Pfeiffer Vacuum PMP06021 Manuel utilisateur
OPERATING INSTRUCTIONS
EN
Translation of the Original
HIPACE 1200
Turbopump
Dear Customer,
Thank you for choosing a Pfeiffer Vacuum product. Your new turbopump is designed to
support you by its performance, its perfect operation and without interfering your individual
application. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a
comprehensive and complete range of top-quality products and first-class service. With this
expertise, we have acquired a multitude of skills contributing to an efficient and secure
implementation of our product.
Knowing that our product must not interfere with your actual work, we are convinced that our
product offers you the solution that supports you in the effective and trouble-free execution of
your individual application.
Please read these operating instructions before putting your product into operation for the
first time. If you have any questions or suggestions, please feel free to contact info@pfeiffer-
vacuum.de.
Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on
our website.
Disclaimer of liability
These operating instructions describe all models and variants of your product. Note that your
product may not be equipped with all features described in this document. Pfeiffer Vacuum
constantly adapts its products to the latest state of the art without prior notice. Please take
into account that online operating instructions can deviate from the printed operating
instructions supplied with your product.
Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from
the use of the product that contradicts its proper use or is explicitly defined as foreseeable
misuse.
Copyright
This document is the intellectual property of Pfeiffer Vacuum and all contents of this
document are protected by copyright. They may not be copied, altered, reproduced or
published without the prior written permission of Pfeiffer Vacuum.
We reserve the right to make changes to the technical data and information in this document.
2/74
Table of contents
1 About this manual 7
1.1 Validity 7
1.1.1 Applicable documents 7
1.1.2 Variants 7
1.2 Target group 7
1.3 Conventions 8
1.3.1 Instructions in the text 8
1.3.2 Pictographs 8
1.3.3 Stickers on the product 8
1.3.4 Abbreviations 9
1.4 Trademark proof 10
2 Safety 11
2.1 General safety information 11
2.2 Safety instructions 11
2.3 Safety precautions 16
2.4 Limits of use of the product 17
2.5 Proper use 17
2.6 Foreseeable improper use 17
2.7 Personnel qualification 18
2.7.1 Ensuring personnel qualification 18
2.7.2 Personnel qualification for maintenance and repair 18
2.7.3 Advanced training with Pfeiffer Vacuum 19
3 Product description 20
3.1 Function 20
3.1.1 Cooling 20
3.1.2 Rotor bearing 20
3.1.3 Drive 20
3.2 Scope of delivery 20
3.3 Identifying the product 21
3.3.1 Product types 21
3.3.2 Product features 21
4 Transportation and Storage 22
4.1 Transport 22
4.1.1 Transport in vertical position 22
4.1.2 Transport in horizontal space 23
4.2 Storage 24
5 Installation 25
5.1 Preparatory work 25
5.2 Connecting the high vacuum side 26
5.2.1 Requirements for the dimensioning of a counter flange 26
5.2.2 Considering earthquake protection 26
5.2.3 Using a splinter shield or protective screen 27
5.2.4 Using the vibration compensator 27
5.2.5 Mounting orientations 28
5.2.6 Attaching ISO-K flange onto ISO-K 29
5.2.7 Attaching ISO-K flange to ISO-F 29
5.2.8 Attaching ISO-F flange to ISO-F 31
5.2.9 Attaching CF flange to CF-F 32
5.3 Filling the operating fluid 34
5.4 Connecting the fore-vacuum side 35
5.5 Connecting the cooling water supply 36
5.6 Connecting accessories 37
Table of contents
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5.7 Connecting sealing gas 38
5.8 Connecting the electrical supply 38
5.8.1 Implement electrical safety measures 38
