Newport XPS Manuel d'utilisation et d'entretien

XPS Unified

Universal High-Performance

Motion Controller/Driver

V1.0

Programmer’s

Manual

XPS Unified Programmer’s Manual

Original instructions.

No part of this document may be reproduced or copied without the prior written

approval of Newport Corporation. This document is provided for information only, and

product specifications are subject to change without notice. Any change will be

reflected in future publishings.

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Table of Contents

1.0 Note ........................................................................................................... 1

2.0 TCP/IP Communication ......................................................................... 2

3.0 XPS .NET Software Drivers ................................................................... 3

3.1 How to Install .NET Drivers for XPS Controller .............................................................3

3.1.1 Requirements.........................................................................................................3

3.1.1 Installing the 32 bit (x86) Windows Platform .......................................................4

3.1.2 Installing the 64 bit (x64) Windows Platform.......................................................4

3.2 Variables Equivalent for Programming Langages............................................................5

3.3 How to Use XPS .NET Assembly from Visual Studio C#? .............................................6

3.3.1 Add Reference to Newport XPS .NET Assembly.................................................6

3.3.2 C# Code Sources ...................................................................................................6

3.4 How to Use XPS .NET Assembly from LabVIEW? ........................................................7

3.4.1 Add Reference to .NET Assembly ........................................................................7

3.4.2 LabVIEW Code Sources .......................................................................................7

3.5 How to Use XPS .NET Assembly from IronPython?.......................................................8

3.5.1 Add Reference to .NET Assembly ........................................................................8

3.5.2 IronPython Code Source .......................................................................................8

3.6 How to Use XPS .NET Assembly from Matlab? ...........................................................10

3.6.1 Add Reference to .NET Assembly ......................................................................10

3.6.2 Matlab Code Source ............................................................................................10

4.0 TCP/IP Support Functions................................................................... 11

4.1 OpenInstrument ..............................................................................................................11

4.2 CloseInstrument..............................................................................................................12

4.3 SetTimeout .....................................................................................................................12

5.0 XPS Standard Firmware Architecture (Base Version)...................... 13

5.1 Group Definition.............................................................................................................13

5.1.1 Object Structure...................................................................................................13

5.2 Positioner Definition.......................................................................................................14

5.2.1 Object Structure...................................................................................................14

5.2.2 Definition of the Positions Available for Each Positioner...................................15

5.3 SingleAxis Group ...........................................................................................................16

5.3.1 State Diagram......................................................................................................17

5.4 Spindle Group.................................................................................................................18

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5.4.1 State Diagram......................................................................................................19

5.5 XY Group .......................................................................................................................20

5.5.1 State Diagram......................................................................................................21

5.6 XYZ Group.....................................................................................................................22

5.6.1 State Diagram......................................................................................................23

5.7 MultipleAxes Group .......................................................................................................24

5.7.1 State Diagram......................................................................................................25

5.8 Analog and Digital I/O ...................................................................................................26

5.8.1 GPIO Name List..................................................................................................26

5.8.1.1 XPS-Q Hardware .....................................................................................26

5.8.1.2 XPS-RL or XPS-D Hardware ..................................................................27

6.0 XPS Extended Firmware Architecture (Contact Newport) .............. 28

6.1 SingleAxisWithClamping Group....................................................................................28

6.1.1 State Diagram......................................................................................................29

6.1.2 Group Clamping Sequence..................................................................................30

6.1.2.1 Clamping State Diagram..........................................................................30

6.2 SingleAxisTheta Group ..................................................................................................31

6.2.1 State Diagram......................................................................................................32

6.2.2 Group Clamping Sequence..................................................................................33

6.2.2.1 Clamping State Diagram..........................................................................33

6.3 TZ Group........................................................................................................................34

6.3.1 State Diagram......................................................................................................35

6.4 User External Module Programming..............................................................................36

6.5 ZYGO Interferometer.....................................................................................................37

