latest versions of the user manuals are available for download (p. 3) on our website.

Product Document

E-503 piezo amplifier module

PZ62E user manual

E-505 piezo amplifier module

E-610 piezo amplifier/servo controller (OEM

module)

PZ70E user manual

PZ72E user manual

E-621 piezo amplifier/servo controller module

PZ160E user manual

E-625 piezo servo controller (benchtop device)

PZ166E user manual

E-712 digital piezo controller (modular system)

PZ195E user manual

E-727 digital multi-channel piezo controller

E727T0005 user manual

E-754 digital piezo controller

E754T0001 user manual

PIMikroMove SM148E software manual

P-5xx / P-6xx / P-7xx piezo positioners

PZ240EK short instructions

1.6 Downloading Manuals

INFORMATION

If a manual is missing or problems occur with downloading:

Contact our customer service department (p. 35).

Downloading Manuals

1. Open the website www.pi.ws.

2. Search the website for the product number (e.g., P-517) or the product family (e.g.,

nanopositioner).

3. Click the corresponding product to open the product detail page.

4. Click the Downloads tab.

The manuals are shown under Documentation. Software manuals are shown under

General Software Documentation.

5. Click the desired manual and fill out the inquiry form.

The download link will then be sent to the email address entered.

2 Safety

P-5x7/P-5x8 Positioners PZ82E Version: 3.2.0 5

In this Chapter

Intended Use.................................................................................................................................. 5

General Safety Instructions............................................................................................................ 5

Organizational Measures ............................................................................................................... 7

2.1 Intended Use

The P-5x7/P-5x8 is a laboratory device as defined by DIN EN 61010-1. It is intended for indoor

use and use in an environment that is free of dirt, oil, and lubricants.

According to its design, the P-5x7/P-5x8 is intended for fine positioning as well as moving small

objects quickly and precisely. The specifications for the P-5x7/P-5x8 apply to horizontal

mounting. Depending on the version, moving is done as follows:

Model Motion Axis

.2CD / .2CL

In two axes horizontally

X, Y

.3CD / .3CL

In two axes horizontally and in one axis vertically

X, Y, Z

.ZCD / .ZCL

In one axis vertically

.RCD

in two axes horizontally and in one axis rotationally

X, Y, θZ

.TCD In one axis vertically and in two axes rotationally Z, θX, θY

The P-5x7/P-5x8 can only be used as intended in conjunction with suitable electronics (p. 11)

available from PI. The electronics are not in the P-5x7/P-5x8's scope of delivery.

The electronics must provide the required operating voltages. To ensure proper performance of

the servo control system, the electronics must also be able to read out and process the signals

from the position sensors.

2.2 General Safety Instructions

The P-5x7/P-5x8 is built according to state-of-the-art technology and recognized safety

standards. Improper use can result in personal injury and/or damage to the P-5x7/P-5x8.

Use the P-5x7/P-5x8 for its intended purpose only, and only when it is in perfect

technical condition.

Read the user manual.

Eliminate any malfunctions that may affect safety immediately.

The operator is responsible for the correct installation and operation of the P-5x7/P-5x8.

Safety

2 Safety

6 Version: 3.2.0 PZ82E P-5x7/P-5x8 Positioners

The P-5x7/P-5x8 is driven by piezo actuators. Temperature changes and compressive stress can

induce charges in piezo actuators. Piezo actuators can remain charged for several hours after

disconnecting the electronics. Touching or short-circuiting the contacts in the P-5x7/P-5x8's

connector can lead to minor injuries from electric shock. The piezo actuators can be destroyed

by an abrupt contraction.

Do not open the P-5x7/P-5x8.

Discharge the positioner's piezo actuators before installing:

Connect the positioner to the switched-off PI electronics equipped with an internal

discharge resistor.

Do not pull the plug connector out of the electronics during operation.

Positioners with D-sub plug connector:

Touching the contacts in the plug connector can lead to an electric shock (max. 130 V DC) and

minor injuries.

Do not touch the contacts in the plug connector.

Use screws to secure the positioner's connector against being pulled out of the

electronics.

If a protective earth conductor is not or not properly connected, dangerous touch voltages can

occur on the P-5x7/P-5x8 in the case of malfunction or failure of the system. If there are touch

voltages, touching the P-5x7/P-5x8 can result in minor injuries from electric shock.

Connect the P-5x7/P-5x8 to a protective earth conductor (p. 18) before starting.

Do not remove the protective earth conductor during operation.

If the protective earth conductor has to be removed temporarily (e.g., in the case of

modifications), reconnect the P-5x7/P-5x8 to the protective earth conductor before

restarting.

Mechanical forces can damage or misalign the P-5x7/P-5x8.

Avoid impacts that affect the P-5x7/P-5x8.

Do not drop the P-5x7/P-5x8.

Do not exceed the maximum permissible stress and load capacities according to the

specifications (p. 37).

Do not touch any sensitive parts (e.g., motion platform) when handling the

P-5x7/P-5x8.

The P-5x7/P-5x8 is maintenance-free and achieves its positioning accuracy as a result of the

optimal alignment of mechanical components and piezo actuators. Loosened screws cause a

loss in positioning accuracy.

Loosen screws only when instructed in this manual.

Do not open the P-5x7/P-5x8.

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