LEYBOLD EcoDry - M Series Manuel utilisateur

EcoDry - M

Oil-free Vacuum Pumps

EcoDry M 15

130 000; 130 001; 130 002; 130 004

EcoDry M 20

130 010; 130 011; 130 012; 130 014

Operating Instructions

GA 01.701/5.02

Vacuum Solutions Application Support Service LEYBOLD VACUUM

GA 01.701/5.02 - 07/01

Contents

Important Safety Considerations . . . . . . . . . . . . . 4

1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . 6

1.1 Principles of Operation . . . . . . . . . . . . . . . . . 6

1.2 Specifications . . . . . . . . . . . . . . . . . . . . . . . . 7

2 Installation and Operation . . . . . . . . . . . . 10

2.1 Unpacking the Pump . . . . . . . . . . . . . . . . . . 10

2.2 Installation . . . . . . . . . . . . . . . . . . . . . . . . . 10

2.3 Operation of the Pump . . . . . . . . . . . . . . . . 11

2.4 Electrical Connection . . . . . . . . . . . . . . . . . .11

3 Application Notes . . . . . . . . . . . . . . . . . . . 13

3.1 General Application . . . . . . . . . . . . . . . . . . . 13

3.2 EcoDry M Pumps for Backing of

High-Vacuum Pumps . . . . . . . . . . . . . . . . . 13

3.3 Condensable Vapours & Liquids . . . . . . . . . 13

3.4 Use on Wet Processes . . . . . . . . . . . . . . . . 13

4 Maintenance . . . . . . . . . . . . . . . . . . . . . . . .14

5 Troubleshooting . . . . . . . . . . . . . . . . . . . . .15

EC Declaration of Conformity . . . . . . . . . 16

Figures

The references to figures, e.g. (1/2) consist of the Fig.

No. and the Item No. in that order.

Leybold-Service

If a pump is returned to Leybold, indicate whether the

pump is free of substances damaging to health or

whether it is contaminated.

If it is contaminated also indicate the nature of the

hazard. Leybold must return any pumps without a

“Declaration of Contamination” to the sender’s address.

Indicates procedures that must be strictly

observed to prevent hazards to persons.

Indicates procedures that must strictly be

observed to prevent damage to, or destruc-

tion of the equipment.

Warning

Caution

We reserve the right to modify the design and the speci-

fied data.The illustrations are not binding.

GA 01.701/5.02 -07/01 3

Ordering Information

ECODRY M 15

with three phase motor Cat. No. 130 000

with single phase motor 115 V 60 Hz USA Cat. No. 130 001

with single phase motor 230 V 50/60 Hz Euro Cat. No. 130 002

with single phase motor 200 V 50/60 Hz Cat. No. 130 004

ECODRY M 20

with three phase motor Cat. No. 130 010

with single phase motor 115 V 60 Hz USA Cat. No. 130 011

with single phase motor 230 V 50/60 Hz Euro Cat. No. 130 012

with single phase motor 200 V 50/60 Hz Cat. No. 130 014

Accessories

Silencer for

ECODRY M

15 - M 20 Cat. No. 130 050

Vibration absorbers for underneath (Set = 4 pieces) for

ECODRY M

15 - M 20 Cat. No. 130 051

Solenoid gas purge kit for

ECODRY M

15 - M 20 Cat. No. 169 50

Vibration absorber kit for

ECODRY M

15 - M 20 Cat. No. 130 052

GA 01.701/5.02 - 07/01

IMPORTANT SAFETY CONSIDERATIONS

The Leybold EcoDry M, oil-free vacuum pump is designed for safe and efficient operation when used properly and in

accordance with this manual. It is the responsibility of the user to carefully read and strictly observe all safety precau-

tions described in this section and throughout the manual. This product must be operated and maintained by trained

personnel only. Consult local, state, and national agencies regarding specific requirements and regulations. Address

any further safety, operation and/or maintenance questions to your nearest Leybold Vacuum office.

Warning Failure to observe the following precautions could result in serious personal injury:

• Before beginning with any maintenance or service work on the EcoDry M, disconnect the pump from

all power supplies.

• Do not operate the pump with any of the covers removed. Serious injury may result.

• If exhaust gases must be collected or contained, do not allow the exhaust line to become pressurised.

• Make sure that the gas flow from the exhaust port is not blocked or restricted in any way.

• The standard version of the EcoDry M is not suited for operation in explosion hazard areas. Contact us

before planning to use the pump under such circumstances.