6.5.1 ZMI Measurement System ..................................................................................37

6.5.2 ZYGO P2 Interface Registers..............................................................................37

6.5.3 Status, Error, and High Nibble P2 Interface Register..........................................38

6.5.4 ZYGO Error Code Table.....................................................................................39

6.5.5 PEG Control Register..........................................................................................40

6.5.6 ZYGO Axis Error Status List..............................................................................40

6.5.7 ZYGO Axis Status List .......................................................................................41

7.0 XPS Functions Description................................................................... 42

7.1 Input Tests Common to all XPS Functions ....................................................................42

7.2 XPS Functions Lists .......................................................................................................43

7.2.1 Standard Functions..............................................................................................43

7.2.1.1 CleanCoreDumpFolder ............................................................................43

7.2.1.2 CleanTmpFolder ......................................................................................44

7.2.1.3 CloseAllOtherSockets ..............................................................................45

7.2.1.4 ControllerMotionKernelTimeLoadGet ....................................................46

7.2.1.5 ControllerRTTimeGet..............................................................................47

7.2.1.6 ControllerSlaveStatusGet.........................................................................48

7.2.1.7 ControllerSlaveStatusStringGet ...............................................................49

7.2.1.8 ControllerStatusGet..................................................................................50

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XPS Unified Programmer’s Manual

7.2.1.9 ControllerStatusRead ...............................................................................51

7.2.1.10 ControllerStatusStringGet ........................................................................52

7.2.1.11 ControllerSynchronizeCorrectorISR........................................................53

7.2.1.12 DataCollectionBufferReset ......................................................................54

7.2.1.13 DataCollectionBufferAndTimeReset .......................................................55

7.2.1.14 DataCollectionRequest.............................................................................56

7.2.1.15 DataCollectionTimeStampGet .................................................................57

7.2.1.16 DataCollectionTimeStampReset ..............................................................58

7.2.1.17 DoubleGlobalArrayGet............................................................................59

7.2.1.18 DoubleGlobalArraySet.............................................................................60

7.2.1.19 ElapsedTimeGet.......................................................................................61

7.2.1.20 ErrorStringGet..........................................................................................62

7.2.1.21 EventExtendedAllGet ..............................................................................63

7.2.1.22 EventExtendedConfigurationActionGet ..................................................64

7.2.1.23 EventExtendedConfigurationActionSet ...................................................65

7.2.1.24 EventExtendedConfigurationTriggerGet .................................................67

7.2.1.25 EventExtendedConfigurationTriggerSet ..................................................68

7.2.1.26 EventExtendedGet....................................................................................70

7.2.1.27 EventExtendedRemove ............................................................................71

7.2.1.28 EventExtendedStart..................................................................................72

7.2.1.29 EventExtendedWait..................................................................................74

7.2.1.30 ExternalModuleFirmwareVersionGet......................................................76

7.2.1.31 ExternalModuleScanFuncTimeDurationsGet ..........................................77

7.2.1.32 ExternalModuleSocketFree......................................................................78

7.2.1.33 ExternalModuleSocketReserve ................................................................79

7.2.1.34 FileGatheringRename ..............................................................................80

7.2.1.35 FileScriptHistoryRename.........................................................................81

7.2.1.36 FirmwareBuildVersionNumberGet..........................................................82

7.2.1.37 FirmwareVersionGet................................................................................83

7.2.1.38 GatheringConfigurationGet......................................................................84

7.2.1.39 GatheringConfigurationSet ......................................................................85

7.2.1.40 GatheringCurrentNumberGet...................................................................86

7.2.1.41 GatheringDataAcquire .............................................................................87

7.2.1.42 GatheringDataGet ....................................................................................88

7.2.1.43 GatheringDataMultipleLinesGet..............................................................89

7.2.1.44 GatheringExternalConfigurationGet ........................................................91

7.2.1.45 GatheringExternalConfigurationSet.........................................................92

7.2.1.46 GatheringExternalCurrentNumberGet .....................................................93

7.2.1.47 GatheringExternalDataGet.......................................................................94

7.2.1.48 GatheringExternalStopAndSave ..............................................................95

7.2.1.49 GatheringReset.........................................................................................96

7.2.1.50 GatheringRun...........................................................................................97

7.2.1.51 GatheringRunAppend ..............................................................................98

7.2.1.52 GatheringStop ..........................................................................................99

7.2.1.53 GatheringStopAndSave..........................................................................100

7.2.1.54 GetLibraryVersion .................................................................................101

7.2.1.55 GlobalArrayGet......................................................................................102

7.2.1.56 GlobalArraySet ......................................................................................103

7.2.1.57 GPIOAnalogGainGet .............................................................................104

7.2.1.58 GPIOAnalogGainSet..............................................................................105

7.2.1.59 GPIOAnalogGet.....................................................................................106

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7.2.1.60 GPIOAnalogRangeConfigurationGet ....................................................107

