5User Manual -MPI-TS150_UG_REV 2.1.3 -20102017
Content
Overview ��������������������������������������������������������������������������� 6
Probe System Architecture �������������������������������������������������� 7
Microscope and Movement ................................................................................................................7
Probe Platen ........................................................................................................................................7
.........................................................................................................................................7
Chuck XYT Stage ..................................................................................................................................7
......................................................................................................................................7
MPI MicroPositioner ............................................................................................................................7
Non Electrical Utilities.........................................................................................................................9
Electrical Utilities.................................................................................................................................9
Open Connections...............................................................................................................................9
Accessories...........................................................................................................................................9
Installation����������������������������������������������������������������������� 10
Probe System Unpacking..................................................................................................................10
Probe System - Transport Locks Removal........................................................................................11
Microscope - Transport Locks Removal............................................................................................11
TS150 Probe System Installation ......................................................................................................12
...................................................................................................................12
Microscope Installation .....................................................................................................................13
System Facility Hookup.....................................................................................................................22
Operation������������������������������������������������������������������������� 24
Chuck Stage .......................................................................................................................................24
Microscope Movement ......................................................................................................................26
........................................................................................................34
System Vacuum Control....................................................................................................................35
MicroPositioner Setup and Control ..................................................................................................36
Maintenance and Service ����������������������������������������������� 42
