Pfeiffer Vacuum BASIC Manuel utilisateur
OPERATING INSTRUCTIONS
EN
Translation of the Original
CALIBRATION SYSTEM BASIC
Calibration system for vacuum gauges
Dear Customer,
Thank you for choosing a Pfeiffer Vacuum product. Your new calibration system is designed
to support you in your individual application with full performance and without malfunctions.
The name Pfeiffer Vacuum represents high-quality vacuum technology, a comprehensive and
complete range of top-quality products and first-class service. From this extensive, practical
experience we have gained a large volume of information that can contribute to efficient
deployment and to your personal safety.
In the knowledge that our product must avoid consuming work output, we trust that our
product can offer you a solution that supports you in the effective and trouble-free
implementation of your individual application.
Please read these operating instructions before putting your product into operation for the
first time. If you have any questions or suggestions, please feel free to contact info@pfeiffer-
vacuum.de.
Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on
our website.
Disclaimer of liability
These operating instructions describe all models and variants of your product. Note that your
product may not be equipped with all features described in this document. Pfeiffer Vacuum
constantly adapts its products to the latest state of the art without prior notice. Please take
into account that online operating instructions can deviate from the printed operating
instructions supplied with your product.
Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from
the use of the product that contradicts its proper use or is explicitly defined as foreseeable
misuse.
Copyright
This document is the intellectual property of Pfeiffer Vacuum and all contents of this
document are protected by copyright. They may not be copied, altered, reproduced or
published without the prior written permission of Pfeiffer Vacuum.
We reserve the right to make changes to the technical data and information in this document.
2/42
Table of contents
1 About this manual 7
1.1 Validity 7
1.1.1 Applicable documents 7
1.1.2 Variants 7
1.2 Target group 7
1.3 Conventions 7
1.3.1 Instructions in the text 7
1.3.2 Pictographs 8
1.3.3 Stickers on the product 8
1.3.4 Abbreviations 9
2 Safety 10
2.1 General safety information 10
2.2 Safety instructions 10
2.3 Safety precautions 14
2.4 Limits of use of the product 14
2.5 Proper use 15
2.6 Foreseeable improper use 15
3 Product description 17
3.1 Structure 17
3.2 Function 18
3.2.1 Comparing measuring range limits 18
3.2.2 Calibrating vacuum gauges 18
3.3 Identifying the product 19
3.4 Scope of delivery 19
4 Transportation and Storage 20
4.1 Transporting the calibration system 20
4.2 Removing transport lock 20
4.3 Storing the calibration system 20
5 Installation 22
5.1 Installing the calibration system 22
5.2 Connecting vacuum measuring instruments 22
5.3 Connecting nitrogen supply 22
6 Operation 24
6.1 Switching on the calibration system 24
6.2 Performing a zero point adjustment and offset correction 24
6.3 Calibrating vacuum measuring instruments 25
6.4 Switching off and venting the calibration system 27
6.5 Interpreting calibration data 28
6.6 Examples of measuring accuracies 29
7 Maintenance 31
7.1 General maintenance information 31
7.2 Replacing the turbopump 31
8 Decommissioning 33
9 Recycling and disposal 34
9.1 General disposal information 34
9.2 Disposing of the calibration system 34
10 Malfunctions 35
11 Service solutions by Pfeiffer Vacuum 36
Table of contents
3/42
List of tables
Tbl. 1: Applicable documents 7
Tbl. 2: Stickers on the product 8
Tbl. 3: Abbreviations used in this document 9
Tbl. 4: Limits of use of the product 15
Tbl. 5: Conversion table: Pressure units 38
Tbl. 6: Conversion table: Units for gas throughput 38
Tbl. 7: Technical data for calibration system BASIC 39
List of tables
5/42
List of figures
Fig. 1: Position of the stickers on the product 9
Fig. 2: Structure 17
Fig. 3: Vacuum diagram 18
Fig. 4: Example of a calibration report, page 1 28
Fig. 5: Example of a calibration report, page 2 29
Fig. 6: Measuring accuracies CMR 36x 30
Fig. 7: Measuring accuracies CMR 37x 30
Fig. 8: Removing the vacuum chamber 32
Fig. 9: Dimensions 40
List of figures
6/42
1 About this manual
IMPORTANT
Read carefully before use.