7.2.1.61 GPIOAnalogRangeConfigurationSet .....................................................108

7.2.1.62 GPIOAnalogSet .....................................................................................109

7.2.1.63 GPIODigitalGet .....................................................................................110

7.2.1.64 GPIODigitalSet ......................................................................................111

7.2.1.65 GPIODigitalPulseWidthGet...................................................................112

7.2.1.66 GPIODigitalPulseWidthSet....................................................................113

7.2.1.67 GroupAccelerationCurrentGet ...............................................................114

7.2.1.68 GroupAccelerationSetpointGet ..............................................................115

7.2.1.69 GroupAnalogTrackingModeDisable......................................................116

7.2.1.70 GroupAnalogTrackingModeEnable .......................................................117

7.2.1.71 GroupBrakeStateGet ..............................................................................119

7.2.1.72 GroupBrakeSet.......................................................................................120

7.2.1.73 GroupCorrectorOutputGet .....................................................................121

7.2.1.74 GroupCurrentFollowingErrorGet...........................................................122

7.2.1.75 GroupGantryModeGet ...........................................................................123

7.2.1.76 GroupGantryModeSet............................................................................124

7.2.1.77 GroupHomeSearch.................................................................................125

7.2.1.78 GroupHomeSearchAndRelativeMove....................................................127

7.2.1.79 GroupInitialize .......................................................................................129

7.2.1.80 GroupInitializeNoEncoderReset ............................................................131

7.2.1.81 GroupInitializeWithEncoderCalibration ................................................133

7.2.1.82 GroupInterlockDisable...........................................................................135

7.2.1.83 GroupInterlockEnable ............................................................................136

7.2.1.84 GroupJogCurrentGet..............................................................................137

7.2.1.85 GroupJogModeDisable ..........................................................................139

7.2.1.86 GroupJogModeEnable............................................................................140

7.2.1.87 GroupJogParametersGet ........................................................................142

7.2.1.88 GroupJogParametersSet .........................................................................144

7.2.1.89 GroupKill ...............................................................................................146

7.2.1.90 GroupMotionDisable..............................................................................147

7.2.1.91 GroupMotionEnable...............................................................................148

7.2.1.92 GroupMotionStatusGet ..........................................................................149

7.2.1.93 GroupMoveAbort...................................................................................150

7.2.1.94 GroupMoveAbortFast ............................................................................152

7.2.1.95 GroupMoveAbsolute..............................................................................154

7.2.1.96 GroupMoveEndWait..............................................................................156

7.2.1.97 GroupMoveRelative...............................................................................157

7.2.1.98 GroupPositionCurrentGet ......................................................................159

7.2.1.99 GroupPositionSetpointGet .....................................................................160

7.2.1.100 GroupPositionTargetGet ........................................................................161

7.2.1.101 GroupReferencingActionExecute ..........................................................162

7.2.1.102 GroupReferencingStart ..........................................................................164

7.2.1.103 GroupReferencingStop...........................................................................165

7.2.1.104 GroupSpinCurrentGet ............................................................................166

7.2.1.105 GroupSpinModeStop..............................................................................167

7.2.1.106 GroupSpinParametersGet.......................................................................168

7.2.1.107 GroupSpinParametersSet .......................................................................169

7.2.1.108 GroupStatusGet......................................................................................171

7.2.1.109 GroupStatusStringGet ............................................................................172

7.2.1.110 GroupVelocityCurrentGet......................................................................173

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XPS Unified Programmer’s Manual