5.8.2 Grounding the vacuum pump 39
5.8.3 Establishing the electric connection 39
6 Operation 41
6.1 Commissioning 41
6.2 Operating modes 42
6.2.1 Operation without operating unit 42
6.2.2 Operation via connection "E74" 42
6.2.3 Operation via multi-function connection "remote" 42
6.2.4 Operation via Pfeiffer Vacuum display and control unit 42
6.2.5 Operation via field bus 42
6.3 Switching on the turbopump 43
6.4 Operation monitoring 43
6.4.1 Operating mode display via LED 43
6.4.2 Temperature monitoring 44
6.5 Switching off and venting 44
6.5.1 Switching off 44
6.5.2 Venting 44
7 Maintenance 46
7.1 General maintenance information 46
7.2 Maintenance intervals and responsibilities 46
7.3 Changing the operating fluid 47
7.3.1 Draining the operating fluid 47
7.3.2 Filling the operating fluid 48
7.4 Replacing the electronic drive unit 49
7.4.1 Removing electronic drive unit 50
7.4.2 Installing the electronic drive unit 51
7.4.3 Confirming the speed specification 52
8 Decommissioning 53
8.1 Stillsetzen für längere Zeit 53
8.2 Recommissioning 53
9 Recycling and disposal 55
9.1 General disposal information 55
9.2 Dispose of turbopumps 55
10 Malfunctions 56
11 Service solutions by Pfeiffer Vacuum 58
12 Spare parts 60
13 Accessories 61
13.1 Accessory information 61
13.2 Ordering accessories 61
14 Technical data and dimensions 64
14.1 General 64
14.2 Technical data 64
14.3 Dimensions 70
Declaration of conformity 72
Table of contents
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List of tables
Tbl. 1: Stickers on the product 9
Tbl. 2: Abbreviations used in this document 10
Tbl. 3: Permissible ambient conditions 17
Tbl. 4: Product designation of Pfeiffer Vacuum HiPace turbopumps 21
Tbl. 5: Turbopump features 21
Tbl. 6: Delivered drive power depending on the supplied mains voltage 21
Tbl. 7: Requirements for the dimensioning of customer-specific high vacuum con-
nection
26
Tbl. 8: Behavior of pumping speed when using a splinter shield or protective screen 27
Tbl. 9: Requirements on the cooling water composition 36
Tbl. 10: Requirements on the cooling water connection 36
Tbl. 11: Factory pre-set accessory connections on the electronic drive unit 37
Tbl. 12: Terminal lay-out of the power supply connector 40
Tbl. 13: Preconfigured settings for turbopumps when delivered 41
Tbl. 14: Behavior and meaning of the LEDs on the electronic drive unit 44
Tbl. 15: Factory settings for delayed venting in turbopumps 45
Tbl. 16: Characteristic nominal rotation speeds of the turbopumps 52
Tbl. 17: Troubleshooting turbopumps 57
Tbl. 18: Available spare parts 60
Tbl. 19: Accessories 63
Tbl. 20: Conversion table: Pressure units 64
Tbl. 21: Conversion table: Units for gas throughput 64
Tbl. 22: Technical data for HiPace 1200 Standard 66
Tbl. 23: Technical data for HiPace 1200 U 67
Tbl. 24: Technical data for HiPace 1200 C 68
Tbl. 25: Technical data for HiPace 1200 UC 69
List of tables
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List of figures
Fig. 1: Position of the labels on the product 9
Fig. 2: Design HiPace 1200 standard and U version 20
Fig. 3: Slinging points for vertical transport of the turbopump without packaging 23
Fig. 4: Slinging points for horizontal transport of the turbopump without packaging 24
Fig. 5: Example: Secure against displacement and tipping caused by external vi-
brations
27
Fig. 6: Mounting orientations of the standard version, upright 28
Fig. 7: Mounting orientations of the U version, overhead 28
Fig. 8: Alignment of the fore-vacuum connection with horizontal mounting orienta-
tion
28
Fig. 9: Flange connection ISO-K to ISO-F, bracket screws 29
Fig. 10: Flange connection ISO-K to ISO-F, hexagon head screw and tapped hole 30
Fig. 11: Flange connection ISO-K to ISO-F, stud screw and tapped hole 30
