Pfeiffer Vacuum ATH 2300 MT Manuel utilisateur

OPERATING INSTRUCTIONS

Translation of the original instructions

ATH 2300 M/MT

Turbomolecular pumps

GB 01717 - Edition 07 - 01/2018

1/2

ATH 2300 M/MT - Turbopumps

Welcome

Dear Customer,

You have just purchased a

Magnetically turbopump.

We would like to thank you

and are proud to count you

as one of our customers.

This product has benefited

from Pfeiffer Vacuum SAS

many years of experience

in the field of turbo pump

design.

In order to ensure the best

possible performance of

the equipment and your

complete satisfaction in

using it, we advise you to

read this manual carefully

before any intervention

on your pump and to pay

particular attention to the

equipment installation and

start-up section.

Applications:

SEMICONDUCTOR APPLICATIONS:

Plasma etching, Ion implantation,

Sputtering, Plasma deposition.

OTHERS APPLICATIONS:

Electron microscopes, Surface analysis,

Research and development, High energy physics, Space simulation,

Accelerators.

Advantages:

High throughput - Quiet and clean vacuum - Corrosion proof -

High MTBF - Minimum size, volume and weight - Smart and

compact electronic controller - Reliability - Maintenance free - Battery

free - Easy integration.

This operating instruction manual includes only the instructions to

connect the pump to the equipment. Refer to the controller operating

instructions to power and use the pump (chapter B, C and D).

This pumping component is designed to generate vacuum by pumping on

gases, but no liquids neither solids. It is dedicated for running in industrial

environments.

The integrator of this ATHM component must provide all operator safety

measures mainly against hot surfaces.

This pumping component must not operate in an area with risk of

explosion. Consult us to study a solution.

Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT

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ATH 2300 M/MT - Turbopumps

GB 01717 - Edition 07 - 01/2018

The use of Pfeiffer Vacuum SAS are subject to

any jurisdiction.

document in whole or any part without prior written

authorization from Pfeiffer Vaccum SAS.

Specifications and information are subject to change

without notice by the manufacturer.

This product complies with the requirements of European Directives, listed

in the Declaration of Conformity contained in sheet G100 of the controller

operating instructions.

Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT

GB 01718 - Edition 07 - 03/2018

1/2

MANUAL REFERENCE: 108895

EDITION: 07 - March 2018 General contents

ATH 2300 M/MT

Operating instructions

Translated from original version

Chapter A INTRODUCTION

A 150 - Introduction to the ATH 2300 M/MT pumps

A 200 - Control loop of the pump

A 210 - The pump operating principle

A 400 - Technical characteristics of the pump

A 510 - The accessories of the pump

A 515 - Pump accessory dimensions

Chapter B START-UP

B 100 - Safety instructions for installation

B 201 - Unpacking and storage of the pump

B 300 - Pump connections to an installation

B 310 - Inlet and exhaust connections

B 330 - Nitrogen purge and inlet air valve device connections

B 340 - Water cooling connection

B 401 - Typical electrical wiring diagram

Chapter C OPERATION

C 100 - Safety instructions for product use

Chapter D MAINTENANCE

D 100 - Safety instructions for product maintenance

D 150 - Maintenance frequency

Chapter E MAINTENANCE INSTRUCTIONS

E 50 - Replacement of the water valve coil

E 100 - Shipping procedure for contaminated pumps

Chapter F MAINTENANCE COMPONENTS

F 000 - Spare parts - Instructions of use

F 100 - First level maintenance parts

Chapter G APPENDIX

G 200 - Service

Indicates a potentially hazardous situation which, if not avoided, could

result in property damage.

Indicates a potentially hazardous situation which, if not avoided, could

result in moderate or minor injury. It may also be used to alert against unsafe

practices.

Indicates an imminently hazardous situation that, if not avoided, will result

in death or severe injury (extreme situations).

Indicates a potentially hazardous situation which, if not avoided, could

result in death or severe injury.

Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT

2/2

General contents

ATH 2300 M/MT

Operating instructions

GB 01718 - Edition 07 - 03/2018

MANUAL REFERENCE:108895

EDITION: 07 - March 2018

Translated from original version

The performance and operational safety of this product are guaranteed pro-

vided it is used normally in the operating conditions defined in this manual.

It is the customer’s task to:

- train operators to use the product if they do not speak the language the

manual is written in,

- ensure operators know the safe practices to apply when using the product.