7.2.1.111 GroupVelocitySetpointGet.....................................................................174

7.2.1.112 HardwareDateAndTimeGet ...................................................................175

7.2.1.113 HardwareDateAndTimeSet ....................................................................176

7.2.1.114 HardwareDriverAndStageGet ................................................................177

7.2.1.115 InstallerVersionGet ................................................................................178

7.2.1.116 INTServitudesCommandGet..................................................................179

7.2.1.117 INTServitudesStatusGet.........................................................................180

7.2.1.118 KillAll ....................................................................................................181

7.2.1.119 Login ......................................................................................................182

7.2.1.120 LoginS....................................................................................................183

7.2.1.121 MultipleAxesPTExecution.....................................................................184

7.2.1.122 MultipleAxesPTLoadToMemory...........................................................186

7.2.1.123 MultipleAxesPTParametersGet..............................................................188

7.2.1.124 MultipleAxesPTPulseOutputGet............................................................189

7.2.1.125 MultipleAxesPTPulseOutputSet ............................................................191

7.2.1.126 MultipleAxesPTResetInMemory ...........................................................193

7.2.1.127 MultipleAxesPTVerification..................................................................194

7.2.1.128 MultipleAxesPTVerificationResultGet..................................................196

7.2.1.129 MultipleAxesPVTExecution ..................................................................197

7.2.1.130 MultipleAxesPVTLoadToMemory........................................................199

7.2.1.131 MultipleAxesPVTParametersGet...........................................................201

7.2.1.132 MultipleAxesPVTPulseOutputGet.........................................................202

7.2.1.133 MultipleAxesPVTPulseOutputSet .........................................................204

7.2.1.134 MultipleAxesPVTResetInMemory ........................................................206

7.2.1.135 MultipleAxesPVTVerification ...............................................................207

7.2.1.136 MultipleAxesPVTVerificationResultGet ...............................................209

7.2.1.137 OpenConnection.....................................................................................210

7.2.1.138 PositionerAccelerationAutoScaling .......................................................211

7.2.1.139 PositionerAnalogTrackingPositionParametersGet.................................213

7.2.1.140 PositionerAnalogTrackingPositionParametersSet..................................214

7.2.1.141 PositionerAnalogTrackingVelocityParametersGet ................................216

7.2.1.142 PositionerAnalogTrackingVelocityParametersSet .................................218

7.2.1.143 PositionerBacklashDisable.....................................................................220

7.2.1.144 PositionerBacklashEnable......................................................................221

7.2.1.145 PositionerBacklashGet ...........................................................................223

7.2.1.146 PositionerBacklashSet............................................................................224

7.2.1.147 PositionerCompensatedFastPCOAbort ..................................................225

7.2.1.148 PositionerCompensatedFastPCOCurrentStatusGet................................226

7.2.1.149 PositionerCompensatedFastPCOEnable ................................................227

7.2.1.150 PositionerCompensatedFastPCOFromFile.............................................228

7.2.1.151 PositionerCompensatedFastPCOLoadToMemory .................................230

7.2.1.152 PositionerCompensatedFastPCOMemoryReset.....................................231

7.2.1.153 PositionerCompensatedFastPCOPrepare ...............................................232

7.2.1.154 PositionerCompensatedFastPCOPulseParametersGet ...........................234

7.2.1.155 PositionerCompensatedFastPCOPulseParametersSet ............................235

7.2.1.156 PositionerCompensatedFastPCOSet ......................................................236

7.2.1.157 PositionerCompensatedPCOAbort.........................................................238

7.2.1.158 PositionerCompensatedPCOCurrentStatusGet.......................................240

7.2.1.159 PositionerCompensatedPCOEnable.......................................................241

7.2.1.160 PositionerCompensatedPCOFromFile ...................................................243

7.2.1.161 PositionerCompensatedPCOLoadToMemory........................................245

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7.2.1.162 PositionerCompensatedPCOMemoryReset............................................247