• Before starting up for the first time, the motor circuit (3 phase) must be equipped with a suitable pro-

tective motor switch.Please take note of the information in these Operating Instructions or on the elec-

tric motor (wiring diagram).

• The EcoDry M is not suited for pumping of:

- combustible and explosive gases or vapours

- radioactive and toxic substances

- pyrophorous substances.

• The EcoDry M must be integrated in the system control arrangement so that the pump can not run-up

automatically after it has been shut down by the temperature switches in the motor.This applies equal-

ly to emergency shut-down arrangements. After having determined the fault cause, the pump should

be switched on manually again.

• Avoid exposing any part of the human body to the vacuum.

• Never operate the EcoDry M without a connected intake line or blank flange.

• The location at which the EcoDry M (including its accessories) is operated should be such that angles

over 10° from the vertical are avoided.

• The location of the EcoDry M should be such that all controls are easily accessible.

• Under certain ambient conditions the EcoDry M may attain a temperature of over 80 °C (176 °F).There

then exists the danger of receiving burns.

Note the symbols on the pump pointing to the hazards, and in the case of a hot pump wear the requi-

red protective clothing.

• The noise level produced by the EcoDry M without gas ballast is < 59 dB(A) with silencer or connec-

ted exhaust line.

Make sure that suitable protection measures are taken to protect the hearing.

• Before operating the EcoDry M with atmospheric gas ballast check first compatibility with the pumped

media so as to avoid hazardous conditions during operation right from the start.

• Before commissioning the EcoDry M, make sure that the media which are to be pumped are compa-

tible with each other so as to avoid hazardous situations.

All relevant safety standards and regulations must be observed.

Warning

GA 01.701/5.02 -07/01

• It is recommended to always operate the EcoDry M with a suitable exhaust line which is properly

connected. It must slope down and away from the pump.

• When moving the EcoDry M always use the allowed means.

A lifting eye is provided as standard on the pump.

Failure to observe the following precautions could result in damage to the pump:

• Do not allow the ingestion of small objects (screws, nuts, washers, pieces of wire, etc.)

through the inlet port. Always use the screen which is supplied with every pump.

• Do not use the pump for applications that produce abrasive or adhesive powders or

condensable vapours that can leave adhesive or high viscosity deposits. Please contact Leybold Sales

or Service to select a suitable separator. Also please contact Leybold Sales or Service when planning

to pump vapours other than water vapour.

• This pump is suited for pumping water vapour within the specified water vapour tolerance limits.

• Avoid vapours that can condense into liquids upon compression inside the pump, if these substances

exceed the vapour tolerance of the pump (> 25 mbar for water vapour).

• Before pumping vapours, the EcoDry M should have attained its operating temperature, and the gas

ballast should be set to position I - III (position 0 = closed, position 3 = max.water vapour tolerance, 25

mbar).

The pump will have attained its operating temperature about 30 minutes after starting the pump.During

this time the pump should be separated from the process, by a valve in the intake line, for example.

• Be sure that the lines (exhaust and intake lines) and other vacuum connections are clean and free of

oil. This applies in particular if oil sealed pumps were used before. The conditions must be checked

before commissioning, and in the case of deviations you should contact your nearest Leybold Service

office.

• In the case of wet processes we recommend the installation of liquid separators upstream and down-

stream of the pump as well as the use of the gas ballast.

• The exhaust line should be laid so that it slopes down and away from the pump so as to prevent con-

densate from backstreaming into the pump.

• In order to prevent the transfer of vibrations from the EcoDry M to other parts of the system we recom-

mend the use of corrugated hoses or compensators on both the intake and the exhaust sides. In case

you need any further information please get in touch with Leybold.

• Operate the EcoDry M only in the orientations detailed in the dimensional drawings (see page 8). For

the purpose of reducing the transfer of vibrations to the building we also recommend the use of vibra-

tion absorbers (see accessories for the EcoDry M).

This information will help the operator to obtain the best performance from the equipment:

• Normal amounts of humidity within the range of the pump’s vapour tolerance will not significantly affect

pump performance when the gas ballast is active.

• With the pump switched off, the pressure in the pump will rise very slowly to the level of the exhaust

pressure (normally atmospheric pressure).The EcoDry M is not equipped with any vacuum protec-

tion means.Thus you must install a valve in the intake line which automatically seals off the intake port

of the EcoDry M when at standstill.

