MKS 649A Manuel utilisateur
121004-P1
Rev A, 11/97
Instruction Manual
MKS Type 649A
Pressure Controller
with an Integral Mass Flow Meter
Six Shattuck Road
Andover, MA 01810-2449
(800) 227-8766 or (978) 975-2350
Fax: (978) 975-0093
E-mail: mks@mksinst.com
Web site: http://www.mksinst.com
WARRANTY
Type 649A Equipment
MKS Instruments, Inc. (MKS) warrants that for two years from the date of shipment
the equipment described above (the “equipment”) manufactured by MKS shall be
free from defects in materials and workmanship and will correctly perform all date-
related operations, including without limitation accepting data entry, sequencing,
sorting, comparing, and reporting, regardless of the date the operation is performed
or the date involved in the operation, provided that, if the equipment exchanges
data or is otherwise used with equipment, software, or other products of others,
such products of others themselves correctly perform all date-related operations
and store and transmit dates and date-related data in a format compatible with
MKS equipment. THIS WARRANTY IS MKS’ SOLE WARRANTY CONCERNING
DATE-RELATED OPERATIONS.
For the period commencing with the date of shipment of this equipment and ending
two years later, MKS will, at its option, either repair or replace any part which is
defective in materials or workmanship or with respect to the date-related operations
warranty without charge to the purchaser. The foregoing shall constitute the
exclusive and sole remedy of the purchaser for any breach by MKS of this
warranty.
The purchaser, before returning any equipment covered by this warranty, which is
asserted to be defective by the purchaser, shall make specific written arrange-
ments with respect to the responsibility for shipping the equipment and handling
any other incidental charges with the MKS sales representative or distributor from
which the equipment was purchased or, in the case of a direct purchase from MKS,
with the MKS home office in Andover, Massachusetts, USA.
This warranty does not apply to any equipment which has not been installed and
used in accordance with the specifications recommended by MKS for the proper
and normal use of the equipment. MKS shall not be liable under any circumstances
for indirect, special, consequential, or incidental damages in connection with, or
arising out of, the sale, performance, or use of the equipment covered by this
warranty.
MKS recommends that all MKS pressure and flow products be calibrated
periodically (typically every 6 to 12 months) to ensure accurate readings. When a
product is returned to MKS for this periodic re-calibration it is considered normal
preventative maintenance not covered by any warranty.
THIS WARRANTY IS IN LIEU OF ALL OTHER RELEVANT WARRANTIES,
EXPRESSED OR IMPLIED, INCLUDING THE IMPLIED WARRANTY OF
MERCHANTABILITY AND THE IMPLIED WARRANTY OF FITNESS FOR A
PARTICULAR PURPOSE, AND ANY WARRANTY AGAINST INFRINGEMENT OF
ANY PATENT.
11-98 121004-P1
121004-P1
Rev A, 11/97
MKS Type 649A
Pressure Controller
with an Integral Mass Flow Meter
Copyright © 1997 by MKS Instruments, Inc.
All rights reserved. No part of this work may be reproduced or transmitted in any form or by
any means, electronic or mechanical, including photocopying and recording, or by any
information storage or retrieval system, except as may be expressly permitted in writing by MKS
Instruments, Inc.
Baratronis a registered trademark of MKS Instruments, Inc., Andover, MA
Cajonand VCRare registered trademarks of Cajon Company, Macedonia, OH
Vitonis registered trademark of DuPont Dow Elastomers, Inc., Wilmington, DE
Kel-Fis a registered trademark of 3M, Minneapolis, MN
Elgiloyis a registered trademark of Elgiloy Limited Partnership, Elgin, IL
Protected by U. S. Patent 5461913; foreign patents pending.