Fig. 12: Flange connection ISO-K to ISO-F, stud screw and through hole 30
Fig. 13: Flange connection ISO-F, hexagon head screw and tapped hole 31
Fig. 14: Flange connection ISO-F, hexagon head screw and through hole 31
Fig. 15: Flange connection ISO-F, stud screw and tapped hole 31
Fig. 16: Flange connection ISO-F, stud screw and through hole 32
Fig. 17: Flange connection CF-F, hexagon head screw and through hole 32
Fig. 18: Flange connection CF-F, stud screw and tapped hole 33
Fig. 19: Flange connection CF-F, stud screw and through hole 33
Fig. 20: The position of the filler screws depends on the mounting orientation. Exam-
ple: Standard versions
34
Fig. 21: The position of the filler screws depends on the mounting orientation. Exam-
ple: U versions
34
Fig. 22: Example of fore-vacuum connection 35
Fig. 23: Cooling water connection 37
Fig. 24: Example: Connecting the grounding cable 39
Fig. 25: Examples: Draining operating fluid for the standard and U versions 47
Fig. 26: The position of the filler screws depends on the mounting orientation. Exam-
ple: Standard versions
48
Fig. 27: The position of the filler screws depends on the mounting orientation. Exam-
ple: U versions
49
Fig. 28: Removing the electronic drive unit 50
Fig. 29: Fitting the electronic drive unit 51
Fig. 30: Attaching the electronic drive unit 51
Fig. 31: Spare parts HiPace 1200 60
Fig. 32: Dimensions HiPace 1200 and HiPace 1200 C | DN 200 ISO-K 70
Fig. 33: Dimensions HiPace 1200 and HiPace 1200 C | DN 200 ISO-F 70
Fig. 34: Dimensions HiPace 1200 and HiPace 1200 C | DN 200 CF-F 70
Fig. 35: Dimensions HiPace 1200 U and HiPace 1200 U C | DN 200 ISO-K 71
Fig. 36: Dimensions HiPace 1200 U and HiPace 1200 U C | DN 200 ISO-F 71
Fig. 37: Dimensions HiPace 1200 U and HiPace 1200 U C | DN 200 CF-F 71
List of figures
6/74
1 About this manual
IMPORTANT
Read carefully before use.
Keep the manual for future consultation.
1.1 Validity
This operating instructions is a customer document of Pfeiffer Vacuum. The operating instructions de-
scribe the functions of the named product and provide the most important information for the safe use of
the device. The description is written in accordance with the valid directives. The information in this op-
erating instructions refers to the product's current development status. The document shall remain valid
provided that the customer does not make any changes to the product.
1.1.1 Applicable documents
Document Number
Operating instructions, Electronic drive unit TC 1200, standard PT 0239 BN
Operating instructions, Electronic drive unit TC 1200 PB, Profibus PT 0269 BN
Operating instructions, Electronic drive unit TC 1200 E74, according to
Semi E74
PT 0303 BN
Operating instructions, Electronic drive unit TC 1200 DN, DeviceNet PT 0353 BN
Operating instructions, Electronic drive unit TC 1200 EC, EtherCat PT 0455 BN
Declaration of conformity A component of these in-
structions
You can find these documents in the Pfeiffer Vacuum Download Center.
1.1.2 Variants
●HiPace 1200, DN 200 ISO-K
●HiPace 1200, DN 200 ISO-F
●HiPace 1200, DN 200 CF-F
●HiPace 1200 C, DN 200 ISO-K
●HiPace 1200 C, DN 200 ISO-F
●HiPace 1200 C, DN 200 CF-F
●HiPace 1200 U, DN 200 ISO-K
●HiPace 1200 U, DN 200 ISO-F
●HiPace 1200 U, DN 200 CF-F
●HiPace 1200 U C, DN 200 ISO-K
●HiPace 1200 U C, DN 200 ISO-F
●HiPace 1200 U C, DN 200 CF-F
1.2 Target group
These operating instructions are aimed at all persons performing the following activities on the product:
●Transportation
●Setup (Installation)
●Usage and operation
●Decommissioning
●Maintenance and cleaning
●Storage or disposal
The work described in this document is only permitted to be performed by persons with the appropriate
technical qualifications (expert personnel) or who have received the relevant training from Pfeiffer Vac-
uum.