Keep the manual for future consultation.
1.1 Validity
This operating instructions is a customer document of Pfeiffer Vacuum. The operating instructions de-
scribe the functions of the named product and provide the most important information for the safe use of
the device. The description is written in accordance with the valid directives. The information in this op-
erating instructions refers to the product's current development status. The document shall remain valid
provided that the customer does not make any changes to the product.
1.1.1 Applicable documents
Designation Document
"Turbo pumping station" operating instructions
HiCube 80 Eco
PT 0553 1)
"Pirani/cold cathode gauge" operating instructions
PKR 361
BG 5164
"Dosing valve" operating instructions
EVN 116
BP 5005
Declaration of conformity (part of these instructions)
Tbl. 1: Applicable documents
You can find these documents in the Pfeiffer Vacuum Download Center.
1.1.2 Variants
This document is valid for the calibration system BASIC.
Different variants are distinguished by the nominal diameter (DN) and the number of flange connections
on the vacuum chamber.
1.2 Target group
These operating instructions are aimed at all persons performing the following activities on the product:
●Transportation
●Setup (Installation)
●Usage and operation
●Decommissioning
●Maintenance and cleaning
●Storage or disposal
The work described in this document is only permitted to be performed by persons with the appropriate
technical qualifications (expert personnel) or who have received the relevant training from Pfeiffer Vac-
uum.
1.3 Conventions
1.3.1 Instructions in the text
Usage instructions in the document follow a general structure that is complete in itself. The required ac-
tion is indicated by an individual step or multi-part action steps.
1) Including individual components
About this manual
7/42
Individual action step
A horizontal, solid triangle indicates the only step in an action.
►This is an individual action step.
Sequence of multi-part action steps
The numerical list indicates an action with multiple necessary steps.
1. Step 1
2. Step 2
3. ...
1.3.2 Pictographs
The pictographs used in the document indicate useful information.
Note
Tip
Wear laboratory gloves
Perform a visual inspection
1.3.3 Stickers on the product
This section describes all the stickers on the product along with their meanings.
CUS
TÜV Rheinland
Fuse
S/N
Mod.
Calibration System BASIC
P/N
Input
Mass
D-35614 Asslar
xxxxxxxx
PS A30 xxx
Made in Germany 2020/08
16 A
115-230 V, 50/60Hz
22.1 kg
Rating plate
The rating plate is located on the back of the housing.
VOR INBETRIEBNAHME
TRANSPORTSICHERUNG LÖSEN
BEFORE USE UNFASTEN THE
TRANSPORT PROTECTION
Transport lock
This sticker indicates that the backing pump transport lock
must be released prior to commissioning.
warranty seal
Warranty seal
The product is sealed ex-factory. Damaging or removing a war-
ranty seal results in loss of the warranty.
Protection class
The sticker describes protection class 1 for the product. Its
placement indicates the position for the ground connection.
Electrical voltage warning
The sticker warns of the risk of electric shock when working
with the housing open.
Mandatory: disconnect mains plug
The sticker indicates that the mains plug is to be disconnected
from the device prior to installation and maintenance work.
Tbl. 2: Stickers on the product
About this manual
8/42
6 + 7
1
2
3
4
5
Fig. 1: Position of the stickers on the product
1 Electrical voltage (power supply pack) warning sign 5 Transport lock sticker
2 Transport lock sticker 6 Closure seal (vacuum pump)
3 Rating plate 7 Ground connection sticker (vacuum pump)
4 Mandatory disconnect mains plug sign
1.3.4 Abbreviations
Abbreviation Meaning in this document
ATM Atmospheric pressure
DAkkS Deutsche Akkreditierungsstelle (German Accreditation Body)
DCU Display and Control Unit from Pfeiffer Vacuum
DKD Deutscher Kalibrierdienst (German Calibration Service)
DN Nominal diameter as size description
HV High vacuum
ISO International Organization for Standardization
MVP Diaphragm vacuum pump
[P:xxx] Electronic drive unit control parameters. Printed in bold as a three-digit number in
square brackets. Frequently displayed in conjunction with a short description.