7.2.1.163 PositionerCompensatedPCOPrepare......................................................248

7.2.1.164 PositionerCompensatedPCOSet.............................................................250

7.2.1.165 PositionerCompensationDisturbanceDisable .........................................252

7.2.1.166 PositionerCompensationDisturbanceEnable ..........................................253

7.2.1.167 PositionerCompensationDisturbanceFileLoad.......................................254

7.2.1.168 PositionerCompensationDisturbanceStatusGet......................................255

7.2.1.169 PositionerCompensationDualLoopNotchFilterGet ................................256

7.2.1.170 PositionerCompensationDualLoopNotchFilterSet.................................258

7.2.1.171 PositionerCompensationDualLoopPhaseCorrectionFilterGet................260

7.2.1.172 PositionerCompensationDualLoopPhaseCorrectionFilterSet ................262

7.2.1.173 PositionerCompensationEncoderNotchFilterGet ...................................264

7.2.1.174 PositionerCompensationEncoderNotchFilterSet....................................266

7.2.1.175 PositionerCompensationFrequencyNotchsGet.......................................268

7.2.1.176 PositionerCompensationFrequencyNotchsSet .......................................270

7.2.1.177 PositionerCompensationLowPassTwoFilterGet ....................................272

7.2.1.178 PositionerCompensationLowPassTwoFilterSet .....................................273

7.2.1.179 PositionerCompensationNotchFilterGet ................................................274

7.2.1.180 PositionerCompensationNotchFilterSet .................................................275

7.2.1.181 PositionerCompensationNotchModeFiltersGet......................................277

7.2.1.182 PositionerCompensationNotchModeFiltersSet ......................................279

7.2.1.183 PositionerCompensationPhaseCorrectionFilterGet................................281

7.2.1.184 PositionerCompensationPhaseCorrectionFilterSet.................................283

7.2.1.185 PositionerCompensationPhaseCorrectionFiltersGet ..............................285

7.2.1.186 PositionerCompensationPhaseCorrectionFiltersSet...............................287

7.2.1.187 PositionerCompensationPositionFilterGet .............................................289

7.2.1.188 PositionerCompensationPositionFilterSet..............................................290

7.2.1.189 PositionerCompensationPostExcitationFrequencyNotchFilterGet.........291

7.2.1.190 PositionerCompensationPostExcitationFrequencyNotchFilterSet .........292

7.2.1.191 PositionerCompensationPostExcitationLowPassFilterGet.....................294

7.2.1.192 PositionerCompensationPostExcitationLowPassFilterSet .....................295

7.2.1.193 PositionerCompensationPostExcitationNotchModeFilterGet ................296

7.2.1.194 PositionerCompensationPostExcitationNotchModeFilterSet.................298

7.2.1.195 PositionerCompensationPostExcitationPhaseCorrectionFilterGet.........300

7.2.1.196 PositionerCompensationPostExcitationPhaseCorrectionFilterSet .........302

7.2.1.197 PositionerCompensationPreFeedForwardFrequencyNotchFilterGet .....304

7.2.1.198 PositionerCompensationPreFeedForwardFrequencyNotchFilterSet......305

7.2.1.199 PositionerCompensationPreFeedForwardPhaseCorrectionFilterGet .....307

7.2.1.200 PositionerCompensationPreFeedForwardPhaseCorrectionFilterSet ......309

7.2.1.201 PositionerCompensationPreFeedForwardSpatialNotchFilterGet...........311

7.2.1.202 PositionerCompensationPreFeedForwardSpatialNotchFilterSet............312

7.2.1.203 PositionerCompensationSpatialPeriodicNotchsGet ...............................314

7.2.1.204 PositionerCompensationSpatialPeriodicNotchsSet................................316

7.2.1.205 PositionerCorrectorAutoTuning.............................................................318

7.2.1.206 PositionerCorrectorDamperFilterGet .....................................................320

7.2.1.207 PositionerCorrectorDamperFilterSet......................................................321

7.2.1.208 PositionerCorrectorDualGet...................................................................323

7.2.1.209 PositionerCorrectorDualSet ...................................................................325

7.2.1.210 PositionerCorrectorExcitationSignalGainGet ........................................327

7.2.1.211 PositionerCorrectorExcitationSignalGainSet.........................................328

7.2.1.212 PositionerCorrectorNotchFiltersGet.......................................................329

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XPS Unified Programmer’s Manual