About this manual
7/74
1.3 Conventions
1.3.1 Instructions in the text
Usage instructions in the document follow a general structure that is complete in itself. The required ac-
tion is indicated by an individual step or multi-part action steps.
Individual action step
A horizontal, solid triangle indicates the only step in an action.
►This is an individual action step.
Sequence of multi-part action steps
The numerical list indicates an action with multiple necessary steps.
1. Step 1
2. Step 2
3. ...
1.3.2 Pictographs
Pictographs used in the document indicate useful information.
Note
Tip
1.3.3 Stickers on the product
This section describes all the stickers on the product along with their meaning.
C US
T V Rheinland
Oil
S/N
Mod.
HiPace 1200
PM P06 000
- - - - - - - -
P/N
n, f
Mass Made in Germany 2019/06
PM 006 336 -T
37800 1/min, 630 Hz
30.0 kg
D-35614 Asslar
Rating plate
Rating plates of individual assemblies are located on the lower
part of the turbopump or on the relevant attachments.
Operating instructions note
This sticker indicates that this operating instructions must be read
before performing any tasks.
Mounting orientation upright note
This sticker depends on the variant. The sticker shows the valid
spatial positions for the installation and operation of the turbo-
pump.
Overhead mounting orientation note
This sticker depends on the variant. The sticker shows the valid
spatial positions for the installation and operation of the turbo-
pump.
About this manual
8/74
Operating fluid filler screw
This sticker describes the position of the respective filler screw for
operating fluid.
Protection class
This sticker describes protection class 1 for the product. The posi-
tioning indicates the position for the ground connection.
COOLING WATER IN
max. 6 bar (90 psi)
Cooling water connection
This sticker indicates the position and conditions for the cooling
water supply of the turbopump.
COOLING WATER OUT
Cooling water connection
This sticker indicates the position for the cooling water outlet of the
turbopump.
warranty seal
Closure seal
The product is sealed ex-factory. Damaging or removing a closure
seal results in loss of the warranty.
Is stuck on concealed underneath the electronic drive unit.
PURGE
Sealing gas connection note
This label describes the position for the exclusive sealing gas con-
nection.
Tbl. 1: Stickers on the product
1
678910 5234
Fig. 1: Position of the labels on the product
1 Label for operating instructions 6 Label for operating fluid
2 Label for cooling water outlet 7 Label for sealing gas connection (purge)
3 Label for cooling water inlet 8 Label for ground terminal
4 Label for mounting orientation 9 Electronic drive unit type plate
5 Label for operating instructions 10 Turbopump type plate
1.3.4 Abbreviations
Abbreviation Meaning in this document
AC Alternating current (AC)
CCorrosive gas version
About this manual
9/74
Abbreviation Meaning in this document
dDiameter value (in mm)
DCU Display Control Unit (Pfeiffer Vacuum display and control unit).
DN Nominal diameter as size description
EMS Emergency Stop
fRotation speed value of a vacuum pump (frequency, in rpm or Hz)
HPU Handheld Programming Unit. Aid for control and monitoring pump parameters
HV High vacuum flange, high vacuum side
ISO Flange: Connector in accordance with ISO 1609 and ISO 2861
LED Light emitting diode
PE Earthed conductor (protective earth)
[P:xxx] Electronic drive unit control parameters. Printed in bold as a three-digit number in
square brackets. Frequently displayed in conjunction with a short description.
Example: [P:312] software version
remote 26-pole D-Sub connecting socket on the turbopump electronic drive unit
WAF width across flats
TTemperature (in °C)
TC Turbo Controller
UUpside-down version
VV Fore-vacuum flange, fore-vacuum connection
Tbl. 2: Abbreviations used in this document
1.4 Trademark proof
●DeviceNet® is a tademark of Open DeviceNet Vendor Association Inc.
●Profibus® is a trademark of Profibus Nutzerorganisation e.V.
●EtherCAT® is a trademark of Beckhoff Automation GmbH, Germany
●HAN® 3 A is a trademark of HARTING Electric GmbH & Co. KG.
About this manual
10/74
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