◇The STP pump operates at high temperatures while the baking heater is in operation.
NEVER touch the STP pump and its peripheral equipment while the baking heater is in
operation.
Operators can burn hands.
◇Execute the following to prevent an accident caused by the gas.
•Check the properties of the gas to be used, referring to the Material Safety Data Sheet
(MSDS) you obtain from the gas supplier. (explosive・combustible・toxic・corrosive, etc)
And, keep MSDS and a safety advice of gas supplier.
•Warn of the danger of the gas with the warning label when the use gas is hazardous
chemicals materials.
•Always execute gas purge in the pump with the inert gas, and then exhaust residual
gases thoroughly from the STP pump when removing the STP pump from the vacuum
equipment.
•Secure safety by wearing personal protective equipment when using the gas which
might influence damage health. In addition, take appropriate measure for depending
upon the properties of the gas to be used.
◇Exhaust residual gas thoroughly when disposing of the STP pump. If the STP pump is used
for any toxic or reactive gas, always clean the STP pump and dispose of it as industrial
waste in accordance with guidelines given by the national and/or local government.
Residual gas in the STP pump may cause an accident which, for certain gases, may involve
serious injury or death.
◇NEVER use any gas that is not specified as usable in this Manual. The use of such gas may
corrode the STP pump and damage it.
◇TMS unit does not stop automatically when an abnormality/error is detected.
Establish a sequence so that equipments can stop when an abnormality/error occurs.
◇Always check the STP pump has stopped, then turn OFF the primary power (disconnect the
power cable) and isolate the electrical energy source (Lockout/Tagout) on the vacuum
equipment before proceeding to any of the following operations. Failure to do so may cause
the STP pump to rotate accidentally, which may injure operators seriously or result in electric
shock.
•Connect or disconnect cables;
•Perform maintenance and inspections such as replacement of; or
•Perform investigations into probable causes and action/measures taken in the event of
occurrence of a problem.
◇Connect the cables securely. NEVER bend nor place heavy objects on the cable. Doing so
may result in electric shock or product damage.
◇Always use the power voltage specified on the nameplate for the primary power voltage of
the STP control unit. Wire the power cable securely. Incorrect wiring may result in electric
shock or product damage.
◇Perform investigations into probable causes and remove them before restarting the STP
pump in the event of the occurrence of a problem. The use of the abnormal STP pump may
result in product damage.