7.2.1.213 PositionerCorrectorNotchFiltersSet .......................................................331

7.2.1.214 PositionerCorrectorPIDAccelerationFilterGet .......................................333

7.2.1.215 PositionerCorrectorPIDAccelerationFilterSet........................................334

7.2.1.216 PositionerCorrectorPIDBaseGet ............................................................335

7.2.1.217 PositionerCorrectorPIDBaseSet.............................................................337

7.2.1.218 PositionerCorrectorPIDDualFFVoltageGet ...........................................339

7.2.1.219 PositionerCorrectorPIDDualFFVoltageSet ............................................341

7.2.1.220 PositionerCorrectorPIDFFAccelerationGet ...........................................344

7.2.1.221 PositionerCorrectorPIDFFAccelerationSet ............................................346

7.2.1.222 PositionerCorrectorPIDFFVelocityGet..................................................348

7.2.1.223 PositionerCorrectorPIDFFVelocitySet...................................................350

7.2.1.224 PositionerCorrectorPIPositionGet..........................................................352

7.2.1.225 PositionerCorrectorPIPositionSet...........................................................353

7.2.1.226 PositionerCorrectorPlantFeedForwardDelayGet....................................355

7.2.1.227 PositionerCorrectorPlantFeedForwardDelaySet ....................................356

7.2.1.228 PositionerCorrectorPostFFGet ...............................................................357

7.2.1.229 PositionerCorrectorPostFFSet................................................................358

7.2.1.230 PositionerCorrectorTypeGet ..................................................................359

7.2.1.231 PositionerCurrentVelocityAccelerationFiltersGet .................................360

7.2.1.232 PositionerCurrentVelocityAccelerationFiltersSet ..................................361

7.2.1.233 PositionerDriverFiltersGet .....................................................................363

7.2.1.234 PositionerDriverFiltersSet......................................................................364

7.2.1.235 PositionerDriverPositionOffsetsGet.......................................................366

7.2.1.236 PositionerDriverStatusGet......................................................................367

7.2.1.237 PositionerDriverStatusStringGet............................................................368

7.2.1.238 PositionerEncoderAmplitudeValuesGet ................................................369

7.2.1.239 PositionerEncoderCalibrationParametersGet.........................................370

7.2.1.240 PositionersEncoderIndexDifferenceGet.................................................372

7.2.1.241 PositionerErrorGet .................................................................................373

7.2.1.242 PositionerErrorRead...............................................................................374

7.2.1.243 PositionerErrorStringGet........................................................................375

7.2.1.244 PositionerExcitationSignalGet ...............................................................376

7.2.1.245 PositionerExcitationSignalSet................................................................377

7.2.1.246 PositionerExcitationSignalCorrectorOutSet...........................................380

7.2.1.247 PositionerFeedforwardAccDisable.........................................................383

7.2.1.248 PositionerFeedforwardAccEnable..........................................................384

7.2.1.249 PositionerFeedforwardAccGet...............................................................385

7.2.1.250 PositionerFeedforwardAccSet................................................................386

7.2.1.251 PositionerFeedforwardPositionDisable ..................................................388

7.2.1.252 PositionerFeedforwardPositionEnable ...................................................389

7.2.1.253 PositionerFeedforwardPositionGet ........................................................390

7.2.1.254 PositionerFeedforwardPositionSet .........................................................391

7.2.1.255 PositionerGantryEndReferencingPositionGet........................................392

7.2.1.256 PositionerHardInterpolatorFactorGet.....................................................393

7.2.1.257 PositionerHardInterpolatorFactorSet......................................................394

7.2.1.258 PositionerHardInterpolatorPositionGet..................................................396

7.2.1.259 PositionerHardwareStatusGet ................................................................397

7.2.1.260 PositionerHardwareStatusStringGet.......................................................398

7.2.1.261 PositionerJogMaximumVelocityAndAccelerationGet...........................399

7.2.1.262 PositionerMagneticTrackPositionAtHomeGet.......................................400

7.2.1.263 PositionerMaximumVelocityAndAccelerationGet ................................401

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XPS Unified Programmer’s Manual

