FOM ScalarSC Manuel

FOM scalarSC

OPERATION & MAINTENANCE MANUAL

Revised January 2023

FOM TECHNOLOGIES A/S

Enabling Functional Materials R&D

info@fomtechnologies.com

Artillerivej 86, 1.

Copenhagen 2300, Denmark

(+45) 88 70 89 00

Contents

1. Introduction ..............................................................................................................1

1.1. Equipment specifications ...................................................................................1

1.2. Safety: disclaimers & equipment hazards ..........................................................2

2. Description of equipment .........................................................................................5

2.1. Relevant standards............................................................................................8

2.1.1. Machine standards ......................................................................................8

2.1.2. Electrical panel standards............................................................................8

2.2. System requirements.........................................................................................9

3. Setup instructions...................................................................................................10

3.1. Safe startup......................................................................................................10

3.2. Installation........................................................................................................11

4. Software interface..................................................................................................17

4.1. Home screen & Quick Access Ribbon .............................................................17

4.2. Coating screen.................................................................................................20

4.3. Settings screen ................................................................................................22

4.4. Alarms screen..................................................................................................24

5. Slot-die, syringe, the substrate mounting...............................................................26

5.1. Slot-die assembly, syringe & tubing connection...............................................26

5.2. Slot-die mounting.............................................................................................28

5.3. Mounting syringe into the pump.......................................................................32

5.4. Substrate mounting..........................................................................................33

6. Getting started with coating....................................................................................34

7. Service & maintenance ..........................................................................................37

FOM TECHNOLOGIES A/S

Enabling Functional Materials R&D

info@fomtechnologies.com

Artillerivej 86, 1.

Copenhagen 2300, Denmark

(+45) 88 70 89 00

7.1. Standard maintenance.....................................................................................37

8. Appendices ............................................................................................................39

8.1. Appendix 1: Background calculations for film thickness, pump rate, and coating

width 39

FOM TECHNOLOGIES A/S

Enabling Functional Materials R&D

info@fomtechnologies.com

Artillerivej 86, 1.

Copenhagen 2300, Denmark

(+45) 88 70 89 00

1. Introduction

This document is the operation and maintenance manual for the FOM Technologies

scalarSC. The FOM scalarSC is a benchtop slot-die coating tool with rigid and flexible

substrates.

1.1. Equipment specifications

Several key specifications of the FOM scalarSC are outlined below:

Table 1 Key equipment specifications of the FOM scalarSC.

Specification

Value

Coating width

≤ 200 mm

Substrate compatibility

Rigid and flexible

Substrate throughput

≤ 5.0 m min-1

Syringe pump

External

Substrate heating

≤ 200 °C

Slot-die heating

≤ 80 °C (optional)

Slot-die height repeatability

± 12.5 μm

Protocol control

Yes

Dimensions

87 x 63 x 500 cm3

Weight

71 kg

Intended lifetime of equipment and safety components

20 years

Site workspace requirement

Suitable fumes extraction

FOM TECHNOLOGIES A/S

Enabling Functional Materials R&D

info@fomtechnologies.com

Artillerivej 86, 1.

Copenhagen 2300, Denmark

(+45) 88 70 89 00

The FOM scalarSC has been designed and dimensioned for convenient glovebox

compatibility. In addition, the stated temperature rating and coating speed are ideally

suited to achieve stable coating of a wide range of materials with thicknesses of a few

nanometers to several tens of microns.

1.2. Safety: disclaimers & equipment hazards

IMPORTANT

To ensure the successful operation of the FOM scalarSC and the safety of all lab users,

operators, trainees, and maintenance personnel should read and understand this manual

before beginning any coating experiments or tool maintenance. Operators must be of

sound mind and body before operating this equipment. Operators under the age of 18

should not attempt to operate this equipment. The general public should not be permitted

to use this equipment.

It is recommended that new users are trained in the use of this equipment by experienced

operators, any deviation from the instructions provided in this manual may lead to

personal and material damage for which FOM Technologies A/S cannot be held

responsible.

The FOM scalarSC is equipped with an emergency stop button, which immediately halts

all ongoing operations in case of an emergency. Thisbutton must be tested once per year

to guarantee its function.

Further information on the risks and hazards associated with the operation of the FOM

scalarSC is provided below.

FOM TECHNOLOGIES A/S

Enabling Functional Materials R&D

info@fomtechnologies.com

Artillerivej 86, 1.

Copenhagen 2300, Denmark

(+45) 88 70 89 00

Table 2 Risks and hazards associated with the use of the FOM scalarSC.