Caution

Note

Introduction

6GA 01.701/5.02 - 07/01

1 Introduction

EcoDry M pump provides a clean, absolutely oil-free

means of evacuation without the risk of hydrocarbon

contamination. The gas compression stages achieve

pressures as low as 2·10-2 mbar (15 mTorr, 2 Pa). The

very low friction coating on the cylinders and on the

pistons allows maintenance-free continuous operation

for up to 2 years depending on the kind of application.

Please note the recommendations as to the applications

provided in these Operating Instructions.

1.1 Principles of Operation

1.1.1 Stages of Compression

The EcoDry M is equipped with three (M 15) or two (M

20) compression stages which are formed by three

pistons.

The gas to be pumped reaches the compression space

of the cylinder by means of slots formed in the walls of

the cylinders.These slots are uncovered by the piston at

bottom dead center and then covered again as the piston

ascends. The gas is compressed while the piston

ascends and exits the compression chamber through

large valves.

1.1.2 Sealing

At initially high pressures, gases may leak past the

piston from the compression chamber and into the drive-

unit housing (called ”blow-by”). However, the EcoDry M

drive-unit housing is designed such that blow-by gases

are drawn back into the cylinders and exhausted.

Moreover, the entire sealing system of the EcoDry M is

so designed that a low leak rate in the order of

< 1·10-4 mbar · l · s-1 is attained.The static seals made

of Viton and the PTFE radial shaft seals which are lubri-

cated with a grease which is free of hydrocarbons and

which are highly media compatible, reliably prevent the

exchange of gas between the EcoDry M and the

surrounding atmosphere.

To avoid internal leakage reducing the pump perform-

ance, the cylinder and piston are manufactured to very

close tolerances, leaving almost no gap between them.

Additional sealing collars are provided towards the drive-

unit housing. Towards the outside the chamber of the

shaft is sealed off by a radial shaft seal.

1.1.3 Lubrication

The pistons are covered with a low-friction material.The

low friction coefficient of the PTFE lets it serve as a bea-

ring and seal without additional liquid lubricants.

Moreover, all rolling bearings are lubricated with a grea-

se which is free of hydrocarbons and they are separated

by a dry seal from the vacuum chamber within the pump.

1.1.4 Friction and Cooling

Due to the selection of the pump materials, the friction

(and therefore the heat generated) is kept very low. No

additional cooling is needed in normal applications.

When installing the pump in an enclosure

make sure that there is an adequate flow of

cooling air.

1.1.5 Eliminating Hydrocarbon

Contamination

The risk of contamination by hydrocarbons is a major

concern with mechanical oil-sealed pumps because

liquid lubricants can stream back into the chamber to be

evacuated. The EcoDry M achieves high compression

ratios by using dry multiple-stage compression instead

of oil sealing, and absolutely no liquid lubricants are

used in the compression chambers.

Caution

GA 01.701/5.02 -07/01

Specifications

1.2 Specifications

EcoDry M 15 EcoDry M 20

Number of cylinders 3 3

Number of pumping stages 3 2

Max. pumping speed - at 50 Hz m3· h-1/ cfm 14/8.3 19/11.2

- at 60 Hz m3· h-1/ cfm 16/9.4 22/13

Ultimate pressure - at 50 Hz mbar/Torr 3 · 10-2 / 2.3 · 10-2 5 · 10-1 / 3.8 · 10-1

(absolute) - at 60 Hz mbar/Torr 2 · 10-2 / 1.5 · 10-2 4 · 10-1 / 3.0 · 10-1

Inlet pressure limit

- at initial evacuation mbar 1000

- in continuous operation mbar 100

Water vapour tolerance g · h-1 290 400

(with gas ballast set to “3”) (with gas ballast set to “3”)

Leak rate (integral) mbar·l·s-1 1·10-4 1·10-4

Motor power requirements

at inlet pressures < 20 mbar (15 Torr) W 300 300

Motor

Mains voltage, frequency

3-ph. / 50 Hz V 220-240/346-415 (-10% to +5%) 220-240/346-415 (-10% to +5%)

3-ph. / 60 Hz V 200-277/380-480 (-10% to +5%) 200-277/380-480 (-10% to +5%)

1-ph. 50 / 60 Hz (Euro) V 220 - 240 (-10 % to +5 %) 220 - 240 (-10 % to +5 %)

1-ph. 60 Hz (USA) V 115 (-10 % to +5 %) 115 (-10 % to +5 %)

1-ph 50/60 Hz V 200 (-10 % to +5 %) 200 (-10 % to +5 %)