Table of Contents
iii
Table of Contents
Safety Information.................................................................................................................. 1
Symbols Used in This Instruction Manual.................................................................. 1
Symbols Found on the Unit ....................................................................................... 2
Chapter One: General Information......................................................................................... 5
Introduction............................................................................................................... 5
Design Features of the Integral Mass Flow Meter.......................................... 5
Cleanliness Features...................................................................................... 6
How This Manual is Organized.................................................................................. 6
Manual Conventions ..................................................................................... 6
Customer Support...................................................................................................... 7
Chapter Two: Installation......................................................................................................9
How To Unpack the Type 649 Unit ........................................................................... 9
Opening the Package..................................................................................... 9
Unpacking Checklist ..................................................................................... 10
Interface Cables ......................................................................................................... 11
Generic Shielded Cable Description .............................................................. 11
Product Location and Requirements........................................................................... 12
Dimensions................................................................................................................ 13
Front and Back Views................................................................................... 13
Side View ..................................................................................................... 14
Bottom View................................................................................................. 15
Setup ......................................................................................................................... 16
Fittings.......................................................................................................... 16
Mounting Hardware ...................................................................................... 16
Gas Pressure.................................................................................................. 16
Installing the Unit.......................................................................................... 17
Electrical Information................................................................................................ 18
I/O Connector................................................................................................ 18
Initial Configuration .................................................................................................. 20
Table of Contents
iv
Chapter Three: Overview.......................................................................................................21
General Information ...................................................................................................21
Pressure Control Range..................................................................................21
Flow Range ...................................................................................................22
A Typical Control System..............................................................................22
How The 649 Pressure Controller Works....................................................................23
Flow Measurement Overview.....................................................................................24
Flow Path ......................................................................................................24
Measurement Technique................................................................................24
Tuning the 649 Pressure Controller ............................................................................25
Proportional Term..........................................................................................25
Integral Term.................................................................................................26
Tuning the 649 Controller..............................................................................27
Priority of Commands................................................................................................29
Trip Points .................................................................................................................30
Action of the Trip Points................................................................................30
Applications with a Large Differential Pressure..........................................................31
Labels ........................................................................................................................31
The Gas Correction Factor (GCF) for Flow Metering .................................................32
Chapter Four: Operation ........................................................................................................33
How To Check the Pressure Transducer Zero .............................................................33
How To Adjust the Pressure Transducer Span............................................................34
How To Zero the Integral Mass Flow Meter...............................................................35
How To Tune the 649 Controller................................................................................36
How To Adjust the Trip Point Values.........................................................................37
How To Select the Trip Point Action..........................................................................38
How To Use Trip Points as Error Indicators ...............................................................40
How To Change the Pressure Output Signal Range ....................................................41
Chapter Five: Maintenance ....................................................................................................43
General Information ...................................................................................................43
Zero Adjustment ........................................................................................................43
Appendix A: Product Specifications.......................................................................................45
Table of Contents
v
Performance Specifications........................................................................................ 45
Physical Specifications .............................................................................................. 46
Environmental Specifications..................................................................................... 47
Trip Point Specifications............................................................................................ 47
Appendix B: Model Code Explanation.................................................................................. 49
Model Code............................................................................................................... 49
Appendix C: Valve Orifice Selection..................................................................................... 53
General Information................................................................................................... 53
Checking the Valve Orifice Size.................................................................... 53
How To Verify the Orifice Selection.......................................................................... 54
Using Different Gases ................................................................................... 56
Appendix D: Gas Correction Factors..................................................................................... 59
Index...................................................................................................................................... 63
Table of Contents
vi
List of Fi
g
ures
vii
List of Figures
Figure 1: Front View of the Type 649 Controller................................................................... 13
Figure 2: Back View of the Type 649 Controller ................................................................... 14
Figure 3: Side View (Inlet) of the Type 649 Controller.......................................................... 14
Figure 4: Bottom View of the Type 649 Controller................................................................ 15
Figure 5: Downstream Pressure Control ................................................................................ 17
Figure 6: Top View of the Type 649 Controller..................................................................... 21
Figure 7: Location of the Mass Flow Meter Adjustments....................................................... 22
Figure 8: Effects of the Proportional Control......................................................................... 25
Figure 9: Effects of the Integral Control ................................................................................ 26
Figure 10: Controller Response with Initial P Term and I Term Values ................................. 27
Figure 11: Controller Response with Increased P Term ......................................................... 28
Figure 12: Controller Response with Increased I Term .......................................................... 28
Figure 13: Serial Number Label............................................................................................. 31
Figure 14: Jumper Positions on the Transducer Board ........................................................... 39
Figure 15: Flow Range Selection........................................................................................... 55
List of Figures
viii
Table des matières
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