H06533-R06
2
Definitions and Symbols
In this operation manual, “Warning” and “Caution” are defined as follows:
Warning: To prevent an accident resulting in injury or death.
If you don’t follow it, it will cause an accident resulting in injury or death.
Caution: To prevent damage to the pump.
If you don’t follow it, it will cause damage to the pump and injury.
Warning
Important description for preventing accidents resulting in injury or death when you use
the pump.
Caution
Important description for safe operation of the pump.
Warning
Before using the pump, be sure to read this operation manual for safe operation of the
pump. Operation not following the procedure in this operation manual may cause a failure
or an accident resulting in injury etc.
Warning
1) Pump installation
Secure the pump onto the frame or onto the floor before use.
When the pump is used in a system, read and understand this operation manual
thoroughly before designing the system.
2) Inspection
Do NOT put your hand or foreign object in the pump.
3) Process gas
Do NOT evacuate gallium or its compounds with the pump. It may damage the pump.
4) Overhaul and repair
If the pump has been used to evacuate toxic or reactive gas, purge the pump with inert
gas before removing it from the equipment. Take protective measures not to expose any
part of your body to the toxic gas, the reactive gas or its products.
Before transporting the pump, cover the inlet, the outlet, the leak port and the purge gas
inlet firmly so that reactive products do NOT leak out of the pump in transport.
5) Disassembly and retrofit
Do NOT disassemble and/or retrofit the pump. It will cause a failure or an accident.
6) Temporary inlet flange
The temporary inlet flange is only for shipping. Do NOT use it for any other purpose.
7) Air inrush
Do NOT rush air into the pump in operation. It may cause a failure or damage to the
pump. Take care not to rush air into the pump.
8) Heat emission
The pump generates heat in operation. Do NOT touch the pump in operation, or you
may get burned.