Before switching on the product, study the Operating instructions and make

sure you follow the safety instructions it gives. You can recognise these by

the ‘Caution’, ‘Warning’ and ‘Danger’ symbols.

Good practice tips and manufacturer’s recommendations are in a grey box.

Symbols, labels Description

Warning : hot surface

Warning : hazardous voltage

Caution : risk of danger. Refer to the operating

instructions before use

OFF

Do not touch when the pump is running

Use of glove is recommended

Moving parts present

Heavy object

Electrical connector locking

Purge Purge port

Pump exhaust Exhaust of the pump

Water Water cooling circuit connection

Water max Pr.7 bar/101 psi Max. cooling water pressure

Direction of rotation of the pump

LOCK

Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT

GB 01719 - Edition 05 - 01/2018

1/1

Introduction

ATH 2300 M/MT Operating manual

Detailed contents

A 150 Introduction to the ATH 2300 M/MT pumps

A 200 Control loop of the pump

- 5 active axis

- Unbalanced force rejection control

A 210 The pump operating principle

- Pumping principle

- The hybrid tubopump in an installation

- The back-up ball bearings

- No maintenance

- Battery free

- Variation of the pump rotational speed

A 400 Technical characteristics of the pump

A 510 The accessories of the pump

A 515 Pump accessory dimensions

- Purge valve (50 sccm) dimensions

- Water valve dimensions

- Air inlet valve dimensions

Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT

GB 01720 - Edition 06 - 01/2018

1/1

A 150

Introduction to the ATH 2300 M/MT

pumps

1 magnetically

levitated hybrid

turbo pump

Five active axes

Rotor position control in 5 directions.

Automatic balancing system

Lowest possible levels of noise and vibration.

Compensation for any imbalance of the rotor.

Maintenance free

Inert gas purge

Eliminate corrosion of the motor and magnetic bearing coils.

Battery free

In case of a power failure, the pump motor acts like a generator to

transform the rotor energy into electrical power to supply the controller.

ATH 2300 M

ATH 2300 MT Integrated heater band

Maintaining the pumps internal surface up to 75 °C to prevent the

condensation effect.

Temperature regulated by the controller. The MT version is supplied with

a water valve.

Controllers The ATH 2300 M/MT pumps work with the OBC controller or with the

MAGPOWER controller.

(refer to the operating instructions corresponding).

Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT

5 active axis The mobile assembly formed by the turbo rotor and the shaft

is known as the rotor. The rotor is driven by the motor and held

in suspension by magnetic fields generated by electromagnets

housed in an active bearing.

The mobile rotor has 5 axes of freedom monitored by 5 active

magnetic bearings.

Movements in relation to these axes are monitored by position

sensors. According to the position data recorded, the controller

corrects differences to bring the rotor back to its optimum position,

by varying the current in electromagnets

3 controlled translations (X, Y, Z)

2 controlled tiltings (X, Y)

Rotor

Stator

BearingElectronics

Power

amplifiers

Position of

Reference

Position return

Electro-

magnet

Correction

Position

sensor

A 200

Control loop of the pump

1/2

GB 02721 - Edition 04 - Aug 07

Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT

Unbalanced force

rejection control The unbalanced force rejection control is an electronic function,

that monitors the rotor position, allowing it to rotate in its own axis

of inertia.

Changes in the rotor balance, due to deposit built-up during the

life time of the pump, are automatically compensated by the

unbalanced force rejection control.

It ensures the lowest possible levels of noise and vibration.

Stator geometric axis

Rotor geometric axis

Rotor inertia axis

A 200

Control loop of the pump

2/2

GB 02721 - Edition 04 - Aug 07

Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT

GB 03411 - Edition 05 - 01/2018

1/3

A 210

The pump operating principle

Pumping principle The ATHM pump integrates the advantages of a multi-staged

turbomolecular pump with a spiral helix molecular drag section.

The turbomolecular section provides high pumping speeds and

high ultimate vacuum. The molecular drag section provides a high

compression ratio and extends forevacuum tolerance.

INLET

Dry back-up bearings

EXHAUST

Cooling

Magnetic

levitated

bearings

Motor

Molecular

drag

Stator

Rotor

Gas purge*

* The gas purge provides an excellent protection of the pump bearings

for corrosive applications and ensures the rotor cooling.

Pfeiffer Vacuum SAS – Operating instructions - ATH 2300 M/MT

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