Risk

Comment

Burn risk

Operators should avoid touching the heating parts when they are hot, as

temperature can reach 200 °C. It should be noted that heated parts will

remain hot for some time even after the equipment has been shut down,

representing a burn risk for operators even when power is not supplied to

the tool. In the case of FOM scalarSC units fitted with an oven module,

operators should additionally avoid touching or opening the oven while it

is heating due to high temperatures and significant IR output. To prevent

the risk of burn, the FOM scalarSC is equipped with a warning LED red

light which will be activated when either the chuck or the slot die head

temperatures are higher than 50 °C. Burn risk areas are depicted in Figure

Crushing/pinching

People can be struck and injured by moving parts of machinery. Parts of

the body can also be drawn in or trapped between, belts drivers and

other components of the tool. Operators should avoid placing their

fingers or any other body parts in the path of any moving part. Damage to

items and persons may occur if they become caught between the slot-die

and chuck, the chuck and the scalarSC housing case, or the shaft and

plates of the syringe pump as they are moving. In the case of FOM

scalarSC units fitted with an oven module, operators should additionally

avoid placing objects or body parts in the path of the oven lid while it is

opening or closing. Crushing/pinching parts are depicted in Figure 1.

Electric shock

Operators should avoid contact with cables and plugs at the rear of the

tool while the main power is being supplied. Operators should avoid

contact with wiring for the chuck energy chain and heated slot-die while

mains power is being supplied. Operators should avoid contact with

electrical cabinet wiring while main power is being supplied. Operators

should take care to only touch the physical power switch on the exterior

of the electrical cabinet when switching on the main power supply for the

tool.

FOM TECHNOLOGIES A/S

Enabling Functional Materials R&D

info@fomtechnologies.com

Artillerivej 86, 1.

Copenhagen 2300, Denmark

(+45) 88 70 89 00

Chemical exposure

Open coating of heated, solution-processed chemical mixtures may lead

to the evaporation of solvents and other hazardous materials. Operators

should ensure that the tool is installed in a suitably ventilated location to

avoid unintended exposure to these chemical hazards. Operators should

be fully aware of the material risks associated with their work.

Misc.

To avoid damage to persons and equipment, repairs, and servicing of the

FOM scalarSC and its accompanying electrical components should only be

carried out by authorized, trained technicians. If on-site servicing is

required, please contact FOM Technologies directly.

Figure 1: Hot surface and crushing/pinching hazards are present on the FOM scalarSC. (1) Hazard due to

heated vacuum chuck surface, (2) crushing/pinching hazard between moving chuck and right-hand-side

tool structure, (3) crushing/pinching hazard between moving chuck and left-hand-side tool structure, (4)

crushing/pinching hazard between fixed slot-die head and moving chuck platform.

Stop button

FOM TECHNOLOGIES A/S

Enabling Functional Materials R&D

info@fomtechnologies.com

Artillerivej 86, 1.

Copenhagen 2300, Denmark

(+45) 88 70 89 00

2. Description of equipment

The FOM scalarSC is a compact slot-die coating tool with a simple, user-friendly design.

The exterior of the tool consists of several simple components, as seen below:

Figure 2: FOM scalarSC tool render (left) and a closeup of the slot-die head and bridge elements

(right). (1) Gantry system for lateral adjustment, (2) integrated touch screen panel control, (3)

heating-enabled substrate holder (chuck), (4) emergency stop button, (5) Heat-hazard indicator (for

temperature >50 °C), (6) leveling and height mount feet 1/3, (7) slot-die head (L), (8) lateral

positioning dial (9) Vertical position positioning dial with digital display.

1. Coating bridge: supports the slot-die positioning gantry over the substrate.

2. Panel control: touch screen panel for process control.

3. Heating-enabled substrate holder: it is used to position the material to be

coated.

4. The emergency stop button immediately stops all ongoing processes. Twist to

release the button and return the tool to a normal functioning state.

5. Heat-hazard indicator: the light switches on when the temperature of the

substrate holder is above 50 °C.

6. Height-adjustable feet allow for tool leveling.

FOM TECHNOLOGIES A/S

Enabling Functional Materials R&D

info@fomtechnologies.com

Artillerivej 86, 1.

Copenhagen 2300, Denmark

(+45) 88 70 89 00

7. Slot-die: receives coating fluid from external pump and syringe elements and

distributes it evenly across the desired coating width on the substrate.

8. Lateral positioning dial: for manual positioning of the slot-die head across the

coating area width.

9. Vertical positioning dial: for manual positioning of the slot-die to the desired

coating height.

The FOM scalarSC also features several ports on the rear panel of the tool for power

and control of tool functions, as seen below (Figure 3):

Figure 3: Rear and top view of ScalarSC tool showing connection hub, stop button, and warning light.

(1) stop button and warning light; (2) Power and control plugs.

1. Power and control plugs: supply power and control data for heating and motion

functions from the electrical cabinet.

2. Stop button and warning light.

FOM TECHNOLOGIES A/S

Enabling Functional Materials R&D

info@fomtechnologies.com

Artillerivej 86, 1.

Copenhagen 2300, Denmark

(+45) 88 70 89 00

FOM scalarSC electrical cabinet:

Figure 4: Photograph of the electrical cabinet showing (1) Physical power switch and (2) mains power

socket.

1. Physical power switch: controls the primary power supply to the coating unit via

the electrical cabinet.

2. Mains power socket: to supply electrical power.

NOTE: the FOM scalarSC and its electrical cabinet are designed to be used and stored

indoors, out of direct sunlight, at room temperature. The tool is compatible with dry

environments such as glovebox environments but is not designed for extended exposure

to high humidity.

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