ETS 9903 Manuel utilisateur

CHARGE DEVICE MODEL

TEST FIXTURE

Model 9903

Operating Manual 10/12

1.0 INTRODUCTION

The rapid advancement in the electronics industry during the past decade has placed an

increasing importance on the understanding of electrostatics and its effect on electronic

devices and systems. Electrostatic discharge (ESD) is a common cause of microelectronic

circuit failure. Many devices can be seriously damaged or destroyed by an electrostatic

discharge below 20 Volts. The sensitivity to ESD of other components has also become

evident through use, testing and failure analysis. The trend in technology towards greater

complexity, increased packaging density and hence thinner dielectrics between active

elements result in parts becoming even more sensitive to ESD.

Failure mechanisms of electrical and electronic parts due to ESD typically include thermal

breakdown, metalization melt and bulk breakdown that are power dependent; dielectric

breakdown, metalization to metalization arc over, surface breakdown and surface inversion

that are voltage dependent.

ESD can also induce latent failure mechanisms in both MOS structures and bipolar

junctions in both discrete devices and microcircuits. This latent failure mechanism results in

performance degradation and eventually a failure.

Personnel are prime sources of ESD for damaging electrical and electronic parts.

Electrostatic charges generated by rubbing or separating materials are readily transmitted

to a person’s conductive sweat layer charging that person. When a person handles or

comes in close proximity to an ESD sensitive part, that part can then be damaged from a

direct discharge by touching the part or by subjecting the part to an electrostatic field.

However, another type of discharge that is far more severe than the discharge from a

person touching a device is the Charge Device Model (CDM). This occurs when the device

itself becomes charged then touches ground a very fast rise time discharge can occur.

Charge

Touch to GND for discharge

GND

Figure 1.0-1: Basic Charge Device Model equivalent circuit

The CDM discharge is a function of the device capacitance that may be as low as a few

picofarads or can be as high as several hundred picofarads. This variation has a significant

affect on the severity of the discharge. Small component packages may not be able to hold

sufficient charge to meet specified discharge levels.

The Charged Device Model (CDM) test, as defined in standards JEDS22-C101C,

ANSI/ESD-STM 5.3 and AEC-Q101-005 describe a test procedure where a component is

slowly charged to a given voltage and then discharged to ground through one of the device

leads. The CDM test permits either field induced or direct charge/discharge.

The Model 9903 Charge Device Test Fixture shown in Figure 1.0-1 is a completely

integrated unit that provides the means of performing both direct charge and field induced

CDM tests.

IMPRORTANT NOTE

The Model 9903 only provides the means to perform CDM testing. It does not

produce verification waveforms that meet all the requirements specified in the test

standards referenced above.

Figure 1.0-1: Model 9903 Charge Device Model Test Fixture

2.0 Description

The Charged Device Model (CDM) test is when a device is charged and then discharged

directly to ground. To create a CDM the Device Under Test (DUT) is charged as if it was

the capacitor and then discharged by grounding the desired pin manually by lowering a

grounded spring loaded pin to the desired lead. Two different charging methods are

specified.

The Field Induced Model charging method raises the DUT potential indirectly by induction

and then the desired pin is grounded to generate the CDM discharge. The potential is

raised by applying voltage to the field-charging electrode shown in Figure 2.0-1.

Figure 2.0-1: Field Induced Charge Device Model

Tests that are performed using Direct Charging is when the device is placed on a grounded

surface with or without a dielectric isolator and one or more pins are charged directly

through at least a 100 MegOhm resistor. The respective pin is then discharged directly to

ground. Discharge rise times are in the picosecond range. The Models 910 and 9910

incorporate a 400 MegOhm series resistor in the charging circuit.

The Model 9903 in conjunction with either the ETS Model 910 with CDM modification or the

Model 9910 enables the user to perform both Field Induced and Direct Charge tests.

The CDM Test Fixture shown in Figure 1.0-1 consists of a magnetic stainless steel field

induction plate/ground plane and a control module that controls the charging and grounding

function. It contains the upper ground plane, spring-loaded discharge pin and the discharge

button. The internal control electronics time the charge and discharge function of the field

induction plate and DUT. This enables the DUT to be charged and discharged multiple

times at the same polarity. In addition, the module contains a radial 1 Ohm resistor for

measuring the discharge current. The entire assembly is mounted on a press fixture for

performing the test. To select field induction or direct charging a jumper wire connects the

plate to the voltage output connector on the rear of the control module for field induced

charging or to the ground connector that is also located on the rear of the module for direct

charging. In the latter configuration, a 6” (152mm) charging lead with a 5” (127mm)

minigrabber and 15 megOhm resistor to reduce the effects of parasitic cable capacitance

when the test pin is both charged then discharged is connected to the voltage output. In

addition, the 4 and 30pF calibration discs specified in ANSI/ESD-STM-5.3.1 and the 6.8

and 55pF discs specified in JEDS22-C101C are supplied.

The adjustable fixture shown in Figure 2.0-2 holds devices up to 2.5x2.5” (64x64mm). The

fixture itself has magnets to help align the desired pins with the discharge electrode.