Motor speed at 50/60 Hz rpm. 1000/1200 1000/1200

Protection IP 54 54

Noise level at ultimate pressure1) dB(A) < 59 < 59

Permissible ambient temperature °C/°F 0 - 50 / 32 - 122 0 - 50 / 32 - 122

Connections / Inlet ports DN 25 KF or G 3/4”

Connections /Outlet ports DN 25 KF or G 3/4”

Weight with three phase motor kg/lbs 38/84 38/84

Weight with single phase motor kg/lbs 50/111 50/111

1) without gas ballast, with silencer (accessory) or connected exhaust line

Specifications

8GA 01.701/5.02 - 07/01

606 max. (545)

1-Phase motor (3-Phase motor)

176

229 212 212

289

89191

Ø6.2

Exhaust silencer (Option)

Vibration absorber (Option)

19.5

17.2

350

335

117

38.7

186

314

20.2

Fig. 1 Dimensional drawing of the EcoDry M with 3-phase motor

Vertical arrangement

Horizontal arrangement

Specifications

GA 01.701/5.02 -07/01

m3/h

mbar

0,01

0,1 1 10

M 15 - 50 Hz

M 15 - 60 Hz M 20 - 60 Hz

M 20 - 50 Hz

100 1000

Inlet pressure

Pumping speed

Fig. 2 Pumping speed vs. inlet pressure for the EcoDry M 15 / M 20 (50/60 Hz operation)

Fig. 3 Connection for the intake and exhaust flanges

Connecting flanges on top, DN 25 KF

Intake sideExhaust side Gas ballast valve

10 GA 01.701/5.02 - 07/01

2.1 Unpacking the Pump

Leybold Vacuum inspects each EcoDry M pump before

shipping and packs each pump carefully to avoid dama-

ge from improper handling.

2.1.1 Receiving Conditions

Inspect shipping crate for external damage.

If damaged:

• Refuse the shipment.

• Notify Leybold Vacuum immediately.

2.1.2 Unpacking the Pump

1. Open the top of the shipping crate.

2. Remove any packing materials.

3. The pump is equipped with a lifting eye, and should

only be lifted with this device.

2.1.3 Inspecting the Pump

Inspect the pump for damage.

If damaged:

• Notify Leybold Vacuum immediately.

• Retain the original shipping and packing materials.

• Wait for return authorisation from Leybold Vacuum.

• Return the pump in the original package via the

original shipper.

2.1.4 Supplied Equipment

The EcoDry M is supplied with the following basic items:

• Pump with motor

• Separate dirt collecting sieve (dirt trap)

• Operating Instructions

• “Declaration of Contamination” form

The connection ports are sealed off before shipping with

sealing caps.

EcoDry M pumps equipped with a single phase AC

motor have a 1.8 m long mains cord and may be connec-

ted to the mains direct via the plug.

The AC motors are equipped with a built-in thermal

motor overload circuit breaker and a mains cord (1.8 m

long).

Country specific plugs USA, Japan, Euro are included.In

the case of the three-phase motors suitable motor over-

load protection and the connection to the mains power

supply must be installed resp. provided by the customer.

2.2 Installation

The EcoDry M pump is installed upright or horizontally

on the anti-vibration mounts provided.

Make sure that there is a clearance of at least 100 mm

to other components or pumps at every side to allow an

adequate air flow for cooling.

The EcoDry M pump is a complete unit.Listed below are

several optional accessories that will lead to more effi-

cient operation and prolong the useful life of the pump.

• Dust filter, liquid separator for the inlet

• Vibration absorbers

• Exhaust silencer

• Inert gas connection

2.2.1 Suggested Installation Procedure

The EcoDry M must only be operated in

such orientations where the axis of the

pump (crankshaft) runs horizontally.

Please accurately observe the following

safety information given in these Operating

Instructions.

1. Install in an open area with an ambient temperature

below 50°C (122 °F). If the pump must be installed in

an enclosed area, air-circulating fans may be neces-

sary to ensure adequate cooling.

2. Before connecting the EcoDry M to the intake and

exhaust lines please remove the shipping seals on the

pump’s intake and exhaust flanges. Connect the

chamber to be evacuated to the inlet flange of the

EcoDry M pump.

3. Use flexible stainless steel bellows in the piping to

reduce transmission of vibrations during operation.

4. Make sure pipe lines are adequately supported to

reduce stress on joints.

5. Install a vacuum gauge in the inlet line with a

vacuum-quality valve upstream of the gauge. This

allows the pump to be isolated from the system to

monitor its proper performance.

2 Installation and Operation

Installation and Operation

Warning

Caution

Ce manuel convient aux modèles suivants

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