Example: [P:312] software version
TC Turbopump electronic drive unit (turbo controller)
TPS Voltage supply for turbopump (turbo power supply)
UUC Unit under calibration
UUT Unit under test
Tbl. 3: Abbreviations used in this document
About this manual
9/42
2 Safety
2.1 General safety information
The following 4 risk levels and 1 information level are taken into account in this document.
DANGER
Immediately pending danger
Indicates an immediately pending danger that will result in death or serious injury if not observed.
►Instructions to avoid the danger situation
WARNING
Potential pending danger
Indicates a pending danger that could result in death or serious injury if not observed.
►Instructions to avoid the danger situation
CAUTION
Potential pending danger
Indicates a pending danger that could result in minor injuries if not observed.
►Instructions to avoid the danger situation
NOTICE
Danger of damage to property
Is used to highlight actions that are not associated with personal injury.
►Instructions to avoid damage to property
Notes, tips or examples indicate important information about the product or about this docu-
ment.
2.2 Safety instructions
Safety instructions according to product’s life stages
All safety instructions in this document are based on the results of a risk assessment.
Pfeiffer Vacuum has taken into account all the relevant life stages of the product.
Risks during transport
WARNING
Danger of serious injury due to falling objects
Due to falling objects there is a risk of injuries to limbs through to broken bones.
►Take particular care and pay special attention when transporting products manually.
►Do not stack the products.
►Wear protective equipment, e.g. safety shoes.
Safety
10/42
Table des matières
Autres manuels Pfeiffer Vacuum Équipement industriel
Pfeiffer Vacuum
Pfeiffer Vacuum TPG 361 Manuel utilisateur
Pfeiffer Vacuum
Pfeiffer Vacuum FullRange PKR 251 Manuel utilisateur
Pfeiffer Vacuum
Pfeiffer Vacuum XPT 200 PN Manuel utilisateur
Pfeiffer Vacuum
Pfeiffer Vacuum ACP 28 Manuel utilisateur
Pfeiffer Vacuum
Pfeiffer Vacuum FullRange ITR 90 Manuel utilisateur
Pfeiffer Vacuum
Pfeiffer Vacuum HIPACE 2800 I Manuel utilisateur
Pfeiffer Vacuum
Pfeiffer Vacuum PCR 280 Manuel utilisateur
Pfeiffer Vacuum
Pfeiffer Vacuum FullRange PKR 251 Manuel utilisateur
Pfeiffer Vacuum
Pfeiffer Vacuum TTR 101 Manuel utilisateur
Pfeiffer Vacuum
Pfeiffer Vacuum APR 250 Manuel utilisateur
Pfeiffer Vacuum
Pfeiffer Vacuum HIPACE 1500 I Manuel utilisateur
Pfeiffer Vacuum
Pfeiffer Vacuum HIPACE 10 Manuel utilisateur
Pfeiffer Vacuum
Pfeiffer Vacuum CPT 200 Manuel utilisateur
Pfeiffer Vacuum
Pfeiffer Vacuum TPR-270 Manuel utilisateur
Pfeiffer Vacuum
Pfeiffer Vacuum HIPACE 700 P Manuel utilisateur
Pfeiffer Vacuum
Pfeiffer Vacuum HIPACE Manuel utilisateur
Pfeiffer Vacuum
Pfeiffer Vacuum PKR 36X Manuel utilisateur
Pfeiffer Vacuum
Pfeiffer Vacuum XPT 200 PB Manuel du propriétaire
Pfeiffer Vacuum
Pfeiffer Vacuum HIPACE 2800 IT Manuel utilisateur
Pfeiffer Vacuum
Pfeiffer Vacuum HPT 200 Manuel utilisateur