Figure 2.0-2: DUT Holding Fixture

The spring-loaded pins (Interconnect Devices Series S, Size 3) shown in Figure 2.0-3 are

interchangeable. Three types are provided. They are round tip (J) for pad terminals, cup tip

(G) for DIP style legs, and point tip (B) for very small contact points.

Figure 2.0-3: Spring-loaded pin configurations

To change pins raise the test head to the top by loosening the lever on the rear. This will

give sufficient room to be able to replace or change the pin. Then move the test head back

to a position where the pin tip is approximately 0.25” (6mm) above the pin under test.

3.0 SET UP

The Model 9903 is designed to work with a minimum 1 GHz/4Gsample oscilloscope

with 50 Ohm input. It is connected to the oscilloscope via a 2’ (61cm), 50 Ohm, low

loss, semi-rigid cable.

3.1 System Set Up

3.1.1 Set-Up (Model 910 modified for CDM)

Connect the CDM Test Fixture to the Model 910 as shown in Figure

3.0-1.

Figure 3.0-1: Model 9903 with Model 910

1. Plug the CDM Charging Module into the CAPACITOR location on the

Simulator OUTPUT panel. This provides the voltage to the induction plate or

to the device depending on the type of test.

2. Plug the red 0.080” pin plug from the CDM Test fixture into the CDM plug-in

module.

3. Connect the 3-pin power plug into the REMOTE DIN connector located on

the rear panel. This provides the power to operate the charge and discharge

relays.

4. Connect the coaxial cable to the oscilloscope. The scope input must be

set to 50 Ohms. The scope ground is the ground point to which the CDM is

discharged. For testing at 500V using the small verification discs the cable

can be connected directly to the scope input. For higher voltages and/or the

large verification discs a 10:1 attenuator must be used.

3.1.2 Set-Up (Model 9910)

Connect the CDM Test Fixture to the Model 9910 as shown in Figure

3.0-2.

Figure 3.0-2: Model 9903 with Model 9910

1. Plug the red 0.080” pin plug from the CDM Test fixture into the CDM 0.080

pin jack on the Simulator OUTPUT panel. This provides the voltage to the

induction plate or to the device depending on the type of test.

2. Connect the 3-pin power plug into the REMOTE DIN connector located on

the rear panel. This provides the power to operate the charge and discharge

relays.

5. Connect the coaxial cable to the oscilloscope. The scope input must be

set to 50 Ohms. The scope ground is the ground point to which the CDM is

discharged. For testing at 500V using the small verification discs the cable

can be connected directly to the scope input. For higher voltages and/or the

large verification discs a 10:1 attenuator must be used.

2.2 Charging Method

2.2.1 Field Induced Model

To configure the Test Fixture for Field Induced testing plug the red

banana-banana cable into the red banana jack on the rear of the control

module and the red banana jack on the plate as shown in Figure 3.0-3.

Figure 3.0-3: Field Induced connections

3.2-2 Direct Discharge Method

To configure the Test Fixture for Direct Charge testing plug the red

banana-banana cable into the GND jack on the rear of the control

module and the red banana jack on the plate as shown in Figure 3.0-4.

Figure 3.0-4: Direct Charge connections

6.4 Waveform Verification

The Model 9903 only provides the means to perform CDM testing. It does not

produce verification waveforms that meet all the requirements specified in the test

standards referenced above. These deviations are small, but may be outside the

limits specified. It is up to the end user to determine that the CDM waveforms

measured with the specified verification modules will meet individual requirements.

The CDM waveforms can be measured using the supplied 4 and 30pF STM5.3, and/or the

6.8 and 55pF JEDEC verification modules. The measurement procedure is the same for

both methods. Typical waveforms over 3 discharges obtained with the Model 9903 CDM

Test Fixture using the Field Induced charging method are shown in Figure 3.0-5a and the

Direct Charging method in Figure 3.05b. Low amplitude can usually be compensated for by

increasing the charging voltage since it is typically affected by losses caused by leakage,

parasitic capacitance, verification module characteristics humidity etc. during charging. In

addition, air discharge can easily result in a 20% variation in peak amplitude.

The actual resistance of the radial 1 Ohm resistor is 1.03 Ohms. The 3% variation should

be factored in when measuring the actual peak current levels.

Performing direct discharge measurements with the charging probe connected will also

affect the waveform by adding additional parasitic capacitance. The Model 9903 Probe

contains a 15 megOhm resistor at the wire end of the 5” minigrabber.

ESD STM 5.3, 4pf Disc @ 500V

JEDEC JDCS 22-C101E, 6.8pF Disc @ 500V

ESD STM 5.3, 30pF Disc @ 500V

JEDEC JDCS 22-C101E, 55pF Disc @ 500V

Figure 3.0.5a: Typical Field Induce Model verification waveforms

Figure 3.0-6 lists the waveform requirements for both the ESDA and JEDEC standards.

ESD STM 5.3, 4pf Disc @ 500V (Touch disc to charge, remove probe, discharge)

JEDEC JDCS 22-C101E, 6.8pF Disc @ 500V (Touch disc to charge, remove probe, discharge)

ESD STM 5.3, 4pf Disc @ 500V (Hold disc to charge then discharge)

JEDEC JDCS 22-C101E, 6.8pF Disc @ 500V (Hold disc to charge then discharge)

Figure 3.0.5a: Typical Direct Charging Method verification waveforms

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