7.2.1.264 PositionerMotionDoneGet .....................................................................402

7.2.1.265 PositionerMotionDoneSet ......................................................................403

7.2.1.266 PositionerMotorDualSinForceBalanceGet.............................................404

7.2.1.267 PositionerMotorDualSinForceBalanceSet..............................................405

7.2.1.268 PositionerPositionCompareAquadBAlwaysEnable ...............................406

7.2.1.269 PositionerPositionCompareAquadBPrescalerGet ..................................407

7.2.1.270 PositionerPositionCompareAquadBPrescalerSet...................................408

7.2.1.271 PositionerPositionCompareAquadBWindowedGet ...............................409

7.2.1.272 PositionerPositionCompareAquadBWindowedSet ................................410

7.2.1.273 PositionerPositionCompareDisable........................................................412

7.2.1.274 PositionerPositionCompareEnable.........................................................413

7.2.1.275 PositionerPositionCompareGet ..............................................................414

7.2.1.276 PositionerPositionComparePulseParametersGet....................................415

7.2.1.277 PositionerPositionComparePulseParametersSet.....................................416

7.2.1.278 PositionerPositionCompareScanAccelerationLimitGet .........................418

7.2.1.279 PositionerPositionCompareScanAccelerationLimitSet..........................419

7.2.1.280 PositionerPositionCompareSet...............................................................420

7.2.1.281 PositionerPreCorrectorExcitationSignalGet...........................................422

7.2.1.282 PositionerPreCorrectorExcitationSignalSet ...........................................423

7.2.1.283 PositionerRawEncoderPositionGet ........................................................425

7.2.1.284 PositionerSGammaExactVelocityAjustedDisplacementGet..................426

7.2.1.285 PositionerSGammaParametersGet .........................................................427

7.2.1.286 PositionerSGammaParametersSet..........................................................428

7.2.1.287 PositionerSGammaPreviousMotionTimesGet .......................................430

7.2.1.288 PositionerSGammaVelocityAndAccelerationSet...................................431

7.2.1.289 PositionerStageParameterGet.................................................................432

7.2.1.290 PositionerStageParameterSet .................................................................433

7.2.1.291 PositionerTimeFlasherDisable ...............................................................434

7.2.1.292 PositionerTimeFlasherEnable ................................................................435

7.2.1.293 PositionerTimeFlasherGet......................................................................436

7.2.1.294 PositionerTimeFlasherSet ......................................................................437

7.2.1.295 PositionerUserTravelLimitsGet .............................................................439

7.2.1.296 PositionerUserTravelLimitsSet ..............................................................440

7.2.1.297 PositionerWarningFollowingErrorGet ...................................................441

7.2.1.298 PositionerWarningFollowingErrorSet....................................................442

7.2.1.299 Reboot....................................................................................................443

7.2.1.300 RestartApplication .................................................................................444

7.2.1.301 SingleAxisSlaveModeDisable................................................................445

7.2.1.302 SingleAxisSlaveModeEnable.................................................................446

7.2.1.303 SingleAxisSlaveParametersGet..............................................................447

7.2.1.304 SingleAxisSlaveParametersSet ..............................................................448

7.2.1.305 SingleAxisThetaClampDisable ..............................................................450

7.2.1.306 SingleAxisThetaClampEnable ...............................................................451

7.2.1.307 SingleAxisThetaFeedforwardJerkParametersGet...................................452

7.2.1.308 SingleAxisThetaFeedforwardJerkParametersSet ...................................453

7.2.1.309 SingleAxisThetaFeedforwardParametersGet .........................................454

7.2.1.310 SingleAxisThetaFeedforwardParametersSet..........................................455

7.2.1.311 SingleAxisThetaSlaveModeDisable.......................................................456

7.2.1.312 SingleAxisThetaSlaveModeEnable........................................................457

7.2.1.313 SingleAxisThetaSlaveParametersGet.....................................................458

7.2.1.314 SingleAxisThetaSlaveParametersSet .....................................................459

EDH0373En1023 — 01/18 x

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